CN217207498U - Active vibration isolation platform for large-scale precision instrument - Google Patents
Active vibration isolation platform for large-scale precision instrument Download PDFInfo
- Publication number
- CN217207498U CN217207498U CN202220473903.1U CN202220473903U CN217207498U CN 217207498 U CN217207498 U CN 217207498U CN 202220473903 U CN202220473903 U CN 202220473903U CN 217207498 U CN217207498 U CN 217207498U
- Authority
- CN
- China
- Prior art keywords
- vibration isolation
- backup pad
- plate
- air spring
- scale precision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000002955 isolation Methods 0.000 title claims abstract description 35
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 9
- 239000010959 steel Substances 0.000 claims abstract description 9
- 238000006073 displacement reaction Methods 0.000 claims abstract description 8
- 229910001220 stainless steel Inorganic materials 0.000 claims description 8
- 239000010935 stainless steel Substances 0.000 claims description 8
- 230000000694 effects Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Landscapes
- Vibration Prevention Devices (AREA)
- Details Of Measuring And Other Instruments (AREA)
Abstract
The utility model provides an initiative vibration isolation platform for large-scale precision instruments, including roof, air spring and landing leg, four angles in roof bottom are connected with air spring respectively, the air spring bottom is connected with first backup pad, four angles in first backup pad bottom are connected with the landing leg respectively, be connected with the second backup pad between the landing leg, install displacement sensor and speedtransmitter in the first backup pad, be connected with the controller in the second backup pad. The utility model discloses passive vibration isolation design of three-layer roof based on fretwork rubber slab has reduced the natural frequency of system, simultaneously with air spring initiative isolator series design, realizes the low frequency vibration isolation, obtains the vibration isolation area of broad, all has better vibration isolation effect in the 0.5~150Hz within range, and the steel constructs the concrete landing leg simultaneously, has improved the system bearing capacity, can satisfy the vibration isolation requirement of large-scale precision instrument, and the level of preventing micro-vibration can reach VC-E level.
Description
Technical Field
The utility model relates to a vibration isolation device technical field specifically is an initiative vibration isolation platform for large-scale precision instruments.
Background
The base is used as a supporting base and a mounting platform of the precision instrument and is fixedly connected with the precision instrument through the steel fittings, the stability of the base and the environment meeting the technical requirements directly influence the working precision of the instrument, the product quality and the production safety after production are greatly influenced, and particularly in the industries of semiconductors, photoelectricity and the like with extremely high requirements on the precision of the used instrument.
The micro-vibration caused by the vibration of the external environment and the reaction force inside the equipment is one of the key factors restricting the measurement precision of the ultra-precision instrument and the manufacturing precision of the ultra-precision machining equipment, and the high-performance precise isolation micro-vibration technology becomes a core key technology in the fields of precision engineering, ultra-precision manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration control part is the core of the vibration isolation platform, and passive vibration isolation is adopted for medium-high frequency vibration, so that the passive vibration isolation structure is simple, the work is reliable, the power supply is not relied on, and the medium-high frequency vibration interference can be effectively isolated. Aiming at low frequency vibration or even ultra-low frequency vibration, active vibration isolation is adopted mostly, pneumatic active vibration isolation has good adaptivity, low frequency vibration is counteracted through the reverse force output by an actuator, and the pneumatic active vibration isolation has excellent low frequency or ultra-low frequency vibration isolation performance. The environment of the precision instrument is not single high-frequency vibration or low-frequency vibration, but is a complex vibration environment with various frequencies, and the existing isolated platform mainly aims at single high-frequency or low-frequency vibration, has poor vibration isolation capability to the complex vibration environment and a narrow vibration isolation band, and is particularly difficult to meet the load and vibration isolation requirements of large precision instruments.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an initiative vibration isolation platform for large-scale precision instruments to solve the problem that exists among the above-mentioned background art.
The technical scheme of the utility model is realized like this:
the utility model provides an initiative vibration isolation platform for large-scale precision instruments, includes roof, air spring and landing leg, four angles in roof bottom are connected with air spring respectively, the air spring bottom is connected with first backup pad, four angles in first backup pad bottom are connected with the landing leg respectively, be connected with the second backup pad between the landing leg, install displacement sensor and speedtransmitter in the first backup pad, be connected with the controller in the second backup pad.
Further, the roof includes panel, rubber slab and bottom plate, panel and bottom plate are corrosion resistant plate, the rubber slab is the fretwork rubber slab, and the inside rectangle fretwork that is equipped with of rubber slab.
Furthermore, the first supporting plate is a stainless steel plate, and a rectangular hole is formed in the middle of the first supporting plate.
Further, the second support plate is a stainless steel plate and is welded on the inner sides of the four support legs.
Furthermore, the supporting legs are square steel pipes, and concrete is poured into the square steel pipes.
Further, the controller is connected with the air spring, the displacement sensor and the speed sensor through cables passing through the openings.
The beneficial effects of the utility model are that:
the utility model discloses passive vibration isolation design of three-layer roof based on fretwork rubber slab has reduced the natural frequency of system, simultaneously with air spring initiative isolator series design, realizes the low frequency vibration isolation, obtains the vibration isolation area of broad, all has better vibration isolation effect in the 0.5~150Hz within range, and the steel constructs the concrete landing leg simultaneously, has improved the system bearing capacity, can satisfy the vibration isolation requirement of large-scale precision instrument, and the level of preventing micro-vibration can reach VC-E level.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
In the figure, 1-top plate, 101-face plate, 102-rubber plate, 103-bottom plate, 2-air spring, 3-first support plate, 301-hole, 4-support leg, 5-second support plate, 6-displacement sensor, 7-speed sensor, 8-controller and 9-cable.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1, an active vibration isolation platform for large-scale precision instruments comprises a top plate 1, air springs 2 and support legs 4, wherein the air springs 2 are connected to four corners of the bottom of the top plate 1 respectively, a first support plate 3 is connected to the bottom of the air springs 2, the support legs 4 are connected to four corners of the bottom of the first support plate 3 respectively, a second support plate 5 is connected between the support legs 4, a displacement sensor 6 and a speed sensor 7 are installed on the first support plate 3, and a controller 8 is connected to the second support plate 5.
The top plate 1 comprises a panel 101, a rubber plate 102 and a bottom plate 103, wherein the panel 101 and the bottom plate 103 are both stainless steel plates, the rubber plate 102 is a hollow rubber plate, and a rectangular hollow part is arranged inside the rubber plate 102.
The first supporting plate 3 is a stainless steel plate, and a rectangular hole 301 is formed in the middle of the first supporting plate 3.
The second support plate 5 is a stainless steel plate, and the second support plate 5 is welded on the inner sides of the four support legs 4.
The supporting legs 4 are square steel pipes, and concrete is poured into the square steel pipes.
The controller 8 is connected with the air spring 2, the displacement sensor 6 and the speed sensor 7 through the opening 301 through cables 9.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides an initiative vibration isolation platform for large-scale precision instruments, includes roof, air spring and landing leg, its characterized in that, four angles in roof bottom are connected with air spring respectively, the air spring bottom is connected with first backup pad, four angles in first backup pad bottom are connected with the landing leg respectively, be connected with the second backup pad between the landing leg, install displacement sensor and speedtransmitter in the first backup pad, be connected with the controller in the second backup pad.
2. The active vibration isolation platform for large-scale precision instruments according to claim 1, wherein the top plate comprises a panel, a rubber plate and a bottom plate, the panel and the bottom plate are stainless steel plates, the rubber plate is a hollowed rubber plate, and a rectangular hollow is arranged inside the rubber plate.
3. The active vibration isolation platform for large-scale precision instruments according to claim 1, wherein the first supporting plate is a stainless steel plate, and a rectangular opening is formed in the middle of the first supporting plate.
4. The active vibration isolation platform for large scale precision instruments according to claim 1, wherein the second support plate is stainless steel plate and is welded inside four legs.
5. The active vibration isolation platform for large-scale precision instruments according to claim 1, wherein the supporting legs are square steel tubes, and concrete is poured into the square steel tubes.
6. The active vibration isolation platform for large scale precision instruments according to claim 1, wherein the controller is connected with the air spring, the displacement sensor and the speed sensor through the opening by cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220473903.1U CN217207498U (en) | 2022-03-07 | 2022-03-07 | Active vibration isolation platform for large-scale precision instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220473903.1U CN217207498U (en) | 2022-03-07 | 2022-03-07 | Active vibration isolation platform for large-scale precision instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217207498U true CN217207498U (en) | 2022-08-16 |
Family
ID=82752804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220473903.1U Active CN217207498U (en) | 2022-03-07 | 2022-03-07 | Active vibration isolation platform for large-scale precision instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217207498U (en) |
-
2022
- 2022-03-07 CN CN202220473903.1U patent/CN217207498U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN217207498U (en) | Active vibration isolation platform for large-scale precision instrument | |
| CN219139704U (en) | Micro-vibration prevention platform based on magnetic levitation and metal rubber | |
| CN217003695U (en) | Single-degree-of-freedom active and passive combined vibration isolation base | |
| CN217207501U (en) | Active and passive parallel micro-vibration prevention device | |
| CN217207497U (en) | Three-degree-of-freedom active vibration isolation base based on electromagnetic drive | |
| CN217003693U (en) | Active and passive vibration isolation base based on rubber damping | |
| CN217633635U (en) | Rigidity-adjustable ultralow-frequency passive micro-vibration-prevention base | |
| CN217207504U (en) | Ultralow frequency active micro-vibration prevention base | |
| CN201106231Y (en) | Shock insulation apparatus for steel tube concrete column | |
| CN211369126U (en) | Energy consumption device for wall | |
| CN217003698U (en) | Active and passive vibration isolation base based on Lorentz force driving | |
| CN219139708U (en) | Active and passive micro-vibration prevention platform for precise instrument | |
| CN219139698U (en) | Double-freedom-degree active micro-vibration prevention base based on magnetic levitation | |
| CN219139701U (en) | Rigidity-variable double-freedom-degree active micro-vibration prevention base | |
| CN217207502U (en) | Low-frequency micro-vibration prevention base for precision instrument | |
| CN217842518U (en) | Vibration isolation device based on giant magnetostrictive drive | |
| CN218347839U (en) | Parallel fluid damping vibration isolation device and vibration control system | |
| CN218094024U (en) | Active and passive micro-vibration prevention base based on air floatation variable rigidity | |
| CN218152146U (en) | Active and passive double-freedom-degree micro-vibration prevention base | |
| CN220740894U (en) | Interval adjustable tool suitable for assembly of hydraulic valve assembly joint | |
| CN217003696U (en) | Three-degree-of-freedom active and passive vibration isolation base for precision instrument | |
| CN221075066U (en) | Rubber vibration isolation support | |
| CN219139697U (en) | Active and passive parallel vibration isolation base based on magnetic levitation-air bag | |
| CN217633642U (en) | Active and passive parallel vibration isolation platform | |
| CN218177816U (en) | Active and passive parallel micro-vibration prevention platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 116000 room a434, 4th floor, saibole building, 133 Guangxian Road, high tech Industrial Park, Dalian, Liaoning Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: 116000 room a434, 4th floor, saibole building, 133 Guangxian Road, high tech Industrial Park, Dalian, Liaoning Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |