CN215000266U - Precision vibration isolation platform with adjustable posture - Google Patents
Precision vibration isolation platform with adjustable posture Download PDFInfo
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- CN215000266U CN215000266U CN202121515036.5U CN202121515036U CN215000266U CN 215000266 U CN215000266 U CN 215000266U CN 202121515036 U CN202121515036 U CN 202121515036U CN 215000266 U CN215000266 U CN 215000266U
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Abstract
The utility model discloses an accurate vibration isolation platform of gesture adjustable, include: the vibration isolation device comprises an upper plate, a lower plate, a passive vibration isolation assembly, an active vibration isolation assembly, a vibration sensor assembly and a controller, wherein the passive vibration isolation assembly is arranged between the lower plate and the upper plate, the active vibration isolation assembly is arranged between the lower plate and the upper plate, the vibration sensor assembly is arranged on the lower plate and the upper plate, the signal output end of the passive vibration isolation assembly and the signal output end of the vibration sensor assembly are electrically connected with the signal input end of the controller, and the signal output end of the controller is electrically connected with the signal input end of the active vibration isolation assembly. The utility model discloses an installation passive vibration isolation subassembly and initiative vibration isolation subassembly between upper plate and hypoplastron, through the isolated low frequency small amplitude vibration of initiative vibration isolation subassembly, through the isolated high frequency of passive vibration isolation subassembly vibration by a wide margin to the realization reduces the purpose of the vibration frequency and the range between upper plate and the hypoplastron.
Description
Technical Field
The utility model relates to a vibration isolation field, concretely relates to accurate vibration isolation platform of gesture adjustable.
Background
In the field of ultra-precision machining, environmental vibration is an important factor influencing machining precision, and the environmental vibration can be transmitted to ultra-precision machining equipment and then causes the vibration of the equipment, so that the machining precision is influenced. Therefore, the ultra-precision machine tool and the precision measuring instrument need to adopt a vibration isolation device to reduce and isolate environmental vibration.
Vibration isolation devices can be divided into passive vibration isolation and active vibration isolation, wherein the passive vibration isolation system must be at the system resonance frequency
The vibration can be effectively inhibited only by more than times of the working frequency band, so that the passive vibration isolation cannot meet the vibration isolation requirement on low-frequency micro vibration; active vibration isolation is to actively perform reverse vibration to cancel low-frequency minute vibration, but cannot effectively isolate vibration with large amplitude.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that the defect that can't compensate all exists in initiative vibration isolation and passive vibration isolation, aim at provides and an accurate vibration isolation platform of gesture adjustable, has solved the equipment vibration and has influenced the problem of machining precision.
The utility model discloses a following technical scheme realizes:
an attitude adjustable precision vibration isolation platform comprising:
an upper plate;
a lower plate disposed in parallel with the upper plate;
the passive vibration isolation assembly is arranged between the lower plate and the upper plate, and two ends of the passive vibration isolation assembly are respectively fixedly connected with the lower plate and the upper plate;
the active vibration isolation assembly is arranged between the lower plate and the upper plate, and two ends of the active vibration isolation assembly are respectively fixedly connected with the lower plate and the upper plate;
a vibration sensor assembly disposed on the lower plate and the upper plate;
and the signal output end of the passive vibration isolation assembly and the signal output end of the vibration sensor assembly are electrically connected with the signal input end of the controller, and the signal output end of the controller is electrically connected with the signal input end of the active vibration isolation assembly.
Specifically, the lower plate and the upper plate are both horizontally arranged, and one side of the upper plate, which is opposite to the lower plate, is set as the upper side of the vibration isolation platform;
the passive vibration isolation assembly comprises a plurality of telescopic rods and a plurality of displacement encoders, the lower ends of the telescopic rods are vertically and fixedly connected with the outer edge of the lower plate, the upper ends of the telescopic rods are vertically and fixedly connected with the outer edge of the upper plate, the displacement encoders are fixedly arranged on the telescopic rods, and the signal output ends of the displacement encoders are electrically connected with the signal input end of the controller.
