CN114593036A - Gas path distribution system for multistage dry vacuum pump - Google Patents
Gas path distribution system for multistage dry vacuum pump Download PDFInfo
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- CN114593036A CN114593036A CN202011430519.5A CN202011430519A CN114593036A CN 114593036 A CN114593036 A CN 114593036A CN 202011430519 A CN202011430519 A CN 202011430519A CN 114593036 A CN114593036 A CN 114593036A
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- gas path
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- 230000001105 regulatory effect Effects 0.000 claims abstract description 65
- 238000007789 sealing Methods 0.000 claims description 10
- 239000011148 porous material Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 3
- 230000001276 controlling effect Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B25/00—Multi-stage pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/10—Adaptations or arrangements of distribution members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/08—Regulating by delivery pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/10—Other safety measures
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
- F04B49/225—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves with throttling valves or valves varying the pump inlet opening or the outlet opening
Abstract
The invention belongs to the field of vacuum pumps, and particularly relates to a gas path distribution system for a multistage dry vacuum pump. According to the invention, the gas output with different flow proportions among the output pipelines can be realized without replacing the gas circuit by adjusting the pressure regulating valve, rotating the flow regulating pin and connecting the flow limiting pieces of the flow limiting holes with different apertures with the gas outlet; through the arrangement of the gas path flowmeter, data acquisition can be directly carried out and used for measuring the size of the total air inflow; the on-off of the branch channel is conveniently controlled by the arrangement of the electromagnetic valve; the direction of gas distribution is ensured by the arrangement of the one-way valve; through installing check valve, air-vent valve, gas circuit flowmeter, solenoid valve, pressure sensor, flow control round pin and current-limiting piece on integrated module, the integrated level is high, reduces occupation space, uses reliable and stable.
Description
Technical Field
The invention belongs to the field of vacuum pumps, and particularly relates to a gas path distribution system for a multi-stage dry vacuum pump.
Background
Dry gas is introduced into the multistage dry vacuum pump, which is beneficial to the discharge of condensable gas between stages of the vacuum pump and the discharge of extracted dust medium, and the dust medium is not left or accumulated in dead corners in the pump. When dry gas is supplied to the multi-stage dry vacuum pump, the dry gas is generally distributed by a dedicated gas path distribution system. The multipath output of the gas circuit of the existing gas circuit distribution system can only be in accordance with a unique flow proportion and cannot be changed; when gas is required to be output according to other flow proportions, the gas path distribution system can only be replaced generally.
Disclosure of Invention
The invention aims to provide a gas path distribution system for a multistage dry vacuum pump, aiming at the problem that the multi-path output end of the existing gas path distribution system cannot output gas in different flow proportions.
The purpose of the invention is realized by the following technical scheme:
a gas path distribution system for a multistage dry vacuum pump comprises an integrated module, a one-way valve, a pressure regulating valve, a gas path flowmeter, an electromagnetic valve, a pressure sensor, a flow regulating pin and a flow limiting piece;
an air inlet channel and an air outlet channel are respectively arranged in the integrated module, wherein the air outlet channel is divided into a plurality of branch channels in the midway, and finally each branch channel is respectively communicated with an air outlet, each air outlet is provided with a flow limiting piece, and the flow limiting piece is provided with a flow limiting hole for limiting the flow of the air outlet;
the one-way valve is arranged at the input end of the air inlet channel, the one-way valve is connected with an external air source, air is input into the air inlet channel from the one-way valve, and the one-way valve is used for ensuring the direction of air distribution;
the pressure regulating valve is arranged on the integrated module, a valve body of the pressure regulating valve extends into the air inlet channel, and the pressure regulating valve is used for regulating pressure and further regulating the total air volume passing through the air inlet channel;
the input end of the gas path flowmeter is communicated with the output end of the gas inlet channel, the output end of the gas path flowmeter is communicated with the input end of the gas outlet channel, and the gas path flowmeter is used for measuring the total gas quantity passing through the gas inlet channel;
the electromagnetic valves are respectively arranged on the integrated modules, valve bodies of the electromagnetic valves respectively extend into the branch channels, and the electromagnetic valves are used for controlling the on-off of the branch channels;
the flow regulating pin is inserted into the integrated module, one end of the flow regulating pin is a rotating end, and the other end of the flow regulating pin is a regulating end; the regulating end of the flow regulating pin extends to the bifurcation of the branch channel, a connecting pore channel communicated with the superior branch channel is arranged on the regulating end, and regulating holes corresponding to the input ports of the inferior branch channels are respectively arranged on the connecting pore channel; rotating the rotating end of the flow regulating pin to change the through area between the regulating hole and the input port of the branch passage so as to change the flow flowing into the branch passage;
the pressure sensor is arranged on the integrated module, the detection end of the pressure sensor is arranged at the air outlet, and the pressure sensor is used for detecting the air outlet pressure of the air outlet;
the gas path flowmeter, the electromagnetic valve and the pressure sensor are respectively connected with an external controller through electric conductors.
