CN219139704U - Micro-vibration prevention platform based on magnetic levitation and metal rubber - Google Patents
Micro-vibration prevention platform based on magnetic levitation and metal rubber Download PDFInfo
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- CN219139704U CN219139704U CN202223503127.4U CN202223503127U CN219139704U CN 219139704 U CN219139704 U CN 219139704U CN 202223503127 U CN202223503127 U CN 202223503127U CN 219139704 U CN219139704 U CN 219139704U
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- metal rubber
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- 229920001967 Metal rubber Polymers 0.000 title claims abstract description 35
- 238000005339 levitation Methods 0.000 title claims abstract description 16
- 230000002265 prevention Effects 0.000 title claims abstract description 16
- 238000002955 isolation Methods 0.000 claims abstract description 37
- 229910052751 metal Inorganic materials 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims abstract description 12
- 229910000838 Al alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model provides a micro-vibration prevention platform based on magnetic levitation and metal rubber, which comprises a top plate, vibration isolation devices and a base, wherein the vibration isolation devices are connected to four corners of the bottom of the top plate, the bottom of the vibration isolation devices is respectively connected with four corners of the top of the base, the vibration isolation devices comprise a supporting plate and a bottom plate, the metal rubber is connected between the supporting plate and the bottom plate, a metal spring is sleeved outside the metal rubber, a push rod is connected in the middle of the bottom of the supporting plate, a support rod is connected in the middle of the top of the bottom plate, a permanent magnet is connected at the bottom of the push rod, an electromagnet is connected at the top of the support rod, a position sensor and a speed sensor are further arranged at the bottom of the top plate, and a controller is arranged at the top of the base. The utility model has large bearing capacity and wide vibration isolation bandwidth, and has good vibration isolation effect on vibration interference of 0.5-150 Hz.
Description
Technical Field
The utility model relates to the technical field of vibration isolation devices, in particular to a micro-vibration prevention platform based on magnetic levitation and metal rubber.
Background
At present, the semiconductor industry rapidly develops, the precision requirement of semiconductor production equipment is higher and higher, the equipment is sensitive to the requirements of environments such as micro-vibration and the like, the yield of the equipment is reduced by a small amount of micro-vibration, and even the equipment cannot work normally, so that the isolation of the micro-vibration is more and more important.
The micro-vibration caused by external environment vibration and internal reaction force of equipment is one of key factors limiting the measurement precision of ultra-precise instruments and the manufacturing precision of ultra-precise machining equipment, and the high-performance precise micro-vibration isolation technology becomes a core key technology in the fields of precise engineering, ultra-precise manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration control part is a core of the vibration isolation platform, and aims at medium-high frequency vibration, passive vibration isolation is mostly adopted, and the vibration isolation device has a simple structure, is reliable in work, does not depend on a power supply, and can effectively isolate medium-high frequency vibration interference. For low-frequency or even ultra-low frequency vibration, active vibration isolation is mostly adopted. However, the environment where the precise instrument is located is complex, not only single low-frequency vibration or high-frequency vibration, but also the low-frequency vibration and the high-frequency vibration exist at the same time, and the vibration isolation requirement of the complex environment vibration is difficult to be met by the traditional vibration isolation device. Although the active and passive hybrid vibration isolation devices appear, the problems of narrow vibration isolation bandwidth, poor positioning accuracy of the system, small bearing capacity, weak vibration isolation capability for complex vibration environments and the like exist.
Disclosure of Invention
The utility model aims to provide a micro-vibration prevention platform based on magnetic levitation and metal rubber, so as to solve the problems in the background technology.
