CN212024086U

CN212024086U - Gas conveying structure of dry vacuum pump

Info

Publication number: CN212024086U
Application number: CN201922293699.6U
Authority: CN
Inventors: 雷晓宏; 曾爱明
Original assignee: Beijing Tongjia Hongrui Technology Co ltd
Current assignee: Beijing Tongjia Hongrui Technology Co ltd
Priority date: 2019-12-18
Filing date: 2019-12-18
Publication date: 2020-11-27
Anticipated expiration: 2029-12-18

Abstract

The utility model discloses a dry vacuum pump's gas conveying structure, which comprises a valve body, the valve pocket has been seted up to the inside of valve body, and has seted up the gas circuit through-hole in the lateral wall of valve body, the inside of valve pocket is provided with the case, and the inside interlude of case has the trachea, install the choke valve on the trachea, install the check valve in the intake pipe on the bottom end of case, and be provided with the air-vent valve in the intake pipe of the inboard of check valve. The utility model discloses a be provided with a series of structures and solved traditional dry vacuum pump structure controllability poor, the part needs manual regulation, can't realize the automation, can't handle the backward flow problem of gas in the vacuum pump in addition, because the inside temperature of purge system is lower after the backward flow of the inside process gas of vacuum pump, can lead to gas or dust to take place chemical reaction and condense to purge system, lead to the inside jam of purge system to influence purge system normal work, lead to the problem that purge system became invalid even.

Description

Gas conveying structure of dry vacuum pump

Technical Field

The utility model relates to a vacuum pump technical field specifically is a gas conveying structure of dry vacuum pump.

Background

Vacuum pumps are used in chemical industry, semiconductor and electronic product manufacturing, and are mainly used for exhausting various gases generated in the manufacturing process. In order to enable process gas entering a vacuum pump to be discharged out of a pump cavity as soon as possible, certain inert gas can be introduced into the pump cavity to purge the pump cavity, at present, a gas conveying structure of an existing dry vacuum pump exists when the existing dry vacuum pump is used, the existing purging structure inside the vacuum pump controls fixed gas conveying through opening and closing of an electromagnetic valve, and the gas is conveyed into a purging cavity inside the vacuum pump; however, the structure has poor controllability, part of the structure needs manual adjustment, automation cannot be realized, and in addition, the backflow problem of gas in the vacuum pump cannot be processed, and after the backflow of the process gas in the vacuum pump, due to the fact that the temperature in the purging system is low, gas or dust can be caused to generate chemical reaction and be condensed into the purging system, the internal blockage of the purging system is caused, the normal work of the purging system is influenced, and even the purging system is caused to be invalid, so that the prior art needs to be improved to solve the problems.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

An object of the utility model is to provide a dry vacuum pump's gas conveying structure to solve the problem that proposes among the above-mentioned background art.

(II) technical scheme

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a gas conveying structure of dry vacuum pump, includes the valve body, the valve pocket has been seted up to the inside of valve body, and has seted up the gas circuit through-hole in the lateral wall of valve body, the inside of valve pocket is provided with the case, and the inside interlude of case has the trachea, install the choke valve on the trachea, install the check valve in the intake pipe on the bottom end of case, and be provided with the air-vent valve in the intake pipe of the inboard of check valve, install flow sensor in the intake pipe of the inboard of air-vent valve, install the manometer on the trachea of case top.

Preferably, the number of the air passage through holes is six, and the air passage through holes are arranged in a circular ring array.

Preferably, the inner wall of the valve body is connected with the outer wall of the valve core in a matching manner.

Preferably, the inner cavity of the valve core is communicated with the air passage through hole on the valve body through an air pipe.

Preferably, the air pipe is communicated with the air passage through hole in the valve body through a throttle valve.

Preferably, the valve body and the valve core are both arranged in a hollow cylindrical structure.

(III) advantageous effects

Compared with the prior art, the beneficial effects of the utility model are that: compared with the gas conveying structure of the traditional dry vacuum pump, the gas conveying structure of the dry vacuum pump has the advantages that the pressure regulating valve and the throttle valve are arranged, so that the nitrogen purging gas input flow can be automatically regulated, the gas input flow is effectively controlled, the loss rate of conveying gas is reduced, the working consumption of the vacuum pump is saved, and the gas in the vacuum pump can be prevented from flowing reversely under emergency conditions.

Meanwhile, by arranging the one-way valve, the pressure regulating valve and the flow sensor, the small valve core in the gas transmission device is decomposed into multiple paths by the gas inlet and is transmitted into the pump cavity of the multi-stage vacuum pump according to different flows, so that the inside of the pump cavity is cleaned and protected. A flow monitoring device and a pressure adjusting device are arranged at the front end of the flow distribution, and are used for monitoring the gas flow delivered to the interior of the target pump body in real time and adjusting the gas supply pressure. The small valve core arranged in the gas conveying device can rotate at any angle under the control of the rotating mechanism, so that throttling ports with different requirements can be communicated with a gas circuit of the valve body, and the pressure and the flow of the conveyed gas can be adjusted.

