CN115597001A - Special gas flow distribution box with multi-branch pressure independent adjusting structure - Google Patents
Special gas flow distribution box with multi-branch pressure independent adjusting structure Download PDFInfo
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- CN115597001A CN115597001A CN202211077953.9A CN202211077953A CN115597001A CN 115597001 A CN115597001 A CN 115597001A CN 202211077953 A CN202211077953 A CN 202211077953A CN 115597001 A CN115597001 A CN 115597001A
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- 238000009826 distribution Methods 0.000 title claims description 82
- 239000007789 gas Substances 0.000 claims abstract description 226
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 65
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims description 43
- 229910052757 nitrogen Inorganic materials 0.000 claims description 23
- 238000004891 communication Methods 0.000 claims description 17
- 230000002146 bilateral effect Effects 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 238000005086 pumping Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 230000002349 favourable effect Effects 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000010354 integration Effects 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 13
- 238000010408 sweeping Methods 0.000 description 8
- 238000007664 blowing Methods 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000005465 channeling Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/08—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/065—Arrangements for producing propulsion of gases or vapours
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/005—Protection or supervision of installations of gas pipelines, e.g. alarm
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/02—Preventing, monitoring, or locating loss
- F17D5/06—Preventing, monitoring, or locating loss using electric or acoustic means
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Pipeline Systems (AREA)
Abstract
The application discloses be applied to semiconductor field's a special gas flow divider box with many branch circuits pressure independently adjusts structure, this special gas flow divider box is through being provided with two sets of independent special gas flow divider pipe ways in two inner box bodies about, can be with two sets of special gas flow divider pipe way integration in a VMB outer box, be favorable to reducing equipment usage, the use cost of the device has been reduced to a certain extent, simultaneously, through all installing air-vent valve and manometer a on every special gas flow divider branch pipe, be convenient for according to different gas equipment user demands, pressure when the special gas is supplied with on different branches carries out independent regulation and control, the use flexibility of the device has been promoted effectively, simultaneously, divide the nitrogen gas of supplying with in the nitrogen gas supply pipe through being provided with three-way pipe d-a and three-way pipe d-b, can supply nitrogen gas for a plurality of special gas flow divider branch pipes in two inner box bodies about, be favorable to integrating inner structure, reduce the manufacturing cost of the device to a certain extent.
Description
Technical Field
The application relates to the field of semiconductors, in particular to a special gas flow distribution box with a multi-branch pressure independent adjusting structure.
Background
The special gas is flammable, explosive, toxic, corrosive and high in purity, is widely applied to high-tech industries such as semiconductors, microelectronics and related solar cells in the prior art, and is generally stored, transported and distributed by using a special gas shunt box (VMB) in order to ensure the safety of the special gas in the actual use process.
In the traditional special gas distribution box for a microelectronic and semiconductor laboratory, the inside of one VMB can only be used for one gas supply mode, in practical application, if the number of processing equipment (gas receiving equipment) is small, the number of the processing equipment is not more than two machines, just two compatible special gases are needed, and in consideration of energy conservation, environmental protection and cost saving, one VMB only walks one special gas, and one special gas is not more than two branches, so that the VMB in the prior art has the following defects:
1. the manufacturing cost is high, two independent VMBs are needed, and each VMB is provided with an independent exhaust system, a sweeping and blowing system and a vacuum suction system;
2. the adoption of two VMBs occupies a larger use space, causing inconvenience in connection use.
3. The pressure inside the adjacent branches is inconvenient to independently adjust, and different branches are difficult to flexibly apply in an adjusting and borrowing mode.
Therefore, the special gas distribution box with the multi-branch pressure independent adjusting structure is provided to solve the problems in the prior art.
Disclosure of Invention
The utility model aims to solve the problem that the special gas flow distribution box in the prior art is difficult to carry out more environmental protection and energy saving under the less circumstances of process equipment and use, and be difficult to carry out pressure independent control and borrow to adjacent branch road, compare prior art and provide a special gas flow distribution box with multi-branch pressure independent control structure, through install two inner box bodies that bilateral symmetry set up in the inside top of the outer box body of VMB, the inside of every inner box body all installs special gas flow distribution pipeline, a set of special gas flow distribution pipeline includes the special gas supply pipe of fixed mounting in inner box body bottom, and the intermediate position department fixed connection of special gas supply pipe has manual diaphragm valve an-a, the upper end fixed intercommunication of special gas supply pipe has two bilateral symmetry to set up the special gas flow distribution branch pipe inside the inner box body, the upper end of every special gas flow distribution branch pipe all fixed intercommunication has the gas receiving equipment connecting pipe of inlaying on the outer box body back of VMB, special gas flow distribution branch pipe is close to the one end inside fixed mounting of special gas supply pipe has manual reposition of valves a-b, special gas flow distribution branch pipe's intermediate position department fixed mounting has air-vent valve and manometer a in proper order.
Through be provided with two independent special gas reposition of redundant personnel pipelines in two inner box bodies about, can be with two sets of special gas reposition of redundant personnel pipelines integration in the external box body of VMB, be favorable to reducing the equipment use amount, the use cost of the device has been reduced to a certain extent, and simultaneously, through all installing air-vent valve and manometer a on every special gas reposition of redundant personnel branch pipe, be convenient for according to different gas appliances user demand, pressure when supplying with special gas on different branches carries out independent regulation and control, the device's use flexibility has been promoted effectively.
Optionally, a plurality of hinges are sequentially fixed on the right end wall of the front side of the VMB outer box body from top to bottom, the VMB outer box body is hinged to a box door covering the front side of the VMB outer box body through the hinges, an operation window arranged right in front of the two inner box bodies is further arranged in the middle position of the upper side of the box door, a window door matched with the inner size of the operation window is embedded in the operation window, and a plurality of hinges arranged from top to bottom are also fixedly installed between the right side of the window door and the operation window.