The technical scheme of the utility model is realized as follows:
the utility model provides a micro-vibration prevention platform based on magnetic levitation and metal rubber, includes roof, vibration isolation device and base, four minutes in roof bottom are connected with vibration isolation device, vibration isolation device bottom is connected with four angles in base top respectively, vibration isolation device includes backup pad and bottom plate, be connected with metal rubber between backup pad and the bottom plate, metal rubber outside cover is equipped with metal spring, be connected with the push rod in the middle of the backup pad bottom, be connected with the bracing piece in the middle of the bottom plate top, the push rod bottom is connected with the permanent magnet, the bracing piece top is connected with the electro-magnet, position sensor and speed sensor are still installed to the roof bottom, the controller is installed at the base top.
Further, the top plate and the base are all made of stainless steel plates and have rectangular structures with the same size.
Further, the supporting plate and the bottom plate are all made of aluminum alloy plates into round structures with the same diameter, and the supporting plate and the bottom plate are parallel on a vertical line.
Further, the metal rubber is made into a cylinder shape by an aluminum alloy material.
Further, the push rod and the support rod are inserted into the metal rubber.
Further, the permanent magnet and the electromagnet are of circular structures with the same size, and a certain gap is reserved between the permanent magnet and the electromagnet, so that the push rod can move up and down conveniently.
Further, the top and the bottom of the metal spring are respectively connected with the bottom of the supporting plate and the top of the bottom plate.
Further, the controller is connected with the position sensor, the speed sensor and the electromagnet through cables.
The beneficial effects of the utility model are as follows:
according to the utility model, the load bearing and high-frequency passive vibration isolation are realized through the metal rubber and the metal spring which are connected in parallel, the metal rubber has metal characteristics and elasticity, and the metal rubber and the metal spring are connected in parallel, so that the system bearing capacity is improved, and the micro-vibration prevention requirement of a 2000kg large-scale precise instrument can be met; in addition, the cylindrical metal rubber made of aluminum alloy, the supporting plate and the bottom plate made of aluminum alloy are adopted, so that the influence of magnetic field leakage in the aluminum alloy on an upper precise instrument is avoided; and realize low frequency vibration isolation through the magnetic levitation mode, the location is accurate, and stability is high. The utility model has large bearing capacity and wide vibration isolation bandwidth, and has good vibration isolation effect on vibration interference of 0.5-150 Hz.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
Fig. 2 is a cross-sectional view of the driver of the present utility model.
The vibration isolator comprises a top plate, a 2-vibration isolation device, a 201-supporting plate, a 202-bottom plate, a 203-metal spring, a 204-metal rubber, a 205-push rod, a 206-supporting rod, a 207-permanent magnet, a 208-electromagnet, a 3-base, a 4-position sensor, a 5-speed sensor and a 6-controller.
Detailed Description
The technical solutions of the present utility model will be clearly and completely described in connection with the embodiments, and it is obvious that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1-2, a micro-vibration prevention platform based on magnetic levitation and metal rubber comprises a top plate 1, vibration isolation devices 2 and a base 3, wherein the vibration isolation devices 2 are connected to four corners at the bottom of the top plate 1, the bottom of the vibration isolation devices 2 are respectively connected to four corners at the top of the base 3, each vibration isolation device 2 comprises a supporting plate 201 and a bottom plate 202, a metal rubber 204 is connected between each supporting plate 201 and the corresponding bottom plate 202, a metal spring 203 is sleeved outside each metal rubber 204, a push rod 205 is connected to the middle of the bottom of each supporting plate 201, a supporting rod 206 is connected to the middle of the top of each bottom plate 202, a permanent magnet 207 is connected to the bottom of each push rod 205, an electromagnet 208 is connected to the top of each supporting rod 206, a position sensor 4 and a speed sensor 5 are further installed at the bottom of the top plate 1, and a controller 6 is installed at the top of the base 3.
The top plate 1 and the base 3 are made of stainless steel plates and are rectangular structures with the same size.
The supporting plate 201 and the bottom plate 202 are made of aluminum alloy plates with the same diameter and are in a circular structure, and the supporting plate 201 and the bottom plate 202 are parallel on a vertical line.
The metal rubber 204 is made of aluminum alloy material into a cylindrical shape.
The push rod 205 and the support rod 206 are inserted into the metal rubber 204.
The permanent magnet 207 and the electromagnet 208 are of circular structures with the same size, and a certain gap is reserved between the permanent magnet 207 and the electromagnet 208, so that the push rod 205 can move up and down conveniently.
The top and the bottom of the metal spring 203 are respectively connected with the bottom of the supporting plate 201 and the top of the bottom plate 202.
The controller 6 is connected with the position sensor 4, the speed sensor 5 and the electromagnet 208 through cables.
When the device works, a precision instrument is placed on the top plate 1, vibration signals are collected through the position sensor 4 and the speed sensor 5, and then the signals are transmitted to the controller 6; when the high-frequency vibration source is used, high-frequency vibration isolation is realized through the metal spring 203 and the metal rubber 204 which are connected in parallel; in the low-frequency vibration source, the controller 6 controls the magnetic field intensity of the electromagnet 208 so as to change the repulsive force between the electromagnet 208 and the permanent magnet 207, so that the push rod 205 vertically moves to realize low-frequency vibration isolation.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.
Claims (8)
1. The utility model provides a micro-vibration prevention platform based on magnetic levitation and metal rubber, includes roof, vibration isolation device and base, its characterized in that, four angles in roof bottom are connected with vibration isolation device, vibration isolation device bottom is connected with four angles in base top respectively, vibration isolation device includes backup pad and bottom plate, be connected with metal rubber between backup pad and the bottom plate, metal rubber outside cover is equipped with metal spring, be connected with the push rod in the middle of the backup pad bottom, be connected with the bracing piece in the middle of the bottom plate top, the push rod bottom is connected with the permanent magnet, the bracing piece top is connected with the electro-magnet, position sensor and speedtransmitter are still installed to the roof bottom, the controller is installed at the base top.
2. The micro-vibration prevention platform based on magnetic levitation and metal rubber according to claim 1, wherein the top plate and the base are made of stainless steel plates and have rectangular structures with the same size.
3. The micro-vibration prevention platform based on magnetic levitation and metal rubber according to claim 1, wherein the supporting plate and the bottom plate are all made of aluminum alloy plates and have circular structures with the same diameter, and the supporting plate and the bottom plate are parallel on a vertical line.
4. The micro-vibration prevention platform based on magnetic levitation and metal rubber according to claim 1, wherein the metal rubber is made of aluminum alloy material into a cylinder shape.
5. The micro-vibration prevention platform based on the magnetic levitation and the metal rubber according to claim 1, wherein the push rod and the support rod are inserted into the metal rubber.
6. The micro-vibration prevention platform based on magnetic levitation and metal rubber according to claim 1, wherein the permanent magnet and the electromagnet are of circular structures with the same size, and a certain gap exists between the permanent magnet and the electromagnet.
7. The micro-vibration prevention platform based on magnetic levitation and metal rubber according to claim 1, wherein the top and the bottom of the metal spring are respectively connected with the bottom of the supporting plate and the top of the bottom plate.
8. The micro-vibration prevention platform based on magnetic levitation and metal rubber according to claim 1, wherein the controller is connected with the position sensor, the speed sensor and the electromagnet through cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223503127.4U CN219139704U (en) | 2022-12-28 | 2022-12-28 | Micro-vibration prevention platform based on magnetic levitation and metal rubber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223503127.4U CN219139704U (en) | 2022-12-28 | 2022-12-28 | Micro-vibration prevention platform based on magnetic levitation and metal rubber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219139704U true CN219139704U (en) | 2023-06-06 |
Family
ID=86592774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223503127.4U Active CN219139704U (en) | 2022-12-28 | 2022-12-28 | Micro-vibration prevention platform based on magnetic levitation and metal rubber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219139704U (en) |
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2022
- 2022-12-28 CN CN202223503127.4U patent/CN219139704U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |