CN217207497U - Three-degree-of-freedom active vibration isolation base based on electromagnetic drive - Google Patents
Three-degree-of-freedom active vibration isolation base based on electromagnetic drive Download PDFInfo
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- CN217207497U CN217207497U CN202220473812.8U CN202220473812U CN217207497U CN 217207497 U CN217207497 U CN 217207497U CN 202220473812 U CN202220473812 U CN 202220473812U CN 217207497 U CN217207497 U CN 217207497U
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- 238000002955 isolation Methods 0.000 title claims abstract description 31
- 239000002184 metal Substances 0.000 claims abstract description 10
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 3
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- 238000010586 diagram Methods 0.000 description 1
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- 238000003754 machining Methods 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
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Abstract
The utility model provides a three degree of freedom initiative vibration isolation bases based on electromagnetic drive, including roof, base and support, the rigid coupling has the baffle around the roof below, the perpendicular rigid coupling of support is around the base top, be connected with the permanent magnet on the baffle, be connected with the electro-magnet on the support, permanent magnet and electro-magnet are on same water flat line, the below is connected with flexible hinge in the middle of the roof, flexible hinge below is connected with air spring, the air spring below is connected with corrugated metal pipe, the corrugated metal pipe below is connected with the air chamber, the roof below is connected with first position sensor, the base top is connected with second position sensor, the base top still is connected with digital controller. The utility model discloses simple structure, the vibration isolation bandwidth, system natural frequency can be realistic and be less than 0.5Hz, all has better vibration isolation effect to high frequency and low frequency interference.
Description
Technical Field
The utility model relates to a vibration isolation device technical field specifically is a three degree of freedom initiative vibration isolation bases based on electromagnetic drive.
Background
At present, the semiconductor industry is rapidly developed, the precision requirement of semiconductor production equipment is higher and higher, the requirement of the equipment on environments such as micro-vibration is more and more sensitive, a little micro-vibration can reduce the yield of the equipment, and even the equipment can not work normally, so that the isolation of the micro-vibration becomes more and more important.
The micro-vibration caused by the vibration of the external environment and the reaction force inside the equipment is one of the key factors restricting the measurement precision of the ultra-precision instrument and the manufacturing precision of the ultra-precision machining equipment, and the high-performance precise isolation micro-vibration technology becomes a core key technology in the fields of precision engineering, ultra-precision manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration control part is the core of the vibration isolation platform, and passive vibration isolation is adopted for medium-high frequency vibration, so that the passive vibration isolation structure is simple, the work is reliable, the power supply is not relied on, and the medium-high frequency vibration interference can be effectively isolated. Aiming at low frequency vibration or even ultra-low frequency vibration, active vibration isolation is adopted mostly, pneumatic active vibration isolation has good adaptivity, low frequency vibration is counteracted through the reverse force output by an actuator, and the pneumatic active vibration isolation has excellent low frequency or ultra-low frequency vibration isolation performance. The environment of the precision instrument is not single high-frequency vibration or low-frequency vibration, but is a complex vibration environment with various frequencies, and the existing vibration isolation platform mainly aims at single high-frequency or low-frequency vibration and has poor vibration isolation capability for the complex vibration environment.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a three degree of freedom initiative vibration isolation bases based on electromagnetic drive to solve the problem that exists among the above-mentioned background art.
The technical scheme of the utility model is realized like this:
the utility model provides a three degree of freedom initiative vibration isolation bases based on electromagnetic drive, includes roof, base and support, the rigid coupling has the baffle around the roof below, the perpendicular rigid coupling of support is around the base top, be connected with the permanent magnet on the baffle, be connected with the electro-magnet on the support, permanent magnet and electro-magnet are on same water flat line, the below is connected with flexible hinge in the middle of the roof, flexible hinge below is connected with air spring, the air spring below is connected with corrugated metal pipe, the corrugated metal pipe below is connected with the air chamber, the roof below is connected with first position sensor, the base top is connected with second position sensor, the base top still is connected with digital controller.
Further, roof, base all are the rectangle structure.
Further, the baffle is located inside the bracket.
Further, the top plate is higher than the top end position of the support.
Furthermore, the first position sensor, the second position sensor, the electromagnet and the air chamber are connected with the digital controller through cables.
The utility model has the advantages that:
the utility model realizes the precise vibration isolation effect in the vertical direction through the matching of the air spring, the metal corrugated pipe and the air chamber in the vertical direction, and has a wider vibration isolation belt; electromagnetic driving is realized through the electromagnetic effect of the electromagnet and the permanent magnet in the horizontal direction, high-precision positioning can be realized, low-frequency vibration isolation is realized, and high-frequency interference is quickly attenuated; the utility model discloses simple structure, the vibration isolation bandwidth, system natural frequency can be realistic and be less than 0.5Hz, all has better vibration isolation effect to high frequency and low frequency interference.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2-is the top view of the present invention.
In the figure, 1-a top plate, 2-a base, 3-a support, 4-a baffle, 5-a permanent magnet, 6-an electromagnet, 7-a flexible hinge, 8-an air spring, 9-a metal corrugated pipe, 10-an air chamber, 11-a first position sensor, 12-a second position sensor, 13-a digital controller and 14-a cable.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1-2, a three-degree-of-freedom active vibration isolation base based on electromagnetic driving comprises a top plate 1, a base 2 and a support 3, wherein a baffle 4 is fixedly connected to the periphery of the lower portion of the top plate 1, the support 2 is fixedly connected to the periphery of the upper portion of the base 2 in a perpendicular mode, a permanent magnet 5 is connected to the baffle 4, an electromagnet 6 is connected to the support 3, the permanent magnet 5 and the electromagnet 6 are on the same horizontal line, a flexible hinge 7 is connected to the lower portion of the middle of the top plate 1, an air spring 8 is connected to the lower portion of the flexible hinge 7, a metal corrugated pipe 9 is connected to the lower portion of the air spring 8, an air chamber 10 is connected to the lower portion of the metal corrugated pipe 9, a first position sensor 11 is connected to the lower portion of the top plate 1, a second position sensor 12 is connected to the upper portion of the base 2, and a digital controller 13 is further connected to the upper portion of the base 2.
The top plate 1 and the base 2 are both rectangular structures.
The baffle 4 is positioned inside the bracket.
The position of the top plate 1 is higher than the top end position of the bracket 3.
The first position sensor 11, the second position sensor 12, the electromagnet 6 and the air chamber 10 are connected with the digital controller 13 through cables.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. The utility model provides a three degree of freedom initiative vibration isolation bases based on electromagnetic drive, includes roof, base and support, its characterized in that, the rigid coupling has the baffle around the roof below, the perpendicular rigid coupling of support is around the base top, be connected with the permanent magnet on the baffle, be connected with the electro-magnet on the support, permanent magnet and electro-magnet are on same water flat line, the below is connected with flexible hinge in the middle of the roof, flexible hinge below is connected with air spring, the air spring below is connected with corrugated metal pipe, the corrugated metal pipe below is connected with the air chamber, the roof below is connected with first position sensor, the base top is connected with second position sensor, the base top still is connected with digital controller.
2. The three-degree-of-freedom active vibration isolation base based on electromagnetic driving as claimed in claim 1, wherein the top plate and the base are both rectangular.
3. The three-degree-of-freedom active vibration isolation base based on electromagnetic driving as claimed in claim 1, wherein the baffle is located inside the bracket.
4. The three-degree-of-freedom active vibration isolation base based on electromagnetic driving as claimed in claim 1, wherein the top plate is higher than the top end of the support.
5. The three-degree-of-freedom active vibration isolation base based on electromagnetic driving as claimed in claim 1, wherein the first position sensor, the second position sensor, the electromagnet, the air chamber and the digital controller are connected through cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220473812.8U CN217207497U (en) | 2022-03-07 | 2022-03-07 | Three-degree-of-freedom active vibration isolation base based on electromagnetic drive |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220473812.8U CN217207497U (en) | 2022-03-07 | 2022-03-07 | Three-degree-of-freedom active vibration isolation base based on electromagnetic drive |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217207497U true CN217207497U (en) | 2022-08-16 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220473812.8U Active CN217207497U (en) | 2022-03-07 | 2022-03-07 | Three-degree-of-freedom active vibration isolation base based on electromagnetic drive |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217207497U (en) |
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2022
- 2022-03-07 CN CN202220473812.8U patent/CN217207497U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 116000 room a434, 4th floor, saibole building, 133 Guangxian Road, high tech Industrial Park, Dalian, Liaoning Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: 116000 room a434, 4th floor, saibole building, 133 Guangxian Road, high tech Industrial Park, Dalian, Liaoning Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |