KR100481802B1 - Tee shut-off manual operated valve - Google Patents

Abstract

A TS(Tee Shutoff manual operated) valve is provided to reduce the number of parts installed in a semiconductor manufacturing pipe line, and to increase productivity by integrally forming a branch pipe with a manual valve. A TS valve(100) for a resin pipe line is installed in an intersection of pipe lines to form branch passages to open and close vertically branched passages, and composed of a T-shape branch pipe having an inlet(50) flowing chemicals from the pipe line, a first discharge port(60) horizontally arranged with the inlet and a second discharge port(70) arranged vertically to the inlet and formed between the inlet and the first discharge port and a manual valve(90) having a valve inlet part formed vertically in a lower part and a discharge port or more formed at a side. The second discharge port of the T-shape branch pipe is connected to the valve inlet part of the manual valve, and flow direction of fluid is changed at 90 angular degrees by opening and closing the TS valve.

Description

Tee Shut-off Manual Operated Valve}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a Tee Shut-off Manual Operated Valve. More specifically, the present invention relates to a fluorine resin widely used in semiconductor manufacturing facility piping lines, food production facility piping lines, or chemical production facility piping lines. The vertical tee branch pipe and the manual valve are integrally integrated with the Tee Shut-off Manual Operated Valve (hereinafter simply referred to as TS valve).

Currently, the semiconductor manufacturing equipment piping line, the food manufacturing equipment piping line, or the chemical manufacturing equipment piping line is an unsaturated poly having excellent heat resistance, chemical resistance, formability, and low shrinkage as piping for supplying chemicals to the manufacturing equipment. In other words, pipes made of fluorine resin are widely used. As a result, these piping lines branch at branch points as necessary and are hermetically connected to many production facilities. Here, as the branch pipe at the connection point, a vertical tee type branch pipe made of the above-mentioned fluororesin, a manual valve, and the like are generally used.

1 is a conceptual diagram schematically illustrating a piping line of a semiconductor manufacturing facility which is widely used at present.

In FIG. 1, in order to continuously or intermittently provide various kinds of chemical solutions from the plurality of chemical solution storage tanks (not shown) to the plurality of semiconductor manufacturing apparatuses 50, respectively, from the plurality of chemical solution storage tanks. The chemical main supply pipes (9) and the chemical sub-main supply pipes (11) of the main supply pipes (11) are not crossed with each other and are alternately installed. The main supply pipes (9) and the sub main supply pipes (11) The vertical tee-shaped branch pipe 10 is provided at the branch point of), and the manual valve 20 is provided in the position which requires the interruption of chemicals. The vertical tee-shaped branch pipe 10 and the manual valve 20 are generally embedded in a box in which a sensor or the like is installed for the purpose of detecting leakage of the valve or the connection fastening pipe.

Figure 2a is a perspective view showing a detailed structure of the vertical tee branch, Figure 2b is a perspective view showing a detailed structure of the manual valve, Figure 2c is a tee fitting structure and a manual valve shown in Figures 2a and 2b Is a perspective view of the combined form for incorporation into a box.

As described above, the vertical tees-shaped branch pipe 10 shown in FIG. 2A is made of fluorine resin, and it can be seen that the chemical solution is passed through from the main supply pipe 9 to the sub main supply pipe 11. have. Here, in the vertical tee branch pipe 10, the fitting structure between the main supply pipe 9 and the vertical tee branch pipe 10 or the vertical tee branch pipe 10 and the sub main supply pipe. Patent Application No. 10-2003-0062007 filed "September 5, 2003" filed by the applicant of the present invention, and "Resin connection pipe fastening, filed July 8, 2004 It is described in detail in the patent application No. 10-20004-0053130 entitled "tube" and the description of the detailed structure thereof will be omitted.

As described above, the manual valve 20 shown in FIG. 2B is made of a fluororesin, is provided in the middle of the main supply pipe or the sub main supply pipe 9, and, if necessary, a chemical solution flowing through the pipe. To crack down. Here, in the manual valve 20, the structure of the manual valve 20 and the structure of the diaphragm (not shown), and the fitting structure between the pipes 9 and 11 and the manual valve 20 are described. As described in detail in Patent Application No. 10-2003-68928, entitled "Valve Body and Diaphragm Structure of Manual Valve," filed October 2, 2003 by the present applicant, a detailed description thereof is omitted. do.

