CN114371308A - Magnetic suspension absolute speed sensor - Google Patents
Magnetic suspension absolute speed sensor Download PDFInfo
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- CN114371308A CN114371308A CN202210039791.3A CN202210039791A CN114371308A CN 114371308 A CN114371308 A CN 114371308A CN 202210039791 A CN202210039791 A CN 202210039791A CN 114371308 A CN114371308 A CN 114371308A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/42—Devices characterised by the use of electric or magnetic means
- G01P3/50—Devices characterised by the use of electric or magnetic means for measuring linear speed
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Abstract
The invention discloses a magnetic suspension absolute speed sensor, which relates to the technical field of sensors, wherein a top plate is connected with a base through an air suspension guide mechanism, a first annular support, a coil annular support and a central support are all fixed on the upper surface of the base, a second annular support and a third annular support are all fixed on the lower surface of the top plate, the second annular support is positioned between the first annular support and the coil annular support, the third annular support is positioned between the coil annular support and the central support, a third permanent magnet ring, a first permanent magnet ring and a fifth permanent magnet ring are sequentially arranged on the first annular support from top to bottom, a seventh permanent magnet ring is arranged on the lower part of the inner side of the second annular support, a coil is arranged on the upper part of the outer side of the coil annular support, an eighth permanent magnet ring is arranged on the lower part of the outer side of the third annular support, a fourth permanent magnet ring, a second permanent magnet ring and a sixth permanent magnet ring are sequentially arranged on the central support from top to bottom, thereby realizing the linearization and the field intensity of the magnetic field in the inner space of the sensor and improving the low-frequency performance of the sensor.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a magnetic suspension absolute speed sensor.
Background
The precise vibration isolation system is the fundamental guarantee for the stable work of ultra-precise manufacturing and measuring equipment. As equipment enters nanometer/sub-nanometer precision, the need for high performance vibration isolation is increasingly acute. Lowering the natural frequency of the vibration isolation system and introducing active control of vibration become the main means to improve the vibration isolation performance. Inertial sensors, represented by acceleration, absolute velocity measurements, are key devices to achieve active vibration isolation. However, the application of active control in low natural frequency vibration isolation systems places higher demands on the low frequency measurement capability of inertial sensors, especially absolute velocity sensors.
At present, a small commercial absolute speed sensor mainly comprises a shell, a permanent magnet fixedly connected with the shell, an inertia reference mass wrapped by a coil and sleeved on the permanent magnet, and components such as a metal spring and the like which play a supporting role between the mass and the shell. When the shell is affected by external vibration, the shell and the reference mass generate relative motion, and the induced coil cuts magnetic lines of force to generate voltage which is proportional to the absolute speed of the shell within a certain bandwidth. The transfer function of the external speed input to the sensor voltage output of an absolute speed sensor exhibits a high-pass characteristic, with the cutoff frequency determined by the internal mechanical spring and inertial reference mass.
By analyzing the structural composition characteristics of the absolute speed sensor, the low-frequency cut-off frequency of the sensor can be reduced by increasing the reference mass and reducing the rigidity of the metal spring, so that the low-frequency performance of the sensor is enhanced, but the volume of the sensor is obviously increased by increasing the reference mass; by definition of stiffness, an increase in load bearing capacity or a decrease in stiffness can result in a rapid increase in the amount of deformation and a corresponding increase in the volume of the sensor, which can lead to difficulties in sensor design and integration. In addition, the reduction of the rigidity of the metal spring can reduce the stability of the system and reduce the linear displacement interval of the system, so that the nonlinear response of the sensor occurs.
Therefore, the low frequency of the sensor is expanded by adopting an analog or digital filter, the internal structure of the sensor is not changed, the problems are avoided, and the method has the advantages of simplicity and easiness in implementation. However, this method cannot improve the sensitivity of the sensor, so that low-frequency noise cannot be effectively suppressed, and the noise is amplified along with the bandwidth expansion, which seriously affects the low-frequency performance of the vibration isolation system.
In order to further improve the low-frequency performance of the absolute speed sensor and overcome the defects of common metal springs, the permanent magnet is used for constructing the magnetic spring to replace the metal spring so as to reduce the rigidity and expand the low-frequency performance of the sensor. However, the spatial magnetic field strength is strongly related to the relative position nonlinearity between the magnets forming the magnetic field, and the reference mass carried by the magnetic spring and the sensor shell are continuously changed along with the difference of vibration input, so that the spatial magnetic field changes, the carrying force and the output nonlinearity of the induced coil are caused, and the measurement performance of the absolute velocity sensor is seriously influenced.
Disclosure of Invention
In order to solve the technical problems, the invention provides a magnetic suspension absolute velocity sensor, which realizes the linearization and the field intensity of a magnetic field in the internal space of the sensor and improves the low-frequency performance of the sensor.
In order to achieve the purpose, the invention provides the following scheme:
the invention provides a magnetic suspension absolute speed sensor, which comprises a top plate, a base, a coil annular support, a magnetic spring mechanism and an air suspension guide mechanism, wherein the magnetic spring mechanism comprises a first permanent magnet ring, a second permanent magnet ring, a third permanent magnet ring, a fourth permanent magnet ring, a fifth permanent magnet ring, a sixth permanent magnet ring, a seventh permanent magnet ring, an eighth permanent magnet ring, a first annular support, a second annular support, a third annular support and a central support; the first ring-shaped support, the coil ring-shaped support and the central support are all fixed on the upper surface of the base, the coil ring-shaped support is sleeved inside the first ring-shaped support in a clearance manner, the central support is sleeved inside the coil ring-shaped support in a clearance manner, the second ring-shaped support and the third ring-shaped support are both fixed on the lower surface of the top plate, the second ring-shaped support is positioned between the first ring-shaped support and the coil ring-shaped support, the third ring-shaped support is positioned between the coil ring-shaped support and the central support, the third permanent magnetic ring, the first permanent magnetic ring and the fifth permanent magnetic ring are sequentially installed on the first ring-shaped support from top to bottom, the seventh permanent magnetic ring is installed on the lower part of the inner side of the second ring-shaped support, and the coil is installed on the upper part of the outer side of the coil ring-shaped support, the eighth permanent magnet ring is arranged at the lower part of the outer side of the third annular bracket, and the fourth permanent magnet ring, the second permanent magnet ring and the sixth permanent magnet ring are sequentially arranged on the central bracket from top to bottom; the third permanent magnet ring, the fourth permanent magnet ring, the fifth permanent magnet ring, the sixth permanent magnet ring, the seventh permanent magnet ring and the eighth permanent magnet ring are radial magnetizing permanent magnet rings, the third permanent magnet ring, the fourth permanent magnet ring, the seventh permanent magnet ring and the eighth permanent magnet ring have the same magnetizing direction, the magnetizing directions of the fifth permanent magnet ring and the sixth permanent magnet ring are the same, the magnetizing directions of the fifth permanent magnet ring and the third permanent magnet ring are opposite, the first permanent magnet ring and the second permanent magnet ring are axial magnetizing permanent magnet rings, the magnetizing directions of the first permanent magnet ring and the second permanent magnet ring are opposite, the upper half part of the first permanent magnet ring and the upper half part of the second permanent magnet ring generate attraction force to the seventh permanent magnet ring and the eighth permanent magnet ring, the lower half parts of the first permanent magnet ring and the second permanent magnet ring generate repulsive force to the seventh permanent magnet ring and the eighth permanent magnet ring.
Preferably, the base is provided with a plurality of first through holes, the first through holes are located outside the first annular support, the top plate is provided with a plurality of second through holes, the second through holes correspond to the first through holes in a one-to-one manner, the air-floatation guide mechanism comprises a plurality of air-floatation guide assemblies, each air-floatation guide assembly comprises an air-floatation bearing, a guide shaft and a tensioning sleeve, the air-floatation bearings are fixed on the base, one air-floatation bearing is located above one first through hole, the upper end of each guide shaft is fixed in one second through hole through one tensioning sleeve, the lower end of each guide shaft is sleeved in the air-floatation bearing, and the bottom end of each guide shaft can extend into the first through hole.
Preferably, the upper surface of the base is provided with a plurality of bearing installation grooves, each bearing installation groove is located above one first through hole, and each air bearing is fixed in one bearing installation groove.
Preferably, the third permanent magnet ring comprises a plurality of third magnet tiles, the first permanent magnet ring comprises a plurality of first magnet tiles, and the fifth permanent magnet ring comprises a plurality of fifth magnet tiles; the first annular support comprises a first top annular plate, a first bottom annular plate, a limiting ring, a plurality of upper fixing supports, a plurality of middle fixing supports and a plurality of lower fixing supports, the upper fixing supports are of inverted L-shaped structures, the lower fixing supports are of L-shaped structures, each third magnetic tile is bonded on the inner side of one upper fixing support, each first magnetic tile is bonded on the inner side of one middle fixing support, each fifth magnetic tile is bonded on the inner side of one lower fixing support, a first top annular groove is formed in the lower surface of the first top annular plate, a first bottom annular groove is formed in the upper surface of the first bottom annular plate, the first bottom annular plate is fixed on the base, the lower fixing supports are sequentially arranged in the first bottom annular groove and fixed on the first bottom annular plate, each middle fixing support is bonded to the upper surface of the lower fixing support, the limiting ring is sleeved outside the middle fixing supports, each upper fixing support is bonded to the upper surface of one middle fixing support, the first top ring plate is fixed above the upper fixing supports, and the upper fixing supports are located in the first top ring-shaped grooves.
Preferably, the seventh permanent magnet ring includes a plurality of seventh magnetic tiles, the second annular support includes a second top annular plate, a second bottom annular plate and a plurality of first fixing supports, a second top annular groove is formed in a lower surface of the second top annular plate, a second bottom annular groove is formed in an upper surface of the second bottom annular plate, a first recessed portion is formed in a lower portion of an inner side of the first fixing support, the first recessed portion penetrates through a bottom surface and two sides of the first fixing support, each of the seventh magnetic tiles is bonded to one of the first recessed portions, bottoms of the plurality of first fixing supports are sequentially fixed to the second bottom annular plate, lower portions of the first fixing support and the seventh magnetic tiles are located in the second bottom annular groove, an upper portion of the first fixing support is located in the second top annular groove, and the top of the first fixing support is fixed on the second top circular plate, and the second top circular plate is fixed on the top plate.
Preferably, the eighth permanent magnet ring includes a plurality of eighth magnet tiles, the third annular support includes a third top annular plate, a third bottom annular plate and a plurality of second fixing supports, a third top annular groove is formed in a lower surface of the third top annular plate, a third bottom annular groove is formed in an upper surface of the third bottom annular plate, a second recessed portion is formed in a lower portion of an outer side of the second fixing support, the second recessed portion penetrates through a bottom surface and two sides of the second fixing support, each eighth magnet tile is bonded to one second recessed portion, bottoms of the plurality of second fixing supports are sequentially fixed to the third bottom annular plate, lower portions of the second fixing supports and the eighth magnet tiles are located in the third bottom annular groove, and an upper portion of the second fixing support is located in the third top annular groove, and the top of the second fixing support is fixed on the third top circular plate, and the third top circular plate is fixed on the top plate.
Preferably, the fourth permanent magnet ring comprises a plurality of fourth magnet tiles, and the sixth permanent magnet ring comprises a plurality of sixth magnet tiles; the central support comprises a central shaft, a bottom plate, an upper fixing sleeve, a lower fixing sleeve, a plurality of third fixing supports and a plurality of fourth fixing supports, the bottom plate is fixed at the bottom end of the central shaft, the bottom plate is fixed on the base, each sixth magnetic tile is adhered to the upper part of the inner side of each third fixing support, the plurality of third fixing supports are circumferentially arranged outside the central shaft, the bottom of each third fixing support is adhered to the bottom plate, the lower fixing sleeve is adhered to the outer parts of the plurality of third fixing supports, the second permanent magnetic ring is adhered to the central shaft, the second permanent magnetic ring is positioned above the plurality of sixth magnetic tiles, each fourth magnetic tile is adhered to the lower part of the inner side of the fourth fixing support, an upper annular groove is arranged on the lower surface of the upper fixing sleeve, and the upper parts of the plurality of fourth fixing supports are sequentially arranged in the upper annular groove and adhered to the upper fixing sleeve, the fourth magnetic shoes are sleeved outside the central shaft, the inner side of the upper fixing sleeve is bonded on the central shaft, and the fourth magnetic shoes are located above the second permanent magnetic ring.
Preferably, the coil mounting bracket includes a mounting cylinder, the bottom of the mounting cylinder is fixed to the base, an annular recess is provided on the upper portion of the outer side of the mounting cylinder, the annular recess penetrates through the top surface of the mounting cylinder, and the coil is fixedly sleeved outside the annular recess.
Compared with the prior art, the invention has the following technical effects:
according to the magnetic suspension absolute speed sensor provided by the invention, the third permanent magnet ring, the first permanent magnet ring and the fifth permanent magnet ring are sequentially arranged on the first annular bracket from top to bottom, and the fourth permanent magnet ring, the second permanent magnet ring and the sixth permanent magnet ring are sequentially arranged on the central bracket from top to bottom, so that two groups of halbach permanent magnet arrays are formed, and compared with a single magnet, the spatial magnetic field intensity is improved; the second annular support and the third annular support are fixed on the lower surface of the top plate, the seventh permanent magnet ring is installed on the lower portion of the inner side of the second annular support, and the eighth permanent magnet ring is installed on the lower portion of the outer side of the third annular support, so that the inertia reference mass is formed. The seventh permanent magnet ring and the eighth permanent magnet ring are arranged in parallel and interact with the two groups of halbach permanent magnet arrays, so that when the inertial reference mass moves upwards along the axial direction, the attraction force is increased, and the repulsion force is reduced; when the inertia reference mass moves downwards along the axial direction, the repulsive force is increased, the attractive force is reduced, and the change quantity of the two component forces can be basically the same by optimizing the structure and the magnetic field reference, so that the size of the resultant force is unchanged, and the nonlinear characteristic of the magnetic field is overcome. A uniform magnetic field is formed between the seventh permanent magnet ring and the eighth permanent magnet ring, the magnetic field intensity of a space is enhanced, the problem of nonlinearity of the magnetic field is solved, and the linearity and the sensitivity of the sensor are improved by arranging a coil in the area. The seventh permanent magnet ring and the eighth permanent magnet ring are non-contact and non-friction with other permanent magnet rings, and the problem of a metal spring in the conventional absolute speed sensor is solved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a perspective view of a magnetic levitation absolute velocity sensor according to the present invention;
FIG. 2 is a cross-sectional view of a magnetic levitation absolute velocity sensor provided by the present invention;
FIG. 3 is a perspective view of the lower portion of the magnetic levitation absolute velocity sensor provided in the present invention;
FIG. 4 is a cross-sectional view of the lower portion of the magnetic levitation absolute velocity sensor provided by the present invention;
fig. 5 is a three-dimensional structural view of a seventh permanent magnet ring and a second annular bracket in the magnetic levitation absolute velocity sensor provided by the present invention;
fig. 6 is a cross-sectional view of a seventh permanent magnet ring and a second annular bracket in the magnetic levitation absolute velocity sensor provided by the present invention;
fig. 7 is a three-dimensional structural view of an eighth permanent magnet ring and a third ring-shaped support in the magnetic levitation absolute velocity sensor provided by the present invention;
fig. 8 is a cross-sectional view of an eighth permanent magnet ring and a third ring-shaped support in the magnetic levitation absolute velocity sensor provided by the present invention;
fig. 9 is a schematic view of the magnetizing direction of the magnetic spring mechanism in the magnetic levitation absolute velocity sensor according to the present invention.