Preferably, the telescopic rod comprises a cylinder main body, a piston rod and a stop block, the cylinder is vertically arranged, a cavity is arranged in the cylinder, the stop block is horizontally arranged in the cavity and divides the cavity into an upper cavity and a lower cavity which are independent, a through hole is formed in the upper side surface of the upper cavity, the piston rod is vertically arranged, and the lower end of the piston rod penetrates through the through hole to be vertically and fixedly connected with the upper side surface of the stop block;
the lower end of the cylinder main body is fixedly connected with the lower plate, and the upper end of the piston rod is fixedly connected with the upper plate;
the telescopic rod further comprises an air pressure adjusting assembly, and the air supply end of the air pressure adjusting assembly is respectively communicated with the upper cavity and the lower cavity;
the air pressure adjusting assembly comprises an air pressure pump and an air pipe, the air outlet end of the air pressure pump is respectively communicated with the upper cavity and the lower cavity through the air pipe, and an electromagnetic control valve and a pressure reducing valve are arranged on the air pipe;
the upper side surface of the upper cavity and the lower side surface of the lower cavity are fixedly provided with buffer rubber pads.
Specifically, the active vibration isolation assembly comprises a vertical vibration isolation system and a horizontal vibration isolation system, and a signal output end of the controller is electrically connected with a control signal input end of the vertical vibration isolation system and a control signal input end of the horizontal vibration isolation system respectively;
the vertical vibration isolation system comprises a plurality of vertical moving voice coil motors, each vertical moving voice coil motor comprises a first stator, a first rotor and a first shell, the first stator and the first rotor are arranged in the first shell, the first stator is fixedly connected with the upper plate through a first support, and the first rotor is fixedly connected with the lower plate;
the horizontal vibration isolation system comprises a plurality of horizontal movement voice coil motors, each horizontal movement voice coil motor comprises a second stator, a second rotor and a second shell, the second stators and the second rotors are arranged in the second shells, the second stators are fixedly connected with the upper plate through second supports, and the second rotors are fixedly connected with the lower plate.
Specifically, the first stator comprises a first electromagnetic coil plate, the first electromagnetic coil plate is vertically arranged, and the upper end of the first electromagnetic coil plate penetrates through the first shell and is vertically and fixedly connected with the lower side surface of the upper plate through the first support;
the first rotor comprises a first permanent magnet and a first base, the outer side face of the first permanent magnet is fixedly connected with the first base, the inner side face of the first permanent magnet is parallel to the first electromagnetic coil plate, and the lower end of the first base penetrates through the first shell and is fixedly connected with the lower plate.
Specifically, the second stator comprises a second electromagnetic coil plate, the second electromagnetic coil plate is vertically arranged, and the upper end of the second electromagnetic coil plate penetrates through the second shell and is vertically and fixedly connected with the lower side surface of the upper plate through the second support;
the second rotor comprises a second permanent magnet and a second base, the outer side face of the second permanent magnet is fixedly connected with the second base, the inner side face of the second permanent magnet is parallel to the second electromagnetic coil plate, and the lower end of the second base penetrates through the second shell and is fixedly connected with the lower plate.
Preferably, the first permanent magnet comprises two first side permanent magnets and a first middle permanent magnet, the first middle permanent magnet is fixedly arranged between the two first side permanent magnets, and both the internal magnetic induction line of the first side permanent magnet and the internal magnetic induction line of the first middle permanent magnet are perpendicular to the lower plate;
the second permanent magnet includes permanent magnet in the middle of two second side permanent magnets and the second, the permanent magnet is fixed to be set up two in the middle of the second between the second side permanent magnet, the inside magnetism of second side permanent magnet feel the line with the inside magnetism of permanent magnet in the middle of the second feel the line all with hypoplastron parallel arrangement.
Preferably, the number of the vertical movement voice coil motors is two, the number of the horizontal movement voice coil motors is two, and the number of the telescopic rods is four;
the upper plate and the lower plate are square plates, the four telescopic rods are fixedly arranged at four corners of the upper plate and the lower plate, and the two voice coil motors capable of vertically moving and the two voice coil motors capable of horizontally moving are annularly distributed along the central axis of the lower plate.