The gas circuit flowmeter is arranged on the outer side of the integrated module, the input end of the gas circuit flowmeter is communicated with the output end of the gas inlet channel through a pipeline, and the output end of the gas circuit flowmeter is communicated with the input end of the gas outlet channel through a pipeline.
The flow limiting piece is screwed into the air outlet through threads.
And a sealing ring A is arranged on the periphery of the flow limiting piece.
The rotating end of the flow regulating pin extends out of the integrated module.
And a rotating groove is formed in the end face of the rotating end of the flow adjusting pin.
And a sealing ring B is arranged in the middle of the flow regulating pin and in the part inside the integrated module.
The invention has the advantages and positive effects that:
1. according to the invention, the gas output with different flow proportions among the output pipelines can be realized without replacing the gas circuit by adjusting the pressure regulating valve, rotating the flow regulating pin and connecting the flow limiting pieces of the flow limiting holes with different apertures with the gas outlet;
2. through the arrangement of the gas path flowmeter, data acquisition can be directly carried out and used for measuring the size of the total air inflow;
3. the on-off of the branch channel is conveniently controlled by the arrangement of the electromagnetic valve;
4. the direction of gas distribution is ensured by the arrangement of the one-way valve;
5. through installing check valve, air-vent valve, gas circuit flowmeter, solenoid valve, pressure sensor, flow control round pin and current-limiting piece on integrated module, the integrated level is high, reduces occupation space, uses reliable and stable.
Drawings
FIG. 1 is a schematic overall structure diagram of an embodiment of the present invention;
FIG. 2 is a partially broken-away schematic view of an overall configuration of an embodiment of the invention;
FIG. 3 is a gas circuit system diagram of an embodiment of the present invention;
FIG. 4 is a schematic top view of an embodiment of the present invention;
FIG. 5 is a schematic bottom view of an embodiment of the present invention;
FIG. 6 is a schematic diagram of a right-view structure of an embodiment of the present invention;
FIG. 7 is a schematic diagram of a partial cross-sectional structure of an embodiment of the present invention;
FIG. 8 is a schematic view of the construction of the flow control pin of the present invention;
FIG. 9 is a schematic view of a flow restrictor according to the present invention;
fig. 10 is an enlarged view of fig. 7 at a.
In the figure: 1-integrated module, 2-flow regulating pin, 201-connecting pore channel, 202-regulating hole, 203-rotating groove, 3-gas path flowmeter, 4-electromagnetic valve, 5-pressure regulating valve, 6-one-way valve, 7-pressure sensor, 8-flow limiting piece, 801-flow limiting hole, 9-sealing ring A and 10-sealing ring B.
Detailed Description
The invention is described in further detail below with reference to figures 1-10.
An air path distribution system for a multi-stage dry vacuum pump, as shown in fig. 1-6, includes an integrated module 1, a check valve 6, a pressure regulating valve 5, an air path flowmeter 3, an electromagnetic valve 4, a pressure sensor 7, a flow regulating pin 2 and a flow limiting member 8, wherein the check valve 6, the pressure regulating valve 5, the air path flowmeter 3, the electromagnetic valve 4 and the pressure sensor 7 are all commercially available products.
The integrated module 1 is internally provided with an air inlet channel and an air outlet channel respectively, wherein the air outlet channel is divided into a plurality of stages of branch channels in the midway, and finally, the branch channels are respectively communicated with an air outlet, and the integrated module 1 can adopt an integrated valve block structure of a mobile system in the prior art; each air outlet is provided with a flow limiting piece 8, the flow limiting piece 8 is provided with a flow limiting hole 801 for limiting the flow of the air outlet, and the flow limiting piece 8 is screwed into the air outlet through threads in the embodiment; the flow limiting holes 801 with different apertures are arranged on different air outlets as required, so that the air outlet flow of different air outlets can be changed. In this embodiment, the periphery of the flow limiting member 8 is provided with a sealing ring A9, which can enhance the sealing performance at the joint of the flow limiting member 8 and the air outlet. In this embodiment, the integrated module 1 has six gas outlets, which are respectively used to connect the outlet of the vacuum pump, the upper and lower pump connectors, the 3-4 stage cavity, the 4-5 stage cavity, the exhaust cavity and the shaft seal, so as to respectively convey the cleaning gas to each position of the vacuum pump.
The pressure regulating valve 5 is installed on the integrated module 1, a valve body of the pressure regulating valve 5 extends into the air inlet channel, and the pressure of a knob of the pressure regulating valve 5 can be regulated so as to regulate the total air quantity passing through the air inlet channel.
The gas circuit flowmeter 3 is arranged at the outer side of the integrated module 1, the input end of the gas circuit flowmeter 3 is communicated with the output end of the gas inlet channel through a pipeline, the output end of the gas circuit flowmeter 3 is communicated with the input end of the gas outlet channel through a pipeline, and the gas circuit flowmeter 3 is used for measuring the total gas quantity passing through the gas inlet channel; in this embodiment, the gas path flowmeter 3 is a mass flowmeter, which is convenient for collecting flow data and transmitting the flow data to an external controller, and occupies a small space.
The electromagnetic valves 4 are respectively installed on the integrated module 1, valve bodies of the electromagnetic valves 4 respectively extend into the branch channels, and the electromagnetic valves 4 are used for controlling the on-off of the branch channels; in this embodiment, as shown in fig. 3, a branch channel connecting an upper pump connection port and a lower pump connection port of the vacuum pump is provided with one electromagnetic valve 4, and another electromagnetic valve 4 is provided on a general branch channel connecting an outlet of the vacuum pump, a 3-4 stage cavity, a 4-5 stage cavity, an exhaust cavity and a shaft seal, and respectively controls the on-off of gas paths at two positions; the solenoid valve 4 may be set at a specific branch passage as required.
As shown in fig. 7-10, the flow regulating pin 2 is inserted into the integrated module 1, one end of the flow regulating pin 2 is a rotating end, and the other end of the flow regulating pin 2 is a regulating end; the regulating end of the flow regulating pin 2 extends to the bifurcation of the branch channel, the regulating end is provided with a connecting pore channel 201 communicated with the superior branch channel, and the connecting pore channel 201 is provided with regulating holes 202 corresponding to the input ports of the inferior branch channel respectively; rotating the rotating end of the flow regulating pin 2 changes the through area between the regulating hole 202 and the input port of the branch passage, thereby changing the flow rate flowing into the branch passage; in the embodiment, a flow regulating pin 2 is arranged at a bifurcation of a branch channel connecting a 3-4 level cavity and a 4-5 level cavity of a vacuum pump so as to regulate the outlet flow of air outlets connecting the 3-4 level cavity and the 4-5 level cavity of the vacuum pump; the flow regulating pin 2 may be provided at a specific branch of the branch passage as required. In the embodiment, the rotating end of the flow regulating pin 2 extends out of the integrated module 1, and the end surface of the rotating end of the flow regulating pin 2 is provided with a rotating groove 203, so that a worker can rotate the flow regulating pin 2 conveniently; and a sealing ring B10 is arranged on the middle part of the flow regulating pin 2 and the part positioned inside the integrated module 1, so that the sealing property of the joint of the flow regulating pin 2 and the integrated module 1 can be enhanced.
