CN219035452U - Active and passive micro-vibration prevention platform based on magnetic suspension double degrees of freedom - Google Patents
Active and passive micro-vibration prevention platform based on magnetic suspension double degrees of freedom Download PDFInfo
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- CN219035452U CN219035452U CN202223480952.7U CN202223480952U CN219035452U CN 219035452 U CN219035452 U CN 219035452U CN 202223480952 U CN202223480952 U CN 202223480952U CN 219035452 U CN219035452 U CN 219035452U
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- 239000000725 suspension Substances 0.000 title claims abstract description 17
- 230000002265 prevention Effects 0.000 title claims abstract description 15
- 238000002955 isolation Methods 0.000 claims abstract description 39
- 229910052751 metal Inorganic materials 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 11
- 229910000838 Al alloy Inorganic materials 0.000 claims description 10
- 239000010935 stainless steel Substances 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 2
- 238000005339 levitation Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model provides a magnetic suspension double-degree-of-freedom active and passive micro-vibration prevention platform, which comprises a top plate and a vibration isolation device, wherein the vibration isolation device comprises a shell, the top of the shell is vertically connected with a supporting rod, the top of the supporting rod is vertically connected with a supporting plate, a metal spring is sleeved between the bottom of the supporting plate and the top of the shell and outside the supporting rod, an electromagnet A is arranged at the bottom of the inner side of the shell, a coil A is arranged in the middle of the electromagnet A, an armature is vertically connected at the bottom of the supporting rod, an electromagnet B is arranged at the upper part of the inner side around the shell, a coil B is arranged in the middle of the electromagnet B, a permanent magnet is arranged at the position corresponding to the electromagnet B in parallel around the supporting rod, and a spherical hinge is arranged at the lower part of the supporting rod. According to the utility model, the mode of parallel connection of the magnetic levitation and the passive element is adopted in the vertical and horizontal directions, so that the vibration isolation bandwidth is enlarged, the positioning is accurate, the stability is high, and the vibration isolation device has a good vibration isolation effect on the vibration interference of 0.5-200 Hz.
Description
Technical Field
The utility model relates to the technical field of vibration isolation devices, in particular to a magnetic suspension-based double-degree-of-freedom active and passive micro-vibration prevention platform.
Background
At present, the semiconductor industry rapidly develops, the precision requirement of semiconductor production equipment is higher and higher, the equipment is sensitive to the requirements of environments such as micro-vibration and the like, the yield of the equipment is reduced by a small amount of micro-vibration, and even the equipment cannot work normally, so that the isolation of the micro-vibration is more and more important.
The micro-vibration caused by external environment vibration and internal reaction force of equipment is one of key factors limiting the measurement precision of ultra-precise instruments and the manufacturing precision of ultra-precise machining equipment, and the high-performance precise micro-vibration isolation technology becomes a core key technology in the fields of precise engineering, ultra-precise manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration control part is a core of the vibration isolation platform, and aims at medium-high frequency vibration, passive vibration isolation is mostly adopted, and the vibration isolation device has a simple structure, is reliable in work, does not depend on a power supply, and can effectively isolate medium-high frequency vibration interference. For low-frequency or even ultra-low frequency vibration, active vibration isolation is mostly adopted. However, the environment where the precise instrument is located is complex, not only single low-frequency vibration or high-frequency vibration, but also the low-frequency vibration and the high-frequency vibration exist at the same time, and the vibration isolation requirement of the complex environment vibration is difficult to be met by the traditional vibration isolation device. Although the active and passive hybrid vibration isolation devices appear, the problems of large occupied space, narrow vibration isolation bandwidth, poor system positioning accuracy, weak vibration isolation capability for complex vibration environments and the like exist.
Disclosure of Invention
The utility model aims to provide a magnetic suspension-based double-degree-of-freedom active and passive micro-vibration prevention platform so as to solve the problems in the background technology.
The technical scheme of the utility model is realized as follows:
the utility model provides a passive micro-vibration prevention platform based on two degrees of freedom of magnetic suspension, includes roof and vibration isolation device, vibration isolation device is located four angles in roof bottom respectively, vibration isolation device includes the shell, the shell top is connected with the bracing piece perpendicularly, the bracing piece passes shell top and shell sliding connection, the bracing piece top is connected with the backup pad perpendicularly, between backup pad bottom and the shell top, the outside cover of bracing piece is equipped with metal spring, electro-magnet A is installed to the inboard bottom of shell, install coil A in the middle of electro-magnet A, the bracing piece bottom is connected with armature perpendicularly, electro-magnet B is installed on the inboard upper portion around the shell, install coil B in the middle of the electro-magnet B, the bracing piece is installed the permanent magnet with electro-magnet B parallel corresponding position all around, spherical hinge is installed to the bracing piece lower part, position sensor, speed sensor and controller are still installed to the roof bottom.
