JP2000249185A - Active type vibration resistant device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an active type vibration resistant device of a lightweight construction managing with a small occupation space and involving less restriction on the place of installation. SOLUTION: An active type vibration resistant device 1000 comprises a vibration resisting mechanism part 800 and a control device part to perform control of the mechanism part 800, wherein the part 800 is equipped with a case 100, intermediate frame 200, mounting plate 300, minor displacement actuator 400, a major displacement actuator 500, a vibration sensor 600, and an air spring 700. The intermediate frame 200 is supported by the case 100 slidably in the vertical direction. The minor displacement actuator 400 displaces the intermediate frame 200 in the vertical direction relative to the case 100. The major displacement actuator 500 displaces the intermediate frame 200 in the vertical direction relative to the case 100.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an active vibration isolator.

[0002]

2. Description of the Related Art For example, manufacturing equipment used for ultra-fine processing used in a semiconductor manufacturing factory or the like and precision equipment such as an ultra-high-magnification electron microscope are apparatuses that extremely dislike vibrations. An anti-vibration device is used in order to prevent a bad influence on the apparatus. The anti-vibration device has a surface plate that can maintain a high altitude stationary state without being affected by external vibrations and the like. , That is, a vibration-removed body which is an object to be vibration-removed.

[0003] Vibrations that adversely affect such devices that dislike vibration are roughly classified into the following three types. (A) Small vibration normally occurring in the external environment. For example, a vehicle running near a building with a device that dislikes vibration, a ground vibration due to surrounding construction work, vibration generated by the operation of air conditioning equipment, elevators and other machines installed in the building, and its Such vibrations are caused by a person walking in a building. (B) Vibration generated by a device that dislikes vibration. For example, a case in which the apparatus that dislikes this vibration is a step-and-scan type wafer exposure apparatus used in a semiconductor lithography process will be described as an example. Is accelerated and decelerated because the wafer stage and the mask stage on which the mask is mounted are scanned in the horizontal direction,
A small vibration is generated by the swing generated at that time. (C) Earthquake vibration. The amplitude and acceleration of this vibration can vary from small to large, so the vibration can include small to large vibrations.

[0004] Many anti-vibration devices are designed to absorb the small vibrations of the above (A) and (B) so that devices that dislike the vibration are not affected by such small vibrations. It is not planned from the beginning to deal with relatively large vibrations among the vibrations caused by the earthquake (C). For example, when the integration degree of a semiconductor device was not as high as it is now and the line width of a pattern handled by an exposure apparatus or the like was not as thin as it is now, a passive type vibration isolator was often used. In the passive vibration isolator, a surface plate for mounting a device that dislikes vibration such as an exposure device is fixed on a base fixed to the floor surface through an elastic support means such as an air spring or a vibration isolating rubber, The vibration of the elastic support means absorbs small vibrations from the outside, and the resonance frequency of the vibration system formed by the elastic support means and the mass of the surface plate and the device attached thereto is appropriately set. ,
The amplitude of the small vibration generated by the exposure device and the like is suppressed.

[0005] However, such a passive vibration isolator cannot provide a vibration isolation effect for vibrations in a low vibration region below the natural frequency of the elastic support means, and conversely amplifies the vibration. There is a limit to lower the natural frequency of the elastic support means. And, as the degree of integration of semiconductors increases and pattern miniaturization progresses,
Since the passive vibration isolation device has become insufficient in vibration isolation capability, recently, active vibration isolation devices have been frequently used.

In an active vibration isolator, a surface plate is supported on a base via a plurality of actuators, and a plurality of vibration detecting means (acceleration sensors) are attached to the surface plate, and the detection output of the vibration detecting means is applied to the detection output. By controlling the actuator on the basis of such techniques as feedback and feedforward, the acceleration generated on the surface plate is suppressed to be small, and the vibration thereof is suppressed to be small.

[0007]

In the above-described active vibration isolator, a minute displacement actuator such as a piezo actuator or a giant magnetostrictive actuator having a small displacement but excellent frequency response (hereinafter referred to as a small displacement actuator). ), The above (A),
(B) It has an excellent anti-vibration performance that favorably suppresses the vibration of the base plate having a small amplitude and a high frequency due to small external and internal vibrations. However, in the conventional active vibration isolation device, a surface plate on which a vibration isolation body is mounted is supported on a base via an actuator, and the base is installed on a lower structure composed of, for example, a floor of a building. The configuration has the following disadvantages. First, since a surface plate for attaching the vibration-isolated object is required, the weight of the active vibration isolator tends to be large. Secondly, when a device (vibration isolation body) attached to the surface plate becomes large, a large space is occupied by the device and the surface plate of the active vibration isolation device. Third, because the surface plate requires a certain occupied space, if there is an obstacle at the installation location of the active vibration isolation device that interferes with the space occupied by the surface plate, the active vibration isolation device is installed. And the installation location must be restricted. The present invention has been devised in view of the above circumstances, and an object of the present invention is to provide an active vibration isolator having a small weight and a small occupied space, and having a limited installation place. is there.

