JPH0642578A - Semi-active vibration proof device, semi-active damper device, semi-active stiffness mechanism device, reduced projection exposure device and its semi-active damping method - Google Patents

Abstract

PURPOSE:To provide an inexpensive semi-active damping device which enables damping by providing a semi-active damper device or a semi-active stiffness mechanism device on a damping device consisting of a structure subject to the step input in the horizontal direction and the floor vibration and a damping table, apart from a passive damping device. CONSTITUTION:When the X-Y stage 4 is driven by its driving device, a reaction force is exerted on a level block 3 supporting the driving device, and a damping device 2 is deformed thereby. If an electro-magnet 14 is actuated immediately before the X-Y stage 4 is driven, a movable member 16 and the level block 3 are connected to each other, and a relative motion is generated between the movable member 16 and a container member 17, and the viscous resistance of the viscous fluid 18 to be generated when the viscous fluid 18 is removed performs the damping effect as a damper. In particular, when the higher the viscosity of the viscous fluid 18 becomes, and the narrower the space between the movable member 16 and the container member 17 becomes, the larger damping force is obtained, and if required, it is possible to provide the overdamping.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration isolator for equipment that receives step input and floor vibration, and in particular, it is suitable for achieving both a vibration control effect for step input and a vibration isolation effect for floor vibration. Active vibration isolation device, semi-active damper device,
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semi-active rigidity mechanism device, a reduced projection exposure apparatus, and a semi-active vibration isolation method for the same.

[0002]

2. Description of the Related Art Precision equipment such as a reduction projection exposure apparatus, which incorporates a moving table used for moving a wafer, may lower its accuracy due to vibration of the floor surface. It is placed on the surface plate mounted above. Generally, as a vibration isolation device, a coil spring, an air spring, or a vibration isolation rubber having low rigidity in the horizontal and vertical directions,
Combinations with viscous dampers, which have a damping effect, are often used. The vibration isolation device can reduce minute vibrations from the floor surface, but in order to make the surface plate sway easily, when a vibration source is provided inside the equipment, it has an adverse effect on the vibration force. It will increase the vibration of the surface plate.

In the case of the reduction projection exposure apparatus, the reduction projection exposure apparatus as a whole vibrates as the XY stage provided on the surface plate moves. It is necessary to take a long settling time for attenuating. As a result, it takes a long time to move the wafer to an appropriate position by the XY stage and perform reduction projection exposure on the wafer. So X
In order to reduce the vibration generated by the movement of the Y stage (this reduction effect is called the vibration damping effect), a method of increasing the damping effect of the vibration isolation device to quickly damp the vibration, A method of increasing the rigidity of the device to prevent the occurrence of vibration is considered. However, these methods may adversely affect the vibration isolation effect.
That is, it is difficult to provide a vibration damping device that achieves both the vibration damping effect and the vibration damping effect only with the passive element.

To solve this problem, it is effective to actively suppress the vibration of the surface plate due to the reaction force when the XY stage is driven. As a conventional technique, for example, as described in Japanese Patent Laid-Open No. 1-307537, an actuator is used instead of a passive vibration isolator, and an absolute response acceleration on a surface plate is fed back to actively. There are those that suppress the vibration of the surface plate.

[0005]

According to the principle of the prior art, it is possible to actively obtain the vibration damping effect and the vibration damping effect of the surface plate. However, it is assumed that an active vibration isolation device using an actuator is expensive and it is difficult to make adjustments to achieve its performance.

An object of the present invention is to provide an inexpensive semi-active vibration isolator, a semi-active damper device, and a semi-active rigid mechanical device capable of controlling the characteristics of the passive vibration isolator device and its vibration isolator. To provide a reduction projection exposure apparatus and a semi-active vibration isolating method thereof.

[0007]

SUMMARY OF THE INVENTION The above-mentioned object is to provide a vibration isolator comprising a structure subject to horizontal step input and floor vibration and a vibration isolator, and a semi-active damper separately from a passive vibration isolator. This is accomplished by providing a device or semi-active rigid mechanical device. That is, the semi-active damper device is a passive damper member different from the vibration isolation means of the vibration isolation table, an active transmission device that transmits the damping force of the passive damper member to the structure, and the active damper device. A controller for controlling the mold transmission device, or an electromagnet for connecting or disconnecting the passive damper member to or from the structure, and a controller for controlling the electromagnet. It is what In addition, the semi-active rigidity mechanism device includes a passive spring member different from the vibration isolation means of the vibration isolation table, an active transmission device that transmits the spring force of the passive spring member to the structure, A controller for controlling the active transmission device, or an electromagnet for connecting or disconnecting the spring force of the passive spring member to or from the structure, and a controller for controlling the electromagnet. It is characterized by being present.

