CN100465473C - Actuator arrangement for active vibration isolation comprising an inertial reference mass - Google Patents

Actuator arrangement for active vibration isolation comprising an inertial reference mass Download PDF

Info

Publication number
CN100465473C
CN100465473C CNB2004800254962A CN200480025496A CN100465473C CN 100465473 C CN100465473 C CN 100465473C CN B2004800254962 A CNB2004800254962 A CN B2004800254962A CN 200480025496 A CN200480025496 A CN 200480025496A CN 100465473 C CN100465473 C CN 100465473C
Authority
CN
China
Prior art keywords
sensor
actuator
reference mass
output signal
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004800254962A
Other languages
Chinese (zh)
Other versions
CN1846082A (en
Inventor
M·J·弗伍德唐克
T·A·M·鲁杰尔
R·M·G·里杰斯
J·C·A·穆勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of CN1846082A publication Critical patent/CN1846082A/en
Application granted granted Critical
Publication of CN100465473C publication Critical patent/CN100465473C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

Actuator arrangement with an actuator (8), a reference mass (22), a spring (24) and a first sensor (26; 42, 43; 32, 36). The actuator (8) applies a force between a first object (2) and to a second object (16; 54). The reference mass (22) is, in use, supported by a third object (16; 56) by means of the spring (24). The first sensor (26; 42, 43; 32, 36) generates a first distance signal that depends on a first distance (z2; z5,z6; z3,z4) between the reference mass (22) and the first object (2) and is applied to a controller (6) to actuate the actuator (8).

Description

The actuator devices that is used for active vibration isolation that comprises inertial reference mass
The present invention relates to a kind of actuator devices that is used for active vibration isolation (active vibration isolation) that comprises inertial reference mass (inertial reference mass).
Fig. 1 shows the active vibration isolation system according to prior art. and this system comprises useful load (payload) 2, and it for example can be the metrology frame (metroframe) in the lithography machine (lithography machine).Velocity transducer 4 is connected to useful load 2.Can use acceleration transducer to replace velocity transducer.Sensor 4 can be geophone (geophone).
Sensor 4 is connected to controller 6, and this controller 6 is called as " trolley crane (skyhook) " controller sometimes.Controller 6 can be any suitable program control (little) computer.
Yet, can use analog-and digital-circuit in suitable occasion.
Between useful load 2 and " ground (earth) " 16, provide actuator 8.Controller 6 is connected to actuator 8 so that provide suitable control signal for actuator 8.Can observe, the connection between sensor 4, controller 6 and the actuator 8 is shown as side circuit.Yet as known to persons of ordinary skill in the art, these connections can be wireless connections. this observation also is applicable to other connections shown in the other embodiments of the invention.
Actuator 8 shows with a kind of shows in schematic form.Actuator 8 can be Lorentz (Lorenz) motor or other are arranged to the power that produces when controlled device 6 controls a suitable actuator.
Fig. 1 also shows airmount (airmount) 10, comprises piston 12 and shell 14, and piston 12 can move up and down in this shell 14. in use, be full of air (or other suitable gas) in the shell 14.Valve 20 is provided, and is connected to shell 14 by passage 21.A controller is connected to valve 20 to control its operation.Provide sensor 18 to measure airmount 10 shell 14 and the distance z 1 between the useful load 2.Sensor 18 is connected to comparator 17, and comparator 17 is also accepted reference signal zlref.Sensor 18 generates the output signal of expression distance z 1.The proportional output signal of difference between the output of comparator 17 generations and zlref and sensor 18, and apply it to controller 19.Controller 19 encourages valve 20 by this way so that distance z 1 is controlled at the horizontal zlref of expection.
Controller 6 and 19 needs not be the physical location that separates.They can be implemented as the program of the separation that moves on same computer.
In fact, useful load 2 can be very heavy, for example 3000 kilograms or more.Be not that absolute demand provides the device of airmount 10 as ACTIVE CONTROL.Alternatively, it can be a kind of passive isolation mounting.Can use other isolation mountings for example spring replace airmount 10.
In practical situation, known for those of ordinary skills, can use three or four airmount 10 to support useful load 2 usually.And Fig. 1 shows an actuator devices, comprises sensor 4, controller 6 and actuator 8, yet, in fact a plurality of actuator devices can be arranged.Then, this actuator devices is configured to any one or combination that should different degrees of freedom in the six-freedom degree (x, y, z and rotation about x, y and z) and realizes vibration isolation.
Fig. 2 a shows the transfer rate of prior art systems (transmissibility) as shown in Figure 1.In order to make Fig. 2 a clearer,, wherein show the useful load of being supported by the active vibration isolation AVI that is placed on the ground 16 2 with reference to Fig. 2 c.Active vibration isolation AVI comprises airmount 10 and active actuator 8, and sensor shown in Figure 1 and controller.Useful load 2 can move up and down with amplitude z, thereby ground 16 can move up and down with amplitude h.Now, transfer rate is described to ratio z/h, and promptly z is to the dependence of the h function as frequency.
Curve A is this dependent example.Curve A shows the above vibration of 2Hz.Below 2Hz, any vibration on (follow) ground 16 will be only followed in useful load 2: isolated system has the eigenfrequency of 2Hz. and as one of ordinary skill in the known, this eigenfrequency is suppressed preferably.
Now, be designed to have the eigenfrequency of 0.5Hz so suppose this active vibration isolation AVI., can be easy to find out that for the vibration with the equal frequencies more than 2Hz, ratio z/h approximately can be littler 16 times than first kind of situation.This more performance shows with curve B in Fig. 2 a.
Yet, shown in reference Fig. 2 b, shortcoming is so also arranged.Fig. 2 b shows the flexibility (compliance) of the system of summarizing among Fig. 2 c.This flexibility is described to ratio z/F, and wherein F equals to be applied directly to the power (for example because the reaction force of the moving object in the useful load 2) in the useful load.As one of ordinary skill in the known, when design has the active vibration isolation AVI of low eigenfrequency, can cause relatively poor flexibility.For example, yet the curve D among Fig. 2 b shows the flexible z/F. about the active vibration isolation with 2Hz eigenfrequency, if this active vibration isolation AVI is designed to have the eigenfrequency of 0.5Hz, curve D can be displaced to curve C.As can be seen, for this frequency below 0.5Hz eigenfrequency, flexible z/F will be approximately high 16 times in the last situation of 2Hz than eigenfrequency.
So, have incidence relation if Fig. 2 a and 2b show between according to transfer rate in the prior art systems of Fig. 1 and flexibility. and wanting to improve transfer rate by reducing suspension frequency (suspensionfrequency), will be cost with the flexibility, and vice versa.
Notice, at P.G.Nelson, " An active vibration isolationsystem for inertial reference and precision measurement ", Rev.Sci.Instrum.62, (9), September 1991, disclose a kind of low frequency active vibration isolation system among the pages 2069-2075.Nelson has described a kind of seismoscope, comprise be stabilized and with the useful load of isolating from the vibration on ground.This useful load is passed through first spring suspension on " ground ".Parallel with this first spring, have the actuator damped vibration.
By second spring additional Reference mass is suspended in the useful load.Provide a sensor to measure the distance between this useful load and the additional reference mass.By the actuator between this signal of sensor control useful load and " ground ".This piece document is not open by the Reference mass of ground supports, this Reference mass and the reference that will follow as useful load.
The purpose of this invention is to provide a kind of active vibration isolation arrangement, can substantially improve it flexible the time, also have transfer rate identical or that improve.
For this reason, the invention provides a kind of actuator devices, comprise actuator, Reference mass, first suspension and the first sensor that at least one degrees of freedom, have at least one predetermined spring performance, this actuator is arranged between first object and second object and applies power, this Reference mass is arranged to by first suspension by the 3rd object support, and this first sensor is arranged to generate first distance signal that depends on first distance between the Reference mass and first object, and controller is used this first distance signal to encourage this actuator.
By this way, the invention provides a kind of active vibration isolation system, wherein first object (for example useful load) is followed this additional reference mass.This additional reference mass is isolated by suspension and second object (for example ground).As hereinafter describing in detail, independently transfer rate and flexible possibility (in the frequency range of this active vibration Control work) are provided like this.Though in prior art systems, transfer rate and flexibility are relevant parameters, and they are independently in framework of the present invention.In the prior art, when improving one of these two parameters by the eigenfrequency that changes this isolated system, this improvement is a cost with another parameter, and in the present invention can to the two or only one improve. additional reference mass and suspension thereof can be with respect to its expectation functions and optimum design, be that picture element amount-spring system or quality-damping-spring system is equally worked, its response only depends on its design and the excitation of second object, avoids other all parasitic disturbances here as much as possible.
In one embodiment, this actuator devices comprises that second sensor is used to measure the second distance between first object and second object, first wave filter is connected to first sensor to generate the first filtering output signal, second wave filter is connected to second sensor to generate the second filtering output signal, and this first and second filtering output signal is applied to controller.
Can comprise shell according to actuator devices of the present invention, be arranged to protect this Reference mass, and this suspension supports this Reference mass.
In other embodiments, actuator devices comprises additional sensor and wave filter, this additional sensor is arranged to the additional distance between the measuring basis quality and second object, and be arranged to provide the wave filter of filtering output signal for this and generate tes signal output, this filtering output signal is applied to controller to compensate the vibration transfer of this second object to first object.
This suspension can be implemented in any suitable mode known to a person of ordinary skill in the art.Example be by second actuator, be used to measure another additional distance between this additional reference mass and second object another additional sensor, be arranged to receive another tes signal output and encourage the additional controller of this second actuator to implement this suspension from this another additional sensor.In this framework, this suspension can be depended on the selected spring constant of design to have according to expection by ACTIVE CONTROL, and for example this spring needs the movable time cycle.
The invention still further relates to a kind of active vibration isolation arrangement, comprise aforesaid at least one actuator devices and comprise and be used to encourage the controller of this actuator at least.
Below, the present invention is described in detail with reference to some accompanying drawings.
These accompanying drawings only are used to illustrate the present invention and some embodiments only are shown.They limit the invention never in any form.The present invention is only limited by appended claim and technical equivalences thereof.
Fig. 1 shows the active vibration isolation system according to prior art;
Fig. 2 a shows and the relevant curve of transfer rate according to the system of Fig. 1;
Fig. 2 b shows and the relevant curve of flexibility according to the system of Fig. 1;
Fig. 2 c be used for interpretation maps 2a and 2b, according to the sketch of summarizing very much of the system of Fig. 1;
Fig. 3 is an active vibration isolation system according to an embodiment of the invention;
Fig. 4 a shows the relevant curve of transfer rate with system shown in Fig. 3 and Fig. 1;
Fig. 4 b shows and the relevant curve of flexibility according to the system of Fig. 3 and Fig. 1;
Fig. 5 a is similar with 4b to Fig. 4 a with 5b, yet is relevant with specified structure according to the system of Fig. 1;
Fig. 6-12 shows the different embodiments according to active vibration isolation system of the present invention.
Can observe, in institute's drawings attached, identical reference number indication components identical or parts.
Fig. 3 shows the first embodiment of the present invention.
In device, removed the sensor 4,18 that exists in the device of Fig. 1 according to Fig. 3.
Additional reference mass 22 is provided on ground 16 and passes through suspension 24 supports.Suspension 24 can be the spring with spring constant.Yet alternatively, it can be the combination of spring and damper (for example sky hook damper), and has predetermined spring and damping characteristic.Below, for simplicity, usually it is called spring 24.
This suspension that in fact, more different degrees of freedom can be arranged. then, quality 22 can be as the Reference mass in a plurality of degrees of freedom.
Sensor 26 is provided to measure the distance z 2 between additional reference mass 22 and the useful load 2.Sensor 26 sends output signal to comparator 28.Comparator 28 also receives reference signal zref and deduct the output signal that receives from sensor 26 from zref.Be compared device 28 based on the output signal of this comparison and be applied to controller 6.Controller 6 is connected to actuator 8 and can be connected to valve 20.
Those of ordinary skills will be clear, this additional reference mass 22 do not need by spring 24 be supported on ground 16 from one's body.Alternatively, additional reference mass 22 can be supported on the pedestal that for example is positioned on the ground 16 by spring 24.
The overall thought of the framework of Fig. 3 is, additional reference mass 22 and support together can be with respect to its expectation function and optimum design, be that picture element amount-spring system or quality-damping-spring system is equally worked, its response only depends on its design and the excitation of second object 16, avoids other all parasitic disturbances for example to rub or crosstalk here as much as possible.
