CN107943128A - A kind of multivariant voice coil loudspeaker voice coil vibration isolation vibration suppression structure and its control method - Google Patents

A kind of multivariant voice coil loudspeaker voice coil vibration isolation vibration suppression structure and its control method Download PDF

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Publication number
CN107943128A
CN107943128A CN201711422441.0A CN201711422441A CN107943128A CN 107943128 A CN107943128 A CN 107943128A CN 201711422441 A CN201711422441 A CN 201711422441A CN 107943128 A CN107943128 A CN 107943128A
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voice coil
coil motor
motor
actuator
vibration
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CN107943128B (en
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李伟鹏
季春炜
黄海
张弘
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BEIJING HANGYU ZHENKONG TECHNOLOGY Co.,Ltd.
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Beihang University
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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D19/00Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
    • G05D19/02Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Vibration Prevention Devices (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)

Abstract

The present invention relates to a kind of multiple degrees of freedom voice coil loudspeaker voice coil vibration isolation vibration suppression structure and its control method, forms vibration isolation vibration suppression structure with two actuator, mounting platform and pedestal are together in series, each actuator is made of two voice coil motors and two panels film spring;When enabling upper voice coil motor, one negative stiffness can be provided between mounting platform and the transition platform of actuator, it is together in series with the positive rigidity of lower film spring, structure overall stiffness can be made to tend to be infinitely great in theory, so as to suppress the direct interference that mounting platform is brought;When starting lower voice coil motor, one adaptive damping is provided, seat vibration is set just to obtain good isolation when being delivered to actuator transition platform, weaken and even eliminate the low-frequency resonance as caused by lower film spring flexibility, so as to significantly weaken influence of the pedestal wide-band vibration to high-precision equipment on mounting platform.

Description

A kind of multivariant voice coil loudspeaker voice coil vibration isolation vibration suppression structure and its control method
Technical field
The present invention relates to a kind of multivariant voice coil loudspeaker voice coil vibration isolation vibration suppression structure and its control method, belong to active control technology Field.
Background technology
With the high speed development of science and technology, highly sophisticated device equipment is widely applied to all the more aerospace field, with It is corresponding be then that its mounting structure anti-vibration performance is further improved with antijamming capability requirement, traditional passive vibration isolation knot Structure gradually can not meet demand, and then active control technology comes into being.
In general, high-precision equipment and its mounting structure need to face both sides disturbing factor, first, equipment itself is brought Direct interference, perturbed force for bringing the etc. when perturbed force as caused by being changed as weight of equipment, the work of self-contained gyro;It is another Kind then comes from the vibration interference that construction pedestals are transmitted to.If necessary to suppress direct interference, it is necessary to structure have it is higher Rigidity, and if to isolate seat vibration, it is that Structure of need has higher flexibility.The demand of these two aspects often mutual lance Shield, can not get both, and can attend to one thing and lose sight of another.In addition, the disturbance in space environment, often multivariant, this also suggests that new Demand.
The content of the invention
The purpose of the present invention is to solve the above problem, overcome the shortcomings of the prior art can not vibration isolation vibration suppression at the same time, carry For a kind of multivariant voice coil loudspeaker voice coil vibration isolation vibration suppression structure and its control method, significantly weaken the vibration of pedestal bandwidth on mounting platform Precision equipment influence.
The technology of the present invention solution:A kind of multivariant voice coil loudspeaker voice coil vibration isolation vibration suppression structure and its control method, installation are flat It is together in series between platform and pedestal by two pairs of identical actuator, two actuator have a transition platform.It is single Actuator is unified into by two voice coil motors and two panels film spring string formation, and film spring plays the role of spring and hinge, is playing branch In the case that support acts on, axial rigidity is not only provided, but also provides certain rotational angle, it is more certainly that translation and rotation etc. can be isolated By the vibrational perturbation spent.For structure generally speaking, can be in mounting platform when enabling the upper voice coil motor of two actuator A negative stiffness is provided between its respective transition platform, the positive rigidity provided with lower film spring is together in series, in theory can be with Structure overall stiffness is set to tend to be infinitely great, so as to suppress direct interference.And when enabling the lower voice coil motor of two actuator, can As soon as to provide an adaptive damping, seat vibration is obtained good isolation when being delivered to each actuator transition platform, weaken The low-frequency resonance as caused by lower film spring flexibility is even eliminated, so as to significantly weaken the vibration of pedestal bandwidth to the precision on mounting platform The influence of equipment.And the structure then by assembling, can further form the platform of Hexapod configurations, more preferable vibration is played The effect of isolation/suppression.
Concrete structure is:Mounting platform and pedestal are together in series by the present invention using two actuator, each actuator bag Include:Power section, supporting structure and measurement part;Supporting structure is used to provide and keep power section original state, easy to it Movement, measurement part are used for the motion conditions for measuring power section;
The power section includes:Upper voice coil motor and lower voice coil motor in each actuator, the upper voice coil motor bag Voice coil motor coil and upper voice coil motor magnet are included, the upper voice coil motor coil is fixedly connected with the operating bar, described Upper voice coil motor magnet is fixedly connected with transition platform, and upper voice coil motor coil is located at the annular groove inside upper voice coil motor magnet In, supported by film spring;Lower voice coil motor includes lower voice coil motor coil and lower voice coil motor magnet, lower voice coil motor line Circle is fixedly connected with transition platform, and lower voice coil motor magnet is fixedly connected with the pedestal in exterior overall structure, lower voice coil motor Coil is located in the annular groove inside lower voice coil motor magnet, is supported by film spring;
Supporting structure includes:Transition platform, motor base, support column, operating bar, contiguous block, indent, tabletting and film spring; Each actuator is fixedly mounted on pedestal by motor base;Four support columns are uniformly distributed installed in motor bottom with 90 ° of angle On seat and transition platform, indent is installed on pillar, film spring outer ring is fixedly mounted on by motor base and transition by tabletting respectively On platform;Film spring inner ring is by contiguous block, respectively by lower voice coil motor coil and transition platform, upper voice coil motor coil and start Bar is fixedly connected;Two actuator are fixedly connected by operating bar with mounting platform respectively;Film spring is in addition to providing axial displacement, also The upset of low-angle can be carried out, so as to carry out the vibration isolating/vibration suppressing for the multiple frees degree for including being translatable and rotating;Transition platform exists Can the relative motion between mounting platform and pedestal under upper and lower voice coil motor movement;
Measurement portion point includes:Relative displacement transducer, velocity sensor and sensor stand;Relative displacement transducer passes through Sensor stand is installed on operating bar;Velocity sensor is fixed on transition platform outer edge;The output of measurement part is supplied to Peripheral control unit.
The voice coil motor uses the voice coil motor of model LA34-37-000A, its in response to belt is roomy, without hysteresis, Reliability is high.
The film spring is made of beryllium-bronze piece (QBe2) cut-flower, has preferable mechanical property.
The mounting platform, transition platform, pedestal, motor base, support column and operating bar are manufactured with 45 Steel materials, even Block, indent, tabletting are connect using aluminium alloy manufacture.
The model CWY-D0-502 of the relative displacement transducer, the model CS-YD-004 of velocity sensor, measurement Precision is high.
A kind of control method of multiple degrees of freedom voice coil loudspeaker voice coil vibration isolation vibration suppression structure of the present invention, including:Upper voice coil loudspeaker voice coil electricity in each actuator The control method of the control method of machine and lower voice coil motor:
The control method of the upper voice coil motor is:
For upper voice coil motor, when mounting platform and each transition platform are interfered power and relative motion occur, two For operating bar with being subjected to displacement, its relative displacement signal can be passed to peripheral control unit by relative displacement transducer in actuator, control Device processed upper voice coil motor coil the output phase induced current into each actuator after circuit computing, makes respective coiler part and magnetic Relative motion occurs for body portion, and mounting platform and transition platform is produced stable relative displacement, there is provided with perturbed force Equivalent negative stiffness;By the parameter of adjustment control device transmission function, the size of negative stiffness is set to be provided just equal to lower film spring Rigidity, so that overall stiffness tends to be infinitely great;
The control method of lower voice coil motor is specially:
For lower voice coil motor, when pedestal vibrates, velocity sensor believes the speed of each actuator transition platform Number pass to peripheral control unit, to lower voice coil motor output current after circuit computing, produce one it is proportional to speed Electromagnetic damping power;By the size of adjustment control device parameter change damped coefficient, increase damping in the low-frequency range of vibrational perturbation Coefficient suppresses resonance, and high band reduces damped coefficient increase vibration rate of decay, so as to obtain good anti-vibration performance.
High frequency and low frequency in the present invention refer to vibration physically, it is generally the case that by the vibrational perturbation of below 6Hz Low frequency is defined as, the vibrational perturbation of more than 100Hz is defined as high frequency.
The present invention's is a little:
(1) the configuration of the present invention is simple, and voice coil motor is widely used, technology maturation, reliability is high.
(2) multiple degrees of freedom of the direct interference of the invention that can suppress at the same time from mounting platform and isolation from pedestal shakes Dynamic, performance is comprehensive;
(3) present invention can guarantee that vibration decay speed of the structure in high band while even elimination low-frequency resonance is weakened Rate;
(4) present invention can be further combined use, form the vibration-isolating platform of Hexapod configurations, carry out more complicated Using easy to use.
Brief description of the drawings
Fig. 1 is the three-dimensional front-view of structure of the present invention;
Fig. 2 is that the three-dimensional of structure of the present invention is axonometric drawing;
Fig. 3 is the 3-D view of the single actuator of the present invention, and wherein a is front view, and b is axonometric drawing;
Fig. 4 is the sectional view of the single actuator of the present invention;
Fig. 5 is the structure diagram of the film spring of the present invention;
Fig. 6 is the control method schematic diagram of upper voice coil motor;
Fig. 7 is the control method schematic diagram of lower voice coil motor;
Fig. 8 is that the combination of the present invention forms a kind of schematic diagram of Hexapod platforms;
In figure:
1- power section 2- supporting structures part 3- measures part
Voice coil motor coil on voice coil motor 103- under the upper voice coil motor 102- of 101-
Voice coil motor magnet under voice coil motor coil 106- under the upper voice coil motor magnet 105- of 104-
201- mounting platform 202- transition platform 203- pedestals
204- motor base 205- support column 206- indents
207- tabletting 208- film spring 209- operating bars
210- contiguous block 301- relative displacement transducer 302- velocity sensors
303- sensor stands
Embodiment
The present invention is described in further detail below in conjunction with attached drawing and example.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5, the present invention is a kind of multivariant voice coil loudspeaker voice coil vibration isolation vibration suppression structure, installation It is together in series between platform and pedestal by two pairs of identical actuator.The structure of each actuator include power section 1, Supporting structure part 2 and measurement part 3, supporting structure are used to provide and keep power section original state, are moved easy to it, surveyed Amount part is used for the motion conditions for measuring power section.
Power section 1 includes upper voice coil motor 101 and lower voice coil motor 102, and upper voice coil motor 101 includes upper voice coil motor Coil 103 and upper voice coil motor magnet 104, upper voice coil motor coil 103 are solid with operating bar 209 with screw by contiguous block 210 Fixed connection, upper voice coil motor magnet 104 are fixedly connected with transition platform 202, and upper voice coil motor coil 103 is located at upper voice coil motor In annular groove inside magnet 104, supported by film spring 208;Lower voice coil motor 102 includes lower voice coil motor coil 105 With lower voice coil motor magnet 106, lower voice coil motor coil 105 is fixed by contiguous block 210 with screw with transition platform 202 to be connected Connect, lower voice coil motor magnet 106 is fixedly connected by screw with pedestal 203, and lower voice coil motor coil 105 is located at lower voice coil motor In annular groove inside magnet 106, supported by film spring 208.
Supporting structure part 2 includes transition platform 202, motor base 204, support column 205, indent 206, tabletting 207, film Spring 208, operating bar 209 and contiguous block 210.
Actuator is fixedly mounted on pedestal 203 by motor base 204 by screw;Four support columns 205 are with 90 ° of folder Angle is uniformly distributed on motor base 204 and transition platform 202, is installed with screw;There is screw thread in 205 upper end of support column, twists On indent 206,208 outer ring of film spring is fixedly mounted on motor base 204 and transition platform 202 respectively by tabletting 207; 208 inner ring of film spring is then by contiguous block 210, respectively by lower voice coil motor coil 105 and transition platform 202, upper voice coil motor Coil 103 is fixedly connected with operating bar 209, and due to the design feature of itself of film spring 208, it can be axially displaced and carries For certain reverse angle, the isolation of multi-freedom-degree vibration can be used;Operating bar 209 is then respectively by two actuator and mounting platform 201 are fixedly connected.
Measurement part 3 includes relative displacement transducer 301, velocity sensor 302 and sensor stand 303;Relative displacement Sensor 301 is installed on operating bar 209 by sensor stand 302;Velocity sensor 302 is screwed in transition Platform outer edge.
Upper voice coil motor 101 and lower voice coil motor 102 use the voice coil motor of model LA34-37-000A, are purchased in market Product, is mainly made of magnet and coil two parts.Both are used by being nested, and can carry out linear relative movement.Its Coil part can provide it in suitable electric current to realize desired movement with external circuits.
Film spring 208 is made of beryllium-bronze piece (QBe2) cut-flower, as shown in figure 4, playing support transition platform 202 and operating bar 209 effect, while larger axial rigidity is provided, actuator is carried out the rotation of certain angle.
Mounting platform 201, transition platform 202, pedestal 203, motor base 204, support column 205 and operating bar 209 are used 45 Steel materials manufacture, and contiguous block, indent, tabletting are manufactured using aluminium alloy.Wherein mounting platform 201 is used to install equipment, Pedestal 203 plays a supportive role.
Part of detecting 3 is mainly that external circuit control provides reference quantity and feedback quantity, relative displacement transducer 301 therein For electric vortex type displacement sensor, model CWY-D0-502, is made of probe and fore-lying device two parts, passes through sensor stand 303 are installed on operating bar 209, for measuring the relative displacement of operating bar 209 vertically.Velocity sensor 302 is single shaft pressure Electric-type velocity sensor, model CS-YD-004, wherein there is internal thread, is installed on outside 202 lower surface of transition platform by screw Edge.
The present invention can suppress the direct interference from mounting platform 201 at the same time and isolate to shake from the broadband of pedestal 203 It is dynamic, the course of work:When there is direct interference to act on mounting platform 201, film spring that two panels plays a supportive role can deform production A raw decrement vertically, at this time by controlling external circuit to provide upper voice coil motor coil 103 a suitable electricity Stream, makes it produce relative motion with upper voice coil motor magnet 104, and the electromagnetic force that upper voice coil motor 101 provides will overcome upper membrane The pressure of spring 208, makes operating bar 209 produce an elongation vertically, there is provided so-called negative stiffness.By adjusting exterior control Device parameter makes the significantly small positive rigidity for being just equal to lower film spring 208 of its equivalent negative stiffness, and the elongation of operating bar 209 can be made firm Each 202 axial length reduction of actuator transition platform is compensated well, and overall stiffness at the end tends to be infinitely great.General effect is exactly that installation is flat The absolute position of platform 201 is constant, and the transition platform 202 of two actuator moves down vertically, so as to ensure that installed in installation The equipment of platform 201 is disturbed from change in location.On the other hand, when pedestal 203 vibrates, peripheral control unit can be passed through A suitable electric current is provided to lower voice coil motor coil 105, a variable electromagnetic damping power is produced, so as to weaken or even disappear Except caused by lower film spring flexibility while low-frequency resonance, also ensureing vibration rate of decay of the power structure in high band.So make Influence of 203 wide-band vibration of pedestal when being delivered to mounting platform 201 is very small, so as to meet high-precision equipment to mounting structure The requirement of anti-vibration performance.
Furthermore, it is possible to by the use that is combined of the present invention, Hexapod platforms are formed, are shown as schemed institute 8, wherein being 1. The multivariant voice coil loudspeaker voice coil vibration isolation vibration suppression structure of the present invention, is 2. vibration isolation connecting platform, is 3. load connecting platform.Use three Identical multivariant voice coil loudspeaker voice coil vibration isolation vibration suppression structure 1., at an angle distributing installation in vibration isolation connecting platform 2. On, 3. it is connected with load connecting platform, integrally realize vibration isolation vibration suppression function.
The control method of the multiple degrees of freedom voice coil vibration isolating/vibration suppressing structure of the present invention, includes the controlling party of upper voice coil motor 101 The control method of method and lower voice coil motor 102.
As shown in fig. 6, the control method of upper voice coil motor 101 is specially:
For upper voice coil motor 101, when mounting platform 201 is disturbed with each actuator transition platform 202 and phase occurs During to movement, relative displacement signal is passed to peripheral control unit by relative displacement transducer 301, and controller is after circuit computing 103 output current of upward voice coil motor coil, makes coiler part and magnet part that relative motion occur, and finally makes mounting platform Platform 202 produces the relative displacement of stabilization between 201 and middle actuator, there is provided corresponding to the equivalent negative stiffness of perturbed force.It can lead to The parameter of controller transfer function is overregulated, the size of negative stiffness is equal to the positive rigidity that lower film spring provides, so that whole Body rigidity tends to be infinitely great.
As shown in fig. 7, the control method of lower voice coil motor 102 is specially:
For lower voice coil motor 102, when pedestal 203 vibrates, velocity sensor 302 is by actuator transition platform 202 speed signal is transmitted to peripheral control unit, controller after circuit computing to lower 105 output current of voice coil motor coil, And produce an electromagnetic damping proportional to speed.The size of damped coefficient can be changed by adjustment control device parameter, Suitably increase damped coefficient in low-frequency range and suppress resonance, high band reduces damped coefficient increase vibration rate of decay, so as to obtain Obtain anti-vibration performance well.
Above example is provided just for the sake of the description purpose of the present invention, and is not intended to limit the scope of the present invention.This The scope of invention is defined by the following claims.The various equivalent substitutions that do not depart from spirit and principles of the present invention and make and repair Change, should all cover within the scope of the present invention.

Claims (6)

  1. A kind of 1. multiple degrees of freedom voice coil loudspeaker voice coil vibration isolation vibration suppression structure, it is characterised in that:Using two actuator by mounting platform and pedestal It is together in series, each actuator includes:Power section, supporting structure and measurement part;Supporting structure is used to provide and keep dynamic Power part original state, is moved easy to it, and measurement part is used for the motion conditions for measuring power section;
    The power section includes:Upper voice coil motor and lower voice coil motor in each actuator, the upper voice coil motor include upper Voice coil motor coil and upper voice coil motor magnet, the upper voice coil motor coil are fixedly connected with the operating bar, the upper sound Circle motor magnet is fixedly connected with transition platform, and upper voice coil motor coil is located in the annular groove inside upper voice coil motor magnet, Supported by film spring;Lower voice coil motor includes lower voice coil motor coil and lower voice coil motor magnet, lower voice coil motor coil It is fixedly connected with transition platform, lower voice coil motor magnet is fixedly connected with the pedestal in exterior overall structure, lower voice coil motor line Circle is supported in the annular groove inside lower voice coil motor magnet by film spring;
    Supporting structure includes:Transition platform, motor base, support column, operating bar, contiguous block, indent, tabletting and film spring;Motor Each actuator is fixedly mounted on pedestal by base;Four support columns be uniformly distributed with 90 ° of angle installed in motor base and On transition platform, indent is installed on pillar, film spring outer ring is fixedly mounted on by motor base and transition platform by tabletting respectively On;Film spring inner ring is respectively consolidated lower voice coil motor coil and transition platform, upper voice coil motor coil and operating bar by contiguous block Fixed connection;Two actuator are fixedly connected by operating bar with mounting platform respectively;Film spring is in addition to providing axial displacement, moreover it is possible into The upset of row low-angle, so as to carry out the vibration isolating/vibration suppressing for the multiple frees degree for including being translatable and rotating;Transition platform is upper and lower Can the relative motion between mounting platform and pedestal under voice coil motor movement;
    Measurement portion point includes:Relative displacement transducer, velocity sensor and sensor stand;Relative displacement transducer passes through sensing Device stent is installed on operating bar;Velocity sensor is fixed on transition platform outer edge;The output of measurement part is supplied to outside Controller.
  2. A kind of 2. multiple degrees of freedom voice coil loudspeaker voice coil vibration isolation vibration suppression structure according to claim 1, it is characterised in that:The voice coil motor The voice coil motor of model LA34-37-000A is used, its in response to belt is roomy, high without hysteresis, reliability.
  3. A kind of 3. multiple degrees of freedom voice coil loudspeaker voice coil vibration isolation vibration suppression structure according to claim 1, it is characterised in that:The film spring is by beryllium Bronze flake (QBe2) cut-flower is made, and has preferable mechanical property.
  4. A kind of 4. multiple degrees of freedom voice coil loudspeaker voice coil vibration isolation vibration suppression structure according to claim 1, it is characterised in that:The mounting platform, Transition platform, pedestal, motor base, support column and operating bar are manufactured with 45 Steel materials, and contiguous block, indent, tabletting use aluminium Alloy manufactures.
  5. A kind of 5. multiple degrees of freedom voice coil loudspeaker voice coil vibration isolation vibration suppression structure according to claim 1, it is characterised in that:The relative displacement passes The model CWY-D0-502 of sensor, the model CS-YD-004 of velocity sensor, high certainty of measurement.
  6. A kind of 6. control method of multiple degrees of freedom voice coil loudspeaker voice coil vibration isolation vibration suppression structure, it is characterised in that:Including upper voice coil loudspeaker voice coil in each actuator The control method of the control method of motor and lower voice coil motor:
    The control method of the upper voice coil motor is:
    For upper voice coil motor, when mounting platform and each transition platform are interfered power and relative motion occur, two starts For operating bar with being subjected to displacement, its relative displacement signal can be passed to peripheral control unit, controller by relative displacement transducer in device Voice coil motor coil the output phase induced current is gone up into each actuator after circuit computing, makes respective coiler part and magnet portion The raw relative motion of distribution, and mounting platform and transition platform is produced stable relative displacement, there is provided it is equivalent with perturbed force Negative stiffness;By the parameter of adjustment control device transmission function, the size of negative stiffness is set to be equal to the positive rigidity that lower film spring is provided, So that overall stiffness tends to be infinitely great;
    The control method of lower voice coil motor is specially:
    For lower voice coil motor, when pedestal vibrates, velocity sensor passes the speed signal of each actuator transition platform Peripheral control unit is passed, to lower voice coil motor output current after circuit computing, produces an electromagnetism proportional to speed Damping force;By the size of adjustment control device parameter change damped coefficient, increase damped coefficient in the low-frequency range of vibrational perturbation Suppress resonance, high band reduces damped coefficient increase vibration rate of decay, so as to obtain good anti-vibration performance.
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Publication number Priority date Publication date Assignee Title
CN108667206A (en) * 2018-05-15 2018-10-16 北京控制工程研究所 A kind of flexible actuator of intelligence based on the double film springs of separate type
CN111602214A (en) * 2018-11-30 2020-08-28 Ck高新材料有限公司 Broadband driver
CN114233785A (en) * 2021-11-30 2022-03-25 沈阳航天新光集团有限公司 Dynamic vibration absorber
CN114608775A (en) * 2022-03-15 2022-06-10 中国科学院长春光学精密机械与物理研究所 Supporting leg type multi-dimensional micro-vibration simulator based on parallel connection of coarse and fine driving components
CN114967777A (en) * 2022-05-04 2022-08-30 西北工业大学 Voice coil actuator-based hyperstatic active vibration isolation platform and method
CN115208124A (en) * 2022-09-16 2022-10-18 中国科学院宁波材料技术与工程研究所 Precise motion platform integrated with active damping and control framework thereof
US20230045158A1 (en) * 2021-08-04 2023-02-09 Chongqing University Magnetic Suspension Type Sensing System For Space Full-Degree-Of-Freedom Absolute Poses

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JPH1089403A (en) * 1996-09-10 1998-04-07 Nikon Corp Vibration control device
CN102394548A (en) * 2011-09-22 2012-03-28 北京航空航天大学 Voice coil vibration isolating/vibration suppressing structure and control method thereof
CN102820761A (en) * 2012-07-30 2012-12-12 北京航空航天大学 Voice coil actuator based on non-linear membrane spring

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JPH1089403A (en) * 1996-09-10 1998-04-07 Nikon Corp Vibration control device
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CN102820761A (en) * 2012-07-30 2012-12-12 北京航空航天大学 Voice coil actuator based on non-linear membrane spring

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108667206A (en) * 2018-05-15 2018-10-16 北京控制工程研究所 A kind of flexible actuator of intelligence based on the double film springs of separate type
CN108667206B (en) * 2018-05-15 2019-07-12 北京控制工程研究所 A kind of flexible actuator of intelligence based on the double film springs of separate type
CN111602214A (en) * 2018-11-30 2020-08-28 Ck高新材料有限公司 Broadband driver
US20230045158A1 (en) * 2021-08-04 2023-02-09 Chongqing University Magnetic Suspension Type Sensing System For Space Full-Degree-Of-Freedom Absolute Poses
US11692607B2 (en) * 2021-08-04 2023-07-04 Chongqing University Magnetic suspension type sensing system for space full-degree-of-freedom absolute poses
CN114233785A (en) * 2021-11-30 2022-03-25 沈阳航天新光集团有限公司 Dynamic vibration absorber
CN114608775A (en) * 2022-03-15 2022-06-10 中国科学院长春光学精密机械与物理研究所 Supporting leg type multi-dimensional micro-vibration simulator based on parallel connection of coarse and fine driving components
CN114608775B (en) * 2022-03-15 2024-04-30 中国科学院长春光学精密机械与物理研究所 Landing leg type multidimensional micro-vibration simulator based on coarse and fine level driving assembly
CN114967777A (en) * 2022-05-04 2022-08-30 西北工业大学 Voice coil actuator-based hyperstatic active vibration isolation platform and method
CN114967777B (en) * 2022-05-04 2023-06-30 西北工业大学 Ultra-static active vibration isolation platform and method based on voice coil actuator
CN115208124A (en) * 2022-09-16 2022-10-18 中国科学院宁波材料技术与工程研究所 Precise motion platform integrated with active damping and control framework thereof

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