Generally, in the semiconductor manufacturing facilities, the piping lines 9 and 11, the branch pipes 10, and the manual valves 20 shown in Figs. 2A and 2B are used in tens or hundreds and have a very complicated structure.

In general, in the semiconductor manufacturing equipment, chemical and food manufacturing equipment, a large number of piping lines (9, 11), branch pipe (10), manual valve (20) has a complex structure to maintain such piping equipment Not only does it require considerable time and human resources, but in the case of chemical or gas leaks, it checks the status of numerous branch pipes (10) and branch pipe connections, manual valves (20), etc. until the cause is found. In order to do so, a lot of time and human resources are consumed.

Therefore, in such a semiconductor manufacturing facility, a chemical, and a food production facility, simplifying a piping line and reducing the number of parts installed in the middle of the line, for example, the branch pipe 10 or the manual valve 20, is required. Has been required.

In this attempt, improvements have been made to place the branch pipes 10, the manual valves 20, and the like as close as possible and to house them in one box as shown in Fig. 2C.

 However, this improvement can not only reduce the number of installation parts of the pipe line, but also can not reduce the connection point between the pipe and the branch pipe, or the pipe and manual valve.

 In addition, this improvement scheme occupies unnecessary space, such as the cross arrangement between the pipe line and the pipe line, and has a problem in that adverse effects occur in space utilization.

In addition, this improvement is because there is a pipe (9, or 11) between the branch pipe 10 and the manual valve 20, through the same pipe (9, 11) different chemical solution to the manufacturing equipment sequentially In the case of supplying, chemical solution remains in the piping lines 9 and 11, and it exists as impurities which affect the end product produced, ie, a semiconductor, foodstuff, etc.

Embodiment of the present invention made in view of the above-described disadvantages, by forming a conventional vertical Tee-shaped branch pipe and a manual valve in a vertical integral type, in the piping equipment of the semiconductor manufacturing equipment, to prevent interference between the piping lines, To provide a TS valve that can significantly reduce the number of parts installed on the pipe line, and also reduce the connection point between the pipe and branch pipe, or pipe and manual valve.

In addition, the embodiment of the present invention, by forming the conventional branch pipe and the manual valve as a vertically integrated TS valve, it is possible to reduce the space occupied by each branch pipe and the manual valve in the piping equipment of the semiconductor manufacturing equipment. It is to provide a TS valve.

Further, in the embodiment of the present invention, the conventional vertical branch pipe and the manual valve are formed as a vertically integrated TS valve, so that different chemicals are formed through the same pipes 9 and 11 in the piping facility of the semiconductor manufacturing facility. Even when the solution is sequentially supplied to the manufacturing facility, no chemical solution remains in the piping lines 9 and 11, so that the final productivity can be improved by not affecting the end product produced, that is, semiconductor or foodstuff. It is to provide a TS valve.

In addition, the embodiment of the present invention, by forming the conventional vertical branch pipe and the manual valve by the vertically integrated TS valve, by reducing the number of components installed on the piping line in the piping equipment of the semiconductor manufacturing equipment, To reduce the time and human resources required for installation and maintenance, and to provide a TS valve that can cope quickly in the event of leakage of chemical solution and gas.

The TS valve for a resin piping line according to an embodiment of the present invention,

It is installed in the pipe line to form a flow path can branch the flow path, and can block or open one of the branched flow paths,

An inlet port for introducing a chemical solution from a piping line; A t-shaped branch pipe having one inlet and two outlets, the first outlet being formed horizontally with the inlet and the other outlet being acting as the inlet of the manual valve; And a manual valve portion of one of the outlets of the branch pipe communicates with the inlet portion of the manual valve portion, and is capable of blocking or opening the flow of the solution flowing from the inlet portion and discharging it to the second outlet. It is characterized by.

Preferably, the TS valve for resin piping lines according to one embodiment of the present invention includes a connection pipe structure in which the inlet portion, the first and the second discharge ports, respectively, can connect the resin piping.

