CN115727093A - Double-freedom-degree active and passive micro-vibration prevention base with adjustable rigidity - Google Patents
Double-freedom-degree active and passive micro-vibration prevention base with adjustable rigidity Download PDFInfo
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- 230000002265 prevention Effects 0.000 title claims abstract description 15
- 239000002184 metal Substances 0.000 claims description 29
- 229920001967 Metal rubber Polymers 0.000 claims description 17
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 238000002955 isolation Methods 0.000 abstract description 22
- 230000000694 effects Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011217 control strategy Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005188 flotation Methods 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Abstract
The invention provides a double-freedom-degree active and passive micro-vibration prevention base with adjustable rigidity, which comprises a top plate, a support rod A, a piston and a rigidity adjusting device, wherein the rigidity adjusting device comprises a cavity, an air inlet pipe is installed at one side of the cavity, the piston is inserted into the rigidity adjusting device, a diaphragm is installed between the piston and the top of the rigidity adjusting device, a position touch sensor is installed in the middle of the bottom inside the cavity, speed sensors are installed at two ends of the top of the piston respectively, and a controller is also installed at the top of the piston. The invention can meet the vibration isolation requirement of large precise instruments, has adjustable rigidity, wide application range, wide system vibration isolation bandwidth and accurate positioning, and has better vibration isolation effect on vibration interference of 0.2Hz to 250Hz.
Description
Technical Field
The invention relates to the technical field of vibration isolation devices, in particular to a double-freedom-degree active and passive micro-vibration prevention base with adjustable rigidity.
Background
At present, the semiconductor industry is rapidly developed, the precision requirement of semiconductor production equipment is higher and higher, the requirement of the equipment on environments such as micro-vibration is more and more sensitive, a little micro-vibration can reduce the yield of the equipment, and even the equipment can not work normally, so that the isolation of the micro-vibration becomes more and more important.
The micro-vibration caused by the vibration of the external environment and the reaction force inside the equipment is one of the key factors restricting the measurement precision of the ultra-precision instrument and the manufacturing precision of the ultra-precision machining equipment, and the high-performance precise isolation micro-vibration technology becomes a core key technology in the fields of precision engineering, ultra-precision manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration frequency of the ultra-precise measuring instrument and the ultra-precise processing and manufacturing equipment which generate interference mainly vibrates at a low frequency within 0.8-100 Hz. The passive vibration isolator can filter out the vibration from the outside by reducing the natural frequency of the passive vibration isolator in principle, and the vibration isolation effect depends on the natural frequency of the passive vibration isolator. But the natural frequency is proportional to the arithmetic square root of the stiffness of the vibration isolator, namely the smaller the natural frequency, the smaller the stiffness. The passive vibration isolator cannot suppress the disturbance vibration source brought by the load. The actively controlled vibration isolation system is very effective in solving the problem of ultralow-frequency and micro-amplitude vibration isolation, and meanwhile, the disturbance caused by the load can be restrained by selecting a proper structure and a proper control strategy. However, infinitely reducing the natural frequency of the system will simultaneously reduce the bearing capacity of the system, and the requirement of vibration isolation of heavy-load equipment cannot be met. In addition, the rigidity of the existing vibration isolator is generally invariable, and the initial rigidity of the existing vibration isolator cannot be adjusted according to the vibration isolation requirements or the bearing capacity requirements of precision instruments of different models.
The environment of the precision instrument is complex, not only is single low-frequency vibration or high-frequency vibration, but also often the low-frequency vibration and the high-frequency vibration exist at the same time, and the traditional vibration isolation device is difficult to meet the vibration isolation requirement of the complex environment vibration. The vibration isolation belt is narrow, the positioning accuracy of the system is not ideal, and the rigidity of the system cannot be adjusted. And the vibration isolation capability for complex vibration environment is weak.
Disclosure of Invention
The invention aims to provide a double-freedom-degree active and passive microvibration prevention base with adjustable rigidity, which is used for solving the problems in the background technology.
The technical scheme of the invention is realized as follows:
a double-freedom-degree active and passive micro-vibration prevention base with adjustable rigidity comprises a top plate, a support rod A, a piston and a rigidity adjusting device, wherein the support rod A is installed in the middle of the bottom of the top plate, the lower end of the support rod A vertically penetrates into the support column A, a metal spring A is sleeved between the inner side of the top of the support column A, the outer side of the lower end of the support rod A and the inner side of the top of the support column A, metal rubber A is installed between the bottom of the metal spring A and the inner side of the bottom of the support column A, side rods A are vertically connected to the left side and the right side of the upper portion of the support column A respectively, permanent magnets A are installed at the tops of the two ends of the side rods A respectively, electromagnets A are installed above the permanent magnets A and on the inner side of the top of the piston vertically, permanent magnets B are installed at the bottoms of the two ends of the side rods A respectively, electromagnets B are installed below the permanent magnets B vertically connected with the inner side wall of the piston respectively, the left side and the right side of the lower part of the strut A are respectively vertically connected with a side lever B, the left side end of the side lever B is connected with a spherical hinge A, an air cavity is arranged between the spherical hinge A and the inner side wall of the piston, the right side end of the side lever B is provided with a permanent magnet C, the inner side wall of the piston in the horizontal direction of the permanent magnet C is provided with an electromagnet C, the lower part of the side lever B and the inner side wall of the piston are vertically connected with a support plate B, the bottom of the support plate B and the inner side wall of the piston are provided with an annular air cavity, the bottom of the strut A is connected with the spherical hinge B, the bottom of the spherical hinge B is connected with a strut B, the left side and the right side of the middle of the strut B are respectively vertically connected with the side lever C, the tops of the two ends of the side lever C are respectively provided with a permanent magnet D, the electromagnets D are respectively arranged at the bottoms of the support plate C vertically connected with the inner side wall of the piston, voice coil motor is installed respectively to side lever C bottom, voice coil motor installs the bottom in the backup pad D top of being connected with the piston inside wall is perpendicular, pillar B bottom is connected with branch B, inside branch B lower extreme penetrated pillar C perpendicularly, the cover is equipped with metal spring B between the inboard of pillar C top, the branch B lower extreme outside and the pillar C inboard, install metal rubber B between metal spring B bottom and the pillar C bottom inboard, install on piston bottom is inboard pillar C bottom, rigidity adjusting device includes the cavity, the intake pipe is installed to cavity one side, inside the piston inserts rigidity adjusting device, install the diaphragm between piston and the rigidity adjusting device top, the position feeler is installed in the middle of the inside bottom of cavity, speedtransmitter is installed respectively at piston top both ends, the controller is still installed at the piston top.
Further, the top plate is made of stainless steel plate into a circular structure.
Further, the support A, the support B and the support C are all made of stainless steel into cylindrical structures.
Furthermore, a cushion block A is further arranged between the metal spring A and the metal rubber A, and a cushion block B is further arranged between the metal spring B and the metal rubber B.
Further, the metal spring a and the metal spring B are pre-pressing springs.
Further, the rigidity adjusting device is of an inverted T-shaped structure, a layer of air film is formed between the piston and the inner side wall of the rigidity adjusting device during inflation, and the thickness of the air film is 5 microns.
Furthermore, an air inlet hole A entering the air cavity is formed in the wall of the piston, and an air inlet hole B entering the annular air cavity is formed in the wall of the piston.
Furthermore, a pneumatic valve is further installed on the air inlet pipe.
Furthermore, the controller is connected with the electromagnet A, the electromagnet B, the electromagnet C, the electromagnet D, the voice coil motor, the position sensor and the speed sensor through cables.
The beneficial effects of the invention are as follows:
the pneumatic valve is used for controlling the air floatation pressure of the bottom cavity and the upper annular air cavity, the integral rigidity and the bearing capacity of the system are adjusted according to the bearing capacity and the vibration isolation requirement of precision instruments of different types, the system has wide application range, and the load and vibration isolation requirement of 2500kg large precision instruments can be met; the metal spring and the metal rubber parallel connection structure with double-layer design is adopted in the vertical direction to realize high-frequency vibration reduction, and meanwhile, the parallel connection piston air floatation vibration reduction can realize the vibration reduction of the maximum 250 Hz; meanwhile, the vibration reduction of 0.2Hz can be realized at the lowest level by the double-layer magnetic suspension driving series voice coil motor driving in the vertical direction, and the positioning precision is improved; the passive air flotation vibration isolation and the active magnetic levitation drive are connected in parallel horizontally, so that the positioning precision is improved, and the vibration isolation bandwidth is widened. The invention can meet the vibration isolation requirement of large precise instruments, has adjustable rigidity, wide application range, wide system vibration isolation bandwidth and accurate positioning, and has better vibration isolation effect on vibration interference of 0.2Hz to 250Hz.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
In the figure 1-top plate, 2-strut A, 3-piston, 4-stiffness adjusting device, 401-chamber, 402-inlet tube, 403-pneumatic valve, 404-air diaphragm, 405-diaphragm, 5-strut A, 6-metal spring A, 7-metal rubber A, 8-side strut A, 9-permanent magnet A, 10-electromagnet A, 11-permanent magnet B, 12-electromagnet B, 13-support plate A, 14-side strut B, 15-spherical hinge A, 16-air chamber, 17-permanent magnet C, 18-electromagnet C, 19-support plate B, 20-annular air chamber, 21-spherical hinge B, 22-strut B, 23-side strut C, 24-permanent magnet D, 25-electromagnet D, 26-support plate C, 27-voice coil motor, 28-support plate D, 29-strut B, 30-strut C, 31-metal spring B, 32-metal rubber B, 33-position sensor, 34-speed sensor, 35-controller, 36-spacer A, 37-strut B, 38-air hole 39-air hole B.
Detailed Description
The technical solution of the present invention will be described in detail and fully with reference to the following examples, and it should be understood that the described examples are only a part of the examples of the present invention, and not all of the examples. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in figure 1, the rigidity-adjustable two-degree-of-freedom active and passive micro-vibration prevention base comprises a top plate 1, a support rod A2, a piston 3 and a rigidity adjusting device 4, wherein the support rod A2 is installed in the middle of the bottom of the top plate 1, the lower end of the support rod A2 vertically penetrates into a support column A5, a metal spring A6 is sleeved between the inner side of the top of the support column A5, the outer side of the lower end of the support rod A2 and the inner side of the support column A5, a metal rubber A7 is installed between the bottom of the metal spring A6 and the inner side of the bottom of the support column A5, the left side and the right side of the upper portion of the support column A5 are respectively and vertically connected with side rods A8, permanent magnets A9 are respectively installed at the tops of the two ends of the side rods A8, electromagnets A10 are installed above the top of the piston 3 vertically, permanent magnets B11 are respectively installed at the bottoms of the two ends of the side rods A8, electromagnets B12 are respectively installed at the tops of support plates A13 vertically connected with the inner side wall of the piston 3, the left side and the right side of the lower part of the strut A5 are respectively vertically connected with a side lever B14, the left side end of the side lever B14 is connected with a spherical hinge A15, an air cavity 16 is arranged between the spherical hinge A15 and the inner side wall of the piston 3, the right side end of the side lever B14 is provided with a permanent magnet C17, the permanent magnet C17 is arranged in the horizontal direction, the inner side wall of the piston 3 is provided with an electromagnet C18, the lower part of the side lever B14 and the inner side wall of the piston 3 are vertically connected with a support plate B19, the bottom of the support plate B19 and the inner side wall of the piston 3 are provided with an annular air cavity 20, the bottom of the strut A5 is connected with a spherical hinge B21, the bottom of the spherical hinge B21 is connected with a strut B22, the left side lever C23 is respectively vertically connected with the left side and the right side of the middle of the strut B22, the tops of the two ends of the side lever C23 are respectively provided with a permanent magnet D24, and the electromagnet D25 is arranged vertically above the permanent magnet D24, electromagnet D25 installs respectively in the backup pad C26 bottom of being connected perpendicularly with piston 3 inside wall, voice coil motor 27 is installed respectively to side lever C23 bottom, voice coil motor 27 installs the bottom backup pad D28 top of being connected perpendicularly with piston 3 inside wall, pillar B22 bottom is connected with branch B29, branch B29 lower extreme penetrates pillar C30 perpendicularly inside, the cover is equipped with metal spring B31 between pillar C30 top inboard, the branch B29 lower extreme outside and pillar C30 inboard, install metal rubber B32 between metal spring B31 bottom and the pillar C30 bottom inboard, install on piston 3 bottom inboard pillar C30 bottom, rigidity adjusting device 4 includes cavity 401, intake pipe 402 is installed to cavity 401 one side, inside piston 3 inserts rigidity adjusting device 4, install diaphragm 405 between piston 3 and the rigidity adjusting device 4 top, the inside bottom mid-mounting of cavity 401 has position feeler 33, speed sensor 34 is installed respectively at piston 3 top both ends, controller 35 is still installed at piston 3 top.
The top plate is made of stainless steel plates into a circular structure.
The support A5, the support B22 and the support C30 are all made of stainless steel into cylindrical structures.
And a cushion block A36 is further arranged between the metal spring A6 and the metal rubber A7, and a cushion block B37 is further arranged between the metal spring B31 and the metal rubber B32.
The metal spring A6 and the metal spring B31 are pre-pressing springs.
The rigidity adjusting device 4 is of an inverted T-shaped structure, when the air is inflated, a layer of air film 404 is formed between the piston 3 and the inner side wall of the rigidity adjusting device 4, and the thickness of the air film 404 is 5 μm.
An air inlet hole A38 entering the air cavity 16 is formed in the wall of the piston 3, and an air inlet hole B39 entering the annular air cavity 20 is further formed in the wall of the piston 3.
An air-operated valve 403 is also mounted on the air intake pipe 402.
The controller 35 is connected with the electromagnet a10, the electromagnet B12, the electromagnet C18, the electromagnet D25, the voice coil motor 27, the position sensor 33, and the speed sensor 34 through cables.
When the device works, a precision instrument is placed on the top plate 1, the air inlet pipe 402 is controlled by the air valve 403 to inflate the chamber 401 of the rigidity adjusting device 4, the air pressures of the chamber 401 and the annular air cavity 20 are adjusted by controlling the air inflow, so that the bearing capacity and rigidity of the system are adjusted, vibration signals are collected by the position sensor 33 and the speed sensor 34, and then the signals are transmitted to the controller 35. During vertical high-frequency vibration, high-frequency vibration reduction is realized through a vibration reduction structure with a double-layer design, namely, the high-frequency vibration reduction is realized through a metal spring A6, metal rubber A7, a metal spring B31 and metal rubber B32, and meanwhile, the high-frequency vibration reduction is realized through the air floatation pressure of the cavity 401 and the annular air cavity 20 by the parallel piston 3; during vertical low-frequency vibration, the controller 35 controls the magnetic field intensity of the electromagnet A10, the electromagnet B12 and the electromagnet D25 so as to change the magnetic force between the electromagnet A10 and the permanent magnet A9, between the electromagnet B11 and the permanent magnet B13 and between the electromagnet D25 and the permanent magnet D24 to realize magnetic force driving low-frequency vibration reduction, and meanwhile, the two voice coil motors 27 are connected in series to realize low-frequency vibration reduction and accurate positioning; when the vibration is carried out in a horizontal high-frequency mode, high-frequency vibration reduction is realized through the air floatation pressure of the air cavity 16; when the vibration is horizontally low-frequency vibration, the controller 35 controls the field intensity of the electromagnet C18 so as to change the magnetic force between the electromagnet C18 and the permanent magnet C17, thereby realizing magnetic force driven low-frequency vibration reduction.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (9)
1. A double-freedom-degree active and passive micro-vibration prevention base with adjustable rigidity comprises a top plate, a support rod A, a piston and a rigidity adjusting device and is characterized in that the support rod A is installed in the middle of the bottom of the top plate, the lower end of the support rod A vertically penetrates into the support rod A, a metal spring A is sleeved between the inner side of the top of the support rod A and the inner side of the support rod A, a metal rubber A is installed between the bottom of the metal spring A and the inner side of the bottom of the support rod A, side rods A are respectively and vertically connected to the left side and the right side of the upper portion of the support rod A, permanent magnets A are respectively installed at the tops of the two ends of the side rods A, electromagnets A are installed vertically above the permanent magnets A and on the inner side of the top of the piston, permanent magnets B are respectively installed at the bottoms of the two ends of the side rods A, electromagnets B are installed vertically below the permanent magnets B, and are respectively installed at the tops of a support plate A vertically connected with the inner side wall of the piston, the left side and the right side of the lower part of the strut A are respectively vertically connected with a side lever B, the left side end of the side lever B is connected with a spherical hinge A, an air cavity is arranged between the spherical hinge A and the inner side wall of the piston, the right side end of the side lever B is provided with a permanent magnet C, the inner side wall of the piston in the horizontal direction of the permanent magnet C is provided with an electromagnet C, the lower part of the side lever B and the inner side wall of the piston are vertically connected with a support plate B, the bottom of the support plate B and the inner side wall of the piston are provided with an annular air cavity, the bottom of the strut A is connected with the spherical hinge B, the bottom of the spherical hinge B is connected with a strut B, the left side and the right side of the middle of the strut B are respectively vertically connected with the side lever C, the tops of the two ends of the side lever C are respectively provided with a permanent magnet D, the electromagnets D are respectively arranged at the bottoms of the support plate C vertically connected with the inner side wall of the piston, voice coil motor is installed respectively to side lever C bottom, voice coil motor installs the bottom in the backup pad D top of being connected with the piston inside wall is perpendicular, pillar B bottom is connected with branch B, inside branch B lower extreme penetrated pillar C perpendicularly, the cover is equipped with metal spring B between the inboard of pillar C top, the branch B lower extreme outside and the pillar C inboard, install metal rubber B between metal spring B bottom and the pillar C bottom inboard, install on piston bottom is inboard pillar C bottom, rigidity adjusting device includes the cavity, the intake pipe is installed to cavity one side, inside the piston inserts rigidity adjusting device, install the diaphragm between piston and the rigidity adjusting device top, the position feeler is installed in the middle of the inside bottom of cavity, speedtransmitter is installed respectively at piston top both ends, the controller is still installed at the piston top.
2. The two-degree-of-freedom active and passive microvibration prevention base with adjustable rigidity as recited in claim 1, wherein the top plate is made of stainless steel plate into a circular structure.
3. The two-degree-of-freedom active and passive microvibration preventing base with adjustable rigidity according to claim 1, wherein the support A, the support B and the support C are all made of stainless steel into a cylindrical structure.
4. The two-degree-of-freedom active and passive micro-vibration prevention base with adjustable rigidity according to claim 1, wherein a cushion block A is further installed between the metal spring A and the metal rubber A, and a cushion block B is further installed between the metal spring B and the metal rubber B.
5. The two-degree-of-freedom active and passive microvibration prevention base with adjustable rigidity according to claim 1, wherein the metal spring A and the metal spring B are pre-pressing springs.
6. The two-degree-of-freedom active and passive microvibration prevention base with adjustable rigidity as recited in claim 1, wherein the rigidity adjustment device is an inverted T-shaped structure, and when inflated, a layer of air film is formed between the piston and the inner side wall of the rigidity adjustment device, and the thickness of the air film is 5 μm.
7. The two-degree-of-freedom active and passive microvibration prevention base with adjustable rigidity as claimed in claim 1, wherein the piston wall is provided with an air inlet hole A entering the air cavity, and the piston wall is further provided with an air inlet hole B entering the annular air cavity.
8. The two-degree-of-freedom active and passive micro-vibration prevention base with adjustable rigidity according to claim 1, wherein a pneumatic valve is further mounted on the air inlet pipe.
9. The two-degree-of-freedom active and passive micro-vibration prevention base with adjustable rigidity according to claim 1, wherein the controller is connected with the electromagnet A, the electromagnet B, the electromagnet C, the electromagnet D, the voice coil motor, the position sensor and the speed sensor through cables.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211678715.3A CN115727093B (en) | 2022-12-27 | 2022-12-27 | Rigidity-adjustable double-degree-of-freedom active and passive micro-vibration prevention base |
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| CN202211678715.3A CN115727093B (en) | 2022-12-27 | 2022-12-27 | Rigidity-adjustable double-degree-of-freedom active and passive micro-vibration prevention base |
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| CN115727093B CN115727093B (en) | 2023-06-06 |
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Cited By (1)
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| CN115727093B (en) | 2023-06-06 |
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