CN103062302A - Coplane air floatation orthogonal decoupling and air floatation ball bearing angle decoupling magnetic levitation vibration isolator - Google Patents
Coplane air floatation orthogonal decoupling and air floatation ball bearing angle decoupling magnetic levitation vibration isolator Download PDFInfo
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- 238000005339 levitation Methods 0.000 title abstract 3
- 238000009434 installation Methods 0.000 claims abstract description 32
- 238000006073 displacement reaction Methods 0.000 claims abstract description 31
- 230000009471 action Effects 0.000 claims description 3
- 238000002955 isolation Methods 0.000 abstract description 14
- 238000001259 photo etching Methods 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 abstract description 3
- 230000003068 static effect Effects 0.000 abstract description 2
- 238000005461 lubrication Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- 230000007704 transition Effects 0.000 description 9
- 230000008569 process Effects 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000006096 absorbing agent Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000005484 gravity Effects 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 5
- 230000035939 shock Effects 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 229920001971 elastomer Polymers 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 241000486406 Trachea Species 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
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Abstract
A coplane air floatation orthogonal decoupling and air floatation ball bearing angle decoupling magnetic levitation vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate and between a piston cylinder and the sleeve are carried out through a magnetic levitation thrust bearing and a static pressure air floatation face respectively, freedom of horizontal rectilinear motion between an upper installation plate and the lower installation plate is decoupled through a coplane orthogonal air floatation guide rail, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through an air floatation ball bearing, a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver, and relative locations of the upper installation plate and the lower installation plate are accurately controlled. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracy and rectilinear motion freedom and angular motion freedom decoupling, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.
Description
Technical field
The invention belongs to the accurate vibration isolation technical field, relate generally to the floating vibration isolator of magnetic of a kind of coplanar air supporting crossing decoupling and the decoupling zero of air-floating ball bearing angle.
Background technique
Along with improving constantly of ultraprecise processing and measuring accuracy, ambient vibration becomes the key factor that restriction ultraprecise process unit and surveying instrument precision and performance improve.Especially step-by-step scanning photo-etching device is the vlsi circuit process unit of representative, technology-intensive degree and complexity are high, key technical index has all reached the limit of prior art, represented the highest level of ultraprecise process unit, the ultraprecise vibration isolation becomes the core key technology in this type of equipment; The live width of step-by-step scanning photo-etching device has reached 22nm and following, silicon chip Location accuracy and alignment precision all reach several nanometers, and the work stage movement velocity reaches more than the 1m/s, and the work stage acceleration reaches tens times of gravity accleration, and this has proposed new challenge to existing vibration isolation technique.At first, lithography machine need to provide for metering system and photoetched object lens the working environment of " super quiet ", simultaneously again the demand motive work stage at full speed with High acceleration motion, this anti-vibration performance to vibrating isolation system has proposed extremely harsh requirement, and the natural frequency of its three directions all needs to reach below the 1Hz; Secondly, relative position between each parts of lithography machine, the distance of photoetched object lens and silicon chip surface for example, all has very strict requirement, and be under the control of position closed loop feedback control system, require the relative positional accuracy between the upper and lower mounting plate of vibration isolator to reach 10 μ m magnitudes, the Location accuracy of traditional vibration isolator can not meet the demands far away.
According to theory of vibration isolation, the natural frequency of passive type vibration isolator is directly proportional with rigidity, is inversely proportional to load quality, therefore under the certain prerequisite of load quality, the rigidity that reduces vibration isolator is the effective way that reduces natural frequency, improves low frequency and superlow frequency vibration isolating performance.There are the intrinsic contradictions of static bearing capacity and rigidity in the vibration isolator of the forms such as conventional air spring, restricted by the factors such as material behavior, structural rigidity, further reduce its rigidity, especially level very difficult to rigidity.For this problem, the researcher is incorporated into " pendulum " formula structure in the air cushion shock absorber, reaches purpose (the 1.Nikon Corporation.Vibration Isolator With Low Lateral Stiffness. U.S. Patent Publication No.: US20040065517A1 that reduces the vibration isolator horizontal rigidity; 2.U.S.Philips Corporation.Positioning Device with a Force Actuator Systemfor Compensating Center-of-gravity Displacements, and Lithographic Device Provided with Such APositioning Device. U.S. Patent number: US005844664A).The method can reduce the horizontal rigidity of air cushion shock absorber to a certain extent, promotes its low frequency vibration isolation performance.The problem that the method exists is: restricted by material behavior and structural rigidity, vibration isolator is vertical limited to the amplitude of stiffness degradation with level; 2) the vertical and level of air cushion shock absorber is all very poor to Location accuracy, can't satisfy the requirement of photoetching process; 3) will reach lower horizontal rigidity needs larger pendulum length, causes the vibration isolator height excessive, the string membrane resonance easily occurs, poor stability.
By to the analysis of existing air cushion shock absorber technological scheme as seen, existing air cushion shock absorber is difficult to satisfy lithography machine to the requirement of ultralow rigidity and high position precision.Germany IDE company has proposed a kind of vibration isolator technological scheme (1.Integrated Dynamics Engineering GmbH.Isolatorgeometrie EinesSchwingungsisolationssystem. european patent number: EP1803965A2 of abandoning tradition rubber air spring; 2.Integrated Dynamics EngineeringGmbH.Schwingungsisolationssystem Mit Pneumatischem Tiefpassfilter. european patent number: EP1803970A2; 3.Integrated Dynamics Engineering GmbH.Air Bearing with Consideration ofHigh-Frequency Resonances. U.S. Patent Publication No.: US20080193061A1).This scheme adopts vertical and level is carried out decoupling zero and vibration isolation to air bearing surface to the vibration of all directions, can reach extremely low rigidity and natural frequency.The problem that this scheme exists is: 1) in the public technology scheme, vibration isolator can't be realized accurate location; 2) among the patent EP1803965A2, do not have the angular motion degrees of freedom around horizontal rotational shaft between the upper and lower mounting plate, the angular rigidity of this direction and natural frequency are all very high; Patent EP1803970A2 and US20080193061A1 adopt block rubber to provide angular motion degrees of freedom around horizontal rotational shaft for upper and lower mounting plate, but because the block rubber angular rigidity is very large, can't effectively carry out the angular motion freedom decoupling, there is frictional force between the decoupling mechanism component and introduces larger additional stiffness, restriction natural frequency and low frequency vibration isolation performance.
Holland ASML company has also proposed similar vibration isolator technological scheme (1.U.S.Philips Corp, ASM LithographyB.V.Pneumatic Support Device with A Controlled Gas Supply, and Lithographic Device Providedwith Such A Support Device. U.S. Patent number: US006144442A; 2.Koninklijke Philips ElectronicsN.V., ASM Lithography B.V.Lithographic Pneumatic Support Device with Controlled Gas Supply. International Patent Publication No.: WO99/22272; 3.ASML Netherlands B.V.Support Device, LithographicApparatus, and Device Manufacturing Method Employing A Supporting Device, and A PositionControl System Arranged for Use in A Supporting Device. U.S. Patent number: US007084956B2; 4.ASML Netherlands B.V.Support Device, Lithographic Apparatus, and Device ManufacturingMethod Employing A Supporting Device and A Position Control System Arranged for Use in ASupporting Device. european patent number: EP1486825A1).Among patent US006144442A and the WO99/22272 bleed pressure is carried out closed-loop feedback control, reach the stability of raising vibration isolator and the purpose of performance; Be provided with vibration transducer at upper mounting plate among patent US007084956B2 and the EP1486825A1, introduce simultaneously with reference to vibration system, promote the anti-vibration performance of vibration isolator by control algorithm.But the technological scheme that proposes still not effectively do not solve the accurate location of vibration isolator and the angular motion freedom decoupling problem of upper and lower mounting plate.
Summary of the invention
The objective of the invention is for ultra precise measurement instrument and process unit, especially the vlsi circuit process unit such as step-by-step scanning photo-etching device is to the low natural frequency of vibration isolator, the an urgent demand of high position precision, the floating vibration isolator of magnetic of a kind of coplanar air supporting crossing decoupling and the decoupling zero of air-floating ball bearing angle is provided, vibration isolator all has approximate zero rigidity and extremely low natural frequency in three-dimensional, on, can accurately locate and the 3 d-line freedom of movement between the lower installation board, the angular motion freedom decoupling, thus ultra precise measurement instrument and process unit effectively solved, especially the accurate vibration isolation problem in the step-by-step scanning photo-etching device.
The object of the present invention is achieved like this:
The magnetic of a kind of coplanar air supporting crossing decoupling and the decoupling zero of air-floating ball bearing angle floats vibration isolator, by upper mounting plate, lower installation board, clean compressed gas source, tracheae and vibration isolator main body form, the vibration isolator main body is installed between upper mounting plate and the lower installation board, clean compressed gas source is connected with the vibration isolator main body by tracheae, the structure of described vibration isolator main body is: the lower surface of sleeve and lower installation board be lubricated and support by the floating thrust-bearing of magnetic, the piston cylinder back-off is installed in the sleeve, and with sleeve by radially carry the cylinder air bearing surface lubricated with support, air-floating ball bearing is installed between piston cylinder and the upper mounting plate, sleeve and X-direction air-float guide rail be lubricated and guiding by X-direction guide rail air bearing surface, X-direction air-float guide rail and lower installation board be lubricated and support by Z-direction bearing air-float face, Y-direction air-float guide rail and lower installation board are rigidly connected, and the two ends of X-direction air-float guide rail and Y-direction air-float guide rail be lubricated and guiding by Y-direction guide rail air bearing surface; Z-direction voice coil motor, Z-direction displacement transducer and Z-direction limit switch are installed between piston cylinder and the sleeve, X-direction voice coil motor, X-direction displacement transducer, X-direction limit switch and Y-direction voice coil motor, Y-direction displacement transducer, Y-direction limit switch are installed between sleeve and the lower installation board, the driving force direction of Z-direction voice coil motor is vertical direction, the driving force direction of X-direction voice coil motor and Y-direction voice coil motor is in horizontal plane and mutually vertical, and the line of action direction of X, Y, Z-direction displacement transducer and X, Y, Z-direction limit switch is consistent with the driving force direction of X, Y, Z-direction voice coil motor; X, Y, Z-direction displacement transducer are connected Y, Z-direction limit switch and are connected with the signal input part of controller respectively with X, the signal output part of controller is connected with the signal input part of driver, and the signal output part of driver is connected with X, Y, Z-direction voice coil motor respectively.
Be provided with gas pressure sensor in the described piston cylinder, piston cylinder is provided with suction port and solenoid valve, and gas pressure sensor is connected with the signal input part of controller, and the signal output part of driver is connected with solenoid valve.
The configuration mode of the floating thrust-bearing of described magnetic is to be provided with permanent magnet at sleeve bottom surface sidewall, and at the relatively equipped electromagnetic coil of lower installation board upper surface sidewall, the floating gap thickness of magnetic is 0.01mm～1mm.
Described X, Y, Z-direction voice coil motor are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail and Y-direction air-float guide rail are single rail structure or two guide rail structure.
Described X, Y, Z-direction displacement transducer are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z-direction limit switch are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Gas pressure is 0.1MPa～0.8MPa in the described piston cylinder.
The good result of technological innovation of the present invention and generation is:
(1) the present invention has abandoned the vibration isolator technological scheme of tradition based on elastic element/mechanism, adopt the floating thrust-bearing of magnetic, radially carry the cylinder air bearing surface respectively to level to carrying out decoupling zero and vibration isolation with vertical vibration, the floating thrust-bearing of magnetic and air bearing surface are without friction, without wearing and tearing, rigidity is approximately zero, can make vibration isolator obtain approximate zero stiffness characteristics and outstanding superlow frequency vibration isolating performance, having solved prior art limited by structural rigidity, material behavior, rigidity is difficult to further reduction, rigidity and the stable problem that can not take into account.This is that the present invention is different from one of innovative point of prior art.
(2) the present invention adopts displacement transducer, limit switch, controller, driver and voice coil motor etc. to consist of the position closed loop feedback control system of vertical direction and substantially horizontal, relative position between the upper and lower mounting plate is accurately controlled, Location accuracy can reach 10 μ m levels and more than, the problem that can solve effectively that prior art scheme Location accuracy is low, Location accuracy and rigidity, anti-vibration performance can not be taken into account.This is two of the present invention's innovative point of being different from prior art.
(3) the present invention adopts coplanar quadrature air-float guide rail that the horizontal rectilinear motion degrees of freedom between the upper and lower mounting plate of vibration isolator is carried out decoupling zero, air-float guide rail is without friction and wear, do not introduce additional stiffness, decoupling zero is effective, can make vibration isolator reach high position precision and anti-vibration performance; Adopt air-floating ball bearing diagonal motion degrees of freedom to carry out decoupling zero, air-floating ball bearing is without friction and wear, do not introduce additional angular rigidity, can effectively solve the existing technological scheme of elastomer decoupling zero that adopts and introduce larger additional stiffness, the problems such as restriction natural frequency and low frequency vibration isolation performance.This is three of the present invention's innovative point of being different from prior art.
(4) the present invention adopts gas pressure sensor, solenoid valve and controller, driver etc. to consist of the pressure closed loop feedback control system, accurately the gas pressure in the control sleeve makes it to keep constant, thrust load to vibration isolator is carried out gravitational equilibrium and compensation, under the effect of radially carrying the cylinder air bearing surface, the piston cylinder of carry load gravity can freely slide up and down with zero stiffness along sleeve, thus the gravitational equilibrium of realizing ideal and zero stiffness vibration isolating effect.This is four of the present invention's innovative point of being different from prior art.
(5) the present invention adopts active actuators that the relative position between the upper and lower mounting plate and the gas pressure in the piston cylinder are carried out ACTIVE CONTROL, the vibration isolator parameter can be according to being changed in real time adjusting by vibration isolation features of the object and working environment, thereby adapt to different operating modes, have preferably flexibility, adaptability and stability.This is five of the present invention's innovative point of being different from prior art.
Description of drawings
Fig. 1 floats the structural representation of vibration isolator for removing coplanar air supporting crossing decoupling and the magnetic of air-floating ball bearing angle decoupling zero behind the upper mounting plate;
Fig. 2 is the cross-sectional view of the floating vibration isolator of magnetic of coplanar air supporting crossing decoupling and the decoupling zero of air-floating ball bearing angle;
Fig. 3 is the floating gap of magnetic, radially carries the schematic diagram of cylinder air bearing surface, X-direction guide rail air bearing surface, Z-direction bearing air-float face and sphere air bearing surface;
Fig. 4 is the schematic diagram of Y-direction guide rail air bearing surface;
Fig. 5 is the tube-in-tube structure schematic diagram;
Fig. 6 is the control structure block diagram of the floating vibration isolator of magnetic of coplanar air supporting crossing decoupling and the decoupling zero of air-floating ball bearing angle;
Fig. 7 is the schematic diagram of cylinder air bearing surface throttle orifice and sphere air bearing surface throttle orifice on the piston cylinder.
Piece number explanation among the figure: 1 upper mounting plate, 2 lower installation boards, 3 clean compressed gas sources, 4 vibration isolator main bodys, 5 piston cylinders, 6 sleeves, 7 air-floating ball bearings, 8X is to voice coil motor, 8a X-direction motor iron yoke, 8b X-direction magnetic steel of motor, 8c X-direction motor coil skeleton, 8d X-direction motor coil, 9Y is to voice coil motor, 10Z is to voice coil motor, 10a Z-direction motor iron yoke, 10b Z-direction magnetic steel of motor, 10c Z-direction motor coil skeleton, 10d Z-direction motor coil, 10e Z-direction motor transitional spare, 11X is to displacement transducer, 11a X-direction grating reading head transition piece, 11b X-direction grating reading head, 11c X-direction glass raster chi, 12Y is to displacement transducer, 13Z is to displacement transducer, 13a Z-direction grating reading head transition piece, 13b Z-direction grating reading head, 13c Z-direction glass raster chi, 14X is to limit switch, 14a X-direction limiting stopper, 14b X-direction Hall switch, 14c X-direction limit switch transition piece, 14d X-direction limiting stopper transition piece, 15Y is to limit switch, 16Z is to limit switch, 16a Z-direction limiting stopper, 16b Z-direction Hall switch, 16c Z-direction limit switch transition piece, 17 gas pressure sensors, 18 solenoid valves, 19 controllers, 20 drivers, 21 magnetic float the gap, 22 radially carry the cylinder air bearing surface, 23 suction ports, 24 magnetic float thrust-bearing, the 24a permanent magnet, the 24b electromagnetic coil, 25 cylinder air bearing surface throttle orifices, 26 tracheaes, 27 sphere air bearing surface, 28 sphere air bearing surface throttle orifices, 29X is to air-float guide rail, 30Y is to air-float guide rail, 31X direction guiding rail air bearing surface, 32Y direction guiding rail air bearing surface, 33Z is to the bearing air-float face.
Embodiment
Provide specific embodiments of the invention below in conjunction with accompanying drawing.
The magnetic of a kind of coplanar air supporting crossing decoupling and the decoupling zero of air-floating ball bearing angle floats vibration isolator, by upper mounting plate 1, lower installation board 2, clean compressed gas source 3, tracheae 26 and vibration isolator main body 4 form, vibration isolator main body 4 is installed between upper mounting plate 1 and the lower installation board 2, clean compressed gas source 3 is connected with vibration isolator main body 4 by tracheae 26, the structure of described vibration isolator main body 4 is: the lower surface of sleeve 6 and lower installation board 2 are by floating the thrust-bearing 24 lubricated and supports of magnetic, piston cylinder 5 back-offs are installed in the sleeve 6, and with sleeve 6 by radially carry cylinder air bearing surface 22 lubricated with support, air-floating ball bearing 7 is installed between piston cylinder 5 and the upper mounting plate 1, sleeve 6 lubricates and guiding by X-direction guide rail air bearing surface 31 with X-direction air-float guide rail 29, X-direction air-float guide rail 29 lubricates by Z-direction bearing air-float face 33 with lower installation board 2 and supports, Y-direction air-float guide rail 30 is rigidly connected with lower installation board 2, and the two ends of X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 are by Y-direction guide rail air bearing surface 32 lubricated and guiding; Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and the sleeve 6, X-direction voice coil motor 8, X-direction displacement transducer 11, X-direction limit switch 14 and Y-direction voice coil motor 9, Y-direction displacement transducer 12, Y-direction limit switch 15 is installed between sleeve 6 and the lower installation board 2, the driving force direction of Z-direction voice coil motor 10 is vertical direction, the driving force direction of X-direction voice coil motor 8 and Y-direction voice coil motor 9 in horizontal plane and mutually vertical, X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16 line of action direction and X, Y, Z-direction voice coil motor 8,9,10 driving force direction is consistent; X, Y, Z- direction displacement transducer 11,12,13 are connected Y, Z- direction limit switch 14,15,16 and are connected with the signal input part of controller 19 respectively with X, the signal output part of controller 19 is connected with the signal input part of driver 20, and the signal output part of driver 20 is connected with X, Y, Z-direction voice coil motor 8,9,10 respectively.
X, Y, Z- direction displacement transducer 11,12,13 pairs of X, Y, Z-direction voice coil motor 8,9,10 displacements of exporting are measured, and X, Y, Z- direction limit switch 14,15,16 pairs of X, Y, Z-direction voice coil motor 8,9,10 strokes that move limit; Controller 19 is according to X, Y, Z- direction displacement transducer 11,12,13 and X, Y, Z- direction limit switch 14,15,16 feedback signal, and the relative position between control X, Y, Z-direction voice coil motor 8,9, the 10 pairs of upper and lower mounting plates 1,2 is accurately controlled.
Be provided with gas pressure sensor 17 in the described piston cylinder 5, piston cylinder 5 is provided with suction port 23 and solenoid valve 18, and gas pressure sensor 17 is connected with the signal input part of controller 19, and the signal output part of driver 20 is connected with solenoid valve 18.
The configuration mode of the floating thrust-bearing 24 of described magnetic is to be provided with permanent magnet 24a at sleeve 6 bottom surface sidewalls, and at the relatively equipped electromagnetic coil 24b of lower installation board upper surface sidewall, the floating gap of magnetic 21 thickness are 0.01mm～1mm.
Described X, Y, Z-direction voice coil motor 8,9,10 are cylinder type voice coil motor or plate voice coil motor.
Described X-direction air-float guide rail 29 and Y-direction air-float guide rail 30 are single rail structure or two guide rail structure.
Described X, Y, Z- direction displacement transducer 11,12,13 are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
Described X, Y, Z- direction limit switch 14,15,16 are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
Described piston cylinder 5 interior gas pressures are 0.1MPa～0.8MPa.
Provide one embodiment of the present of invention below in conjunction with Fig. 1～Fig. 6.In the present embodiment, the pedestal of lower installation board 2 and ground, instrument or basic framework etc. are rigidly connected during vibration isolator work, and upper mounting plate 1 is rigidly connected with load or platform.X, Y, Z-direction voice coil motor 8,9,10 all adopt the cylinder type voice coil motor.Take X-direction voice coil motor 8 as example, it mainly is comprised of X-direction motor iron yoke 8a, X-direction magnetic steel of motor 8b, X-direction motor coil skeleton 8c, X-direction motor coil 8d.X-direction motor iron yoke 8a and X-direction motor coil skeleton 8c are cylindrical shape, and X-direction magnetic steel of motor 8b is cylindrical, and X-direction motor coil 8d is around on the X-direction motor coil skeleton 8c.X-direction motor iron yoke 8a and X-direction magnetic steel of motor 8b consist of motor stator, and X-direction motor coil skeleton 8c and X-direction motor coil 8d consist of electric mover.In the Z-direction voice coil motor 10, Z-direction motor transitional spare 10e provides the mounting structure of Z-direction motor coil skeleton 10c.Pass to electric current during machine operation in the coil, according to electromagnetic theory, hot-wire coil can be subject to the Lorentz force effect in magnetic field, can control the size and Orientation of motor output drive strength by the size and Orientation of control electric current.
The mounting type of air-floating ball bearing 7 is in the present embodiment: the lower surface of air-floating ball bearing 7 is installed on the piston cylinder 5, and by the 27 lubricated and supports of sphere air bearing surface, the upper surface of air-floating ball bearing 7 and upper mounting plate 1 are rigidly connected.
X, Y, Z- direction displacement transducer 11,12,13 adopt grating scale.Take Z-direction displacement transducer 13 as example, it mainly comprises the parts such as Z-direction grating reading head transition piece 13a, Z-direction grating reading head 13b and Z-direction glass raster chi 13c.Z-direction grating reading head transition piece 13a provides the mounting structure of Z-direction grating reading head 13b.In grating scale when work,, Z-direction grating reading head 13b can detect the relative displacement of itself and Z-direction glass raster chi 13c, and gives controller 19 by signal conductor.
X, Y, Z- direction limit switch 14,15,16 adopt the Hall-type limit switch.Take Z-direction limit switch 16 as example, it mainly comprises the parts such as Z-direction limiting stopper 16a, Z-direction Hall switch 16b and Z-direction limit switch transition piece 16c.Two Z-direction Hall switch 16b install back-to-back, and two Z-direction limiting stopper 16a are metallic material, with relative installation of sensitivity end of Z-direction Hall switch 16b.Z-direction limit switch transition piece 16c provides the mounting structure of Z-direction Hall switch 16b.In limit switch when work,, as Z-direction Hall switch 16b during near Z-direction limiting stopper 16a, Z-direction Hall switch 16b provides limit signal, and gives controller 19 by signal conductor.
In the present embodiment, Z-direction voice coil motor 10, Z-direction displacement transducer 13 and Z-direction limit switch 16 are installed between piston cylinder 5 and the sleeve 6, and are installed in piston cylinder 5 inside.
Vibration isolator is realized in the following way to the carrying of load: clean compressed gas source 3 by tracheae 26, through solenoid valve 18, suction port 23 to piston cylinder 5 interior conveying clean compressed airs.Controller 19 is according to the feedback signal of gas pressure sensor 17, the aperture of control solenoid valve 18, adjusting is input to the gas flow in the piston cylinder 5, thereby the pressure of regulating piston cylinder 5 interior clean compressed airs, make active force and load, the piston cylinder 5 that clean compressed air makes progress to piston cylinder 5 and the gravity that loads on other component on the piston cylinder 5 balance each other the gravity compensation of realizing ideal and zero stiffness vibration isolating effect.
In the present embodiment, the pressure of piston cylinder 5 interior clean compressed airs is 0.4Mpa, and the effective radius of piston cylinder 5 lower surfaces is 100mm, and then the quality of single vibration isolator carrying is: m=p * π r
2/ g ≈ 1282kg, wherein p is gas pressure, and p=0.4Mpa, r are the effective radius of piston cylinder 5 lower surfaces, and r=100mm, g are gravity accleration, g=9.8m/m
2
Fig. 7 provides an embodiment of cylinder air bearing surface throttle orifice and sphere air bearing surface throttle orifice on the piston cylinder.In the present embodiment, uniform two arrange cylinder air bearing surface throttle orifices 25 in the circumferential direction of the circle on piston cylinder 5 sidewalls, the quantity of every row's cylinder air bearing surface throttle orifice 25 is 8, and diameter is φ 0.2mm.8 the sphere air bearing surface throttle orifices 28 that evenly distribute in the circumferential direction of the circle around the center of circle on the concave spherical surface of piston cylinder 5 upper surfaces, diameter is φ 0.2mm.
Claims (8)
1. the floating vibration isolator of the magnetic of a coplanar air supporting crossing decoupling and the decoupling zero of air-floating ball bearing angle, by upper mounting plate (1), lower installation board (2), clean compressed gas source (3), tracheae (26) and vibration isolator main body (4) form, vibration isolator main body (4) is installed between upper mounting plate (1) and the lower installation board (2), clean compressed gas source (3) is connected with vibration isolator main body (4) by tracheae (26), it is characterized in that: in the structure of described vibration isolator main body (4), the lower surface of sleeve (6) and lower installation board (2) be lubricated and support by the floating thrust-bearing (24) of magnetic, piston cylinder (5) back-off is installed in the sleeve (6), and with sleeve (6) by radially carry cylinder air bearing surface (22) lubricated with support, air-floating ball bearing (7) is installed between piston cylinder (5) and the upper mounting plate (1), sleeve (6) lubricates and guiding by X-direction guide rail air bearing surface (31) with X-direction air-float guide rail (29), X-direction air-float guide rail (29) and lower installation board (2) lubricated and support by Z-direction bearing air-float face (33), Y-direction air-float guide rail (30) is rigidly connected with lower installation board (2), and the two ends of X-direction air-float guide rail (29) and Y-direction air-float guide rail (30) be lubricated and guiding by Y-direction guide rail air bearing surface (32); Z-direction voice coil motor (10), Z-direction displacement transducer (13) and Z-direction limit switch (16) are installed between piston cylinder (5) and the sleeve (6), X-direction voice coil motor (8), X-direction displacement transducer (11), X-direction limit switch (14) and Y-direction voice coil motor (9), Y-direction displacement transducer (12), Y-direction limit switch (15) is installed between sleeve (6) and the lower installation board (2), the driving force direction of Z-direction voice coil motor (10) is vertical direction, the driving force direction of X-direction voice coil motor (8) and Y-direction voice coil motor (9) in horizontal plane and mutually vertical, X, Y, Z-direction displacement transducer (11,12,13) and X, Y, Z-direction limit switch (14,15,16) line of action direction and X, Y, Z-direction voice coil motor (8,9,10) driving force direction is consistent; X, Y, Z-direction displacement transducer (11,12,13) are connected Y, Z-direction limit switch (14,15,16) and are connected with the signal input part of controller (19) respectively with X, the signal output part of controller (19) is connected with the signal input part of driver (20), and the signal output part of driver (20) is connected with X, Y, Z-direction voice coil motor (8,9,10) respectively.
2. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of air-floating ball bearing angle floats vibration isolator, it is characterized in that: be provided with gas pressure sensor (17) in the described piston cylinder (5), piston cylinder (5) is provided with suction port (23) and solenoid valve (18), gas pressure sensor (17) is connected with the signal input part of controller (19), and the signal output part of driver (20) is connected with solenoid valve (18).
3. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of air-floating ball bearing angle floats vibration isolator, it is characterized in that: the configuration mode that described magnetic floats thrust-bearing (24) is to be provided with permanent magnet (24a) at sleeve (6) bottom surface sidewall, at the relatively equipped electromagnetic coil (24b) of lower installation board upper surface sidewall, it is 0.01mm～1mm that magnetic floats gap (21) thickness.
4. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of air-floating ball bearing angle floats vibration isolator, and it is characterized in that: described X, Y, Z-direction voice coil motor (8,9,10) are cylinder type voice coil motor or plate voice coil motor.
5. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of air-floating ball bearing angle floats vibration isolator, and it is characterized in that: described X-direction air-float guide rail (29) and Y-direction air-float guide rail (30) are single rail structure or two guide rail structure.
6. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of air-floating ball bearing angle floats vibration isolator, it is characterized in that: described X, Y, Z-direction displacement transducer (11,12,13) are grating scale, magnetic railings ruler, appearance grid chi or linear potentiometer.
7. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of air-floating ball bearing angle floats vibration isolator, and it is characterized in that: described X, Y, Z-direction limit switch (14,15,16) are mechanical type limit switch, Hall-type limit switch or photoelectric limit switch.
8. the magnetic of coplanar air supporting crossing decoupling according to claim 1 and the decoupling zero of air-floating ball bearing angle floats vibration isolator, and it is characterized in that: the interior gas pressure of described piston cylinder (5) is 0.1MPa～0.8MPa.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210574764.2A CN103062302B (en) | 2012-12-19 | 2012-12-19 | Coplane air floatation orthogonal decoupling and air floatation ball bearing angle decoupling magnetic levitation vibration isolator |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210574764.2A CN103062302B (en) | 2012-12-19 | 2012-12-19 | Coplane air floatation orthogonal decoupling and air floatation ball bearing angle decoupling magnetic levitation vibration isolator |
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| CN103062302A true CN103062302A (en) | 2013-04-24 |
| CN103062302B CN103062302B (en) | 2014-10-29 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104895921A (en) * | 2015-05-13 | 2015-09-09 | 北京石油化工学院 | Two freedom degree lorentz force outer rotor spherical surface magnetic bearing |
| CN108263646A (en) * | 2018-03-21 | 2018-07-10 | 天津航天机电设备研究所 | A kind of multistage manifold type gravity-compensated device |
| CN114251363A (en) * | 2020-09-24 | 2022-03-29 | 武汉科技大学 | Aerostatic motorized spindle suitable for active control under vacuum environment condition |
| CN114371308A (en) * | 2022-01-14 | 2022-04-19 | 上海大学 | Magnetic suspension absolute speed sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0642578A (en) * | 1992-07-23 | 1994-02-15 | Hitachi Ltd | Semi-active vibration proof device, semi-active damper device, semi-active stiffness mechanism device, reduced projection exposure device and its semi-active damping method |
| US20020017890A1 (en) * | 1994-06-27 | 2002-02-14 | Nikon Corporation | Electromagnetic alignment and scanning apparatus |
| CN1365903A (en) * | 2001-08-06 | 2002-08-28 | 马加良 | Magnetically floating vibration damper |
| CN102393611A (en) * | 2011-11-12 | 2012-03-28 | 哈尔滨工业大学 | Photoetching machine workpiece stage magnetic preloading balance positioning system |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
-
2012
- 2012-12-19 CN CN201210574764.2A patent/CN103062302B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0642578A (en) * | 1992-07-23 | 1994-02-15 | Hitachi Ltd | Semi-active vibration proof device, semi-active damper device, semi-active stiffness mechanism device, reduced projection exposure device and its semi-active damping method |
| US20020017890A1 (en) * | 1994-06-27 | 2002-02-14 | Nikon Corporation | Electromagnetic alignment and scanning apparatus |
| CN1365903A (en) * | 2001-08-06 | 2002-08-28 | 马加良 | Magnetically floating vibration damper |
| CN102393611A (en) * | 2011-11-12 | 2012-03-28 | 哈尔滨工业大学 | Photoetching machine workpiece stage magnetic preloading balance positioning system |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
Non-Patent Citations (2)
| Title |
|---|
| 刘彦，谭久彬，王雷: "差动电磁作动器的超大型光学仪器隔振基础的主动控制机理", 《光学精密工程》 * |
| 林海波，杨国哲: "超精密运动平台主动隔振系统动力学模型理论与实验研究", 《组合机床与自动化加工技术》 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104895921A (en) * | 2015-05-13 | 2015-09-09 | 北京石油化工学院 | Two freedom degree lorentz force outer rotor spherical surface magnetic bearing |
| CN108263646A (en) * | 2018-03-21 | 2018-07-10 | 天津航天机电设备研究所 | A kind of multistage manifold type gravity-compensated device |
| CN108263646B (en) * | 2018-03-21 | 2024-01-16 | 天津航天机电设备研究所 | Multistage coupling type gravity compensation device |
| CN114251363A (en) * | 2020-09-24 | 2022-03-29 | 武汉科技大学 | Aerostatic motorized spindle suitable for active control under vacuum environment condition |
| CN114251363B (en) * | 2020-09-24 | 2024-05-03 | 武汉科技大学 | Gas static pressure motorized spindle suitable for active control under vacuum environment condition |
| CN114371308A (en) * | 2022-01-14 | 2022-04-19 | 上海大学 | Magnetic suspension absolute speed sensor |
| CN114371308B (en) * | 2022-01-14 | 2022-08-30 | 上海大学 | Magnetic suspension absolute speed sensor |
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