The pressure sensor 7 is arranged on the integrated module 1, the detection end of the pressure sensor 7 is arranged at the air outlet, and the pressure sensor 7 is used for detecting the air outlet pressure of the air outlet; in the embodiment, a pressure sensor 7 is arranged at an air outlet connected with an outlet of the vacuum pump to detect the outlet air pressure of the air outlet so as to obtain flow data of the air outlet; the pressure sensor 7 may be provided at a specific air outlet as required.
The gas circuit flowmeter 3, the electromagnetic valve 4 and the pressure sensor 7 are respectively connected with an external controller through electric conductors, data collected by the gas circuit flowmeter 3 and the pressure sensor 7 can be transmitted to the external controller, and the electromagnetic valve 4 can be controlled to act through the external controller.
The working principle is as follows:
the gas enters the gas inlet channel on the integrated module 1 through the one-way valve 6, then enters the gas outlet channel and the branch channel through the pressure regulating valve 5 and the gas path flowmeter 3, the one-way valve 6 ensures the gas distribution direction, the gas path flowmeter 3 is used for calculating the total gas inlet amount, the total air quantity passing through the air inlet channel is adjusted by adjusting a knob of the pressure adjusting valve 5, the electromagnetic valve 4 can control the on-off of the branch channel, the rotating end of the flow adjusting pin 2 is rotated to change the penetrating area between the adjusting hole 202 and the input port of the branch channel, so that the flow flowing into the branch channel is changed, the air reaches the flow limiting pieces 8 of each air outlet through the branch channels in the integrated module 1, the size of the flow limiting holes 801 of the flow limiting pieces 8 can be set according to requirements, the flow limiting holes 801 with different apertures can be connected with the branch channels, and the air output with different flow proportions among output pipelines is realized.
Claims (7)
1. A gas circuit distribution system for a multi-stage dry vacuum pump, characterized by: the device comprises an integrated module (1), a one-way valve (6), a pressure regulating valve (5), a gas path flowmeter (3), an electromagnetic valve (4), a pressure sensor (7), a flow regulating pin (2) and a flow limiting piece (8);
an air inlet channel and an air outlet channel are respectively arranged inside the integrated module (1), wherein the air outlet channel is divided into a plurality of branch channels in the midway, each branch channel is respectively communicated with an air outlet, each air outlet is provided with a flow limiting piece (8), and the flow limiting pieces (8) are provided with flow limiting holes (801) for limiting the flow of the air outlets;
the check valve (6) is arranged at the input end of the air inlet channel, the check valve (6) is connected with an external air source, air is input into the air inlet channel from the check valve (6), and the check valve (6) is used for ensuring the direction of air distribution;
the pressure regulating valve (5) is installed on the integrated module (1), a valve body of the pressure regulating valve (5) extends into the air inlet channel, and the pressure regulating valve (5) is used for regulating pressure and further regulating the total air volume passing through the air inlet channel;
the input end of the gas path flowmeter (3) is communicated with the output end of the gas inlet channel, the output end of the gas path flowmeter (3) is communicated with the input end of the gas outlet channel, and the gas path flowmeter (3) is used for measuring the total gas amount passing through the gas inlet channel;
the electromagnetic valves (4) are respectively installed on the integrated module (1), valve bodies of the electromagnetic valves (4) respectively extend into the branch channels, and the electromagnetic valves (4) are used for controlling the on-off of the branch channels;
the flow regulating pin (2) is inserted into the integrated module (1), one end of the flow regulating pin (2) is a rotating end, and the other end of the flow regulating pin (2) is a regulating end; the adjusting end of the flow adjusting pin (2) extends to the bifurcation of the branch channel, a connecting pore channel (201) communicated with the upper branch channel is arranged on the adjusting end, and adjusting holes (202) corresponding to the input ports of the lower branch channel are respectively arranged on the connecting pore channel (201); rotating the rotating end of the flow regulating pin (2) changes the through area between the regulating hole (202) and the input port of the branch passage so as to change the flow flowing into the branch passage;
the pressure sensor (7) is installed on the integrated module (1), the detection end of the pressure sensor (7) is arranged at the air outlet, and the pressure sensor (7) is used for detecting the air outlet pressure of the air outlet;
the gas path flowmeter (3), the electromagnetic valve (4) and the pressure sensor (7) are respectively connected with an external controller through electric conductors.
2. The gas path distribution system for a multi-stage dry vacuum pump of claim 1, wherein: the gas circuit flowmeter (3) is installed on the outer side of the integrated module (1), the input end of the gas circuit flowmeter (3) is communicated with the output end of the gas inlet channel through a pipeline, and the output end of the gas circuit flowmeter (3) is communicated with the input end of the gas outlet channel through a pipeline.
3. The gas path distribution system for a multi-stage dry vacuum pump of claim 1, wherein: the flow limiting piece (8) is screwed into the air outlet through threads.
4. The gas path distribution system for a multi-stage dry vacuum pump of claim 1, wherein: and a sealing ring A (9) is arranged on the periphery of the flow limiting piece (8).
5. The gas path distribution system for a multi-stage dry vacuum pump of claim 1, wherein: the rotating end of the flow regulating pin (2) extends out of the integrated module (1).
6. The gas path distribution system for a multi-stage dry vacuum pump of claim 1, wherein: and a rotating groove (203) is arranged on the end surface of the rotating end of the flow adjusting pin (2).
7. The gas path distribution system for a multi-stage dry vacuum pump of claim 1, wherein: and a sealing ring B (10) is arranged in the middle of the flow regulating pin (2) and in the part inside the integrated module (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011430519.5A CN114593036A (en) | 2020-12-07 | 2020-12-07 | Gas path distribution system for multistage dry vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011430519.5A CN114593036A (en) | 2020-12-07 | 2020-12-07 | Gas path distribution system for multistage dry vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114593036A true CN114593036A (en) | 2022-06-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011430519.5A Pending CN114593036A (en) | 2020-12-07 | 2020-12-07 | Gas path distribution system for multistage dry vacuum pump |
Country Status (1)
| Country | Link |
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| CN (1) | CN114593036A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201200981Y (en) * | 2008-06-06 | 2009-03-04 | 中国科学院沈阳科学仪器研制中心有限公司 | Cleaner of multilevel dry-type vacuum pump |
| CN103104439A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Gas circuit distribution system used for multistage dry vacuum pump |
| CN105649953A (en) * | 2014-11-11 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Gas path system used for multi-level dry vacuum pump |
| US20160216713A1 (en) * | 2011-08-20 | 2016-07-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
| CN212024086U (en) * | 2019-12-18 | 2020-11-27 | 北京通嘉宏瑞科技有限公司 | Gas conveying structure of dry vacuum pump |
-
2020
- 2020-12-07 CN CN202011430519.5A patent/CN114593036A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201200981Y (en) * | 2008-06-06 | 2009-03-04 | 中国科学院沈阳科学仪器研制中心有限公司 | Cleaner of multilevel dry-type vacuum pump |
| US20160216713A1 (en) * | 2011-08-20 | 2016-07-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
| CN103104439A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Gas circuit distribution system used for multistage dry vacuum pump |
| CN105649953A (en) * | 2014-11-11 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Gas path system used for multi-level dry vacuum pump |
| CN212024086U (en) * | 2019-12-18 | 2020-11-27 | 北京通嘉宏瑞科技有限公司 | Gas conveying structure of dry vacuum pump |
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Application publication date: 20220607 |