Preferably, the TS valve for resin piping lines according to one embodiment of the present invention, wherein the resin piping connection pipe structure each includes a connector, a resin piping, and a nut formed with the TS valve body, wherein the resin piping is It can be airtightly and firmly connected to the TS valve body.

Preferably, the TS valve for resin pipe line according to an embodiment of the present invention, the resin pipe connection pipe, the first auxiliary ring which can be detachable to the connector circumference portion, and the nut circumference portion can be detachable. It is possible to visually monitor the connection state of the pipe connection pipe including a second auxiliary ring.

Preferably, the TS valve for a resin pipe line according to an embodiment of the present invention, wherein the first auxiliary ring and the second auxiliary ring each include an arrow display part marked in red at a vertex of the circumference, and the arrow display part After the pipes are connected in an optimum state, they are attached so as to be arranged in a straight line with each other.

The TS valve for resin piping lines according to another embodiment of the present invention,

It is installed in the pipe line to form a flow path can branch the flow path, and can block or open one of the branched flow paths,

T-shaped branch pipe with one inlet and two outlets at the bottom, and

One outlet of the outlet of the branch pipe is in communication with the inlet portion of the manual valve portion, and consists of a manual valve portion capable of blocking or opening the flow of the solution flowing from the inlet portion to discharge to the second outlet. ,

Since the manual valve part is composed of a handle part, a valve body part, a valve outlet, and a diaphragm formed in the valve, it is possible to block the flow path discharged through the valve.

According to another embodiment of the present invention, a TS valve for a resin pipe line is

It is installed in the pipe line to form a flow path can branch the flow path, and can block or open one of the branched flow paths,

Inlet through which chemical solution is introduced from the outside,

A first outlet for directly discharging the chemical solution introduced from the inlet without being blocked;

A second outlet configured to block the flow of the chemical solution introduced from the inlet;

A diaphragm for the flow path flowing through the second outlet to block or open the solution flow, and

It is axially connected to the diaphragm, characterized in that it comprises a handle connected to control the operation of the diaphragm by rotation to block or open the flow of the solution.

According to another embodiment of the present invention, a TS valve for a resin pipe line is

It is installed in the pipe line to form a flow path can branch the flow path, and can block or open one of the branched flow paths,

T-shaped branch pipe with one inlet and two outlets, and a manual valve unit having one inlet and one outlet, which can block or open the flow of chemical solution flowing from the inlet, vertically integrated Characterized in that consists of.

Preferably, the TS valve for resin pipe line according to another embodiment of the present invention is configured such that a vertical outlet of two outlets of the T-shaped branch pipe serves as a lower inlet of the manual valve unit.

(Example)

Hereinafter, the TS valve 100 according to the exemplary embodiment of the present invention will be described in detail with reference to FIGS. 3 to 6.

Figure 3 is a perspective view showing in detail the structure of the TS valve according to an embodiment of the present invention, Figure 4 is a partial cutaway perspective view of the TS valve shown in Figure 3, Figure 5 is an exploded view of the TS valve shown in FIG. 6 is a conceptual view schematically illustrating a piping line of a semiconductor manufacturing facility in a state where a TS valve according to an embodiment of the present invention is adopted.

In FIG. 3, it is recognized in advance that the TS valve 100 is formed of an integrated form of the T-shaped branch pipe 10 shown in FIG. 2A and the manual valve 20 shown in FIG. 2D, as described above. shall.

In other words, the TS valve 100 is largely classified into three inlet / outlet ports 50, 60, and 70, a manual body part 90, and a handle part 80. The vertical tee-shaped branch pipe part is as shown in Fig. 2A. That is, the inlet port and the outlet port form a vertical first flow path 64 and include a second outlet port 67 vertically branched from the first flow path 64. The manual valve main body 90 forms a flow path that is 90 degrees different from a general manual valve in which the inlet and the outlet port as shown in FIGS. 2B and 2C form a single flow path. The manual valve body portion 90 has an inlet 67 which is vertically introduced into the lower portion, and the outlet 70 is formed to be bent at 90 degrees with the inlet 67. In the TS valve 100 according to the exemplary embodiment of the present invention, the vertical tee-shaped branch pipe part is formed at the lower part, and the manual valve body part 90 as described above is integrally formed at the upper part. Therefore, since the second outlet 67 of the vertical tee-shaped branch pipe portion is in direct communication with the lower inlet 67 of the body portion 90 of the manual valve, it can be represented as one component. That is, the second outlet 67 of the vertical tee-shaped branch pipe part constitutes the same component as the lower inlet 67 of the body part 90 of the manual valve.

As shown in FIGS. 3 and 4, each of the three inlets / outlets 50, 60, 70 has an inlet 50, a first outlet (in order to facilitate the description of the three inlets / outlets). 60), and the second outlet 70. This is not intended to limit the present invention but merely for convenience of explanation, the function of the three inlet / outlet (50, 60, 70) is to be changed depending on the position or direction in which the TS valve 100 of the present invention is installed Here, the direct connection of the vertical tee branch and the manual valve up and down is generally complicated in the case of semiconductor manufacturing equipment piping lines, since these piping lines cross each other. As a result, pipe interference occurs. In order to prevent such pipe interference, not only many considerations are required from the design of the pipe line, but when such pipe interference occurs, various pipe components are required to avoid pipe interference. When the TS valve according to the embodiment of the present invention in which the vertical tee branch pipe and the manual valve are directly connected up and down as described above is adopted, the interference of the pipe line can be easily avoided, and various It can be seen that there is an effect that can simplify the piping components. In FIG. 3, the inlet 50 and the first outlet 60 form a straight first flow path, branched vertically from the first flow path, and through the manual valve body 90, the second outlet ( The liquid flowing to 70 forms a second flow path. The second flow path opens or closes the flow of fluid in the manual body portion 90, that is, the fluid flows or closes. In other words, the second flow path can manually control the flow of the fluid as needed. Therefore, it can be seen that the first flow path and the second flow path flow in three dimensions. It can be seen that the fluid flowing through the inlet flows vertically through the first flow passage, and the second flow passage branched vertically from the first flow passage flows at right angles in the manual valve body 90. Therefore, the flow of the fluid between the 1st flow path and the 2nd flow path will flow two times 90 degrees in three-dimensional space.

In each of the three inlets / outlets 50, 60, 70, a resin pipe connecting fitting 200 (refer to FIG. 5) for connecting the resin pipe to the TS valve 100 is formed. Such resin pipe connection fastening pipe 200 is a patent application No. 10-2003-0062007 and "July 8, 2004" filed "September 5, 2003" filed by the present applicant It is shown and described in detail in patent application No. 10-2004-0053130 entitled "Resin Connection Fastener" filed as. The structure of this connection fastening pipe is mentioned later with reference to FIG.

In FIGS. 3 and 4, the TS valve 100 flows into the first outlet 60 and the second outlet 70 through the inlet 50 through the inlet 50. Since the second outlet 70 is discharged through the manual valve unit 90, the flow of the solution may be interrupted by the manual valve body 90. Here, the manual valve body 90 may have a structure similar to the manual valve 20 shown in FIG. 2B.

As can be seen from the partial cutaway perspective view of FIG. 4, the lower portion of the TS valve 100 is formed with a T-shaped pipe (strictly speaking, an inverse T, but simply referred to as a T-shaped pipe). As shown in FIG. 4, the tee-shaped pipe is composed of a horizontal pipe portion 64 and a vertical pipe portion 67, and the vertical pipe portion 67 is directly connected to the upper manual valve portion 90. It acts as a lead-in part of the manual valve part 90.

The structure of the manual valve portion 90 is shown and described in detail in patent application No. 10-2003-0068928 entitled "Structure of the valve body and diaphragm of a manual valve" filed on October 2, 2003 by the applicant. same. In addition, it can be seen that the conventional technology of the present invention has the same function and structure as the manual valve 20 shown in FIG. 2B.

The manual valve portion 90 rotates the handle portion 80 so that the flow of chemicals is opened or blocked by a diaphragm (not shown) axially supported by the handle portion 80.

In FIG. 5, each of the three inlet / outlet ports 50, 60, 70 formed in the TS valve 100 includes a connection fastening pipe 200 for hermetically fastening the resin pipe 63. The connection coupling pipe 200 formed in the TS valve 100 connects the connector 66 formed integrally with the main body 90 of the TS valve 100 and the resin pipe 63 to the connector 66. A nut 65 for fastening, a first auxiliary ring 61 inserted and mounted to the connector, and a second auxiliary ring 62 inserted and mounted to the nut 65. First, the resin pipe 60 is expanded and inserted into the connector 66, and then tightly and tightly fastened by the nut 65.