[0008]

In the semi-active vibration isolator of the present invention, in order to obtain the vibration isolation effect and the vibration damping effect at the same time, the structure supported by the vibration isolation device, the floor vibration, and the inside of the structure are supported. Measure the acceleration of the vibration source, etc., and use these measurement data,
This is done by on / off controlling an electromagnet that controls the operation of the semi-active vibration isolator so as to suppress the vibration of the structure.

However, when the structure to which the semi-active vibration isolator of the present invention is applied is a reduction projection exposure apparatus, the control of the semi-active vibration isolator can be simplified as follows. Usually, the positioning control of the XY stage of the reduction projection exposure apparatus is performed in two stages. In the first stage, the stage is moved in accordance with an appropriate speed pattern in order to move the stage as fast and as large as possible according to the positioning accuracy. A large reaction force is applied to the reduction projection exposure apparatus main body when the stage is moved in the first stage. Further, in the second stage, high-precision positioning control is performed using a laser length measuring device capable of measuring even minute displacements, but the stage reaction force at this time is small. Moreover, the accuracy of the laser length measuring instrument is easily affected by minute vibrations such as floor vibrations.

Therefore, in the first stage, the controller of the semi-active vibration isolator operates the electromagnet to couple the passive damper member or the passive spring member to the reduction projection exposure apparatus, thereby increasing the size of the reduction projection exposure apparatus. A vibration damping force is applied to reduce the vibration response of the entire reduction projection exposure apparatus due to the stage reaction force. The damping effect is obtained by the damping force when operating the passive damper member, and by increasing the rigidity of the entire vibration isolation device when operating the passive spring member. Next, during the high-precision positioning control in the second stage, the control current to the electromagnet is cut off so that the passive damper member or the passive spring member does not work, thereby obtaining the original vibration isolation effect of the vibration isolation device. be able to. Further, since the stage does not move during exposure, the control current to the electromagnet is kept off so that the vibration isolation effect can be obtained.

When the stage is driven, as a criterion for deciding whether or not to suspend the operation of the semi-active damper device or the semi-active rigid mechanism device when shifting to the second stage for performing highly accurate positioning control of the stage. By using the operation amount (the amount corresponding to the load) or the deviation amount (the amount corresponding to the displacement difference between the target position and the current position), it is possible to perform more effective control. As a concrete control method using the operation amount or the deviation amount during the stage driving, the control current to the electromagnet is turned off when the operation amount (or its impulse) during the stage driving or the deviation amount becomes a certain value or less. The method is effective.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Some embodiments of the present invention will be described below with reference to the drawings. First, an embodiment of the present invention will be described with reference to FIGS. 1, 2 and 11. FIG. 11 is a perspective view of an example in which the reduction projection exposure apparatus is supported by a passive type vibration isolation device. FIG. 1 is a perspective view showing an example of arranging the semi-active type element 11 in the passive vibration isolator 2 shown in FIG. 11 and the configuration of the controller.

In FIG. 11, an XY stage 4 is provided on a surface plate 3 supported by a plurality of vibration isolation devices 2 of an anti-vibration table 1. Further, the lens support base 7 is supported by the four column members 6 arranged at the four corners of the surface plate 3. A lens holder 8 suspended from the lens support base 7,
The positional relationship with the wafer 5 placed on the upper part of the XY stage 4 is arbitrarily set by moving the XY stage 4 in the horizontal plane. Further, a reticle 9 and an illumination device 10 are arranged above the lens support base 7.

By the way, in this embodiment, as shown in FIG. 1, a plurality of semi-active elements 11 are provided on the vibration isolation table 1 in addition to the vibration isolation device 2 composed of a spring member and a damper member. Are arranged. The control of the semi-active element 11 is performed by the controller 12 of the semi-active element using the signal of the operation amount or the deviation amount when driving the stage from the stage controller 33.

In one of the semi-active elements 11, as shown in FIG. 2, a movable member 16 is arranged inside a container member 17 on a vibration isolation table 1, and the movable member 16 and the container member 17 are connected to each other. In order to secure a horizontal and vertical gap between them, an elastic member 19 is provided between them, and further, the movable member 1
The viscous fluid 18 is interposed between the container 6 and the container member 17. The movable member 16 is provided with one or a plurality of leaf spring members 15a for transmitting the viscous resistance force (vibration damping force) acting in the vertical direction of the viscous fluid 18 to the surface plate 3. The corresponding number of electromagnets 14a are on the surface plate 3
It is fixed by the support member 13. In addition, the movable member 1
In FIG. 6, the damping force that acts on the viscous fluid 18 in the horizontal direction is given to
A leaf spring member 15b is provided for transmission to the electromagnet, and an electromagnet 14b is attached to the support member 13 so as to face the leaf spring member 15b. The electromagnet 14 includes a yoke member 21 and a coil member 20.
The yoke member 21 and the leaf spring member 15 are installed close to each other.

Next, the operation of this embodiment will be described.
In FIG. 11, when the XY stage 4 is driven by the driving device, a reaction force is applied to the surface plate 3 supporting the driving device, and thereby the vibration isolation device 2 is deformed.
Since the movable member 16 and the surface plate 3 are connected by operating the electromagnet 14 immediately before the XY stage 4 is driven, relative movement occurs between the movable member 16 and the container member 17, The viscous resistance force of the viscous fluid 18 that occurs when the viscous fluid 18 is to be removed exerts a damping effect as a damper. In particular, by increasing the viscosity of the viscous fluid 18,
The narrower the gap between the movable member 16 and the container member 17,
A large damping force is obtained and, if necessary, overdamping is possible.

As a result, it is possible to suppress the vibration of the entire reduction projection exposure apparatus due to the reaction force when the XY stage is driven. Next, during exposure in the reduction projection exposure apparatus and during high-accuracy positioning control of the XY stage immediately before the start of exposure, the operation of the electromagnet 14 is interrupted by a signal from the controller 12 to suppress the vibration of the viscous fluid 18. Since the force does not act on the surface plate 3, the original vibration isolation effect of the vibration isolation device 2 can be obtained.

When the viscous damper is highly damped, the vibration isolation effect of the vibration isolator becomes worse than when the damping force is small, but this effect does not disappear at all, and floor vibration becomes a problem. If not, only the passive damper member of the present invention can be used as a high damping damper. Further, when the vibration damping effect is exerted only in one of the horizontal direction and the vertical direction, only the leaf spring member and the electromagnet for transmitting the vibration damping force in that direction may be provided.

FIG. 3 shows another embodiment. The difference between FIG. 3 and FIG. 2 is that the elastic member 1 in the viscous fluid 18 in FIG.
9 is arranged on the upper part of the container member 17. By doing so, the elastic member 19 can be easily maintained.

FIG. 4 shows another embodiment of the electromagnet 14.
In this embodiment, the connecting member 23 is inserted in the center of the yoke portion 21, and the spring member 22 is provided between the supporting member 13 and the connecting member 23 so that one end of the connecting member 23 contacts the leaf spring member 15. It is a thing. As a result, since the electromagnet 14 and the leaf spring member 15 are always in contact with each other, the attraction force of the electromagnet can be reduced as compared with the case where they are separated.

FIG. 5 shows an embodiment of the leaf spring member 15b. The leaf spring member of this embodiment is provided with a notch to reduce the rigidity in the out-of-plane direction.

FIG. 6 shows another embodiment of the semi-active damper device. In this embodiment, the movable member 16 is provided with the electromagnet 14, and the connecting member 23 facing the yoke portion of the electromagnet 14 is provided.
Is inserted in the receiving member 24 attached to the surface plate 3. The receiving member 24 serves as a guide when the connecting member 23 moves in the vertical direction, and the connecting member 23 is always in contact with the yoke portion of the electromagnet 14 by its own weight. The connecting member 23 can be fixed to the receiving member 24 by one or a plurality of force applying members provided on the receiving member 24, for example, an applying force member including the laminated piezoelectric element 26 and the pressing member 25. .

In this embodiment, in order to transmit the damping force of the passive viscous damper to the surface plate 3, first, the laminated piezoelectric element 26 is used.
Is operated to press and fix the connecting member 23 against the receiving member 24, and then the electromagnet 14 is operated to attract and fix the connecting member 23 to the yoke portion of the electromagnet 14. In addition, when the vibration damping force of the viscous fluid 18 only in the horizontal direction is required, the laminated piezoelectric element 26 and the pressing member 25 can be omitted.

FIG. 7 shows another embodiment of the semi-active damper device. In this embodiment, a viscoelastic member 28 is used as a passive damper member, and a magnetic member 29 is attached to one end of the viscoelastic member 28. The magnetic member 29 and the electromagnet 14 provided on the vibration isolation table 1 are arranged to face each other. Has been done. The other end of the viscoelastic member 28 is fixed to the surface plate 3 via the support member 27. This semi-active damper device is characterized by a simpler structure than the one using the viscous fluid described above. In this embodiment, the electromagnet 14 is operated to attract and fix the magnetic member 29 of the viscoelastic member 28 to the yoke portion of the electromagnet 14, so that the damping force of the viscoelastic member 28 can be transmitted to the surface plate 3. it can. Moreover, the viscoelastic member 28 has a horizontal and vertical damping effect.

FIG. 8 is an embodiment of a semi-active rigid mechanical device. In this embodiment, a connecting member 23 is arranged so as to face the yoke portion with the electromagnet 14 supported by the vibration isolation table 1, and the connecting member 23 is provided with a passive spring member 30. The connecting member 23 is the receiving member 2 attached to the surface plate 3.
It is inserted in 4. Further, the receiving member 24 is provided with one or a plurality of laminated piezoelectric elements 26 and a pressing member 25. As a result, the connecting member 23 is fixed to the receiving member 24.

In this embodiment, first, the laminated piezoelectric element 26 is operated to press the connecting member 23 against the receiving member 24,
The connecting member 23 is fixed to the receiving member 24. Next, the electromagnet 14 is actuated to attract and fix the connecting member 23 to the yoke portion of the electromagnet 14. By doing this,
The rigidity of the vibration isolation system can be controlled. By using a rubber member or the like as the passive spring member 30,
The spring constants in the horizontal and vertical directions of the semi-active rigid mechanical device can be set appropriately. The passive spring member 3
When the rigidity of 0 only in the horizontal direction is required, the receiving member 2
It is possible to omit the laminated piezoelectric element 26 and the pressing member 25 provided in FIG.

FIG. 9 shows another embodiment of the semi-active type rigid mechanical device. In this embodiment, the electromagnet 1 provided on the vibration isolation table 1
The leaf spring member 15 is supported by the leaf spring support member 31 via the passive spring member 30 so as to face the yoke portion of No. 4. The leaf spring support member 31 is attached to the surface plate 3. In this embodiment, the plate spring member 15 increases the rigidity of the vibration isolation system in the horizontal direction. By reducing the plate thickness of the plate spring member 15 to reduce the rigidity in the out-of-plane direction, the electromagnet 14 operates. The leaf spring member 15 can be sucked and fixed without hindering it.

FIG. 10 shows another embodiment of a semi-active type rigid mechanism device, in which the leaf spring member 15 of FIG. 9 is replaced by a leaf spring member 32 with a hinge. By providing the hinge portion, it is possible to increase the rigidity in the horizontal direction without increasing the rigidity in the out-of-plane direction.

[0029]

As described above, according to the present invention, in a vibration isolator for equipment that receives a step input and floor vibration, it is possible to effectively achieve both the vibration damping effect for the step input and the vibration isolation effect for the floor vibration. be able to.

[Brief description of drawings]

FIG. 1 is a perspective view of a semi-active vibration isolator according to the present invention.

FIG. 2 is a front view of an embodiment of the semi-active damper device of the present invention.

FIG. 3 is a front view of another embodiment of the semi-active damper device of the present invention.

FIG. 4 is a front view of another embodiment of the semi-active damper device of the present invention.

FIG. 5 is a plan view of another embodiment of the semi-active damper device of the present invention.

FIG. 6 is a front view of another embodiment of the semi-active damper device of the present invention.

FIG. 7 is a front view of another embodiment of the semi-active damper device of the present invention.

FIG. 8 is a front view of an embodiment of the semi-active rigid mechanical device of the present invention.

FIG. 9 is a front view of an embodiment of the semi-active type rigid mechanical device of the present invention.

FIG. 10 is a front view of another embodiment of the semi-active type rigid mechanical device of the present invention.

FIG. 11 is a perspective view of an example in which a reduction projection exposure apparatus is mounted on a vibration isolation device.