Description of reference numerals: 100. a magnetic levitation absolute velocity sensor; 1. a top plate; 2. a base; 3. a coil; 4. a coil annular support; 5. an air bearing; 6. a guide shaft; 7. a tensioning sleeve; 8. a first through hole; 9. a first permanent magnet ring; 91. a first magnetic shoe; 10. a second permanent magnet ring; 11. a third permanent magnet ring; 12. a fourth permanent magnet ring; 13. a fifth permanent magnet ring; 14. a sixth permanent magnet ring; 15. a seventh permanent magnet ring; 151. a seventh magnetic shoe; 16. an eighth permanent magnet ring; 161. an eighth magnetic shoe; 17. a first top annular plate; 18. a first bottom annular plate; 19. a limiting ring; 20. an upper fixing bracket; 21. a middle fixed bracket; 22. a lower fixed bracket; 23. a second top annular plate; 24. a second bottom annular plate; 25. a first fixed bracket; 26. a third top annular plate; 27. a third bottom annular plate; 28. a second fixed bracket; 29. a central shaft; 30. a base plate; 31. a third fixed bracket; 32. a fourth fixed bracket; 33. fixing a sleeve; 34. a lower fixing sleeve.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a magnetic suspension absolute speed sensor, which realizes the linearization and the field intensity of a magnetic field in the internal space of the sensor and improves the low-frequency performance of the sensor.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1 to 9, the present embodiment provides a magnetic levitation absolute velocity sensor 100, which includes a top plate 1, a base 2, a coil 3, a coil ring support 4, a magnetic spring mechanism and an air levitation guide mechanism, where the magnetic spring mechanism includes a first permanent magnet ring 9, a second permanent magnet ring 10, a third permanent magnet ring 11, a fourth permanent magnet ring 12, a fifth permanent magnet ring 13, a sixth permanent magnet ring 14, a seventh permanent magnet ring 15, an eighth permanent magnet ring 16, a first ring support, a second ring support, a third ring support and a central support, the top plate 1 and the base 2 are connected by the air levitation guide mechanism, and the top plate 1 is located above the base 2, the top plate 1 can reciprocate in a vertical direction relative to the base 2, and the air levitation guide mechanism restrains the whole device from moving only in a Z direction while avoiding friction. The first annular support, the coil annular support 4 and the central support are all fixed on the upper surface of the base 2, the coil annular support 4 is sleeved inside the first annular support in a clearance manner, the central support is sleeved inside the coil annular support 4 in a clearance manner, the second annular support and the third annular support are both fixed on the lower surface of the top plate 1, the second annular support is positioned between the first annular support and the coil annular support 4 and is not in contact with the first annular support and the coil annular support 4, the third annular support is positioned between the coil annular support 4 and the central support and is not in contact with the coil annular support 4 and the central support, the third permanent magnet ring 11, the first permanent magnet ring 9 and the fifth permanent magnet ring 13 are sequentially arranged on the first annular support from top to bottom, the seventh permanent magnet ring 15 is arranged on the lower part of the inner side of the second annular support, the coil 3 is arranged on the upper part of the outer side of the coil annular support 4, the eighth permanent magnet ring 16 is arranged at the lower part of the outer side of the third annular bracket, the fourth permanent magnet ring 12, the second permanent magnet ring 10 and the sixth permanent magnet ring 14 are sequentially arranged on the central bracket from top to bottom, and specifically, the seventh permanent magnet ring 15, the coil 3 and the eighth permanent magnet ring 16 are in corresponding positions in the radial direction; the third permanent magnet ring 11, the fourth permanent magnet ring 12, the fifth permanent magnet ring 13, the sixth permanent magnet ring 14, the seventh permanent magnet ring 15 and the eighth permanent magnet ring 16 are radial magnetizing permanent magnet rings, the third permanent magnet ring 11, the fourth permanent magnet ring 12, the seventh permanent magnet ring 15 and the eighth permanent magnet ring 16 are in the same magnetizing direction, the fifth permanent magnet ring 13 and the sixth permanent magnet ring 14 are in the same magnetizing direction, the fifth permanent magnet ring 13 and the third permanent magnet ring 11 are in opposite magnetizing directions, the first permanent magnet ring 9 and the second permanent magnet ring 10 are axial magnetizing permanent magnet rings, and the first permanent magnet ring 9 and the second permanent magnet ring 10 are in opposite magnetizing directions.
The third permanent magnet ring 11, the first permanent magnet ring 9 and the fifth permanent magnet ring 13 are sequentially mounted on the first annular support from top to bottom, and the fourth permanent magnet ring 12, the second permanent magnet ring 10 and the sixth permanent magnet ring 14 are sequentially mounted on the central support from top to bottom to form two groups of halbach permanent magnet arrays. The second annular support and the third annular support are both fixed on the lower surface of the top plate 1, the seventh permanent magnet ring 15 is mounted on the lower portion of the inner side of the second annular support, and the eighth permanent magnet ring 16 is mounted on the lower portion of the outer side of the third annular support, so that the inertial reference mass is formed. When the magnetic suspension absolute speed sensor 100 in this embodiment is used, the base 2 is fixed on the housing, and the principle that the coil 3 generates electromagnetic induction is that when external vibration is input to the sensor, the inertial reference mass moves relative to the housing due to the inertial effect, and drives the coil 3 to cut the magnetic field, thereby generating a voltage signal proportional to the housing speed.
The seventh permanent magnet ring 15 and the eighth permanent magnet ring 16 are arranged in parallel and interact with two groups of halbach permanent magnet arrays, and the working principle of the magnetic spring mechanism can be determined by analyzing the principle that like poles repel each other and opposite poles attract each other, specifically, the upper half part of the first permanent magnet ring 9 and the upper half part of the second permanent magnet ring 10 generate attractive force for the seventh permanent magnet ring 15 and the eighth permanent magnet ring 16, and the lower half part of the first permanent magnet ring 9 and the lower half part of the second permanent magnet ring 10 generate repulsive force for the seventh permanent magnet ring 15 and the eighth permanent magnet ring 16. Meanwhile, the third permanent magnet ring 11 and the fourth permanent magnet ring 12 generate an attractive force to the seventh permanent magnet ring 15 and the eighth permanent magnet ring 16, and the fifth permanent magnet ring 13 and the sixth permanent magnet ring 14 generate a repulsive force to the seventh permanent magnet ring 15 and the eighth permanent magnet ring 16. The resultant force produces a spring force that counteracts the weight of the inertial reference mass, thereby forming a magnetic spring mechanism. When the inertial reference mass moves upwards along the axial direction, the attraction force is increased, and the repulsion force is reduced; when the inertial reference mass moves downwards along the axial direction, the repulsive force is increased, the attractive force is reduced, the variation quantity of the two component forces can be basically the same by optimizing the structure and the magnetic field reference, so that the resultant force is unchanged, the nonlinear characteristic of a magnetic field is overcome, the axial rigidity is approximately zero, and the low-frequency cut-off frequency of the sensor is reduced.