Then, the first auxiliary ring 61 and the circumference of the nut 65 are connected to the circumference of the connector 66 in the best fastening state in which the connector 66, the resin pipe 63, and the nut 65 are hermetically fastened. The second auxiliary ring 62 may be mounted to visually monitor the state of the fastening. In other words, the first and second auxiliary rings 61 and 62 are formed with arrow marks so as to face each other at the apex. Accordingly, the first and second auxiliary rings 61 and 62 are fitted to match the arrow marks formed on the first and second auxiliary rings 61 and 62 in a state where the connection fastening tube is in the best connection fastening state. When the nut 65 of the connection fastening pipe is loosened due to vibration or the like, the arrow indicators are shifted from each other to visually monitor the fastening state of the connection fastening pipe.

In FIG. 6, it can be seen that the number of components in the plumbing equipment of the semiconductor manufacturing equipment employing the TS valve 100 according to the present invention is reduced by half compared to the conventional plumbing equipment shown in FIG. In other words, in the piping of the semiconductor manufacturing equipment shown in FIG. 1, the branch pipe 10 is provided in the branch point which branches from the main supply piping 9 to the sub supply piping 11, and the sub supply piping 11 It can be seen that the manual valves 20 for controlling the flow of the solution are separately installed. On the other hand, FIG. 6 shows a branching point branched from the main supply pipe 9 to the sub supply pipe 11 in the piping of the semiconductor manufacturing equipment in the case of adopting the TS valve 100 having an integrated branch pipe and a manual valve. The TS valve 100 is installed in the TS valve 100, and the TS valve 100 integrally includes a manual valve 20 for controlling the flow of the fluid in the sub supply line 11, thereby significantly simplifying the structure of the piping line. As the number of parts has been reduced, it can be seen that the number of parts to be inspected in the initial installation and maintenance or emergency situation can be reduced, which significantly reduces the time and human resources required for installation and maintenance or inspection.

In the TS valve according to the embodiment of the present invention, the conventional branch pipe and the manual valve are integrally formed so that the number of parts installed on the piping line in the piping equipment of the semiconductor manufacturing equipment can be drastically reduced. It provides the effect of reducing the connection point between pipe and branch pipe or pipe and manual valve.

In addition, the TS valve according to the embodiment of the present invention is formed by a conventional branch pipe and a manual valve as an integrated TS valve, so that each branch pipe and a manual valve occupy space in a piping facility of a semiconductor manufacturing facility. Provides the effect of reducing

In addition, the TS valve according to the embodiment of the present invention is formed by using a conventional branch pipe and a manual valve as an integrated TS valve, so that the piping equipment of the semiconductor manufacturing equipment is different from each other through the same pipes 9 and 11. Even when the chemical solution is sequentially supplied to the manufacturing facility, the chemical solution does not remain in the piping lines 9 and 11, thereby improving final productivity by not affecting the final product produced, ie, semiconductor or foodstuff. It provides the effect.

In addition, the TS valve according to the embodiment of the present invention forms a conventional branch pipe and a manual valve as an integrated TS valve, thereby reducing the number of parts installed on the piping line in the piping equipment of the semiconductor manufacturing equipment. This can reduce the time and human resources required for initial installation and maintenance, and provide a quick response to chemical spills and gas leaks.

Embodiments of the invention shown in detail in the drawings and described in detail in the above embodiments should not be construed as limiting the technical spirit of the invention. The protection scope of the present invention is limited only by the matters described in the claims, and those skilled in the art can change the technical spirit of the present invention in various forms. Accordingly, such improvements and modifications will fall within the protection scope of the present invention, which will be apparent to those skilled in the art.

1 is a conceptual diagram schematically showing a piping line of a conventional semiconductor manufacturing facility;

FIG. 2A is a vertical tee shown in FIG. 1 Perspective view of branch pipe,

Figure 2b is a perspective view showing a detailed structure of the manual valve shown in FIG.