Drawings

FIG. 1 is a perspective view of the valve body of the present invention;

FIG. 2 is a side sectional view of the valve body of the present invention;

FIG. 3 is a view showing the internal structure of the valve core of the present invention;

fig. 4 is a gas delivery circuit diagram of the present invention.

The reference numbers in the figures are: 1. a valve body; 2. a valve cavity; 3. a gas path through hole; 4. a valve core; 5. an air tube; 6. a throttle valve; 7. a one-way valve; 8. a pressure regulating valve; 9. a flow sensor; 10. and a pressure gauge.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides an embodiment: the utility model provides a gas conveying structure of dry vacuum pump, including valve body 1, valve pocket 2 has been seted up to the inside of valve body 1, and seted up gas circuit through-hole 3 in the lateral wall of valve body 1, gas circuit through-hole 3 is convenient for gaseous transport, the inside of valve pocket 2 is provided with case 4, and the inside interlude of case 4 has trachea 5, be convenient for carry out hierarchical layer to gas through trachea 5 and carry, install choke valve 6 on the trachea 5, install check valve 7 in the intake pipe on the bottom end of case 4, check valve 7 avoids the gas reflux phenomenon to take place, and be provided with air-vent valve 8 in the intake pipe of the inboard of check valve 7, install flow sensor 9 in the intake pipe of air-vent valve 8's inboard, install manometer 10 on the trachea 5 on case 4 top, manometer 10 can carry out real-time.

Furthermore, the number of the air passage through holes 3 is six, and the air passage through holes 3 are arranged in a circular ring array.

Further, the inner wall of the valve body 1 is connected with the outer wall of the valve core 4 in a matching way.

Further, the inner cavity of the valve core 4 is communicated with the air passage through hole 3 on the valve body 1 through an air pipe 5.

Further, the air pipe 5 is communicated with the air passage through hole 3 in the valve body 1 through a throttle valve 6.

Further, the valve body 1 and the valve core 4 are both arranged in a hollow cylindrical structure.

The working principle is as follows: the small valve core 4 is driven to rotate at an angle through the rotating mechanism, after the small valve core is rotated at a certain angle, the air pipe 5 on the valve core 4 is communicated with the air passage through hole 3 in the valve body 1, and air can be conveyed into the pump cavity through different throttle valves 6 arranged at the positions of the air pipe 5; if a plurality of different flow control modes are needed, the rotating mechanism can rotate the small valve core 4 again to enable the small valve core to rotate for a certain angle, after the small valve core 4 rotates for a certain angle, the air pipe 5 on the valve core 4 is communicated with the air passage through hole 3 in the valve body 1, air can be conveyed into the pump cavity through different throttle valves 6 arranged at the positions of the air pipe 5, the air passage through holes 3 on the valve core 4 and the valve body 1 are not communicated, the air inside the pump cavity can be prevented from reversely flowing into the air module due to the condition, and therefore the air module is blocked. Each path of gas on the small valve core 4 is provided with a special sealing system to ensure the sealing performance of the whole gas conveying module, the gas flows rightwards through a control switch of a left one-way valve 7, the total pressure of the gas of the whole module is controlled through a pressure regulating valve 8, a flow sensor 9 can read the total flow regulated by the pressure regulating valve 8, and then the total flow controls the flow of the gas conveyed into the pump cavity of each path through different throttle valves 6 in the circular small valve core 4; the pressure gauge 10 measures the pressure delivered to the last stage discharge end of the pump chamber.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A gas delivery structure of a dry vacuum pump, comprising a valve body (1), characterized in that: the improved air-conditioning valve is characterized in that a valve cavity (2) is formed in the valve body (1), air passage through holes (3) are formed in the side wall of the valve body (1), a valve core (4) is arranged in the valve cavity (2), an air pipe (5) is inserted into the valve core (4), a throttle valve (6) is installed on the air pipe (5), a check valve (7) is installed in an air inlet pipe on the bottom end of the valve core (4), an air regulating valve (8) is arranged in an air inlet pipe on the inner side of the check valve (7), a flow sensor (9) is installed in an air inlet pipe on the inner side of the air regulating valve (8), and a pressure gauge (10) is installed on the air pipe (5) at.

2. A gas delivery structure of a dry vacuum pump according to claim 1, characterized in that: the number of the air passage through holes (3) is six, and the air passage through holes (3) are arranged in a circular ring array.

3. A gas delivery structure of a dry vacuum pump according to claim 1, characterized in that: the inner wall of the valve body (1) is connected with the outer wall of the valve core (4) in a matching way.

4. A gas delivery structure of a dry vacuum pump according to claim 1, characterized in that: the inner cavity of the valve core (4) is communicated with the air passage through hole (3) on the valve body (1) through an air pipe (5).

5. A gas delivery structure of a dry vacuum pump according to claim 1, characterized in that: the air pipe (5) is communicated with the air passage through hole (3) in the valve body (1) through the throttle valve (6).

6. A gas delivery structure of a dry vacuum pump according to claim 1, characterized in that: the valve body (1) and the valve core (4) are both arranged in a hollow cylindrical structure.