A uniform magnetic field is formed between the seventh permanent magnet ring 15 and the eighth permanent magnet ring 16, the magnetic field intensity in the space is enhanced, the problem of non-linearity of the magnetic field is solved, and the linearity and the sensitivity of the sensor are improved by placing the coil 3 in the area. The seventh permanent magnet ring 15 and the eighth permanent magnet ring 16 are non-contact and non-friction with other permanent magnet rings, and the problem of metal springs in the conventional absolute speed sensor is solved. It can be seen that in this embodiment, through the mutual cooperation and structural optimization of the magnets, an approximately linear magnetic spring mechanism is formed in the range of the stroke concerned by the sensor, and meanwhile, the spatial magnetic field around the coil 3 is improved, so that the single-degree-of-freedom and good-linearization output of the magnetic levitation absolute velocity sensor 100 is realized, the low-frequency performance of the sensor is improved, and the problems of insufficient low-frequency measurement bandwidth and low sensitivity of the traditional mechanical spring-based sensor are solved.
As shown in fig. 9, the Z direction is the vertical direction as previously indicated, and the direction indicated by the arrow is the positive Z direction. The upper half part of the first permanent magnet ring 9 and the upper half part of the second permanent magnet ring 10 generate Z-direction attractive force for the seventh permanent magnet ring 15 and the eighth permanent magnet ring 16, and the lower half part of the first permanent magnet ring 9 and the lower half part of the second permanent magnet ring 10 generate Z-direction repulsive force for the seventh permanent magnet ring 15 and the eighth permanent magnet ring 16. Meanwhile, the third permanent magnet ring 11 and the fourth permanent magnet ring 12 generate Z-direction attractive force for the seventh permanent magnet ring 15 and the eighth permanent magnet ring 16, and the fifth permanent magnet ring 13 and the sixth permanent magnet ring 14 generate Z-direction repulsive force for the seventh permanent magnet ring 15 and the eighth permanent magnet ring 16. In this embodiment, the first permanent magnet ring 9 is magnetized upward, the second permanent magnet ring 10 is magnetized downward, the third permanent magnet ring 11, the fourth permanent magnet ring 12, the seventh permanent magnet ring 15, and the eighth permanent magnet ring 16 are magnetized inward, and the fifth permanent magnet ring 13 and the sixth permanent magnet ring 14 are magnetized outward.
As shown in fig. 2, the base 2 is provided with a plurality of first through holes 8, the plurality of first through holes 8 are all located outside the first annular support, the top plate 1 is provided with a plurality of second through holes, the second through holes correspond to the first through holes 8 one by one, the air-floating guide mechanism comprises a plurality of air-floating guide assemblies, each air-floating guide assembly comprises an air-floating bearing 5, a guide shaft 6 and a tension sleeve 7, the air-floating bearing 5 is fixed on the base 2, and an air bearing 5 is positioned above a first through hole 8, the upper end of each guide shaft 6 is fixed in a second through hole through a tensioning sleeve 7, the lower end of each guide shaft 6 is sleeved in the air bearing 5, and the bottom end of the guide shaft 6 can extend into the first through hole 8, the guide shaft 6 can reciprocate in the vertical direction relative to the air bearing 5, and then the inertial reference mass is constrained to move only along the Z direction while friction is avoided.
The upper surface of base 2 is provided with a plurality of bearing mounting grooves, and each bearing mounting groove is located the top of a first through-hole 8, and each air bearing 5 is fixed in a bearing mounting groove, and then is convenient for fix a position the installation to air bearing 5.
As shown in fig. 3 and 4, the third permanent magnet ring 11 includes a plurality of third magnet tiles, that is, a plurality of third magnet tiles are spliced to form a circular third permanent magnet ring 11, the first permanent magnet ring 9 includes a plurality of first magnet tiles 91, that is, a plurality of first magnet tiles 91 are spliced to form a circular first permanent magnet ring 9, and the fifth permanent magnet ring 13 includes a plurality of fifth magnet tiles, that is, a plurality of fifth magnet tiles are spliced to form a circular fifth permanent magnet ring 13; the first annular bracket comprises a first top annular plate 17, a first bottom annular plate 18, a limiting ring 19, a plurality of upper fixing brackets 20, a plurality of middle fixing brackets 21 and a plurality of lower fixing brackets 22, each third magnetic tile is adhered to the inner side of one upper fixing bracket 20, each first magnetic tile 91 is adhered to the inner side of one middle fixing bracket 21, each fifth magnetic tile is adhered to the inner side of one lower fixing bracket 22, a first top annular groove is arranged on the lower surface of the first top annular plate 17, a first bottom annular groove is arranged on the upper surface of the first bottom annular plate 18, the first bottom annular plate 18 is fixed on the base 2, the plurality of lower fixing brackets 22 are sequentially arranged in the first bottom annular groove and fixed on the first bottom annular plate 18, each middle fixing bracket 21 is adhered to the upper surface of the lower fixing bracket 22, the limiting ring 19 is sleeved outside the plurality of middle fixing brackets 21, each of the upper fixing brackets 20 is adhered to an upper surface of one of the middle fixing brackets 21, the first top ring plate 17 is fixed above the plurality of upper fixing brackets 20, and the upper fixing brackets 20 are located in the first top ring grooves. Specifically, the lower fixing bracket 22 is fixed on the first bottom circular plate 18 by screws, the upper fixing bracket 20 is fixed on the first top circular plate 17 by screws, and the limiting ring 19 is an aluminum ring. The outward repulsive force exists among the first magnetic tiles 91 of the first permanent magnetic ring 9, so that only the outer part needs to be limited, in the embodiment, the upper fixing support 20 is of an inverted L-shaped structure, the lower fixing support 22 is of an L-shaped structure, the outer part of the middle fixing support 21 is limited, and meanwhile, the limiting ring 19 is sleeved on the outer part of the middle fixing support 21 to further limit the outer part of the middle fixing support.