[Explanation of symbols]

 1 Vibration Isolator 2 Vibration Isolator 3 Surface Plate 4 XY Stage 5 Wafer 6 Column Member 7 Lens Support 8 Lens Holder 9 Reticle 10 Illuminator 11 Semi-Active Vibration Isolator 12 Controller 13 Support Members 14a, 14b Electromagnet 15a , 15b leaf spring member 16 movable member 17 container member 18 viscous fluid 19 elastic member 20 coil member 21 yoke member 22 spring member 23 connecting member 24 receiving member 25 pressing member 26 laminated piezoelectric element 27 viscoelastic supporting member 28 viscoelastic member 29 Magnetic member 30 Passive spring member 31 Leaf spring support member 32 Leaf spring member with hinge 33 Controller for stage

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Reference number within the agency FI Technical indication location H01L 21/027 (72) Inventor Ikushi Otake 502 Kintatemachi, Tsuchiura City, Ibaraki Prefecture Hiritsu Manufacturing Co. Inside the mechanical laboratory

Claims (19)

[Claims] 1. A vibration isolation device comprising a structure that receives horizontal step input and floor vibration and a vibration isolation table, wherein a semi-active damper device is provided between the structure and the vibration isolation table. The semi-active damper device is a passive damper member different from the vibration isolation means of the vibration isolation table, an active transmission device that transmits the damping force of the passive damper member to the structure, and the active transmission member. A semi-active vibration isolator comprising a controller for controlling the device. 2. A vibration isolator comprising a structure and a vibration isolation table which receives horizontal step input and floor vibration, wherein a semi-active damper device is provided between the structure and the vibration isolation table. The semi-active damper device includes a passive damper member different from the vibration isolator included in the vibration isolation table, an electromagnet for connecting or disconnecting the passive damper member to or from the structure, and the electromagnet. A semi-active vibration isolator comprising a controller for controlling. 3. The semi-active damper device of the semi-active vibration isolator according to claim 1, wherein the semi-active damper device includes a movable member disposed in a viscous fluid in a container member, and the movable member and the structure. A leaf spring member and an electromagnet having an attraction surface facing the leaf spring member. The leaf spring member is soft in the attraction direction of the electromagnet and has a large rigidity in the orthogonal direction. Then, the semi-active damper device is supported by either one of the movable member and the structure. 4. The semi-active damper device of the semi-active vibration isolator according to claim 1, wherein the semi-active damper device includes a movable member disposed in a viscous fluid in a container member, and the movable member and the structure. A leaf spring member and an electromagnet having an attraction surface facing the leaf spring member. The leaf spring member is soft in the attraction direction of the electromagnet and has a large rigidity in the orthogonal direction. Is supported by either the movable member or the structure, and a weak spring is attached to the tip of the electromagnet that comes into contact with the leaf spring member so that the electromagnet and the leaf spring member always come into contact with each other with a weak force. A semi-active damper device comprising a pressing member that is pressed by a force and is constrained in a direction orthogonal to a spring force. 5. The semi-active damper device in the semi-active vibration isolator according to claim 1, wherein the semi-active damper device includes a movable member disposed in a viscous fluid in a container member, and the movable member and the structure. A leaf spring member provided on the plate spring member and an electromagnet having an attracting surface facing the leaf spring member, and the leaf spring member attracted by the electromagnet is provided on either the movable member or the structure. It is supported, so that it is soft in the out-of-plane direction, which is the suction direction, and can secure rigidity in the in-plane direction.
A semi-active damper device having a hinge portion or a notch portion. 6. The semi-active damper device of the semi-active vibration isolator according to claim 1, wherein the semi-active damper device is a movable member arranged in the viscous fluid in the container member, and an electromagnet provided on the movable member. A connecting member is provided between the electromagnet and a receiving member of the structure, and the receiving member is provided with a force applying member that interlocks with the electromagnet to restrain the connecting member. A semi-active vibration isolation device characterized in that 7. The semi-active damper device of the semi-active vibration isolator according to claim 1, wherein one end of the semi-active damper device is supported by the structure or the vibration isolation table, and the other end is surrounded by a magnetic material. A semi-active damper device comprising a viscoelastic member and an electromagnet provided facing the magnetic body of the viscoelastic member. 8. A vibration isolator comprising a structure and a vibration isolation table which receives horizontal step input and floor vibration, wherein a semi-active rigid mechanical device is provided between the structure and the vibration isolation table. The semi-active stiffness mechanism device is a passive spring member different from the vibration isolation means of the vibration isolation table, an active transmission device that transmits the spring force of the passive spring member to the structure, and the active spring device. A semi-active vibration isolator comprising a controller for controlling a mold transmission device. 