Alternatively, the special gas in the special gas supply pipe on the left side may be compatible with the special gas in the special gas supply pipe on the right side.
Optionally, a communicating pipe arranged transversely is fixedly communicated between the two special air supply pipes, a manual diaphragm valve b is fixedly mounted in the middle of the communicating pipe, a communicating part of the communicating pipe and the special air supply pipe is further arranged below the manual diaphragm valve a-a, and a check valve b is fixedly mounted inside one end of the special air supply pipe close to the air inlet.
Optionally, a mixed flow adjusting assembly is fixedly connected between the upper ends of the two special gas branch pipes located in the same inner box body, and the mixed flow adjusting assembly comprises a valve casing with a cylindrical structure, a connecting pipe c-a is fixedly communicated between the left side of the front surface of the valve casing and the special gas branch pipe located on the left side, a connecting pipe c-b symmetrically arranged with the connecting pipe c-a is fixedly communicated on the right side of the back surface of the valve casing, and the other end of the connecting pipe c-b is fixedly communicated with a connecting pipe of the gas receiving equipment located on the right side, the connecting pipe c-c is fixedly communicated between the right side of the front face of the valve shell and the special gas branch pipe on the right side, the connecting pipe c-d symmetrically arranged with the connecting pipe c-c is further fixedly communicated with the left side of the back face of the valve shell, the other end of the connecting pipe c-d is fixedly communicated with the connecting pipe of the gas receiving equipment on the left side, the valve core matched with the inner size of the valve shell is rotatably connected inside the valve shell, and valve holes matched with the connecting pipe c-a, the connecting pipe c-b, the connecting pipe c-c and the connecting pipe c-d are formed in the middle position of the valve core.
Optionally, a manual diaphragm valve a-c is fixedly installed at one end of the special gas branch pipe close to the gas receiving equipment connecting pipe, and the connecting pipe c-a and the connecting pipe c-c are respectively communicated with the positions between the manual diaphragm valve a-c and the pressure gauge a on the two special gas branch pipes on the left side and the right side.
Optionally, a nitrogen supply pipe is fixedly installed at the middle position inside the VMB outer box body, the upper end of the nitrogen supply pipe is fixedly communicated with a three-way pipe d-a, two ends, far away from the nitrogen supply pipe, of the three-way pipe d-a are respectively and fixedly communicated with three-way pipes d-b, the two three-way pipes d-b extend into the two inner box bodies respectively, two ends, far away from the three-way pipe d-a, of the three-way pipe d-b are respectively and fixedly communicated with two special gas shunt branch pipes in the same inner box body, the communication position between the three-way pipe d-b and the special gas shunt branch pipes is arranged between the manual diaphragm valve a-b and the pressure regulating valve, the manual diaphragm valve d-a is fixedly installed on the nitrogen supply pipe, and the manual diaphragm valve d-b is fixedly installed at one end, close to the special gas shunt branch pipes, of the three-way pipe d-b.
Optionally, an air supply pipeline is fixedly installed at the middle position inside the VMB outer box body, the upper end of the air supply pipeline is fixedly communicated with a vacuum generator, an air outlet above the vacuum generator is fixedly communicated with an exhaust pipeline, the exhaust pipeline is fixedly communicated with an exhaust port fixedly installed at the top of the VMB outer box body, a vacuum pumping port on the side face of the vacuum generator is fixedly communicated with a three-way pipe e-a, two ends, far away from the vacuum generator, of the three-way pipe e-a are fixedly communicated with three-way pipes e-b respectively extending into the left inner box body and the right inner box body, two ends, far away from the three-way pipe e-a, of the three-way pipe e-b are respectively and fixedly communicated with two special air branch flow pipes in the same inner box body, a communication position between a manual diaphragm valve a-c and a pressure gauge a is arranged at the communication position of the three-way pipe e-b and the special air branch flow pipe, a manual diaphragm valve e-a is fixedly installed on the air supply pipeline, a pressure gauge e-b is fixedly installed at one end, close to the vacuum generator, and a manual diaphragm valve e-b is fixedly installed at one end, close to the special air branch pipe.
Optionally, a check valve d is fixedly mounted at one end of the nitrogen supply pipe close to the three-way pipe d-a, a check valve e-a is arranged in the gas supply pipeline, and a check valve e-b is fixedly mounted in each of two ends of the three-way pipe e-a far away from the vacuum generator.
It is optional, the junction of the outer box of VMB and chamber door, and joint strip is all installed with the junction of operation window and window door, the internal portion of VMB outer box constitutes seal structure, the fixed square box that sets up to the internal portion of VMB outer box of inlaying of positive intermediate position department of chamber door, and the inside vertical metal tube that is fixed with of square box, the bottom and the external internal portion of VMB outer box of metal tube are linked together, the top and the external world of VMB outer box of metal tube are linked together, the top fixed mounting of metal tube has the spacing ring, further the top fixed mounting of square box has vertical the resistance rod of inserting and establishing in the internal intermediate position department of metal tube, and the outside movable sleeve of resistance rod is equipped with the metal valve piece of the internal dimension looks adaptation of metal tube, the upper end fixedly connected with spring of metal valve piece, the upper end and the spacing ring fixed connection of spring, the outer end wall of metal tube and the equal fixedly connected with wire on the top of resistance rod.
Compare in prior art, the advantage of this application lies in:
(1) Through be provided with two independent special gas reposition of redundant personnel pipelines in two inner box bodies about, can be with two sets of special gas reposition of redundant personnel pipeline integrations in the external internal portion of a VMB, be favorable to reducing equipment usage, the device's use cost has been reduced to a certain extent, and simultaneously, through all installing air-vent valve and manometer a on every special gas reposition of redundant personnel branch pipe, be convenient for according to different gas appliances user demand, pressure when supplying with special gas on different branches carries out independent regulation and control, the device's use flexibility has been promoted effectively.
(2) Rotate the chamber door through the hinge and connect the front at the outer box of VMB, be convenient for overhaul the device inside through opening the chamber door, simultaneously, through the operation window that will be located two internal box dead ahead set up in the top intermediate position department of chamber door to articulate the window door inside the operation window through the hinge, can control through opening each valve equipment in the internal box of window door, need not to open great chamber door, through the mode of categorised opening, the use flexibility of the device has been promoted effectively.
(3) The communicating pipe is fixedly communicated between the left special gas supply pipe and the right special gas supply pipe, and the manual diaphragm valve b is arranged to control the communication and stopping of the communicating pipe, so that the special gas in the special gas supply pipe on one side can be distributed and supplied to the special gas distribution branch pipes in the left special gas distribution pipeline and the right special gas distribution branch pipe, the flexible use of the special gas distribution branch pipes in the left special gas distribution pipeline and the right special gas distribution branch pipe is facilitated, the use convenience of the device is improved to a certain extent, the applicability of the device in the actual use process is effectively improved, meanwhile, the special gas backflow or channeling is prevented by the check valve b, and the stable safety of the device in the use process is effectively guaranteed.
(4) The operation mode that two special gas branch pipes simultaneously supply gas for one gas receiving equipment connecting pipe in a centralized manner can be realized through rotation of the valve core, the operation flexibility of the device can be further improved, and the stability and the high efficiency of a certain gas receiving equipment connecting pipe in the centralized gas supply process are effectively guaranteed.
(5) The manual diaphragm valves a-c are installed at one end, close to the air receiving equipment connecting pipe, of the special air flow distributing branch pipe, the manual diaphragm valves a-c are rotated and matched with the mixed flow adjusting assembly, the stability of special air centralized supply to a certain air receiving equipment connecting pipe can be effectively guaranteed, and flexible control of opening and closing states of special air supply to different air receiving equipment connecting pipes is facilitated.
(6) The nitrogen gas supplied in the nitrogen gas supply pipe is divided by the three-way pipe d-a and the three-way pipe d-b, so that a single nitrogen gas supply pipe can supply uniform nitrogen gas for a plurality of special gas branch pipes in the left inner box and the right inner box, and a special gas branch pipe in the left inner box and the right inner box is intensively used for sweeping and blowing the nitrogen gas by one nitrogen gas supply pipe, thereby being beneficial to integrating internal structures, reducing the manufacturing cost of the device to a certain extent, and meanwhile, the manual diaphragm valves d-b are all arranged at the end parts of the three-way pipe d-b close to the special gas branch pipes, the nitrogen gas sweeping and blowing access in each special gas branch pipe can be respectively controlled, and the use flexibility of the device is effectively improved.
(7) The air supply device continuously blows air through the external air pump of the air supply pipeline, unified air pumping and impurity removing operation can be performed on a plurality of special air branch pipes by means of conversion of the vacuum generator and connection of the three-way pipes e-a and e-b, use safety of the device is guaranteed, meanwhile, the same vacuum generator is used for vacuumizing operation in the left special air branch pipe and the right special air branch pipe, manufacturing and use cost of the device are effectively reduced, opening and closing control is performed through cooperation of the manual diaphragm valve e-a and the manual diaphragm valve e-b, and use flexibility of the device is promoted.
(8) The one-way valve d is arranged on the nitrogen supply pipe, the one-way valve e-a is arranged on the gas supply pipeline, and the one-way valve e-b is arranged on the three-way pipe e-a, so that the flowing direction of the gas flow in each pipeline can be limited in a one-way mode, the problems of gas flow backflow and wrong flow are avoided, and the working stability of the device is effectively guaranteed.
(9) Through being provided with the tubular metal resonator intercommunication outside VMB between internal portion of box and external atmosphere to set up the external portion of VMB outside into encapsulated situation, drive the metal valve block at the tubular metal resonator removal with the help of the internal atmospheric pressure change of VMB outside box, survey the resistance change between resistance bar and the metal valve block, whether can audio-visually and clearly judge that the external portion of VMB outside has special gas to leak, be favorable to guaranteeing the stable security of the device in the use.
Drawings
FIG. 1 is a perspective view of the present application with the door open;
FIG. 2 is a front perspective view of the present application;
FIG. 3 is a rear perspective view of the present application;
FIG. 4 is a perspective view of the present application with the window and door in an open position;
FIG. 5 is a perspective view of the internal structure of the outer box of the VMB of the present application;
FIG. 6 is a perspective view of the left and right sets of special gas diversion pipelines of the present application;
FIG. 7 is a front view of FIG. 6;
FIG. 8 is a top view of FIG. 6;
FIG. 9 is a top cross-sectional view of the flow mixing adjustment assembly of the present application;
fig. 10 is an exploded view of the internal structure of the square box of the present application.