Make useful load 2 follow the position of additional reference mass 22 by CONTROLLER DESIGN 6, can significantly improve transfer rate and flexible combination, shown in reference Fig. 4 a, 4b, 5a and 5b.
Fig. 4 a shows curve A and the B ' that compares with curve A and the B of Fig. 2 a.Curve A shows the transfer rate of system that eigenfrequency is Fig. 1 of 2Hz.In this case, airmount 10 is described to the airmount of 2Hz.Curve B ' show is about the actuator devices of Fig. 3 with 0.5Hz eigenfrequency and also be the transfer rate of the airmount 10 of 2Hz airmount.In the right lower side of Fig. 4 a, curve B ' increase, but this is by the decision of the selection bandwidth of this control circle.
Fig. 4 b shows compliance curves.Curve D shows the flexibility of the device of the Fig. 1 with 2Hz eigenfrequency once more. and curve E shows the flexibility of the actuator devices of Fig. 3. and curve E shows that this flexibility significantly improves, it promptly approximately can be 125 times of curve D or better, up to frequency by this control circle decision.
In Fig. 5 a, curve B shows has the 0.5Hz eigenfrequency and airmount is the transfer rate of the system shown in Figure 1 of 0.5Hz airmount.In Fig. 5 a, curve B ' with the curve B shown in Fig. 4 a ' identical, promptly it relates to the transfer rate of the actuator devices shown in Figure 3 of Reference mass eigenfrequency with 0.5Hz and 2Hz airmount 10.Thereby Fig. 5 a illustrates, because the selection of airmount and limited bandwidth, and for higher frequency, can be poorer according to the transfer rate of the device of Fig. 3 than the known devices of Fig. 1.
Fig. 5 b shows the flexibility of known devices that eigenfrequency is Fig. 1 of 0.5Hz by curve C.Fig. 5 b has also shown at curve E shown in Fig. 4 b, relevant with the device of Fig. 3.Now as can be seen, for the prior art systems of low eigenfrequency with 0.5Hz, relatively more remarkable with the system of Fig. 3 than prior art systems with 2Hz eigenfrequency.That is to say that Fig. 5 b shows that this improvement can be above 2000 times.
Thereby Fig. 4 a, 4b, 5a and 5b show, by framework of the present invention, can improve transfer rate and flexibility simultaneously.Transfer rate and flexible be associated no longer in the situation of prior art.Can select to improve the two or only one of them and can not reduce another. this improvement is possible, because useful load 2 must be followed for example additional reference mass 22 of independent reference quality now.
Can observe, in device according to Fig. 3, controller 6 do not need control valve 20. airmount 10 can by passive isolated system for example (large-scale) spring constitute.Further alternative is not use airmount 10 or equivalent spring.The actuator devices that this comprises actuator 8, additional reference mass 22, spring 24 and sensor 26 can be provided as the independent unit of using in any active vibration isolation system.In the time of in being applied to system shown in Figure 3 (other embodiments perhaps), this additional reference mass 22 can be designed as has for example 0.5Hz of lower eigenfrequency.If like this, the airmount 10 that supports useful load 2 so can be designed as have higher eigenfrequency for example 2Hz and even can be passive, up to characteristic frequency, this useful load can be worked as the system with 0.5Hz airmount, with respect to transfer rate simultaneously.This airmount 10 is more cheap than the airmount 10 with 0.5Hz eigenfrequency.
In the time of in being applied to system shown in Figure 3, wherein Reference mass has the eigenfrequency of 0.5Hz, and airmount 10 also can be designed as the eigenfrequency with 0.5Hz.In this case, do not open or close by the switching actuator device and can change transfer rate, and flexibility can significantly improve.
Can observe, spring 24 itself may be embodied as active vibration isolation arrangement.For example, quality 22 and spring 24 can be designed as system shown in Figure 1.Then, additional reference mass 22 equals useful load 2, and spring 24 is arranged to comprise sensor 4,18, valve 20, passage 21, airmount 10 (or other spring, may be passive), actuator 8 and controller 6.Certainly, these elements need by the level of calibration for expection.
Fig. 6 shows another embodiment of the present invention.In Fig. 6, spring 24 is implemented by actuator 30, sensor 32 and controller 34.Sensor 32 is arranged to measure the distance z 3 between quality 22 and the ground 16.Sensor 32 outputs to controller 34 with output signal.Controller 34 is arranged to encourage this actuator 30.Actuator 30 can be a for example lorentz actuator of any suitable actuator.
The framework of actuator 30, sensor 32 and controller 34 is configured to, and makes it to work as having the suspension of predetermined spring constant or spring and damping constant.For example with additional reference mass 22, Fig. 6 should " quality-spring " system (comprising quality 22 and spring 24) can be designed to have the eigenfrequency of 0.5Hz.Drive spring 24 shown in this can pass through is realized at an easy rate. be noted that and consider and will stop or minimize all ghost effects that the low eigenfrequency of this 0.5Hz is difficult to for the physics spring.For example, mechanical spring can be easy to introduce the parasitic capacity that the internal resonance by this spring self causes.
And, the output signal and the reference altitude of sensor 32 can be compared, thereby make controller 34 control actuators 30 quality 32 is remained on the offset height z3 of expection.This reference altitude provides option according to client's needs command range z3 for this device.This distance z 3 can have the desired value of the expected offset distance between the useful load of depending on 2 and second object 16.
And, the device of Fig. 6 also provides the option that changes the eigenfrequency of additional reference mass 22 and spring 24 during measuring. for example, may wish during certain time cycle, to have for example eigenfrequency of 10Hz, and during the time cycle after a while, have the eigenfrequency of 0.5Hz.
In addition, the structure of Fig. 6 can be designed to make it (almost) and not have hysteresis fully.
Can observe, spring 24 also can utilize spring with negative spring constant k to realize as the part of spring 24.This is that those of ordinary skills are known, does not need here to further describe.For example can reference site Www.minusk.com.
Fig. 7 shows another embodiment of the present invention.
Except the components/elements of having described with reference to earlier drawings, the device of Fig. 7 also comprises, is used to measure the sensor 36 of the distance z 4 between useful load 2 and the ground 16.Sensor 36 is connected to low-pass filter 38.Low-pass filter 38 is connected to comparator 28.
Measuring the sensor 26 of the distance z 2 between additional reference mass 22 and the useful load 2 shown in preceding figure, is not to be directly connected to comparator 28 but to be connected to high-pass filter 40. high-pass filters 40 correspondingly to be connected to comparator 28.
Because low-pass filter 38, the output signal of sensor 36 are significant for low frequency, by this wave filter designing institute decision.And the output signal of sensor 26 will mainly influence the feedback for the frequency more than the cut frequency of high-pass filter 40.Preferably, the cut frequency of wave filter 38,40 is relevant with the eigenfrequency of additional reference mass 22 and spring 24.Thereby in device shown in Figure 7, useful load 2 will mainly be followed the motion on ground 16 in low-frequency range, and useful load 2 will mainly be followed the motion of additional reference mass 22 in high-frequency range.This be designed to Reference mass fully the situation of damping solution is provided.
Should be noted in the discussion above that spring 24 can design with aforesaid any way.The cut frequency that should also be noted that wave filter 38,40 can be different.Shall also be noted that wave filter 38,40 can expand to (a plurality of) general second-order filters to compensate specific dynamic effect.For example, wave filter 40 can be designed so that the influence of sensor 26 in scheduled frequency range minimizes, and promptly wave filter 40 can be a notch filter.Then, wave filter 38 can be designed as band-pass filter, thereby sensor 36 has influence more by force in same frequency range.
Fig. 8 shows another embodiment of the present invention.
In device, around additional reference mass 22 and spring 24, provide shell 44 according to Fig. 8.Shell 44 is used to protect additional reference mass 22 and spring 24 not to be subjected to cause the external disturbance of additional reference mass 22 vibrations to influence.The example of this external disturbance is an acoustic signal.
In the device of Fig. 8, provide sensor 42 to measure the distance z 5 between additional reference mass 22 and shell 44 upper surfaces.Another sensor 43 is provided for the distance z of measuring between shell 44 upper surfaces and the useful load 26.Sensor 42 sends output signal to comparator 28.Sensor 43 also sends output signal to comparator 28.Be easy to as can be seen, distance z 4 and z5's and and front embodiment in distance z 2 between linear.Thereby the device of Fig. 8 is about this reponse system and Fig. 3,6 and 7 device equivalence.
Shell 44 comprises space 46.In one embodiment, space 46 can be a vacuum, promptly has to be lower than 10 5The pressure of Pa is so that further reduce any influence of acoustic signal.
Fig. 8 also shows the optional embodiment of airmount 10.Optionally airmount 10 ' do not comprise can airmount 10 ' shell 14 in the piston 12 that moves freely, but comprise by bellows (bellows) structure or film (membrame) structure be fixed on piston 12 on the shell 14 '.
In embodiment in front, airmount 10 ' the need not be airmount of ACTIVE CONTROL.Alternatively, it can be passive airmount (perhaps other any actives or passive spring assembly) or gravity compensator.Except protecting additional reference mass 22 and spring 24 not to be subjected to the influence of external disturbance better, the device of Fig. 8 also provides more option about measuring distance z5 and z6.
Fig. 9 shows another embodiment of the present invention.
The device of Fig. 9 is similar to the device of Fig. 8.Difference is that sensor 42,43 is replaced by sensor 36 and 32.The distance z 4 (in Fig. 7) that sensor 36 is measured between useful load 2 and the ground 16.The output signal of sensor 36 is applied directly to comparator 28.Sensor 38 is measured the distance z 3 (in Fig. 6) between additional reference mass 22 and the ground 16 and will be sent to comparator 28 corresponding to the output signal of this distance z 3.Comparator 28 with the output signal of sensor 32 and reference signal zref mutually adduction deduct the output signal of sensor 36.By this way, comparator 28 is applied to controller 6 with output signal, and this output signal is the indication of z4-z3, and it is with proportional according to the distance z 2 of Fig. 3,6 and 7 device.
Can observe sensor 43 and 36 is technical equivalences: because shell 44 is rigid bodies of fixing, their output signal only differs a predetermined constant.Sensor 42 and 32 also is to differ a constant, and is negative sign.
Figure 10 shows another embodiment of the present invention.
The device of Figure 10 comprises sensor 32,42 and 43, is respectively applied for measuring distance z3, z5 and z6, as reference Fig. 6,8 described.The output signal of sensor 32 is sent to multiplier 50, and its output signal with sensor 32 multiply by the factor-k1.The output signal of multiplier 50 is applied to comparator 28.Thereby comparator 28 will send to controller 6 with the proportional output signal of z5+z6-k1.z3.In the present embodiment, signal-k1.z3 is used as the vibration of feed-forward signal with compensation ground 16, and this vibration can arrive useful load 2 by all types of mechanical structures between useful load 2 and the ground 16 (for example cable, cooling water, airmount etc.).This compensating signal can also be used for other embodiments.
Notice that once more z3 and z5 only differ a fixed constant and negative sign.Thereby, can be by independent use sensor 32 or 42 and its output signal carried out filtering obtaining identical effect, thus the device of Figure 10 can be simplified.
And, can observe, multiplier 50 generally can be a wave filter, it just is not used for multiplying each other with-k1.It can for example be a low-pass filter.
Figure 11 shows another embodiment of the present invention.
Similar among the embodiment of Figure 11 and Fig. 3, its difference is as follows.
At first, Reference mass 22 is not directly to be supported by ground 16.Instead, Reference mass 22 is to be supported by first subframe 56 by spring 24.This first subframe 56 is supported by ground 16 by spring 57.
The second, actuator 8 is not directly to be supported by ground 16.Instead, actuator 8 is supported by second subframe 54.This second subframe 54 is supported by ground 16 by spring 55.
The 3rd, airmount 10 is not directly to be supported by ground 16.Instead, airmount is supported by the 3rd subframe 52.The 3rd subframe 52 is supported by ground 16 by spring 53.
This first, second and the 3rd subframe 52,54,56 do not interconnect.
About actuator 8, the framework of Figure 11 has the following advantages.Actuator 26 is measured the displacement of useful load 2 with respect to Reference mass 22.Based on the output signal of sensor 26, controller 6 generates the control signal that is used for actuator 8 so that actuator 8 produces controlled power for useful load 2, as mentioned above.By doing like this, can control the position of useful load 2 with respect to Reference mass 22.Suppose that in the framework of Fig. 3, ground 16 has limited quality, then can ground 16 is subjected to displacement.In the framework of Fig. 3, the displacement of this back causes Reference mass 22 to be moved by the power by spring 24 transmission.Its result can be:
-because the unexpected of Reference mass 22 moves, the performance of control system reduces: this object need have for the stable as far as possible Reference mass 22 in its position;
-because the transmission of the power that produced of actuator 8, it is unstable that control circle can become. by the displacement of Reference mass 22, the value of the Z2 that sensor 26 is measured changes, and the power that causes actuator 8 to be produced further changes.In the framework of Fig. 3, in order to prevent the instable generation of control circle, must reduce the bandwidth of this control circle, yet but cause relatively poor performance like this.
By increase to support actuator 8 and himself by spring 55 by the subframe 54 of ground supports, any power that actuator 8 is produced is not directly to be sent to ground 16 but filtered.This has caused comparing with the framework of Fig. 3, and the displacement on ground 16 reduces and and then causes the displacement of Reference mass to reduce.Certain filtering amount and whole improvement depend on the design alternative of being done for the spring constant (and damping) of the quality of first subframe 54 and spring 55.
Can further further improve by increase subframe 56 by increasing the improvement that subframe 54 and spring 55 obtained, this subframe 56 supports Reference mass 22 and himself passes through spring 57 by ground supports by spring 24.Then, can be created in the further filter deffect of the power of transmission between actuator 8 and the Reference mass 22.It is not absolute demand additional application subframe 54 and 56 simultaneously.Do not use subframe 54 just can obtain improvement for framework among Fig. 3 by using subframe 56.
Be noted that in practical situation four this actuators 8 and three sensors 26 and three Reference mass 22 can be arranged.These three sensors 26 and three Reference mass 22 can be implemented as three sensor units, and each sensor unit comprises a sensor 26 and a Reference mass 22.These sensor units and actuator 8 can be arranged to mutually away from.
At last, except the framework of Fig. 3, perhaps as independent measurement, airmount 10 can be supported on the subframe 52, causes directly from ground 16 transmission to the power of airmount 10 to prevent any displacement owing to ground 16.
Figure 12 shows another embodiment of the present invention.
In the device of Figure 12, the framework of Fig. 3 is with combined with reference to the trolley crane device of Fig. 1 explanation.Sensor 4 is shown as for controller 62 and produces output signal. and for the purpose of integrity, this output signal is shown as and is applied to comparator 60, and this comparator 60 is with this output signal and reference signal Zref, and a compares.Comparator 60 produces output signal for controller 62.Controller 62 depends on the signal that receives from comparator 60 and produces control signal.The control signal addition that in summation device 58, this control signal and controller 6 is produced.Thereby two power that control signal control is generated by actuator 8 of two controllers 6,62.Those of ordinary skills should be understood that, must not be the controllers 6,62 of two separation.Can provide required function by an independent controller of programming in a suitable manner.
The prior-art devices of Fig. 1 can be the low frequency truncated system, has the cut frequency of 0.5-5Hz scope.Yet in the device according to Figure 12, because should be by the control circle of sensor 26 and controller 6, cut frequency can be higher, for example 20-80Hz scope in.If like this, in the device of Figure 12,4 needs of sensor are suitable for working in the system with the cut frequency that is typically 20-80Hz so.In fact, this is an easier task: using scope needs extra measurement at the sensor 4 of 0.5-5Hz, for example uses stretching wave filter known to a person of ordinary skill in the art (stretch filter).In the device of Figure 12, can omit this wave filter.
Those of ordinary skills should be understood that the present invention is not limited to the foregoing description.Various selections are possible.
For example, in fact, this device can reverse with respect to shown device.And controller 6,34 is shown as independent unit.In fact, they may be embodied as the independent program on same computer. and the sensor of measuring same distance is represented with identical reference number.Yet they can be different. Wave filter 38,40 can be the part of controller 6.The program that they may be embodied as analog filter, digital filter or move on computers.Comparator 28 needs not be independent unit, but can be integrated in the controller 6, perhaps as a computer program element or a part.Comparator 60 needs not be independent unit, but can be integrated in the controller 62, perhaps as a computer program element or a part.Multiplier 50 can be similarly as the integration section of controller 6.Airmount 10,10 ' can be replaced by gravity compensator.Sensor can be capacitive transducer or interferometer.If necessary, can between controller and actuator, amplifier be set.
And, can make up different embodiments' different piece.For example, in the embodiment of Fig. 9, can omit shell 44.In Figure 10, also can omit shell 44.Then, sensor 42,43 will be replaced by sensor 26.
In addition, can have more than an airmount support useful load 2.Additional reference mass 12 can be hanging more than one degree of freedom, and can be to be used for measuring useful load 22 in the reference preferably more than the position of one degree of freedom.So, can provide multisensor more to measure distance between useful load 2 and the Reference mass 22 to obtain information about distance in a plurality of degrees of freedom and rotation.The output of these sensors is applied to the multiple-input and multiple-output processor, and this processor is controlled the degrees of freedom excitation useful load 2 of a plurality of actuators (by suitable amplifier) with expection.Can provide a plurality of additional reference mass 22 to replace this additional reference mass 22 with suspension 24 with suspension 24.All these alternative/additional aspects all comprise within the scope of the appended claims.

Claims (13)

1. actuator devices, first suspension (24) and the first sensor (26 that comprise actuator (8), Reference mass (22), at least one degrees of freedom, have at least one predetermined spring performance; 42,43; 32,36), this actuator (8) is provided in first object (2) and second object (16; 54) apply power between, this Reference mass (22) is configured to by described first suspension (24) by the 3rd object (16; 56) support, and described first sensor (26; 42,43; 32,36) be set to generation and depend on the distance of first between described Reference mass (22) and described first object (2) (z2; Z5, z6; Z3, first distance signal z4), and described first distance signal offered controller (6) to encourage described actuator (8).
2. actuator devices according to claim 1, wherein said actuator (8) is a lorentz actuator.
3. according to the described actuator devices of any one claim of front, wherein said actuator devices comprises second sensor (36) that is used to measure the second distance (z4) between described first object (2) and described second object (16), be connected to described first sensor (26) to generate first wave filter (40) of the first filtering output signal, with be connected to described second sensor (36) to generate second wave filter of the second filtering output signal, this first and second filtering output signal is applied to described controller (6).
4. actuator devices according to claim 1; wherein said actuator devices comprises shell (44); be arranged to protect described Reference mass (22) and described first suspension (24); and has the surface that is arranged between described first object (2) and the described Reference mass (22); described first sensor comprises the first sub-sensor (42) and the second sub-sensor (43); the described first sub-sensor (42) is arranged to measure the 3rd distance (z5) between the described surface of described Reference mass (22) and described shell (44), and the described second sub-sensor (43) is arranged to measure the described surface of described shell (44) and the 4th distance (z6) between described first object (2).
5. actuator devices according to claim 1, wherein said first sensor (26) comprises the first sub-sensor (36) and the second sub-sensor (32), and this first sub-sensor (36) is configured to measure described first object (2) and described the 3rd object (16; 56) distances of the 3rd between (z4) also generate the 3rd output signal, and this second sub-sensor (32) is arranged to measure described Reference mass (22) and described the 3rd object (16; 56) the 4th between distance (z3) also generates the 4th output signal, deducts the 4th output signal before from described the 3rd output signal being sent to described controller (6).
6. actuator devices according to claim 5 comprises shell (44), is used to protect described Reference mass (22) and described first suspension (24).
7. actuator devices according to claim 1 comprises additional sensor (32) and wave filter (50), and this additional sensor (32) is arranged to measure described Reference mass (22) and described the 3rd object (16; 56) additional distance between (z3) also generates tes signal output to be used for described wave filter (50), described wave filter (50) is arranged to provide the output signal of filtering, and the output signal of this filtering is sent to described controller (6) to compensate the vibration transfer of described second object (16) to described first object (2).
8. actuator devices according to claim 1, wherein said first suspension (24) by second actuator (30), be used to measure described Reference mass (22) and described the 3rd object (16; Another additional sensor (32) of another additional distance (z3) 56) and be arranged to receive another tes signal output and encourage the additional controller (34) of described second actuator (30) to realize from described another additional sensor (32).
9. actuator devices according to claim 1, wherein said second object and described the 3rd object are same.
10. actuator devices according to claim 1, wherein said the 3rd object (56) is supported by described second object (16) by second suspension (57), described actuator is supported by the 4th object (54) and the 4th object passes through the 3rd suspension (55) by described second object support.
11. actuator devices according to claim 1, wherein said actuator devices comprise trolley crane control gear (4,62), are used to control the displacement of described first object (2).
12. active vibration isolation arrangement comprises according to the described actuator devices of any one claim of front, and comprises that described controller (6) is used for controlling at least described actuator (8).
13. active vibration isolation arrangement according to claim 12 comprises at least one airmount (10; 10 '), be used to support described first object (2).
CNB2004800254962A 2003-09-05 2004-08-17 Actuator arrangement for active vibration isolation comprising an inertial reference mass Expired - Fee Related CN100465473C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP03103305.3 2003-09-05
EP03103305 2003-09-05
EP04101604.9 2004-04-19