9. A vibration isolation device comprising a structure and a vibration isolation table which receives horizontal step input and floor vibration, wherein a semi-active rigid mechanical device is provided between the structure and the vibration isolation table. The semi-active stiffness mechanism device is a passive spring member different from the vibration isolation means of the vibration isolation table, and an electromagnet for connecting or disconnecting the spring force of the passive spring member to the structure. And a controller for controlling the electromagnet, which is a semi-active vibration isolator. 10. The semi-active vibration isolator according to claim 8, wherein the semi-active rigidity mechanism device is provided between an electromagnet provided on the vibration isolation table and between the electromagnet and the structure. A connecting member having the passive spring member, a holding member that supports the connecting member and is attached to the structure, and an interlocking operation with the electromagnet to fix the connecting member to the holding member. A semi-active type rigid mechanical device. 11. The semi-active rigidity mechanism device of the semi-active vibration isolator according to claim 8, wherein the passive spring member is soft and in-plane in an out-of-plane direction in which both ends are supported by elastic members. A semi-active type rigid mechanical device, characterized in that the electromagnet attracts the center of the leaf spring member in an out-of-plane direction. 12. The hinge of the semi-active vibration isolator according to claim 8, wherein the passive-type spring member has both ends supported by elastic members to reduce the rigidity in the out-of-plane direction. Semi-active type which is composed of a leaf spring member having rigidity in the in-plane direction in which the portion or notch is provided, and the electromagnet attracts the center of the leaf spring member in the out-of-plane direction. Rigid mechanical device. 13. A reduction projection exposure apparatus equipped with the semi-active vibration isolator according to claim 1, 2, 8 or 9. 14. A reduction projection exposure apparatus comprising the semi-active damper device according to claim 3, 4, 5, 6 or 7. 15. A reduction projection exposure apparatus provided with the semi-active rigid mechanical device according to claim 10, 11 or 12. 16. A structure including a structure subject to horizontal step input and floor vibration and an anti-vibration table, wherein the structure has an XY structure.
In a vibration isolation method for a reduction projection exposure apparatus including a stage, a passive damper member different from the vibration isolation means of the vibration isolation table is provided between the structure and the vibration isolation table, and the passive damper member. A semi-active damper device composed of an active transmission device that transmits the damping force of the active structure to the structure, and a controller that controls the active transmission device.
When the stage is in operation, the active transmission device is set in the operating state, and the active transmission device is controlled to be in the non-operation state from the time of high precision positioning of the XY stage immediately before the exposure to the exposure. A semi-active vibration isolation method for a reduced projection exposure apparatus. 17. A structure including a structure subjected to horizontal step input and floor vibration and a vibration isolation table, wherein the structure has an XY structure.
In a vibration isolation method for a reduction projection exposure apparatus including a stage, a passive damper member different from the vibration isolation means of the vibration isolation table is provided between the structure and the vibration isolation table, and the passive damper member. A semi-active damper device composed of an electromagnet that connects or disconnects with the structure and a controller that controls the electromagnet, and supplies a control current to the electromagnet when the XY stage is in operation. A semi-active vibration isolation method for a reduction projection exposure apparatus, characterized in that the electromagnet is controlled by cutting off the control current from the time of high precision positioning of the XY stage immediately before the flow and exposure to the time of exposure. 18. A structure comprising a structure subject to horizontal step input and floor vibration and an anti-vibration table, wherein the structure has an XY structure.
In a vibration isolation method of a reduction projection exposure apparatus including a stage, a passive type spring member different from the vibration isolation means of the vibration isolation table is provided between the structure and the vibration isolation table, and the passive spring member. Is provided with a semi-active rigidity mechanism device including an active transmission device that transmits the spring force of the device to the structure and a controller that controls the active transmission device, and the active transmission device is used when the XY stage is in operation. A reduction projection exposure apparatus characterized in that the apparatus is brought into an operating state, and the active transmission device is controlled to be in a non-operating state from the time of high precision positioning of the XY stage immediately before exposure to the time of exposure. Semi-active vibration isolation method. 19. A structure including a structure subjected to horizontal step input and floor vibration and an anti-vibration table, wherein the structure has an XY structure.
In a vibration isolation method of a reduction projection exposure apparatus including a stage, a passive type spring member different from the vibration isolation means of the vibration isolation table is provided between the structure and the vibration isolation table, and the passive spring member. A semi-active type rigid mechanical device including an electromagnet for connecting or disconnecting the spring force of the electromagnet to or from the structure and a controller for controlling the electromagnet.
A control current is supplied to the electromagnet during operation of the Y stage, and the electromagnet is controlled by cutting off the control current from the time of high-precision positioning of the XY stage immediately before exposure to the time of exposure. Vibration isolation method for reduced projection exposure apparatus.