The reference numbers in the figures illustrate:
1. a VMB outer case; 101. a box door; 102. operating a window; 103. a window and a door; 2. an inner box body; 201. a special gas supply pipe; 202. a manual diaphragm valve a-a; 203. an extra-gas branch pipe; 204. a gas receiving equipment connecting pipe; 205. manual diaphragm valves a-b; 206. manual diaphragm valves a-c; 207. a pressure regulating valve; 208. a pressure gauge a; 4. a communicating pipe; 401. a manual diaphragm valve b; 402. a check valve b; 5. a mixed flow adjusting assembly; 501. a valve housing; 502. a connecting pipe c-a; 503. connecting tubes c-b; 504. connecting tubes c-c; 505. connecting pipes c-d; 506. a valve core; 507. a valve bore; 6. a nitrogen gas supply pipe; 601. a three-way pipe d-a; 602. a three-way pipe d-b; 603. a manual diaphragm valve d-a; 604. a manual diaphragm valve d-b; 605. a one-way valve d; 7. a gas supply duct; 701. a vacuum generator; 702. an exhaust duct; 703. a three-way pipe e-a; 704. a three-way pipe e-b; 705. a manual diaphragm valve e-a; 706. a one-way valve e-a; 707. a pressure gauge e; 708. a manual diaphragm valve e-b; 709. a check valve e-b; 8. a square box; 801. a metal tube; 802. a limiting ring; 803. a resistance rod; 804. a metal valve block; 805. a spring.
Detailed Description
The technical solutions in the embodiments of the present application will be described below clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments, and all other embodiments obtained by a person of ordinary skill in the art without making creative efforts based on the embodiments in the present application belong to the protection scope of the present application.
Example 1:
the application discloses a special gas distribution box with a multi-branch pressure independent adjusting structure, please refer to fig. 1-10, two inner box bodies 2 which are arranged in bilateral symmetry are installed above the inside of a VMB outer box body 1, a special gas distribution pipeline is installed inside each inner box body 2, one set of special gas distribution pipeline comprises a special gas supply pipe 201 which is fixedly installed at the bottom of the inner box body 2, a manual diaphragm valve a-a202 is fixedly connected to the middle position of the special gas supply pipe 201, two special gas distribution branch pipes 203 which are arranged inside the inner box body 2 in bilateral symmetry are fixedly communicated with the upper end of the special gas supply pipe 201, a gas receiving device connecting pipe 204 which is embedded on the end wall of the back side of the VMB outer box body 1 is fixedly communicated with the upper end of each special gas distribution branch pipe 203, a manual diaphragm valve a-b205 is fixedly installed inside one end of each special gas distribution branch pipe 203 close to the special gas supply pipe 201, and a pressure adjusting valve 207 and a pressure gauge 208 are fixedly installed in sequence at the middle position of each special gas distribution branch pipe 203.
When the device works, a worker connects a plurality of air receiving equipment connecting pipes 204 correspondingly arranged on the back surfaces of left and right inner box bodies 2 with air using equipment respectively according to use requirements, supplies special air to the air using equipment through the device, and in the use process, the worker can rotate to open manual diaphragm valves a-a202, the supplied special air A is dispersed into two special air distribution branch pipes 203 communicated with the special air distribution branch pipes through special air supply pipes 201 on the left side, the flowing direction of the special air A to the two special air distribution branch pipes 203 can be controlled through the rotation control of the manual diaphragm valves a-B205 on the special air distribution branch pipes 203, the special air A is distributed into the corresponding air receiving equipment connecting pipes 204 through the two special air distribution branch pipes 203 and is supplied into the air using equipment correspondingly connected with the special air distribution branch pipes, so that the special air distribution pipe is a special air distribution pipeline, and the diaphragm valves are the same.
Through be provided with two independent special gas reposition of redundant personnel pipelines in two inner box 2 about, can be with two sets of special gas reposition of redundant personnel pipelines integration outside a VMB box 1 inside, be favorable to reducing equipment usage, the device's use cost has been reduced to a certain extent, and simultaneously, through all installing air-vent valve 207 and manometer a208 on every special gas reposition of redundant personnel branch pipe 203, be convenient for according to different gas appliances user demand, pressure when supplying with to special gas on different branches carries out independent regulation and control, the device's use flexibility has been promoted effectively.
Referring to fig. 1, 2 and 4, a plurality of hinges are sequentially fixed on the right end wall of the front side of the VMB outer box 1 from top to bottom, the VMB outer box 1 is hinged with a box door 101 covering the front side of the VMB outer box 1 through the hinges, an operation window 102 arranged right in front of the two inner boxes 2 is arranged at the middle position above the box door 101, a window door 103 matched with the inner size of the operation window 102 is embedded in the operation window 102, and a plurality of hinges arranged from top to bottom are also fixedly installed between the right side of the window door 103 and the operation window 102.
The device during operation, rotate chamber door 101 through the hinge and connect the front in outer box 1 of VMB, be convenient for overhaul the device inside through opening chamber door 101, and simultaneously, the top intermediate position department at chamber door 101 is seted up through the operation window 102 that will be located two interior box 2 dead ahead, and articulate window 103 inside operation window 102 through the hinge, can control each valve equipment in interior box 2 of internal box through opening window 103, need not to open great chamber door 101, through the mode of categorised opening, the use flexibility of the device has been promoted effectively.
Referring to fig. 1 and 5, the special gas in the special gas supply pipe 201 on the left side can be compatible with the special gas in the special gas supply pipe 201 on the right side.
Referring to fig. 6 and 7, a transversely disposed communication pipe 4 is fixedly communicated between two special gas supply pipes 201, a manual diaphragm valve b401 is fixedly mounted at the middle position of the communication pipe 4, the communication position of the communication pipe 4 and the special gas supply pipe 201 is disposed below the manual diaphragm valve a-a202, and a check valve b402 is fixedly mounted inside one end of the special gas supply pipe 201 close to the gas inlet thereof.