FIG. 2C is a perspective view illustrating a combined form of the vertical tee-shaped branch pipe shown in FIGS. 2A and 2B and a manual valve; FIG.

3 is a perspective view showing in detail the structure of the TS valve according to an embodiment of the present invention,

4 is a partial cutaway perspective view of the TS valve shown in FIG. 3;

5 is an exploded perspective view of the TS valve shown in FIG. 3;

6 is a conceptual diagram schematically illustrating a piping line of a semiconductor manufacturing apparatus according to an embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

 9: main supply piping 11: sub main supply piping

40: semiconductor manufacturing apparatus 50: inlet

60: first outlet 61: first auxiliary ring

62: second auxiliary ring 63: resin piping line

64: T-shaped branch pipe 65: nut

66 connector 67 upper inlet and outlet

70 second outlet 80 handle portion

90: manual valve body 100: TS valve

Claims (9)

A resin valve is provided at an intersection of a piping line to form a branch flow path, wherein the TS valve for resin pipe lines can branch vertically from the flow path and block or open the vertically branched flow path. A t-shaped branch pipe part including an inlet port through which a chemical solution or the like is introduced from a pipe line, a first outlet port formed horizontally with the inlet port, and a second outlet port formed perpendicularly to the inlet port at a central portion between the inlet port and the first outlet port , And Manual valve portion including a valve inlet formed in the vertical lower portion and one or more outlets formed on the side Is integrally formed, A second outlet of the t-shaped branch pipe portion is in direct communication to act as an inlet of the manual valve portion; The second outlet of the T-shaped branch pipe portion and the flow of fluid flowing from the inlet portion of the manual valve portion for the resin pipe line, characterized in that it can be blocked or opened to change the direction at an angle of approximately 90 ° TS valve. The flow of the first fluid of claim 1, wherein the fluid flowing from the pipe line to the T-shaped branch pipe forms a first fluid flow continuously flowing to the first outlet of the T-shaped branch pipe part. Forming a flow of the second fluid vertically branched from, if the flow of the second fluid is a TS valve for a resin pipe line, characterized in that it can be opened or blocked manually. The resin pipe according to claim 1, wherein each of the inlet portion, the first outlet port, and the manual valve of the upper tee branch branch includes a connector, a resin pipe, and a nut formed with the TS valve body. A TS valve for resin piping lines, further comprising a resin piping connection pipe structure that can be hermetically and firmly connected to the valve body. 4. The pipe connecting tube according to claim 3, wherein the resin pipe connecting tube includes a first auxiliary ring that can be attached to and detached from the connector circumferential portion, and a second auxiliary ring that can be attached to and detached from the nut circumferential portion. TS valve for resin piping lines, which can visually monitor the state. 4. The first and second auxiliary rings of claim 3, wherein the first auxiliary ring and the second auxiliary ring each include an arrow mark portion marked in red at a vertex of the circumference, and the arrow mark portions are aligned with each other after the pipe is connected in an optimal state. A TS valve for a resin piping line, which is attached to be disposed. 3. The flow path of claim 2, wherein the first flow path formed between the inlet and the first outlet of the vertical tee branch and the second flow path branched perpendicularly from the first flow path to form a three-dimensional flow path. TS valve for resin piping lines characterized by the above-mentioned. In the TS valve for resin piping lines, which are installed at the intersections of the piping lines to form flow paths, which branch vertically from the flow paths, and which can block or open the vertically branched flow paths. Inlet through which chemical solution is introduced from the outside, A first outlet for directly discharging the chemical solution introduced from the inlet horizontally without being blocked; A second outlet configured to be vertically branched from the inlet and the first outlet to be turned 90 degrees and to be turned 90 degrees again; A diaphragm for blocking or opening a solution flow flowing through the second outlet port, and A handle axially connected to the diaphragm and connected to control the operation of the diaphragm by rotation to block or open the flow of the solution TS valve for a resin piping line comprising a. The method of claim 7, wherein Forming a straight first flow path between the inlet and the first outlet; By forming a second flow path branched vertically from the first flow path again 90 degrees, the first flow path and the second flow path flow in spatially different planes to prevent interference of the pipe line. TS valve for resin piping line. delete