Specifically, the shape of the upper fixing support 20 is matched with that of the third magnetic shoe, the shape of the middle fixing support 21 is matched with that of the first magnetic shoe 91, the shape of the lower fixing support 22 is matched with that of the fifth magnetic shoe, the plurality of upper fixing supports 20 are spliced into an annular structure, the plurality of middle fixing supports 21 are spliced into an annular structure, and the plurality of lower fixing supports 22 are spliced into an annular structure.
As shown in fig. 5 and 6, the seventh permanent magnet ring 15 includes a plurality of seventh magnetic shoes 151, the second annular bracket includes a second top annular plate 23, a second bottom annular plate 24 and a plurality of first fixing brackets 25, a second top annular groove is provided on a lower surface of the second top annular plate 23, a second bottom annular groove is provided on an upper surface of the second bottom annular plate 24, a first recess is provided on a lower portion of an inner side of the first fixing bracket 25 and penetrates through a bottom surface and both sides of the first fixing bracket 25, each of the seventh magnetic shoes 151 is bonded to one of the first recesses, a plurality of first fixing brackets 25 are sequentially fixed on the second bottom annular plate 24 at bottoms thereof, and lower portions of the first fixing bracket 25 and the seventh magnetic shoes 151 are both located in the second bottom annular groove, an upper portion of the first fixing bracket 25 is located in the second top annular groove, and a top portion of the first fixing bracket 25 is fixed on the second top annular plate 23, a second top annular plate 23 is fixed to the top plate 1. Specifically, the top of the first fixing bracket 25 is fixed on the second top circular plate 23 by screws, and the bottom of the first fixing bracket 25 is fixed on the second bottom circular plate 24 by screws; the shape of the first fixing bracket 25 is matched with that of the seventh magnetic shoe 151, and the plurality of first fixing brackets 25 are spliced into a circular ring-shaped structure.
As shown in fig. 7 and 8, the eighth permanent magnet ring 16 includes a plurality of eighth magnet shoes 161, the third annular bracket includes a third top annular plate 26, a third bottom annular plate 27 and a plurality of second fixing brackets 28, a third top annular groove is formed on the lower surface of the third top annular plate 26, a third bottom annular groove is formed on the upper surface of the third bottom annular plate 27, a second recess is formed on the lower portion of the outer side of the second fixing bracket 28 and penetrates the bottom surface and both sides of the second fixing bracket 28, each eighth magnet shoe 161 is bonded to one second recess, the bottoms of the plurality of second fixing brackets 28 are sequentially fixed on the third bottom annular plate 27, the lower portions of the second fixing brackets 28 and the eighth magnet shoes 161 are both located in the third bottom annular groove, the upper portion of the second fixing brackets 28 is located in the third top annular groove, and the top portion of the second fixing brackets 28 is fixed on the third top annular plate 26, a third top annular plate 26 is fixed to the top plate 1. Specifically, the top of the second fixing bracket 28 is fixed to the third top annular plate 26 by screws, and the bottom of the second fixing bracket 28 is fixed to the third bottom annular plate 27 by screws; the shape of the second fixing bracket 28 is matched with the shape of the eighth magnetic shoe 161, and a plurality of second fixing brackets 28 are spliced into an annular structure.
As shown in fig. 4, the fourth permanent magnet ring 12 includes a plurality of fourth magnet tiles, and the sixth permanent magnet ring 14 includes a plurality of sixth magnet tiles; the central bracket comprises a central shaft 29, a bottom plate 30, an upper fixing sleeve 33, a lower fixing sleeve 34, a plurality of third fixing brackets 31 and a plurality of fourth fixing brackets 32, the bottom plate 30 is fixed at the bottom end of the central shaft 29, the bottom plate 30 is fixed on the base 2, each sixth magnetic tile is adhered to the upper part of the inner side of the third fixing bracket 31, the plurality of third fixing brackets 31 are arranged outside the central shaft 29 along the circumferential direction, the bottom of each third fixing bracket 31 is adhered to the bottom plate 30, the lower fixing sleeve 34 is adhered to the outer parts of the plurality of third fixing brackets 31, the second permanent magnetic ring 10 is adhered to the central shaft 29, the second permanent magnetic ring 10 is arranged above the plurality of sixth magnetic tiles, each fourth magnetic tile is adhered to the lower part of the inner side of the fourth fixing bracket 32, the lower surface of the upper fixing sleeve 33 is provided with an upper annular groove, the upper parts of the plurality of the fourth fixing brackets 32 are sequentially adhered to the upper annular groove and the upper fixing sleeve 33, the fourth magnetic shoes are sleeved outside the central shaft 29, the inner side of the upper fixing sleeve 33 is adhered to the central shaft 29, and the fourth magnetic shoes are located above the second permanent magnet ring 10.
Specifically, the third fixing bracket 31 includes a first horizontal plate and a first vertical plate disposed in the middle of the upper surface of the first horizontal plate, the first horizontal plate is bonded to the bottom plate 30, the sixth magnetic shoe is bonded to the inner side of the first vertical plate, the shape of the first vertical plate matches with that of the sixth magnetic shoe, and the lower fixing sleeve 34 is bonded and sleeved on the outer portions of the first vertical plates. The fourth fixing support 32 comprises a second horizontal plate and a second vertical plate arranged on the outer side of the lower portion of the second horizontal plate, the fourth magnetic shoe is bonded on the inner side of the second vertical plate, the shape of the second vertical plate is matched with that of the fourth magnetic shoe, and the second horizontal plate is located in the upper annular groove and is bonded on the upper fixing sleeve 33.
The coil 3 mounting bracket comprises a mounting cylinder, the bottom of the mounting cylinder is fixed on the base 2, an annular concave part is arranged on the upper part of the outer side of the mounting cylinder, the annular concave part penetrates through the top surface of the mounting cylinder, and the coil 3 is fixedly sleeved outside the annular concave part.