The communicating pipe 4 is fixedly communicated between the left special gas supply pipe 201 and the right special gas supply pipe 201, and the manual diaphragm valve b401 is arranged to control the communication and stopping of the communicating pipe 4, so that the special gas in the special gas supply pipe 201 on one side can be distributed and supplied to the special gas distribution branch pipes 203 in the left special gas distribution pipeline and the right special gas distribution branch pipes, the flexible use of the special gas distribution branch pipes 203 in the left special gas distribution pipeline and the right special gas distribution branch pipes is facilitated, the use convenience of the device is improved to a certain extent, the applicability of the device in the actual use process is effectively improved, meanwhile, the special gas is prevented from flowing backwards or channeling through the check valve b402, and the stable safety of the device in the use process is effectively guaranteed.
Referring to fig. 8 and 9, a mixed flow adjusting assembly 5 is fixedly connected between the upper ends of two special gas branch pipes 203 located inside the same inner box 2, and the mixed flow adjusting assembly 5 includes a cylindrical valve casing 501, a connecting pipe c-a502 is fixedly communicated between the left side of the front surface of the valve casing 501 and the special gas branch pipe 203 located on the left side, a connecting pipe c-b503 symmetrically arranged with the connecting pipe c-a502 is fixedly communicated on the right side of the back surface of the valve casing 501, and the other end of the connecting pipe c-b503 is fixedly communicated with the air receiving equipment connecting pipe 204 located on the right side, a connecting pipe c-c504 is fixedly communicated between the right side of the front surface of the valve casing 501 and the special gas branch pipe 203 positioned on the right side, a connecting pipe c-d505 symmetrically arranged with the connecting pipe c-c504 is fixedly communicated with the left side of the back surface of the valve casing 501, the other end of the connecting pipe c-d505 is fixedly communicated with the air receiving equipment connecting pipe 204 positioned on the left side, a valve core 506 matched with the inner size of the valve casing 501 is rotatably connected inside the valve casing 501, and a valve hole 507 matched with the connecting pipe c-a502, the connecting pipe c-b503, the connecting pipe c-c504 and the connecting pipe c-d505 is formed in the middle position of the valve core 506.
When the device works, when only one gas receiving equipment connecting pipe 204 in a certain set of special gas distribution pipeline needs to be intensively supplied with gas, at the moment, a worker can open the manual diaphragm valve a-b205 on the special gas distribution branch pipe 203 corresponding to the gas receiving equipment connecting pipe 204 through rotation and close the manual diaphragm valve a-b205 on the other special gas distribution branch pipe 203 in the set of special gas distribution pipeline through rotation, only the special gas distribution branch pipe 203 corresponding to the gas receiving equipment connecting pipe 204 is kept in a conducting state, of course, if the special gas supply efficiency is improved, the worker can also keep the two special gas distribution branch pipes 203 in the conducting state through rotating the manual diaphragm valve a-b205, under the state, the worker needs to rotate the valve core 506 to ensure that the valve hole 507 is switched and communicated between the connecting pipe c-a502 and the connecting pipe c-b503, or the connecting pipe c-c504 and the connecting pipe c-d505, so that the two special gas distribution branch pipes 203 are communicated with the gas receiving equipment connecting pipe 204 needing to be intensively supplied with gas, the valve hole 507 rotates to the connecting pipe c-a502 c 502-c 505 and the connecting pipe c-d505, the connecting pipe c-d, the connecting pipe 503 c-d, and the connecting pipe c-d 503 c-d connecting pipe 503 are not communicated with the connecting pipe c-d.
In the same inner box 2, that is, in the same special gas distribution pipeline, when the special gas centralized supply needs to be performed to the air-receiving equipment connecting pipe 204 located on the left side, the worker rotates the valve core 506 to make the valve hole 507 communicate between the connecting pipe c-c504 and the connecting pipe c-d505 in a deflected manner, in this state, the special gas distribution branch pipe 203 located on the right side communicates with the air-receiving equipment connecting pipe 204 located on the left side through the connection of the connecting pipe c-c504 and the connecting pipe c-d505, when the special gas centralized supply needs to be performed to the air-receiving equipment connecting pipe 204 located on the right side, the worker rotates the valve core 506 to make the valve hole 507 communicate between the connecting pipe c-a502 and the connecting pipe c-b503 in a deflected manner, in this state, the special gas distribution branch pipe 203 located on the left side communicates with the air-receiving equipment connecting pipe 204 located on the right side through the connection of the connecting pipes c-a502 and the connecting pipe c-b503, and the operation mode that the two special gas distribution branch pipes 203 simultaneously perform the centralized gas supply to one air-receiving equipment connecting pipe 204 can be further improved in operation flexibility, and the stability of the air-receiving equipment connecting pipe 204 can be effectively ensured.
Referring to fig. 6 and 8, when the device works, the manual diaphragm valves a to c206 are installed at one end of the special gas flow distribution branch pipe 203 close to the gas receiving equipment connecting pipe 204, and the connecting pipe c to a502 and the connecting pipe c to c504 are respectively communicated with the positions between the manual diaphragm valves a to c206 and the pressure gauge a208 on the two special gas flow distribution branch pipes 203 on the left and right sides.
Referring to fig. 6, a nitrogen supply pipe 6 is fixedly installed at the middle position inside the vmb outer box 1, the upper end of the nitrogen supply pipe 6 is fixedly communicated with a three-way pipe d-a601, two ends of the three-way pipe d-a601, which are far away from the nitrogen supply pipe 6, are respectively fixedly communicated with a three-way pipe d-b602, the two three-way pipes d-b602 extend into the two inner boxes 2, two ends of the three-way pipe d-b602, which are far away from the three-way pipe d-a601, are respectively fixedly communicated with two special gas branch pipes 203 in the same inner box 2, the communication part between the three-way pipe d-b602 and the special gas branch pipe 203 is arranged between a manual diaphragm valve a-b205 and a pressure regulating valve 207, a manual diaphragm valve d-a603 is fixedly installed on the nitrogen supply pipe 6, and a manual diaphragm valve d-b604 is fixedly installed at one end of the three-way pipe d-b602, which is close to the special gas branch pipe 203.
When the device works, in the process of sweeping and cleaning each branch, a worker can connect the nitrogen supply pipe 6 with an external nitrogen supply device, the external nitrogen supply device is used for supplying nitrogen to the nitrogen supply pipe 6, the worker can rotate to open the manual diaphragm valve d-a603 and the manual diaphragm valve d-b604 corresponding to the special gas branch pipe 203 needing sweeping and cleaning, the nitrogen supplied in the external nitrogen supply device enters the three-way pipe d-a601 through the nitrogen supply pipe 6 after passing through the manual diaphragm valve d-a603, enters the three-way pipe d-b602 connected with the left side and the right side through the shunt of the three-way pipe d-a601, enters the special gas branch pipe 203 communicated with the three-way pipe d-b602 through the shunt of the three-way pipe d-b602 for sweeping and cleaning, and residual special gas in the special gas branch pipe 203 is discharged.
The nitrogen gas supplied in the nitrogen gas supply pipe 6 is divided by the three-way pipe d-a601 and the three-way pipe d-b602, so that the single nitrogen gas supply pipe 6 can supply uniform nitrogen gas for a plurality of special gas branch pipes 203 in the left inner box body and the right inner box body 2, the special gas branch pipes in the left inner box body and the right inner box body 2 are intensively used for sweeping and blowing the nitrogen gas by one nitrogen gas supply pipe 6, the integration of the inner structure is facilitated, the manufacturing cost of the device is reduced to a certain extent, meanwhile, the manual diaphragm valves d-b604 are arranged at the end parts, close to the special gas branch pipes 203, of the three-way pipes d-b602, the nitrogen gas sweeping and blowing access in each special gas branch pipe 203 can be respectively controlled, and the use flexibility of the device is effectively improved.
Referring to fig. 6, an air supply pipeline 7 is fixedly installed at the middle position inside the VMB outer box 1, the upper end of the air supply pipeline 7 is fixedly communicated with a vacuum generator 701, an air outlet above the vacuum generator 701 is fixedly communicated with an air exhaust pipeline 702, the air exhaust pipeline 702 is fixedly communicated with an air exhaust port fixedly installed at the top of the VMB outer box 1, a three-way pipe e-a703 is fixedly communicated with a vacuum exhaust opening on the side surface of the vacuum generator 701, two ends of the three-way pipe e-a703, which are far away from the vacuum generator 701, are respectively and fixedly communicated with three-way pipes e-b704 extending into the inner box 2 on the left side and the right side, two ends of the three-way pipe e-b704, which are far away from the three-way pipe e-a703, are respectively and fixedly communicated with two special air flow distribution branch pipes 203 in the same inner box 2, the communication positions of the three-way pipes e-b704 and the special air flow distribution branch pipes 203 are arranged between the manual diaphragm valves a-c206 and the pressure gauge a208, a manual flow distribution pipe 705 is fixedly installed on the air supply pipeline 7, one end of the diaphragm valve 704 close to the special air distribution branch pipe 203 e-b 203 is fixedly installed on the three-way pipe 701, and a pressure gauge 707 is close to the special air distribution branch pipe 203 is installed on the special air distribution branch pipe 203.
When the device works, when the residual gas in the special gas branch pipe 203 needs to be sucked and discharged in vacuum, a worker can connect the gas supply pipeline 7 with an external gas pump, so that the external gas pump continuously blows gas into the vacuum generator 701 through the gas supply pipeline 7, the gas flow blown into the vacuum generator 701 is discharged through the gas discharge pipeline 702, under the conversion of the vacuum generator 701, continuous suction force is formed at the three-way pipe e-a703, the suction force formed at the vacuum generator 701 can be communicated into the special gas branch pipe 203 through the communication of the three-way pipe e-a703 and the three-way pipe e-b704, each special gas branch pipe 203 is subjected to vacuum pumping and cleaning, and the stability of the device in the use process can be further improved, the air supply device is provided with an air supply pipeline 7 and an external air pump for continuously blowing air, unified air suction and impurity removal operation can be performed on a plurality of special air branch pipes 203 by means of conversion of a vacuum generator 701 and connection of three-way pipes e-a703 and e-b704, use safety of the device is guaranteed, meanwhile, the same vacuum generator 701 is used for vacuumizing operation in the left special air branch pipe and the right special air branch pipe, manufacturing and use cost of the device is effectively reduced, on-off control is performed by matching of a manual diaphragm valve e-a705 and the manual diaphragm valve e-b708, use flexibility of the device is promoted, pressure in the three-way pipes e-a703 is monitored in time by the aid of a pressure gauge e707, and stable safety of the device in a using process is guaranteed.
Referring to fig. 6, a one-way valve d605 is fixedly installed at one end of the nitrogen supply pipe 6 close to the three-way pipe d-a601, a one-way valve e-a706 is installed inside the gas supply pipe 7, and one-way valves e-b709 are fixedly installed inside two ends of the three-way pipe e-a703 far from the vacuum generator 701.
Referring to fig. 4 and 10, sealing rubber strips are mounted at the joint between the VMB outer box 1 and the door 101 and the joint between the operation window 102 and the window 103, a sealing structure is formed inside the VMB outer box 1, a square box 8 recessed into the VMB outer box 1 is fixedly embedded at the middle position of the front surface of the door 101, a metal pipe 801 is vertically fixed inside the square box 8, the bottom of the metal pipe 801 is communicated with the inside of the VMB outer box 1, the top of the metal pipe 801 is communicated with the outside of the VMB outer box 1, a limit ring 802 is fixedly mounted at the top of the metal pipe 801, a resistor rod 803 vertically inserted into the middle position inside the metal pipe 801 is fixedly mounted at the top of the square box 8, a metal valve block 804 with an adaptive inner size of the metal pipe 801 is movably sleeved outside the resistor rod 803, a spring 805 is fixedly connected at the upper end of the metal valve block 804, the upper end of the spring 805 is fixedly connected with the limit ring 802, and leads are fixedly connected to the outer end wall of the metal pipe 801 and the top end of the resistor rod 803.