Specifically, the vibration sensor subassembly includes three-way vibration sensor and lower three-way vibration sensor, go up the three-way vibration sensor with the downside fixed connection of upper plate, down the three-way vibration sensor with the side fixed connection that goes up of hypoplastron, go up the three-way vibration sensor the signal output part with down the signal output part of three-way vibration sensor all with the signal input part electricity of controller is connected.
Compared with the prior art, the utility model, following advantage and beneficial effect have:
the utility model discloses an installation passive vibration isolation subassembly and initiative vibration isolation subassembly between upper plate and hypoplastron, through the isolated low frequency small amplitude vibration of initiative vibration isolation subassembly, through the isolated high frequency of passive vibration isolation subassembly vibration by a wide margin to the realization reduces the purpose of the vibration frequency and the range between upper plate and the hypoplastron.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the invention and together with the description serve to explain the principles of the invention.
Fig. 1 is a schematic structural diagram of a precision vibration isolation platform with adjustable posture according to the present invention.
Fig. 2 is a schematic structural view of the telescopic rod according to the present invention.
Fig. 3 is a schematic structural diagram of a vertical-motion voice coil motor according to the present invention.
Fig. 4 is a schematic structural diagram of a horizontal-motion voice coil motor according to the present invention.
Fig. 5 is a schematic view of the assembly of the upper plate according to the present invention.
Fig. 6 is a schematic view of the assembly of the lower plate according to the present invention.
Reference numerals: 1-upper plate, 2-lower plate, 3-vertical vibration isolation system, 4-horizontal vibration isolation system, 5-passive vibration isolation assembly, 6-vibration sensor assembly, 7-piston rod, 8-cylinder body, 9-displacement encoder, 10-buffer rubber pad, 11-first electromagnetic coil plate, 12-first permanent magnet, 13-first support, 14-first base, 15-second electromagnetic coil plate, 16-second permanent magnet, 17-second support and 18-second base.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limitations of the invention.
It should be noted that, for convenience of description, only the parts related to the present invention are shown in the drawings.
In the case of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail with reference to the accompanying drawings in conjunction with embodiments.
An attitude adjustable precision vibration isolation platform comprising: upper plate 1, lower plate 2, passive vibration isolation component 5, active vibration isolation component, vibration sensor component 6 and controller.
The upper plate 1 is used as a bearing surface of a precision instrument, and meanwhile, a plurality of mounting grooves are formed in the lower side surface of the upper plate 1 and used for mounting the passive vibration isolation assembly 5 and the active vibration isolation assembly, and the specific position and structure of the passive vibration isolation assembly can be flexibly adjusted according to needs.
Passive vibration isolation subassembly 5 sets up between hypoplastron 2 and upper plate 1, and the both ends of passive vibration isolation subassembly 5 respectively with hypoplastron 2 and upper plate 1 fixed connection, passive vibration isolation subassembly 5 still plays the left and right sides of support, make upper plate 1 can the level set up in the top of hypoplastron 2, and set up passive vibration isolation subassembly 5 into the bracing piece that possesses certain elasticity, make when the vibration appears, the change of length is realized through the elastic expansion of bracing piece self, thereby can be between upper plate 1 and hypoplastron 2 passive vibration isolation.
The active vibration isolation assembly is arranged between the lower plate 2 and the upper plate 1, two ends of the active vibration isolation assembly are respectively fixedly connected with the lower plate 2 and the upper plate 1, the vibration sensor assembly 6 is arranged on the lower plate 2 and the upper plate 1, the signal output end of the passive vibration isolation assembly 5 and the signal output end of the vibration sensor assembly 6 are electrically connected with the signal input end of the controller, and the signal output end of the controller is electrically connected with the signal input end of the active vibration isolation assembly.
The vibration sensor assembly 6 and the passive vibration isolation assembly 5 are used for detecting vibration data between the upper plate 1 and the lower plate 2 and transmitting the vibration data to the controller, and then the controller controls the active vibration isolation assembly according to the detected vibration frequency and amplitude to generate vibration to counteract the vibration, so that the purpose of vibration isolation is achieved.
The controller is a conventional processor at present, and it is a technique understood by those skilled in the art to send out a control signal after calculating a detection signal, so that further description is not needed, and those skilled in the art can select an appropriate controller according to requirements.
The lower plate 2 and the upper plate 1 are both horizontally arranged, and for convenience of description, the side of the upper plate 1 opposite to the lower plate 2 is set as the upper side of the vibration isolation platform; the actual user may incline the lower plate 2 without limiting the specific position thereof.
Passive vibration isolation subassembly 5 includes a plurality of telescopic links and a plurality of displacement encoder 9, the lower extreme of a plurality of telescopic links and the perpendicular fixed connection of outer edge of hypoplastron 2, the upper end of a plurality of telescopic links and the perpendicular fixed connection of outer edge of upper plate 1, displacement encoder 9 is fixed to be set up on the telescopic link, and displacement encoder 9's signal output part is connected with the signal input part electricity of controller.
The both ends of telescopic link are stiff end and flexible end respectively, can change the distance between stiff end and the flexible end through the extension of telescopic link or shorten.
For the stability of the support, the telescopic rods are arranged at the outer edge positions of the lower plate 2 and the upper plate 1, and as shown in fig. 1, 5 and 6, the telescopic rods can be arranged at four corners.
Through the externally mounted displacement encoder 9 at the telescopic link, displacement encoder 9 can measure the distance between flexible end and the stiff end through proximity switch non-contact relatively to can derive the length of telescopic link.
It should be noted that the detection of the displacement by the cooperation of the displacement encoder 9 and the proximity switch is a prior art that can be understood and implemented by those skilled in the art, and therefore, a detailed description of the displacement encoder 9 and the proximity switch is not required.
The displacement encoder 9 transmits the telescopic data of the telescopic rods to the controller, and the controller can obtain the position relation of the upper plate 1 relative to the lower plate 2 through the data of the plurality of telescopic rods.
The telescopic rod comprises a cylinder main body 8, a piston rod 7 and a stop block, the cylinder is vertically arranged, a cavity is arranged in the cylinder, the stop block is horizontally arranged in the cavity and divides the cavity into an upper cavity and a lower cavity which are independent, a through hole is formed in the upper side surface of the upper cavity, the piston rod 7 is vertically arranged, and the lower end of the piston rod 7 penetrates through the through hole to be vertically and fixedly connected with the upper side surface of the stop block;
the telescopic rod can be of various structures, and the embodiment shown in fig. 2 adopts an air cylinder to realize the telescopic effect. The upper cavity and the lower cavity which are filled with gas are respectively arranged above and below the stop block, and when the piston rod 7 receives pressure and slides up and down along the through hole, the stop block compresses or stretches the upper cavity and the lower cavity, so that the air pressure in the upper cavity and the lower cavity is changed, and the effect of the air spring is achieved.
Because the telescopic rod also needs to play a supporting role, the lower end of the cylinder main body 8 is fixedly connected with the lower plate 2, and the upper end of the piston rod 7 is fixedly connected with the upper plate 1 in a preferred embodiment;
the telescopic rod also comprises an air pressure adjusting assembly, and the air supply end of the air pressure adjusting assembly is respectively communicated with the upper cavity and the lower cavity;
the air pressure adjusting assembly comprises an air pressure pump and an air pipe, the air outlet end of the air pressure pump is respectively communicated with the upper cavity and the lower cavity through the air pipe, and an electromagnetic control valve and a pressure reducing valve are arranged on the air pipe;
the upper cavity and the lower cavity are communicated with the air pressure adjusting assembly, and the quality of air in the upper cavity and the lower cavity can be controlled by controlling the electromagnetic control valve, the pressure reducing valve and the air pressure pump, so that the length, the expansion amplitude, the expansion force, the expansion strength and other parameters of the expansion rod can be changed.
The upper side surface of the upper cavity and the lower side surface of the lower cavity are both fixedly provided with a cushion rubber pad 10.
The provision of cushion rubber pads 10 reduces impact damage caused by over travel.
The active vibration isolation assembly comprises a vertical vibration isolation system 3 and a horizontal vibration isolation system 4, and the signal output end of the controller is electrically connected with the control signal input end of the vertical vibration isolation system 3 and the control signal input end of the horizontal vibration isolation system 4 respectively;
the controller controls the vertical vibration isolation system 3 and the horizontal vibration isolation system 4 to work, so that the purpose of active vibration isolation is achieved.
The vertical vibration isolation system 3 comprises a plurality of vertical moving voice coil motors, each vertical moving voice coil motor comprises a first stator, a first rotor and a first shell, the first stator and the first rotor are arranged in the first shell, the first stator is fixedly connected with the upper plate 1 through a first support 13, and the first rotor is fixedly connected with the lower plate 2;
horizontal vibration isolation system 4 includes a plurality of horizontal migration voice coil motor, and horizontal migration voice coil motor includes second stator, second active cell and second casing, and second stator and second active cell all set up in the second casing, and the second stator passes through second support 17 and upper plate 1 fixed connection, second active cell and hypoplastron 2 fixed connection.
Fig. 3 and 4 are schematic diagrams of a horizontal movement voice coil motor and a vertical movement voice coil motor, respectively, and the main difference is that the mounting manner of the mover is different.
The first stator comprises a first electromagnetic coil plate 11, the first electromagnetic coil plate 11 is vertically arranged, and the upper end of the first electromagnetic coil plate 11 penetrates through the first shell and is vertically and fixedly connected with the lower side surface of the upper plate 1 through a first support 13;
the electromagnetic coil plate is mainly used for generating a magnetic field under the condition of electrifying, so that acting force is generated between the electromagnetic coil plate and the rotor, and the purpose of driving the rotor to move is achieved.
The electromagnetic coil plate may be a coil wound around an aluminum frame, or may have a regular plate-like structure formed by the strength of the coil itself.
How the winding is performed to generate the electromagnetic field is understood and implemented by those skilled in the art and will not be further described herein.
The first rotor comprises a first permanent magnet 12 and a first base 14, the outer side face of the first permanent magnet 12 is fixedly connected with the first base 14, the inner side face of the first permanent magnet 12 is arranged in parallel with the first electromagnetic coil plate 11, and the lower end of the first base 14 penetrates through the first shell and is fixedly connected with the lower plate 2.
The base is because fixed permanent magnet and be connected with upper plate 1, and the magnetic field of permanent magnet and the magnetic field effect that the electromagnetic coil board produced to the realization realizes carrying out the purpose of controlling the position of permanent magnet through control current, thereby can realize carrying out the purpose of controlling the position of upper plate 1.
The second stator comprises a second electromagnetic coil plate 15, the second electromagnetic coil plate 15 is vertically arranged, and the upper end of the second electromagnetic coil plate 15 penetrates through the second shell and is vertically and fixedly connected with the lower side surface of the upper plate 1 through a second support 17;
the second active cell comprises a second permanent magnet 16 and a second base 18, the outer side face of the second permanent magnet 16 is fixedly connected with the second base 18, the inner side face of the second permanent magnet 16 is arranged in parallel with the second electromagnetic coil plate 15, and the lower end of the second base 18 penetrates through the second shell to be fixedly connected with the lower plate 2.
The working principle between the second stator and the second mover is the same as that between the first stator and the first mover, and will not be further described.
The first permanent magnet 12 comprises two first side permanent magnets and a first middle permanent magnet, the first middle permanent magnet is fixedly arranged between the two first side permanent magnets, and the internal magnetic induction lines of the first side permanent magnets and the internal magnetic induction lines of the first middle permanent magnet are both arranged perpendicular to the lower plate 2;
the second permanent magnet 16 includes two second side permanent magnets and a second middle permanent magnet, the second middle permanent magnet is fixedly disposed between the two second side permanent magnets, and the internal magnetic induction lines of the second side permanent magnets and the internal magnetic induction lines of the second middle permanent magnets are both disposed parallel to the lower plate 2.
The first permanent magnet 12 and the second permanent magnet 16 are arranged in a Halbach array mode, a strong magnetic field can be generated, the first permanent magnet 12 and the second permanent magnet 16 are identical in structure and are different in installation mode, namely the internal magnetic induction line of the first permanent magnet is perpendicular to the lower plate 2, and the internal magnetic induction line of the second permanent magnet 16 is parallel to the lower plate 2.
The magnetic induction lines of the magnetic fields generated by the first and second solenoid plates 11 and 15 are the same, and therefore, the movement of the first and second permanent magnets 12 and 16 in two directions different horizontally and vertically is realized.
A specific embodiment is provided to illustrate the installation of the passive vibration isolation assembly 5 and the active vibration isolation assembly.
Through installing three-dimensional vibration sensor and three-dimensional vibration sensor down on upper plate 1 and hypoplastron 2 respectively, at the in-process of work, realize the collection to the vibration signal of upper plate 1 and hypoplastron 2, can measure the vibration volume of the six degrees of freedom of upper plate 1.
The three-way vibration sensor is a prior art that can be understood and implemented by those skilled in the art, and is not specifically described.
As shown in fig. 5 and 6, the number of the vertical movement voice coil motors is two, the number of the horizontal movement voice coil motors is two, and the number of the telescopic rods is four;
Fig. 5 is an assembly view of the upper plate 1, and the positional relationship of the passive vibration isolation assembly 5, the active vibration isolation assembly, and the vibration sensor assembly 6 can be seen.
Where S1, S2 denote two upper three-way vibration sensors that measure the vibration amount of the upper plate 1 in six degrees of freedom.
V1 and V2 are two voice coil motors moving vertically and are used for active vibration isolation with three degrees of freedom of translation along the z axis, rotation around the x axis and rotation around the y axis.
H1 and H2 are two horizontal moving voice coil motors and are responsible for active vibration isolation with three degrees of freedom of translation along the x axis, translation along the y axis and rotation around the z axis.
Fig. 6 is an assembly view of the lower plate 2, in which the positional relationship of the passive vibration isolation assembly 5, the active vibration isolation assembly, and the vibration sensor assembly 6 can be seen.
Where S3, S4 denote two lower three-way vibration sensors that measure the vibration amount of the lower plate 2 in six degrees of freedom.
The active and passive composite vibration isolation mode is adopted in the embodiment, and the defect that the passive vibration isolation mode is poor in low-frequency vibration isolation effect is overcome. The passive vibration isolation assembly 5 is combined with the active vibration isolation assembly, wherein the passive vibration isolation assembly 5 is an adjustable telescopic cylinder, the active vibration isolation assembly is a voice coil motor, the active vibration isolation assembly and the passive vibration isolation assembly 5 are combined and connected in parallel for use, the vibration isolation frequency range is wide, and the vibration isolation effect is good.
The adjustable telescopic link has displacement encoder 9 and relief pressure valve, and displacement encoder 9 reads cylinder position and angle information through proximity switch non-contact relative measurement in real time, obtains the flexible volume of the piston rod 7 of each group's telescopic link, combines the signal that three-way vibration sensor gathered in the vibration isolation system, based on relief pressure valve precision load synchro control, realizes low frequency vibration compensation.
The two voice coil motors in the vertical direction and the two voice coil motors in the horizontal direction can complete active vibration isolation of six degrees of freedom such as translation along a z axis, rotation around the x axis, rotation around the y axis, translation along the x axis, translation along the y axis, rotation along the z axis and the like according to signals of the three-way vibration sensor.
In the description herein, reference to the description of the terms "one embodiment/mode," "some embodiments/modes," "example," "specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment/mode or example is included in at least one embodiment/mode or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to be the same embodiment/mode or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments/modes or examples. Furthermore, the various embodiments/aspects or examples and features of the various embodiments/aspects or examples described in this specification can be combined and combined by one skilled in the art without conflicting therewith.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
It will be understood by those skilled in the art that the foregoing embodiments are provided for clarity of description only, and are not intended to limit the scope of the invention. Other variations or modifications to the above described embodiments will be apparent to those skilled in the art and are within the scope of the invention.
Claims (10)
1. The utility model provides a precision vibration isolation platform of gesture adjustable which characterized in that includes:
an upper plate;
a lower plate disposed in parallel with the upper plate;
the passive vibration isolation assembly is arranged between the lower plate and the upper plate, and two ends of the passive vibration isolation assembly are respectively fixedly connected with the lower plate and the upper plate;
the active vibration isolation assembly is arranged between the lower plate and the upper plate, and two ends of the active vibration isolation assembly are respectively fixedly connected with the lower plate and the upper plate;
a vibration sensor assembly disposed on the lower plate and the upper plate;
and the signal output end of the passive vibration isolation assembly and the signal output end of the vibration sensor assembly are electrically connected with the signal input end of the controller, and the signal output end of the controller is electrically connected with the signal input end of the active vibration isolation assembly.
2. The precision vibration isolation platform with the adjustable posture as claimed in claim 1, wherein the lower plate and the upper plate are both horizontally arranged, and the side of the upper plate opposite to the lower plate is set as the upper side of the vibration isolation platform;
the passive vibration isolation assembly comprises a plurality of telescopic rods and a plurality of displacement encoders, the lower ends of the telescopic rods are vertically and fixedly connected with the outer edge of the lower plate, the upper ends of the telescopic rods are vertically and fixedly connected with the outer edge of the upper plate, the displacement encoders are fixedly arranged on the telescopic rods, and the signal output ends of the displacement encoders are electrically connected with the signal input end of the controller.
3. The precision vibration isolation platform with the adjustable posture according to claim 2, wherein the telescopic rod comprises a cylinder main body, a piston rod and a stop block, the cylinder is vertically arranged, a cavity is arranged in the cylinder, the stop block is horizontally arranged in the cavity and divides the cavity into an upper cavity and a lower cavity which are independent, a through hole is arranged on the upper side surface of the upper cavity, the piston rod is vertically arranged, and the lower end of the piston rod penetrates through the through hole to be vertically and fixedly connected with the upper side surface of the stop block;
the lower end of the cylinder main body is fixedly connected with the lower plate, and the upper end of the piston rod is fixedly connected with the upper plate.
4. The precision vibration isolation platform with the adjustable posture as claimed in claim 3, wherein the telescopic rod further comprises an air pressure adjusting assembly, and an air supply end of the air pressure adjusting assembly is respectively communicated with the upper cavity and the lower cavity;
the air pressure adjusting assembly comprises an air pressure pump and an air pipe, the air outlet end of the air pressure pump is respectively communicated with the upper cavity and the lower cavity through the air pipe, and an electromagnetic control valve and a pressure reducing valve are arranged on the air pipe;
the upper side surface of the upper cavity and the lower side surface of the lower cavity are fixedly provided with buffer rubber pads.
5. The precision vibration isolation platform with adjustable posture according to claim 2, wherein the active vibration isolation assembly comprises a vertical vibration isolation system and a horizontal vibration isolation system, and the signal output end of the controller is electrically connected with the control signal input end of the vertical vibration isolation system and the control signal input end of the horizontal vibration isolation system respectively;
the vertical vibration isolation system comprises a plurality of vertical moving voice coil motors, each vertical moving voice coil motor comprises a first stator, a first rotor and a first shell, the first stator and the first rotor are arranged in the first shell, the first stator is fixedly connected with the upper plate through a first support, and the first rotor is fixedly connected with the lower plate;
the horizontal vibration isolation system comprises a plurality of horizontal movement voice coil motors, each horizontal movement voice coil motor comprises a second stator, a second rotor and a second shell, the second stators and the second rotors are arranged in the second shells, the second stators are fixedly connected with the upper plate through second supports, and the second rotors are fixedly connected with the lower plate.
6. The precision vibration isolation platform with the adjustable posture according to claim 5, wherein the first stator comprises a first solenoid plate, the first solenoid plate is vertically arranged, and the upper end of the first solenoid plate penetrates through the first shell and is vertically and fixedly connected with the lower side surface of the upper plate through the first bracket;
the first rotor comprises a first permanent magnet and a first base, the outer side face of the first permanent magnet is fixedly connected with the first base, the inner side face of the first permanent magnet is parallel to the first electromagnetic coil plate, and the lower end of the first base penetrates through the first shell and is fixedly connected with the lower plate.
7. The precision vibration isolating platform with the adjustable posture as claimed in claim 6, wherein the second stator comprises a second coil plate, the second coil plate is vertically disposed, and the upper end of the second coil plate passes through the second housing and is vertically and fixedly connected with the lower side surface of the upper plate through the second bracket;
the second rotor comprises a second permanent magnet and a second base, the outer side face of the second permanent magnet is fixedly connected with the second base, the inner side face of the second permanent magnet is parallel to the second electromagnetic coil plate, and the lower end of the second base penetrates through the second shell and is fixedly connected with the lower plate.
8. An attitude adjustable precision vibration isolation platform according to claim 7,
the first permanent magnet comprises two first side permanent magnets and a first middle permanent magnet, the first middle permanent magnet is fixedly arranged between the two first side permanent magnets, and the internal magnetic induction lines of the first side permanent magnets and the internal magnetic induction lines of the first middle permanent magnet are both arranged perpendicular to the lower plate;
the second permanent magnet includes permanent magnet in the middle of two second side permanent magnets and the second, the permanent magnet is fixed to be set up two in the middle of the second between the second side permanent magnet, the inside magnetism of second side permanent magnet feel the line with the inside magnetism of permanent magnet in the middle of the second feel the line all with hypoplastron parallel arrangement.
9. The precision vibration isolation platform with the adjustable posture according to claim 5, wherein the number of the vertical moving voice coil motors is two, the number of the horizontal moving voice coil motors is two, and the number of the telescopic rods is four;
the upper plate and the lower plate are square plates, the four telescopic rods are fixedly arranged at four corners of the upper plate and the lower plate, and the two voice coil motors capable of vertically moving and the two voice coil motors capable of horizontally moving are annularly distributed along the central axis of the lower plate.
10. The precision vibration isolation platform with adjustable posture according to claim 1, wherein the vibration sensor assembly comprises an upper three-way vibration sensor and a lower three-way vibration sensor, the upper three-way vibration sensor is fixedly connected with the lower side surface of the upper plate, the lower three-way vibration sensor is fixedly connected with the upper side surface of the lower plate, and the signal output end of the upper three-way vibration sensor and the signal output end of the lower three-way vibration sensor are electrically connected with the signal input end of the controller.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202121515036.5U CN215000266U (en) | 2021-07-05 | 2021-07-05 | Precision vibration isolation platform with adjustable posture |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202121515036.5U CN215000266U (en) | 2021-07-05 | 2021-07-05 | Precision vibration isolation platform with adjustable posture |
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| CN215000266U true CN215000266U (en) | 2021-12-03 |
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| CN202121515036.5U Active CN215000266U (en) | 2021-07-05 | 2021-07-05 | Precision vibration isolation platform with adjustable posture |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024007737A1 (en) * | 2022-07-05 | 2024-01-11 | 广东工业大学 | Active vibration-isolation and leveling integrated platform of voice coil electric motor direct drive type |
| US12034355B2 (en) | 2022-07-05 | 2024-07-09 | Guangdong University Of Technology | Voice coil motor direct-drive active vibration isolation and leveling integrated platform |
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2021
- 2021-07-05 CN CN202121515036.5U patent/CN215000266U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024007737A1 (en) * | 2022-07-05 | 2024-01-11 | 广东工业大学 | Active vibration-isolation and leveling integrated platform of voice coil electric motor direct drive type |
| US12034355B2 (en) | 2022-07-05 | 2024-07-09 | Guangdong University Of Technology | Voice coil motor direct-drive active vibration isolation and leveling integrated platform |
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