Publications (2)

Publication Number Publication Date
CN1846082A CN1846082A (en) 2006-10-11
CN100465473C true CN100465473C (en) 2009-03-04

Family

ID=37064637

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004800254962A Expired - Fee Related CN100465473C (en) 2003-09-05 2004-08-17 Actuator arrangement for active vibration isolation comprising an inertial reference mass

Country Status (1)

Country Link
CN (1) CN100465473C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103226361A (en) * 2013-04-28 2013-07-31 上海宏力半导体制造有限公司 Method and structure of controlling Z direction of optical platform with active vibration isolation system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103047357B (en) * 2012-12-19 2014-12-24 哈尔滨工业大学 Double-layer orthogonal air floatation decoupling and sliding knuckle bearing angular decoupling eddy-current damping vibration isolator
CN106715955B (en) * 2014-09-23 2020-06-09 博格华纳公司 Control strategy for variable spring rate shock absorber
CN108999919B (en) * 2018-08-27 2023-08-29 爱柯迪股份有限公司 Anti-vibration shell of ECU (electronic control Unit) of reversing system

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08219230A (en) * 1995-02-14 1996-08-27 Atsushi Shimamoto Vibration isolator
US5823307A (en) * 1994-04-04 1998-10-20 Technical Manufacturing Corporation Stiff actuator active vibration isolation system
US6022005A (en) * 1996-09-27 2000-02-08 Trw Inc. Semi-active vibration isolator and fine positioning mount
JP2000065128A (en) * 1998-08-25 2000-03-03 Kanagawa Acad Of Sci & Technol Active vibration resistant device
CN1275448A (en) * 1999-05-26 2000-12-06 神钢电机株式会社 Vibration-damper for steel sheet
US6322060B1 (en) * 1998-04-08 2001-11-27 Canon Kabushiki Kaisha Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method
US20030052548A1 (en) * 2001-08-22 2003-03-20 Hol Sven Antoin Johan Lithographic apparatus and motor for use in the apparatus
CN1424519A (en) * 2001-12-10 2003-06-18 中国科学技术大学 Vibration absorbing device and its control method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5823307A (en) * 1994-04-04 1998-10-20 Technical Manufacturing Corporation Stiff actuator active vibration isolation system
JPH08219230A (en) * 1995-02-14 1996-08-27 Atsushi Shimamoto Vibration isolator
US6022005A (en) * 1996-09-27 2000-02-08 Trw Inc. Semi-active vibration isolator and fine positioning mount
US6322060B1 (en) * 1998-04-08 2001-11-27 Canon Kabushiki Kaisha Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method
JP2000065128A (en) * 1998-08-25 2000-03-03 Kanagawa Acad Of Sci & Technol Active vibration resistant device
CN1275448A (en) * 1999-05-26 2000-12-06 神钢电机株式会社 Vibration-damper for steel sheet
US20030052548A1 (en) * 2001-08-22 2003-03-20 Hol Sven Antoin Johan Lithographic apparatus and motor for use in the apparatus
CN1424519A (en) * 2001-12-10 2003-06-18 中国科学技术大学 Vibration absorbing device and its control method

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
AN ACTIVE VIBRATION ISOLATION SYSTEMFOR INERTIAL REFERENCE AND PRECISIONMEASUREMENT. NELSON P G.Review of Scientific Instruments,Vol.62 No.9. 1991
AN ACTIVE VIBRATION ISOLATION SYSTEMFOR INERTIAL REFERENCE AND PRECISIONMEASUREMENT. NELSON P G.Review of Scientific Instruments,Vol.62 No.9. 1991 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103226361A (en) * 2013-04-28 2013-07-31 上海宏力半导体制造有限公司 Method and structure of controlling Z direction of optical platform with active vibration isolation system

Also Published As

Publication number Publication date
CN1846082A (en) 2006-10-11

Similar Documents

Publication Publication Date Title
US8091694B2 (en) Actuator arrangement for active vibration isolation comprising an inertial reference mass
JP6308999B2 (en) Active vibration isolation system
CA2603946C (en) Vibration isolation
US7571793B2 (en) Actuator arrangement for active vibration isolation using a payload as an inertial reference mass
US5660255A (en) Stiff actuator active vibration isolation system
Benassi et al. Active vibration isolation using an inertial actuator with local displacement feedback control
Beard et al. Practical product implementation of an active/passive vibration isolation system
JP2012529607A (en) Active vibration isolation and damping system
EP2286110B1 (en) A vibration sensor and a system to isolate vibrations
Beijen et al. Two-sensor control in active vibration isolation using hard mounts
US7822509B2 (en) Control system for active vibration isolation of a supported payload
CN100465473C (en) Actuator arrangement for active vibration isolation comprising an inertial reference mass
NL2004415C2 (en) Active vibration isolation system, arrangement and method.
US20070137954A1 (en) Inertial actuator
Spanjer et al. Optimal active vibration isolation systems for multiple noise sources
Liu et al. A three-degree-of-freedom hybrid vibration isolation system using adaptive proportional control supported by passive weight support mechanism

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090304

Termination date: 20180817

CF01 Termination of patent right due to non-payment of annual fee