When the device works, because the inside of the VMB outer box body 1 is in a sealed state, when special gas in the VMB outer box body 1 leaks, the gas pressure in the VMB outer box body 1 is enhanced under the continuous leakage of the special gas, obvious gas pressure difference is formed between the inside of the VMB outer box body 1 and the outside, and the metal valve block 804 movably arranged in the metal pipe 801 is pushed upwards to overcome the elastic support of the spring 805 under the pushing of the gas pressure, at the moment, the position relation between the metal valve block 804 and the resistance rod 803 is changed, therefore, in the using process, whether pipeline leakage exists in the VMB outer box body 1 can be judged only by monitoring the resistance change between the connecting wires on the metal pipe 801 and the resistance rod 803 in real time, when the metal valve block 804 moves upwards, the resistance value between the metal pipe 801 and the lead on the resistance rod 803 should be continuously reduced, which means that the metal valve block 804 is pushed upwards, the influence of the ambient temperature on the device is removed, the air leakage condition inside the VMB outer box body 1 can be judged, the metal pipe 801 is communicated between the inside of the VMB outer box body 1 and the external atmosphere, the inside of the VMB outer box body 1 is set in a sealed state, the metal valve block 804 is driven to move on the metal pipe 801 by the change of the air pressure inside the VMB outer box body 1, the resistance change between the resistance rod 803 and the metal valve block 804 is measured, whether special air leakage exists inside the VMB outer box body 1 can be intuitively judged, and the stable safety of the device in the use process is guaranteed.
The above description is only for the preferred embodiment of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present application, and the equivalent replacement or change according to the technical solution and the improvement concept of the present application in the technical scope of the present application should be covered by the scope of the present application.
Claims (10)
1. The utility model provides a special gas flow distribution box with structure is independently adjusted to multi-branch pressure, includes VMB outer box (1), its characterized in that, two interior box (2) that bilateral symmetry set up are installed to the inside top of VMB outer box (1), every special gas flow distribution pipeline is all installed to the inside of interior box (2), and is one set special gas flow distribution pipeline includes special gas supply pipe (201) of fixed mounting in interior box (2) bottom, and the intermediate position department fixedly connected with manual diaphragm valve a-a (202) of special gas supply pipe (201), the fixed intercommunication in upper end of special gas supply pipe (201) has two bilateral symmetry to set up including box (2) inside special gas flow distribution branch pipe (203), every the equal fixed intercommunication in upper end of special gas flow distribution branch pipe (203) has the equipment of receiving connecting pipe (204) of inlaying on the outer box (1) back end wall of VMB, special gas flow distribution branch pipe (203) is close to the one end inside fixed mounting of special gas supply pipe (201) has manual diaphragm valve a-b (205), the intermediate position department branch pipe of special gas flow distribution branch pipe (203) has pressure regulating valve (207) and pressure regulating valve (208 a) in proper order.
2. The special gas flow distribution box with the multi-branch pressure independent adjusting structure is characterized in that a plurality of hinges are sequentially fixed on the right end wall of the front face of the VMB outer box body (1) from top to bottom, the VMB outer box body (1) is hinged with a box door (101) covering the front face of the VMB outer box body through the hinges, an operation window (102) arranged right in front of the two inner box bodies (2) is arranged at the middle position above the box door (101), a window door (103) matched with the inner size of the operation window (102) is embedded in the operation window (102), and a plurality of hinges arranged from top to bottom are also fixedly installed between the right side of the window door (103) and the operation window (102).
3. The special gas distribution box with the multi-branch pressure independent adjusting structure as claimed in claim 1, wherein the special gas in the special gas supply pipe (201) on the left side can be compatible with the special gas in the special gas supply pipe (201) on the right side.
4. The special gas distribution box with the multi-branch pressure independent adjusting structure according to claim 1, wherein a transversely arranged communication pipe (4) is fixedly communicated between two special gas supply pipes (201), a manual diaphragm valve b (401) is fixedly installed at the middle position of the communication pipe (4), the communication position of the communication pipe (4) and the special gas supply pipe (201) is arranged at the position below the manual diaphragm valve a-a (202), and a one-way valve b (402) is fixedly installed inside one end of the special gas supply pipe (201) close to the gas inlet of the special gas supply pipe.
5. The special gas flow distribution box with the multi-branch pressure independent adjusting structure according to claim 1, wherein a mixed flow adjusting assembly (5) is fixedly connected between the upper ends of two special gas flow distribution branch pipes (203) positioned in the same inner box body (2), and the mixed flow adjusting assembly (5) comprises a valve casing (501) which is a cylindrical structure, a connecting pipe c-a (502) is fixedly communicated between the left side of the front surface of the valve casing (501) and the special gas flow distribution branch pipe (203) positioned on the left side, a connecting pipe c-b (503) symmetrically arranged with the connecting pipe c-a (502) is fixedly communicated with the right side of the back surface of the valve casing (501), the other end of the connecting pipe c-b (503) is fixedly communicated with the air receiving equipment connecting pipe (204) on the right side, the connecting pipe c-c (504) is fixedly communicated between the right side of the front face of the valve casing (501) and the special gas branch pipe (203) on the right side, the connecting pipe c-d (505) symmetrically arranged with the connecting pipe c-c (504) is fixedly communicated with the left side of the back face of the valve casing (501), the other end of the connecting pipe c-d (505) is fixedly communicated with the air receiving equipment connecting pipe (204) on the left side, a valve core (506) matched with the inner size of the valve casing (501) is rotatably connected inside the valve casing (501), and the middle position of the valve core (506) is provided with the connecting pipe c-a (502), A valve hole (507) matched with the connecting pipe c-b (503), the connecting pipe c-c (504) and the connecting pipe c-d (505).
6. The special gas distribution box with the multi-branch pressure independent adjusting structure according to claim 5, wherein a manual diaphragm valve a-c (206) is fixedly installed at one end of the special gas distribution branch pipe (203) close to the air-receiving equipment connecting pipe (204), and the connecting pipe c-a (502) and the connecting pipe c-c (504) are respectively communicated at positions between the manual diaphragm valve a-c (206) and the pressure gauge a (208) on the two special gas distribution branch pipes (203) at the left side and the right side.
7. The special gas distribution box with the multi-branch pressure independent adjusting structure is characterized in that a nitrogen supply pipe (6) is fixedly installed at an internal middle position of the VMB outer box body (1), the upper end of the nitrogen supply pipe (6) is fixedly communicated with a three-way pipe d-a (601), two ends, far away from the nitrogen supply pipe (6), of the three-way pipe d-a (601) are respectively fixedly communicated with a three-way pipe d-b (602), the two three-way pipes d-b (602) extend into the two inner box bodies (2), two ends, far away from the three-way pipe d-a (601), of the three-way pipe d-b (602) are respectively and fixedly communicated with two special gas distribution branch pipes (203) in the same inner box body (2), the communication position of the three-way pipe d-b (602) and the special gas distribution branch pipe (203) is arranged between a-b (205) and a pressure adjusting valve (207), a manual diaphragm valve d-b (603) is fixedly installed on the nitrogen supply pipe (6), and one end, close to the fixed diaphragm valve d-b (602) of the three-way pipe d-b, and one end of the special gas distribution branch pipe (602) is fixedly communicated with two special gas distribution branch pipes.
8. The special gas flow-dividing box with the multi-branch pressure independent adjusting structure as claimed in claim 7, wherein a gas supply pipeline (7) is fixedly installed at a middle position inside the VMB outer box body (1), a vacuum generator (701) is fixedly communicated with the upper end of the gas supply pipeline (7), a gas outlet above the vacuum generator (701) is fixedly communicated with a gas exhaust pipeline (702), the gas exhaust pipeline (702) is fixedly communicated with a gas exhaust port fixedly installed at the top of the VMB outer box body (1), a three-way pipe e-a (703) is fixedly communicated with a vacuum pumping port on the side of the vacuum generator (701), two ends of the three-way pipe e-a (703) far away from the vacuum generator (701) are fixedly communicated with a three-way pipe e-b (704) respectively extending into the left and right inner box bodies (2), two ends of the three-way pipe e-b (704) far away from the three-way pipe e-a (703) are respectively fixedly communicated with two special gas flow-dividing branch pipes (203) in the same inner box body (2), a diaphragm valves (704) are fixedly communicated with a diaphragm valves (704) installed at one end of the three-way pipe e-b (704), a manual flow-generating pipe (701), a) is fixedly communicated with a manual flow-generating pressure gauge (703 a) and a manual flow-generating pressure gauge (206) is installed on a manual flow-generating pipe (701), and manual diaphragm valves e-b (708) are fixedly mounted at one ends of the three-way pipes e-b (704) close to the special gas branch pipes (203).
9. The special gas distribution box with the multi-branch pressure independent adjusting structure as claimed in claim 8, wherein a check valve d (605) is fixedly installed at one end of the nitrogen gas supply pipe (6) close to a three-way pipe d-a (601), a check valve e-a (706) is arranged inside the gas supply pipeline (7), and a check valve e-b (709) is fixedly installed inside both ends of the three-way pipe e-a (703) far away from the vacuum generator (701).
10. The special gas flow distribution box with the multi-branch pressure independent adjusting structure is characterized in that sealing rubber strips are mounted at the joint of the VMB outer box body (1) and the box door (101) and the joint of the operation window (102) and the window door (103), a sealing structure is formed inside the VMB outer box body (1), a square box (8) which is recessed inside the VMB outer box body (1) is fixedly embedded at the middle position of the front face of the box door (101), a metal pipe (801) is vertically fixed inside the square box (8), the bottom of the metal pipe (801) is communicated with the inside of the VMB outer box body (1), the top of the metal pipe (801) is communicated with the outside of the VMB outer box body (1), a limiting ring (802) is fixedly mounted at the top of the metal pipe (801), a resistance rod (803) vertically inserted at the middle position inside the metal pipe (801) is fixedly mounted at the top of the square box (8), the outer end of the resistance rod (803) is movably sleeved with the inner size of the metal pipe (801), and the upper end of the metal pipe (804) is connected with a spring block (804) which is connected with a spring (804) and a wire (804) which is connected with the metal pipe (804).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211077953.9A CN115597001A (en) | 2022-09-05 | 2022-09-05 | Special gas flow distribution box with multi-branch pressure independent adjusting structure |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211077953.9A CN115597001A (en) | 2022-09-05 | 2022-09-05 | Special gas flow distribution box with multi-branch pressure independent adjusting structure |
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| CN115597001A true CN115597001A (en) | 2023-01-13 |
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| CN202211077953.9A Pending CN115597001A (en) | 2022-09-05 | 2022-09-05 | Special gas flow distribution box with multi-branch pressure independent adjusting structure |
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