Further, the top plate is made of stainless steel plate in a rectangular structure.
Further, the shell is made of stainless steel plates and is in a cylindrical structure, and an aluminum alloy layer is arranged on the inner side of the shell.
Further, an aluminum alloy plate is arranged on the top of the armature.
Further, the sliding connection part of the support rod and the shell is provided with a rubber block.
Further, a supporting block is arranged between the metal spring and the shell, and the supporting block spans the rubber block and is welded and fixed with the shell.
Further, the spherical hinge is positioned below the permanent magnet.
Further, the controller is connected with the position sensor, the speed sensor, the coil A and the coil B through cables.
The beneficial effects of the utility model are as follows:
the utility model is connected with the metal spring in parallel through the magnetic suspension device in the vertical direction, thereby enlarging the vertical vibration isolation bandwidth and reducing the occupied space of the vibration isolation device; the horizontal vibration isolation bandwidth is enlarged by connecting the magnetic suspension device and the rubber block in parallel in the horizontal direction; in addition, an aluminum alloy layer is arranged on the inner side of the shell, so that the influence of magnetic field leakage on an upper precise instrument is avoided, and meanwhile, an aluminum alloy plate is arranged on the top of the armature, so that the influence of a bottom magnetic field on an upper magnetic field is avoided. According to the utility model, the mode of parallel connection of the magnetic levitation and the passive element is adopted in the vertical and horizontal directions, so that the vibration isolation bandwidth is enlarged, the positioning is accurate, the stability is high, and the vibration isolation device has a good vibration isolation effect on the vibration interference of 0.5-200 Hz.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
Fig. 2 is a schematic structural view of the vibration isolation apparatus of the present utility model.
In the figure, the device comprises a top plate, a 2-vibration isolation device, a 201-shell, a 202-supporting rod, a 203-supporting plate, a 204-metal spring, a 205-electromagnet A, a 206-coil A, a 207-armature, a 208-electromagnet B, a 209-coil B, a 210-permanent magnet, a 211-spherical hinge, a 212-rubber block, a 213-supporting block, a 214-aluminum alloy plate, a 215-aluminum alloy layer, a 3-position sensor, a 4-speed sensor and a 5-controller.
Detailed Description
The technical solutions of the present utility model will be clearly and completely described in connection with the embodiments, and it is obvious that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1-2, the magnetic suspension double-degree-of-freedom active-passive micro-vibration prevention platform comprises a top plate 1 and vibration isolation devices 2, wherein the vibration isolation devices 2 are respectively positioned at four corners of the bottom of the top plate 1, each vibration isolation device 2 comprises a shell 201, each support rod 202 is vertically connected with a support rod 202, each support rod 202 penetrates through the top of each shell 201 and is in sliding connection with the corresponding shell 201, each support rod 202 top is vertically connected with a support plate 203, a metal spring 204 is sleeved between each support plate 203 bottom and each shell 201 top and outside each support rod 202, an electromagnet A205 is mounted at the bottom of the inner side of each shell 201, a coil A206 is mounted in the middle of each electromagnet A205, an armature 207 is vertically connected to the bottom of each support rod 202, an electromagnet B208 is mounted at the upper portion of the inner side of the periphery of each shell 201, a coil B209 is mounted at the position corresponding to the periphery of each support rod 202 in parallel to each electromagnet B208, a spherical hinge 211 is mounted at the lower portion of each support rod 202, and a position sensor 3, a speed sensor 4 and a controller 5 are further mounted at the bottom of the top plate 1.
The top plate 1 is made of stainless steel plate in a rectangular structure.
The outer shell 201 is made of stainless steel plates and is in a cylindrical structure, and an aluminum alloy layer 215 is arranged on the inner side of the outer shell 201.
An aluminum alloy plate 214 is mounted on top of the armature 207.
The sliding connection part of the support rod 202 and the shell 201 is provided with a rubber block 212.
A supporting block 213 is also installed between the metal spring 204 and the housing 201, and the supporting block 213 spans over the rubber 212 block and is welded and fixed with the housing 201.
The ball-shaped hinge 211 is located below the permanent magnet 210.
The controller 5 is connected with the position sensor 3, the speed sensor 4, the coil a206 and the coil B209 through cables.
When in operation, the precision instrument is placed on the top plate 1, and the bearing is realized by the metal spring 204 of the vibration isolation device 2; vibration signals are collected through the position sensor 3 and the speed sensor 4, and then the signals are transmitted to the controller 5; when the vertical high-frequency vibration source is used, high-frequency vibration isolation is realized through the metal spring 204; when the vertical low-frequency vibration source is used, the current of the coil A206 is controlled by the controller 5 so as to control the magnetic field intensity of the electromagnet A205 and push the armature 207 to move up and down to realize low-frequency vibration isolation; when the vibration source is horizontally oriented to the high-frequency vibration source, the rubber block 212 is used for realizing high-frequency vibration isolation; when the horizontal vibration source is turned to the low-frequency vibration source, the current of the coil B209 is controlled by the controller 5 so as to control the magnetic field intensity of the electromagnet B208, thereby pushing the permanent magnet 210 to horizontally move and realizing low-frequency vibration isolation.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.
Claims (8)
1. The utility model provides a passive micro-vibration prevention platform based on two degrees of freedom of magnetic suspension, includes roof and vibration isolation device, its characterized in that, vibration isolation device is located four angles in roof bottom respectively, vibration isolation device includes the shell, the shell top is connected with the bracing piece perpendicularly, the bracing piece passes shell top and shell sliding connection, the bracing piece top is connected with the backup pad perpendicularly, between backup pad bottom and the shell top, the outside cover of bracing piece is equipped with metal spring, electro-magnet A is installed to the inboard bottom of shell, coil A is installed to electro-magnet A centre, the bracing piece bottom is connected with armature perpendicularly, electro-magnet B is installed on the inboard upper portion around the shell, coil B is installed to electro-magnet B centre, the permanent magnet is installed with electro-magnet B parallel correspondence position all around to the bracing piece, spherical hinge is installed to the bracing piece lower part, position sensor, speed sensor and controller are still installed to the roof bottom.
2. The magnetic suspension double-degree-of-freedom active-passive micro-vibration prevention platform according to claim 1, wherein the top plate is made of stainless steel plates in a rectangular structure.
3. The active-passive micro-vibration prevention platform based on magnetic suspension double degrees of freedom according to claim 1, wherein the outer shell is made of stainless steel plates and is in a cylindrical structure, and an aluminum alloy layer is arranged on the inner side of the outer shell.
4. The magnetic suspension double-degree-of-freedom based active and passive micro-vibration prevention platform according to claim 1, wherein an aluminum alloy plate is installed on the top of the armature.
5. The active-passive micro-vibration prevention platform based on magnetic suspension double degrees of freedom according to claim 1, wherein rubber blocks are arranged at the sliding connection parts of the support rods and the shell.
6. The active-passive micro-vibration prevention platform based on magnetic suspension double degrees of freedom according to claim 1, wherein a supporting block is further installed between the metal spring and the shell, and the supporting block spans over the rubber block and is welded and fixed with the shell.
7. The magnetic suspension double-degree-of-freedom based active-passive micro-vibration prevention platform according to claim 1, wherein the spherical hinge is located below the permanent magnet.
8. The magnetic suspension double-degree-of-freedom based active-passive micro-vibration prevention platform according to claim 1, wherein the controller is connected with the position sensor, the speed sensor, the coil A and the coil B through cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223480952.7U CN219035452U (en) | 2022-12-27 | 2022-12-27 | Active and passive micro-vibration prevention platform based on magnetic suspension double degrees of freedom |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223480952.7U CN219035452U (en) | 2022-12-27 | 2022-12-27 | Active and passive micro-vibration prevention platform based on magnetic suspension double degrees of freedom |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219035452U true CN219035452U (en) | 2023-05-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223480952.7U Active CN219035452U (en) | 2022-12-27 | 2022-12-27 | Active and passive micro-vibration prevention platform based on magnetic suspension double degrees of freedom |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219035452U (en) |
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2022
- 2022-12-27 CN CN202223480952.7U patent/CN219035452U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |