CN108667206A - A kind of flexible actuator of intelligence based on the double film springs of separate type - Google Patents

A kind of flexible actuator of intelligence based on the double film springs of separate type Download PDF

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Publication number
CN108667206A
CN108667206A CN201810461054.6A CN201810461054A CN108667206A CN 108667206 A CN108667206 A CN 108667206A CN 201810461054 A CN201810461054 A CN 201810461054A CN 108667206 A CN108667206 A CN 108667206A
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China
Prior art keywords
spring
voice coil
flexible
coil motor
displacement sensor
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CN201810461054.6A
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Chinese (zh)
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CN108667206B (en
Inventor
王有懿
关新
汤亮
张强
于国庆
周元子
马官营
张科备
郝仁剑
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Beijing Institute of Control Engineering
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Beijing Institute of Control Engineering
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/035DC motors; Unipolar motors
    • H02K41/0352Unipolar motors
    • H02K41/0354Lorentz force motors, e.g. voice coil motors

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Vibration Prevention Devices (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)

Abstract

A kind of flexible actuator of intelligence based on the double film springs of separate type, including:Flexible hinge (2), strut (3), fluting spring installation lid (4) etc., upper damping installation sheet (19), lower damping installation sheet (20), wherein voice coil motor (12) include voice coil motor mover (21) and voice coil motor stator (22).After installation is complete, it is exported by the control of the measurement of large range high precision eddy current displacement sensor (17) feedback and big stroke fast-response voice coil motor (12), realizes the vibration isolation of the flexible actuator of intelligence, disturbs to shake and inhibition and be accurately directed to adjust.The flexible actuator of intelligence of the present invention is using the double film spring parallel-connection structure forms of separate type, and movement travel is big, and control accuracy is high, can be widely used in spacecraft superhigh precision, ultrastability, super quick control field.

Description

A kind of flexible actuator of intelligence based on the double film springs of separate type
Technical field
The invention belongs to Spacecraft Control fields, are related to a kind of flexible actuator of intelligence.
Background technology
In recent years, with very high resolution earth observation, the high steady tracking of space movement target and high-resolution imaging etc. A series of it is proposed of Future direction demands proposes high requirement to precision, the stability of satellite control system.
The measurement accuracy such as traditional attitude sensor (star quick, gyro) and Measurement bandwidth limitation are limited to, it is traditional Low bandwidth attitude control system influence to various disturbing moments can not be realized and effectively inhibit in wide frequency domain, and Satellite Attitude is based only upon State controls to realize that it is very high that the steady technical solution for being directed toward control of the essence of payload has been difficult to meet under prior art conditions Precision is directed toward and stability contorting requirement;Therefore, it is proposed to install the design scheme of active platform in load and celestial body, pass through actively The vibration isolation of actuator in platform disturbs to shake and inhibits and be accurately directed to realize the high performance index of load.
However the actuator used at present generally only installs vibrating sensor (such as force snesor, acceleration transducer), because And only have the function of active vibration isolation, it is accurately directed to regulatory function without having.And in actuator junction using traditional general Logical hinge (such as flexural pivot and Hooke's hinge) limits the control output accuracy of actuator due to the presence to rub with gap.And with The continuous increase of satellite load, the quick motor-driven continuous improvement with fast and stable performance, current small stroke active vibration isolation is made Dynamic device cannot be satisfied application demand.
Invention content
Present invention solves the technical problem that being:Overcome the deficiencies in the prior art proposes a kind of based on the double film springs of separate type It is axially rigid to provide the flexible actuator of intelligence using the double film springs of separate type and fluting spring parallel form for intelligence flexibility actuator Degree, and by the axial movement of the intelligent flexible actuator of the double film spring strict guarantees of separate type, flexible link is added using fluting spring Structure type realizes the function of flexible hinge, provides the flexible actuator of intelligence and axially moves to by the flexible actuator group of multiple intelligence At the transmission of platform six-freedom motion, and by big stroke fast-response voice coil motor and large range high precision eddy current sensor, The large stroke and high precision control output of the flexible actuator of intelligence is realized jointly, while being realized the vibration isolation of load, being disturbed and shake Inhibit and be accurately directed to, efficiently solves the superhigh precision, ultrastability, super quick control problem of satellite.
The technical solution adopted in the present invention is:A kind of flexible actuator of intelligence based on the double film springs of separate type, including:It is soft Property hinge, strut, fluting spring installation lid, upper mounting seat, flexible link, fluting spring, lower mounting seat, upper film spring, mover install Lid, voice coil motor, outer barrel, stator installation lid, lower film spring, displacement sensor measured piece, displacement sensor, bottom cover;Voice coil motor Mover installation lid, stator installation lid are installed in both ends respectively, and voice coil motor, mover installation lid are mounted in outer barrel, stator installation lid It is fixed on outer tube inner wall;Lower mounting seat is installed lid middle part boss with mover and is connect, and lower mounting seat and mover installation lid middle part are convex Upper film spring inner ring is clamped between platform;Flexible link lower end is mounted in lower mounting seat centre bore, and flexible link upper end is mounted on upper installation In seat centre bore;It is connected in the middle part of upper mounting seat and fluting spring mounting seat;Fluting spring mounting seat outer ring and fluting spring upper end Outer ring is connected, and fluting lower spring end outer ring is mounted on outer barrel top port, slots and is pressed from both sides between lower spring end outer ring and outer barrel port Tightly upper film spring outer ring;Strut one end connection fluting spring installation lid middle part, the other end are connect with flexible hinge lower end;Displacement sensing The newel of device measured piece is pacified after sequentially passing through lower film spring inner ring, stator installation lid centre bore, voice coil motor centre bore with mover Capping is fixedly connected;Lower film spring outer ring is fixed at the step structure of outer barrel bottom interior wall;Displacement sensor is mounted on bottom cover, Bottom cover is mounted on outer barrel bottom port.
The voice coil motor includes voice coil motor mover and voice coil motor stator, open-minded on voice coil motor stator central axes Hole;Voice coil motor mover is connected with mover installation lid;Voice coil motor stator is fixed on stator installation and covers.
Further include flexible hinge position-limiting drum, flexible hinge position-limiting drum is installed outside the flexible hinge, on flexible hinge End is connected with external structure and compresses upper flexible hinge position-limiting drum simultaneously;The material of the flexible hinge is titanium alloy.
The material of the upper film spring and lower film spring structure form and material identical, upper film spring and lower film spring is beryllium-bronze.
Further include upper damping installation sheet, lower damping installation sheet;Circumferentially pacify respectively in the outside of the fluting spring upper and lower end Fill several upper damping installation sheets and lower damping installation sheet, upper damping installation sheet and lower damping installation sheet position is corresponding and number phase Together;It is compressed between upper damping installation sheet outer wall and lower damping installation sheet inner wall and damping material is installed.
The displacement sensor is eddy current displacement sensor, and measurement range is ± 5mm, and resolution ratio is 0.3 μm;Displacement Sensor probe center line is overlapped with the flexible actuator center line of the intelligence, and upper end of popping one's head in is deposited with displacement sensor measured piece In distance.
The displacement sensor measured piece includes tested disk and the newel positioned at tested disc centre, is tested disk A diameter of displacement sensor probe diameter three times more than, the material of displacement sensor measured piece is aluminium alloy.
Further include limited block, each limited block passes through the side wall of outer barrel, and circumferentially fixed along outer barrel, is covered for being installed to mover It is limited with voice coil motor mover.
The fluting spring realizes that material is titanium alloy by radial cuts hollow cylinder.
The material of the flexible link is spring steel.
Compared with the prior art, the present invention has the following advantages:
(1) the method for the present invention uses voice coil motor center opening form, and sensor tested surface is passed through by centre bore Voice coil motor, while ensureing that eddy current displacement sensor and tested surface are located on intelligence flexible actuator central axes, improve intelligence The measurement of the flexible actuator of energy and control accuracy.
(2) the method for the present invention is using the structure type of the double film spring parallel connections of separate type, and except providing, the flexible actuator of intelligence is axial Outside rigidity, the radial motion and relative rotation between voice coil motor mover and stator are also limited, avoids the flexible actuator of intelligence Since voice coil motor mover and stator gap are too small and collide when work.
(3) the method for the present invention adds damping material on the outside of fluting spring, increases the quilt of the flexible actuator of intelligence Dynamic damping greatly shortens the control stabilization time of the flexible actuator of intelligence.
Description of the drawings
Fig. 1 is the sectional view of the flexible actuator of present invention intelligence;
Fig. 2 is the composition figure of voice coil motor of the present invention;
Fig. 3 is the schematic diagram of the upper film spring of the present invention;
Fig. 4 is the schematic diagram of lower film spring of the present invention;
Fig. 5 is the axial limiting schematic diagram of the flexible actuator of present invention intelligence;
Fig. 6 is the axial limiting vertical view of the flexible actuator of present invention intelligence;
Fig. 7 is the corner locating schematic diagram of flexible hinge of the present invention;
Fig. 8 is the scheme of installation of damping material of the present invention;
Fig. 9 is the installation vertical view of damping material of the present invention;
Figure 10 is the partial enlarged view of flexible link of the present invention connection.
Specific implementation mode
Below in conjunction with the accompanying drawings and specific embodiment further illustrates present disclosure.
As shown in Figure 1, a kind of flexible actuator of intelligence based on the double film springs of separate type, including:Flexible hinge position-limiting drum 1, Flexible hinge 2, strut 3, fluting spring installation lid 4, upper mounting seat 5, flexible link 6, fluting spring 7, lower mounting seat 8, upper film spring 9, mover installation lid 10, limited block 11, voice coil motor 12, outer barrel 13, stator installation lid 14, lower film spring 15, displacement sensor quilt Survey part 16, displacement sensor 17, bottom cover 18, upper damping installation sheet 19, lower damping installation sheet 20.
As shown in Fig. 2, voice coil motor 12 includes voice coil motor mover 21 and voice coil motor stator 22, and it is fixed in voice coil motor The through-hole of a diameter of 10mm is opened on sub 22 central axes;The impulse stroke of the voice coil motor is ± 6mm, and maximum output power is 450N, power output accuracy are 0.02N.
As shown in fig. 7, the 2 outside installation flexible hinge position-limiting drum 1 of flexible hinge, the maximum for limiting flexible hinge turns Angle, to protect flexible hinge fatigue rupture caused by lasting large deformation;Flexible hinge material used is titanium alloy.Pass through Corner locating distance s is adjusted, while so that it is met intelligence flexibility actuator normal work corner, limits the maximum of flexible hinge Corner;In the present embodiment, s=2mm.Flexible hinge 2 requires high axial rigidity and shearing rigidity and small bending stiffness And torsion stiffness.By making the bending stiffness of cylinder decline to a great extent the wire cutting of cylinder, and the rigidity in remaining direction Decline it is less, make its along vertical axial rotational stiffness be much smaller than remaining direction rigidity.It can by the design in wire cutting path Ensure that virtual axle is overlapped with flexible hinge chain design shaft.Flexible hinge 2 should select elasticity modulus smaller as possible and surrender pole Limit larger material.The bending stiffness of flexible hinge 2 is 60Nm/rad in the present embodiment;The material of flexible hinge chain 2 closes for titanium Gold.
As shown in Figure 3, Figure 4, the upper film spring 9 passes through upper film spring inner ring 23 and upper film spring outer ring 24 and the flexible work of intelligence Dynamic device motion parts are connected with fixed part;Lower film spring 15 is flexible by lower film spring inner ring 25 and lower film spring outer ring 26 and intelligence Actuator motion parts are connected with fixed part, and 21 He of upper film spring 9 and the cooperation limitation voice coil motor of lower film spring 15 mover Radial motion between voice coil motor stator 22 and relative rotation;The structure type and material identical of upper film spring 9 and lower film spring 15, The axial rigidity of film spring passes through the adjustment realization to film spring material selection, film spring thickness and decorative pattern;Upper film spring 9, lower film spring 15 Material is beryllium-bronze.
The fluting spring 7, upper film spring 9, lower film spring 15 realize the axial rigidity of actuator jointly, and set three The axial rigidity of person is identical;The axial rigidity of monolithic membrane spring is 10N/mm in the present embodiment;The material of film spring used is beryllium-bronze; The axial rigidity of fluting spring 7 is 10N/mm;The material of fluting spring used is titanium alloy;
The fluting spring 7 realized by radial cuts hollow cylinder, has lower axial rigidity and curved Stiffness coordinates with flexible link 6, has both the function of film spring and flexible hinge;
6 a diameter of 3mm of flexible link, material is spring steel;
The displacement sensor 17 is eddy current displacement sensor, and measurement range is ± 5mm, and resolution ratio is 0.3 μm;Institute The displacement sensor measured piece 16 stated includes tested disk and the newel positioned at tested disc centre, and it is position to be tested disk diameter More than the three times of 17 probe diameter of displacement sensor, the material of displacement sensor measured piece is aluminium alloy.
As shown in Fig. 8 to Figure 10, the damping material of compression among the upper damping installation sheet 19 and lower damping installation sheet 20 Material 27, generally visco-elastic damping material, such as silicon rubber provide the passive damping of the flexible actuator of intelligence.
As shown in Figure 5, Figure 6, intelligence is realized in the limited block 11, mover installation lid 10, the combination of voice coil motor mover 21 The axial limiting of flexible actuator.As shown, by adjusting axial limiting distance d, it is made to meet the flexible actuator of intelligence just While normal axial stroke, the maximum axial stroke of the flexible actuator of intelligence is limited, to protect displacement sensor probe, avoid sound Circle electric mover is mutually collided with voice coil motor stator;D=5mm in the present embodiment.
The type of attachment of the flexible actuator of intelligence is with operation principle:Voice coil motor mover 21 installs lid 10 with mover It is connected;Lower mounting seat 8 passes through upper film spring inner ring 23 by screw, and is fixedly connected with mover installation lid 10;It wears 6 lower end of flexible link 8 centre bore of lower mounting seat is crossed, and is compressed by the circumferential screw across lower mounting seat 8;6 upper end of flexible link passes through upper installation 5 centre bores of seat, and compressed by the circumferential screw across upper mounting seat 5;Upper mounting seat 5 passes through screw and fluting spring peace 4 middle section of seat is filled to be connected;Fluting 4 outer ring of spring mounting seat is connected by screw and 7 upper end outer ring of fluting spring;Fluting spring 7 lower ends outer ring pass through upper film spring outer ring 24 to be connected with outer barrel 13 by screw;It is installed respectively in fluting 7 outside upper and lower end of spring Four upper damp damp installation sheet 20 under installation sheets 19 and four, compressed among upper damping installation sheet 19 and lower damping installation sheet 20 And pass through glue sticking damping material 27;Fluting spring installation lid 4 is connect by upper external screw thread with 3 lower end internal thread hole of strut; 3 upper external screw thread of strut is connect with 2 lower end internal thread hole of flexible hinge, and 2 upper end of flexible hinge is tied by internal thread hole with external Structure is connected, and compresses upper flexible hinge position-limiting drum 1 simultaneously;Four limited blocks 11 pass through the side wall of outer barrel 13, and pass through screw It is fixed on outer barrel 13;Voice coil motor stator 22 is fixed on stator by screw to be installed on lid 14, and stator installation lid 14 passes through week To threaded hole with across 13 side wall of outer barrel screw be connected, by stator installation lid 14 be fixed on 13 side wall of outer barrel;Stator is pacified 14 central axes trepanning of capping, displacement sensor measured piece 16 pass through lower film spring inner ring 25,14 centre bore of stator installation lid, voice coil electricity 10 centre bore of machine is installed 10 lower end internal thread hole of lid with mover by upper external screw thread and is fixedly connected, and displacement sensor quilt 16 lower end of part is surveyed to be fixedly connected by screw with lower film spring inner ring 25;13 bottom of outer barrel is fixed in lower film spring outer ring 26 by screw End;Displacement sensor 17 is installed on by screw on bottom cover 18, and ensures 17 center probe line of displacement sensor and entire intelligence Flexible actuator center line overlaps, and upper end of popping one's head in apart from displacement sensor measured piece 16 apart from for 6mm;Outer barrel 13 and bottom cover 18 It is connect with external structure by the screw across outer ring;The mover installation lid 14 that is connect with voice coil motor mover 21, in upper film spring Circle 23, lower mounting seat 8, flexible link 6, upper mounting seat 5,7 upper end of fluting spring, fluting spring mounting seat 4, strut 3, flexible hinge 2, flexible hinge position-limiting drum 1 and displacement sensor measured piece 16, lower film spring inner ring 25 collectively constitute the flexible actuator of intelligence Motion parts, connect with voice coil motor stator 22 stator installation lid 14, upper film spring outer ring 24, lower film spring outer ring 26, outer barrel 13, Bottom cover 18, displacement sensor 17, fluting spring 7 lower end collectively constitute the fixed part of the flexible actuator of intelligence.It is scratched positioned at intelligence Property actuator fixed part displacement sensor 17 can measure the displacement sensor positioned at the flexible actuator motion parts of intelligence The relative motion displacement of measured piece 16 can pass through displacement sensor when the flexible actuator of intelligence, which is realized, to be moved to target location The deviation of 17 measurement results and target location designs control algolithm, such as pid control algorithm, and then passes through controller and voice coil electricity Machine driver output current, driving voice coil motor generate control force, so that motion parts is moved in a straight line relative to fixed part, arrive Up to target location.After installation is complete, the measurement by large range high precision eddy current displacement sensor 17 and big stroke fast-response The control of voice coil motor 12 exports, and realizes that the large stroke and high precision output of the flexible actuator of intelligence, the displacement sensor are surveyed Ranging from ± 5mm is measured, resolution ratio is 0.3 μm.The voice coil motor impulse stroke is ± 6mm, and maximum output power is 450N, power Output accuracy is 0.02N.
The flexible actuator of present invention intelligence is installed in such a way that multiple actuator are in parallel between satellite body and load, With this realize the vibration isolation of load, disturb shake inhibition and be accurately directed to adjust.
The content that description in the present invention is not described in detail belongs to the known technology of those skilled in the art.

Claims (10)

1. a kind of flexible actuator of intelligence based on the double film springs of separate type, which is characterized in that including:Flexible hinge (2), strut (3), fluting spring installation lid (4), upper mounting seat (5), flexible link (6), fluting spring (7), lower mounting seat (8), upper film spring (9), mover installation lid (10), voice coil motor (12), outer barrel (13), stator installation lid (14), lower film spring (15), displacement sensor Measured piece (16), displacement sensor (17), bottom cover (18);Mover installation lid (10) is installed respectively, is determined in voice coil motor (12) both ends Son installation lid (14), voice coil motor (12), mover installation lid (10) are mounted in outer barrel (13), and stator installation lid (14) is fixed on On outer barrel (13) inner wall;Lower mounting seat (8) is installed boss in the middle part of lid (10) with mover and is connect, and lower mounting seat (8) is installed with mover It covers and clamps upper film spring inner ring (23) in the middle part of (14) between boss;Flexible link (6) lower end is mounted in lower mounting seat (8) centre bore, Flexible link (6) upper end is mounted in upper mounting seat (5) centre bore;Upper mounting seat (5) and fluting spring mounting seat (4) middle part are solid Even;Fluting spring mounting seat (4) outer ring is connected with fluting spring (7) upper end outer ring, and fluting spring (7) lower end outer ring is mounted on outer Cylinder (13) top port slots and clamps upper film spring outer ring (24) between spring (7) lower end outer ring and outer barrel (13) port;Strut (3) in the middle part of one end connection fluting spring installation lid (4), the other end is connect with flexible hinge (2) lower end;Displacement sensor measured piece (16) after newel sequentially passes through lower film spring inner ring (25), stator installation lid (14) centre bore, voice coil motor (10) centre bore Lid (10) is installed with mover to be fixedly connected;Lower film spring outer ring (26) is fixed at the step structure of outer barrel (13) bottom interior wall;Position Displacement sensor (17) is mounted on bottom cover (18), and bottom cover (18) is mounted on outer barrel (13) bottom port.
2. a kind of flexible actuator of intelligence based on the double film springs of separate type according to claim 1, it is characterised in that:It is described Voice coil motor (12) includes voice coil motor mover (21) and voice coil motor stator (22), is opened on voice coil motor stator (22) central axes Through-hole;Voice coil motor mover (21) installs lid (10) with mover and is connected;Voice coil motor stator (22) is fixed on stator installation lid (14) on.
3. a kind of flexible actuator of intelligence based on the double film springs of separate type according to claim 1 or 2, it is characterised in that: Further include flexible hinge position-limiting drum (1), flexible hinge position-limiting drum (1), flexible hinge are installed outside the flexible hinge (2) (2) upper end is connected with external structure and compresses upper flexible hinge position-limiting drum (1) simultaneously;The material of the flexible hinge (2) is Titanium alloy.
4. a kind of flexible actuator of intelligence based on the double film springs of separate type according to claim 3, it is characterised in that:It is described Upper film spring (7) and lower film spring (13) structure type and material identical, the material of upper film spring (7) and lower film spring (13) is that beryllium is green Copper.
5. a kind of flexible actuator of intelligence based on the double film springs of separate type according to claim 1 or 2, it is characterised in that: Further include upper damping installation sheet (19), lower damping installation sheet (20);The outside of described fluting spring (7) upper and lower end is respectively along week To several upper damping installation sheets (19) of installation and lower damping installation sheet (20), upper damping installation sheet (19) and lower damping installation sheet (20) position is corresponding and number is identical;It compresses and pacifies between upper damping installation sheet (19) outer wall and lower damping installation sheet (20) inner wall Fill damping material (27).
6. a kind of flexible actuator of intelligence based on the double film springs of separate type according to claim 1 or 2, it is characterised in that: The displacement sensor (17) is eddy current displacement sensor, and measurement range is ± 5mm, and resolution ratio is 0.3 μm;Displacement sensing Device (17) center probe line is overlapped with the flexible actuator center line of the intelligence, and pop one's head in upper end and displacement sensor measured piece (16) there are distances.
7. a kind of flexible actuator of intelligence based on the double film springs of separate type according to claim 6, it is characterised in that:It is described Displacement sensor measured piece (16) include tested disk and the newel positioned at tested disc centre, be tested a diameter of of disk More than the three times of displacement sensor (17) probe diameter, the material of displacement sensor measured piece (16) is aluminium alloy.
8. a kind of flexible actuator of intelligence based on the double film springs of separate type according to claim 1 or 2, it is characterised in that: Further include limited block (11), each limited block (11) passes through the side wall of outer barrel (13), and circumferentially fixed along outer barrel (13), for dynamic Son installation lid (10) and voice coil motor mover (21) are limited.
9. a kind of flexible actuator of intelligence based on the double film springs of separate type according to claim 1, it is characterised in that:It is described Fluting spring (7) realize that material is titanium alloy by radial cuts hollow cylinder.
10. a kind of flexible actuator of intelligence based on the double film springs of separate type according to claim 1, it is characterised in that:Institute The material for the flexible link (3) stated is spring steel.
CN201810461054.6A 2018-05-15 2018-05-15 A kind of flexible actuator of intelligence based on the double film springs of separate type Active CN108667206B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109921599A (en) * 2019-03-28 2019-06-21 深圳市赫瑞科技有限公司 A kind of linear motor with flexible base
CN112688531A (en) * 2020-12-18 2021-04-20 上海大学 Voice coil motor active suspension
CN114233785A (en) * 2021-11-30 2022-03-25 沈阳航天新光集团有限公司 Dynamic vibration absorber
CN114244065A (en) * 2021-12-03 2022-03-25 北京辰阳自动化科技有限公司 Voice coil motor and flexible vibration dish

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JP2011109831A (en) * 2009-11-18 2011-06-02 Aisin Seiki Co Ltd Linear actuator
CN102155516A (en) * 2011-01-24 2011-08-17 北京航空航天大学 Eight-rod-redundant-configuration and six-degree-of-freedom active vibration control device
CN102412695A (en) * 2011-09-23 2012-04-11 北京航空航天大学 Voice coil actuator based on linear elastic double-membrane spring structure
CN107943128A (en) * 2017-12-25 2018-04-20 北京航空航天大学 A kind of multivariant voice coil loudspeaker voice coil vibration isolation vibration suppression structure and its control method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011109831A (en) * 2009-11-18 2011-06-02 Aisin Seiki Co Ltd Linear actuator
CN102155516A (en) * 2011-01-24 2011-08-17 北京航空航天大学 Eight-rod-redundant-configuration and six-degree-of-freedom active vibration control device
CN102412695A (en) * 2011-09-23 2012-04-11 北京航空航天大学 Voice coil actuator based on linear elastic double-membrane spring structure
CN107943128A (en) * 2017-12-25 2018-04-20 北京航空航天大学 A kind of multivariant voice coil loudspeaker voice coil vibration isolation vibration suppression structure and its control method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109921599A (en) * 2019-03-28 2019-06-21 深圳市赫瑞科技有限公司 A kind of linear motor with flexible base
CN112688531A (en) * 2020-12-18 2021-04-20 上海大学 Voice coil motor active suspension
CN114233785A (en) * 2021-11-30 2022-03-25 沈阳航天新光集团有限公司 Dynamic vibration absorber
CN114244065A (en) * 2021-12-03 2022-03-25 北京辰阳自动化科技有限公司 Voice coil motor and flexible vibration dish

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