The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (8)
1. A magnetic suspension absolute speed sensor is characterized by comprising a top plate, a base, a coil annular support, a magnetic spring mechanism and an air suspension guide mechanism, wherein the magnetic spring mechanism comprises a first permanent magnet ring, a second permanent magnet ring, a third permanent magnet ring, a fourth permanent magnet ring, a fifth permanent magnet ring, a sixth permanent magnet ring, a seventh permanent magnet ring, an eighth permanent magnet ring, a first annular support, a second annular support, a third annular support and a central support; the first ring-shaped support, the coil ring-shaped support and the central support are all fixed on the upper surface of the base, the coil ring-shaped support is sleeved inside the first ring-shaped support in a clearance manner, the central support is sleeved inside the coil ring-shaped support in a clearance manner, the second ring-shaped support and the third ring-shaped support are both fixed on the lower surface of the top plate, the second ring-shaped support is positioned between the first ring-shaped support and the coil ring-shaped support, the third ring-shaped support is positioned between the coil ring-shaped support and the central support, the third permanent magnetic ring, the first permanent magnetic ring and the fifth permanent magnetic ring are sequentially installed on the first ring-shaped support from top to bottom, the seventh permanent magnetic ring is installed on the lower part of the inner side of the second ring-shaped support, and the coil is installed on the upper part of the outer side of the coil ring-shaped support, the eighth permanent magnet ring is arranged at the lower part of the outer side of the third annular bracket, and the fourth permanent magnet ring, the second permanent magnet ring and the sixth permanent magnet ring are sequentially arranged on the central bracket from top to bottom; the third permanent magnet ring, the fourth permanent magnet ring, the fifth permanent magnet ring, the sixth permanent magnet ring, the seventh permanent magnet ring and the eighth permanent magnet ring are radial magnetizing permanent magnet rings, the third permanent magnet ring, the fourth permanent magnet ring, the seventh permanent magnet ring and the eighth permanent magnet ring have the same magnetizing direction, the magnetizing directions of the fifth permanent magnet ring and the sixth permanent magnet ring are the same, the magnetizing directions of the fifth permanent magnet ring and the third permanent magnet ring are opposite, the first permanent magnet ring and the second permanent magnet ring are axial magnetizing permanent magnet rings, the magnetizing directions of the first permanent magnet ring and the second permanent magnet ring are opposite, the upper half part of the first permanent magnet ring and the upper half part of the second permanent magnet ring generate attraction force to the seventh permanent magnet ring and the eighth permanent magnet ring, the lower half parts of the first permanent magnet ring and the second permanent magnet ring generate repulsive force to the seventh permanent magnet ring and the eighth permanent magnet ring.
2. A magnetic levitation absolute velocity sensor according to claim 1, wherein the base has a plurality of first through holes, and the plurality of first through holes are located outside the first annular support, the top plate has a plurality of second through holes, the second through holes correspond to the first through holes one to one, the air levitation guide mechanism includes a plurality of air levitation guide assemblies, each air levitation guide assembly includes an air levitation bearing, a guide shaft, and a tension sleeve, the air levitation bearing is fixed on the base, and one air levitation bearing is located above one first through hole, an upper end of each guide shaft is fixed in one second through hole through one tension sleeve, a lower end of the guide shaft is sleeved in the air levitation bearing, and a bottom end of the guide shaft can extend into the first through hole.
3. The magnetic levitation absolute velocity sensor according to claim 2, wherein the upper surface of the base is provided with a plurality of bearing installation grooves, each of the bearing installation grooves is located above one of the first through holes, and each of the air bearings is fixed in one of the bearing installation grooves.
4. A magnetic levitation absolute velocity sensor according to claim 1, wherein the third permanent magnet ring comprises a plurality of third magnet tiles, the first permanent magnet ring comprises a plurality of first magnet tiles, and the fifth permanent magnet ring comprises a plurality of fifth magnet tiles; the first annular support comprises a first top annular plate, a first bottom annular plate, a limiting ring, a plurality of upper fixing supports, a plurality of middle fixing supports and a plurality of lower fixing supports, the upper fixing supports are of inverted L-shaped structures, the lower fixing supports are of L-shaped structures, each third magnetic tile is bonded on the inner side of one upper fixing support, each first magnetic tile is bonded on the inner side of one middle fixing support, each fifth magnetic tile is bonded on the inner side of one lower fixing support, a first top annular groove is formed in the lower surface of the first top annular plate, a first bottom annular groove is formed in the upper surface of the first bottom annular plate, the first bottom annular plate is fixed on the base, the lower fixing supports are sequentially arranged in the first bottom annular groove and fixed on the first bottom annular plate, each middle fixing support is bonded to the upper surface of the lower fixing support, the limiting ring is sleeved outside the middle fixing supports, each upper fixing support is bonded to the upper surface of one middle fixing support, the first top ring plate is fixed above the upper fixing supports, and the upper fixing supports are located in the first top ring-shaped grooves.
5. A magnetic levitation absolute velocity sensor according to claim 1, wherein the seventh permanent magnet ring comprises a plurality of seventh magnetic tiles, the second annular bracket comprises a second top annular plate, a second bottom annular plate and a plurality of first fixing brackets, a second top annular groove is formed in the lower surface of the second top annular plate, a second bottom annular groove is formed in the upper surface of the second bottom annular plate, a first concave portion is formed in the lower portion of the inner side of each first fixing bracket, the first concave portions penetrate through the bottom surface and two sides of each first fixing bracket, each seventh magnetic tile is bonded to one first concave portion, the bottoms of the plurality of first fixing brackets are sequentially fixed on the second bottom annular plate, and the lower portions of the first fixing brackets and the seventh magnetic tiles are located in the second bottom annular groove, the upper portion of the first fixing support is located in the second top annular groove, the top of the first fixing support is fixed to the second top annular plate, and the second top annular plate is fixed to the top plate.
6. A magnetic levitation absolute velocity sensor according to claim 1, wherein the eighth permanent magnet ring comprises a plurality of eighth magnet tiles, the third annular support comprises a third top annular plate, a third bottom annular plate and a plurality of second fixing supports, a third top annular groove is formed in the lower surface of the third top annular plate, a third bottom annular groove is formed in the upper surface of the third bottom annular plate, a second concave portion is formed in the lower portion of the outer side of the second fixing support, the second concave portion penetrates through the bottom surface and two sides of the second fixing support, each of the eighth magnet tiles is bonded to one of the second concave portions, the bottoms of the second fixing supports are sequentially fixed on the third bottom annular plate, and the lower portions of the second fixing supports and the eighth magnet tiles are located in the third bottom annular groove, the upper portion of the second fixing support is located in the third top annular groove, the top of the second fixing support is fixed to the third top annular plate, and the third top annular plate is fixed to the top plate.
7. A magnetic levitation absolute velocity sensor according to claim 1, wherein the fourth permanent magnet ring comprises a plurality of fourth magnet tiles, and the sixth permanent magnet ring comprises a plurality of sixth magnet tiles; the central support comprises a central shaft, a bottom plate, an upper fixing sleeve, a lower fixing sleeve, a plurality of third fixing supports and a plurality of fourth fixing supports, the bottom plate is fixed at the bottom end of the central shaft, the bottom plate is fixed on the base, each sixth magnetic tile is adhered to the upper part of the inner side of each third fixing support, the plurality of third fixing supports are circumferentially arranged outside the central shaft, the bottom of each third fixing support is adhered to the bottom plate, the lower fixing sleeve is adhered to the outer parts of the plurality of third fixing supports, the second permanent magnetic ring is adhered to the central shaft, the second permanent magnetic ring is positioned above the plurality of sixth magnetic tiles, each fourth magnetic tile is adhered to the lower part of the inner side of the fourth fixing support, an upper annular groove is arranged on the lower surface of the upper fixing sleeve, and the upper parts of the plurality of fourth fixing supports are sequentially arranged in the upper annular groove and adhered to the upper fixing sleeve, the fourth magnetic shoes are sleeved outside the central shaft, the inner side of the upper fixing sleeve is bonded on the central shaft, and the fourth magnetic shoes are located above the second permanent magnetic ring.
8. The magnetic-levitation absolute velocity sensor according to claim 1, wherein the coil mounting bracket comprises a mounting cylinder, the bottom of the mounting cylinder is fixed on the base, an annular recess is formed in the upper portion of the outer side of the mounting cylinder, the annular recess penetrates through the top surface of the mounting cylinder, and the coil is fixedly sleeved outside the annular recess.
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| CN202210039791.3A CN114371308B (en) | 2022-01-14 | 2022-01-14 | Magnetic suspension absolute speed sensor |
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| CN202210039791.3A CN114371308B (en) | 2022-01-14 | 2022-01-14 | Magnetic suspension absolute speed sensor |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1776365A (en) * | 2005-11-24 | 2006-05-24 | 上海交通大学 | Magnetic field controllable dimagnetic stable suspersion rotor micro gyroscope |
| CN103062302A (en) * | 2012-12-19 | 2013-04-24 | 哈尔滨工业大学 | Coplane air floatation orthogonal decoupling and air floatation ball bearing angle decoupling magnetic levitation vibration isolator |
| CN203177957U (en) * | 2013-04-08 | 2013-09-04 | 成都赛腾自动化工程有限公司 | Magneto-electric absolute speed sensor |
| CN108386481A (en) * | 2018-03-05 | 2018-08-10 | 青岛理工大学 | Based on the High Linear magnetic suspended isolation device and actuator of Halbach permanent magnet arrays, method |
| US20200141763A1 (en) * | 2018-11-07 | 2020-05-07 | Shanghai University | Electromagnetic type quasi-zero stiffness absolute displacement sensor |
| CA3128422A1 (en) * | 2019-02-14 | 2020-08-20 | Magassist, Inc. | Stiffness enhancing mechanism for active magnetic suspension bearing, active magnetic suspension bearing and blood pump |
-
2022
- 2022-01-14 CN CN202210039791.3A patent/CN114371308B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1776365A (en) * | 2005-11-24 | 2006-05-24 | 上海交通大学 | Magnetic field controllable dimagnetic stable suspersion rotor micro gyroscope |
| CN103062302A (en) * | 2012-12-19 | 2013-04-24 | 哈尔滨工业大学 | Coplane air floatation orthogonal decoupling and air floatation ball bearing angle decoupling magnetic levitation vibration isolator |
| CN203177957U (en) * | 2013-04-08 | 2013-09-04 | 成都赛腾自动化工程有限公司 | Magneto-electric absolute speed sensor |
| CN108386481A (en) * | 2018-03-05 | 2018-08-10 | 青岛理工大学 | Based on the High Linear magnetic suspended isolation device and actuator of Halbach permanent magnet arrays, method |
| US20200141763A1 (en) * | 2018-11-07 | 2020-05-07 | Shanghai University | Electromagnetic type quasi-zero stiffness absolute displacement sensor |
| CA3128422A1 (en) * | 2019-02-14 | 2020-08-20 | Magassist, Inc. | Stiffness enhancing mechanism for active magnetic suspension bearing, active magnetic suspension bearing and blood pump |
Non-Patent Citations (2)
| Title |
|---|
| JINGLEI ZHAO 等: "A novel electromagnet-based absolute displacement sensor with approximately linear quasi-zero-stiffness", 《INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES》 * |
| TIANSHU XI 等: "Design and optimization of maglev vibration isolation for underwater unmanned vehicle", 《2021 IEEE INTERNATIONAL CONFERENCE ON DATA SCIENCE AND COMPUTER APPLICATION》 * |
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