[0008]

In order to achieve the above object, the present invention comprises a vibration isolation mechanism for supporting a vibration-isolated body on a lower structure, and a control unit for the vibration isolation mechanism. A base portion provided on the lower structure, mounting means provided so as to be mounted on the vibration receiving body, and supporting means for supporting the vibration receiving body in a predetermined direction with respect to the lower structure; A vibration detecting means for detecting acceleration of the vibration in the predetermined direction of the mounting means; and a displacement means for displacing the mounting means in the predetermined direction with respect to the base part, wherein the base part, the mounting means , The support means, the vibration detection means,
The displacement unit is provided integrally, and the control device unit includes:
By driving the displacement means in accordance with the acceleration in the predetermined direction detected by the vibration detection means, the vibration of the object to be removed is removed in a predetermined direction. Further, the present invention is characterized in that one or two or more of the anti-vibration mechanisms are attached to the anti-vibration body. Further, the present invention is characterized in that one control device is provided for one anti-vibration mechanism. Further, in the present invention, one control device unit is provided for a plurality of the vibration isolation mechanism units, and the control device units are separately detected by the vibration detection unit of each of the vibration isolation mechanism units. The apparatus is characterized in that the displacement means of each of the vibration isolation mechanisms is separately driven in accordance with the acceleration in a predetermined direction. Further, in the present invention, the displacement means includes a small displacement actuator configured to be capable of giving a relatively small displacement to the mounting means, and the small displacement actuator has the same displacement direction as the predetermined direction. It is provided between the base part and the mounting means. Further, the present invention is characterized in that the small displacement actuator is constituted by a solid actuator. Further, according to the present invention, the solid actuator is a giant magnetostrictive actuator or a piezo actuator.
Further, the present invention is characterized in that the small displacement actuator has a high accuracy of the generated displacement amount, but a small generated displacement amount, and a high frequency response of the generated displacement amount. Further, in the present invention, the support means has a first support member disposed between the base portion and the mounting means,
The vibration-receiving member is supported by the support means by the first support member. Also,
The present invention is characterized in that the first support member is constituted by an air spring. Further, in the present invention, the displacement means further includes a large displacement actuator configured to apply a relatively large displacement to the mounting means, and the small displacement actuator and the large displacement actuator are in the same direction as the predetermined direction. It is arranged between the base and the mounting means so as to have a displacement direction. Further, the present invention is characterized in that the large displacement actuator includes an air actuator or a linear motor. Further, the present invention is characterized in that the large displacement actuator has a low accuracy of the generated displacement amount, but a large generated displacement amount, and a low frequency response of the generated displacement amount. Also, the present invention
An intermediate frame is provided between the base and the mounting means and movably provided in the predetermined direction. The small displacement actuator is attached to the intermediate frame, and the large displacement actuator is attached to the intermediate frame. And the base portion.
Also, in the present invention, the support means has a second support member disposed between the mounting means and the intermediate frame, and the mounting means is supported by the intermediate frame via the second support member. It is characterized by having been done. Further, the present invention is characterized in that the second support member is constituted by an air spring. Further, according to the present invention, a position holding means is provided between the base and the intermediate frame, and the position holding means holds a position of the intermediate frame in the predetermined direction with respect to the base at a predetermined position when no vibration occurs. It is characterized by comprising. Also,
The present invention is characterized in that the position holding means is constituted by an air spring. Also, in the present invention, the intermediate frame is slidably supported by the base portion in the predetermined direction, and the frictional resistance generated in the predetermined direction between the intermediate frame and the base portion is a predetermined value. The predetermined value is set and is a value equal to or more than a maximum force that the small displacement actuator can generate in the predetermined direction. Further, according to the present invention, the intermediate frame is configured to have a predetermined weight, and the predetermined weight is generated by the intermediate frame when the small displacement actuator generates a maximum force that can be generated in the predetermined direction. It is characterized in that it is set to a value at which an inertial reaction force greater than the maximum force is generated. Further, the present invention is characterized in that the intermediate frame is supported movably in the predetermined direction by intermediate frame supporting means provided between the intermediate frame and the case. Further, according to the present invention, the small displacement actuator is configured to apply a displacement in the predetermined direction to the mounting means via an elastic body, and the elastic body absorbs a shear force acting on the small displacement actuator. It is characterized by comprising. Further, the present invention is characterized in that a pre-compression force adjusting means for adjusting a pre-compression force received by the small displacement actuator in the non-driven state in the displacement direction is provided.
Further, the invention is characterized in that the predetermined direction is at least one or both of a vertical direction and a horizontal direction.
Further, the invention is characterized in that the support means has an elastic support member for supporting the vibration-isolated body with respect to the lower structure. Further, the present invention is characterized in that the elastic support member is constituted by an air spring.

According to the active vibration isolator of the present invention,
The base section, the mounting section, the supporting section, the vibration detecting section, and the displacement section are integrally provided to form a vibration removing mechanism section. The vibration transmitted to the substructure is
The vibration is transmitted from the lower structure to the vibration receiving body to which the mounting means is attached via the vibration isolating mechanism. This vibration is detected by the vibration detecting means. The control unit removes the vibration of the vibration-free body in the predetermined direction by driving the displacement unit in accordance with the acceleration in the predetermined direction detected by the vibration detection unit. Therefore, unlike the related art, the active vibration isolation device can be configured by attaching the mounting means of the vibration isolation mechanism to the vibration isolation body without providing a surface plate for attaching the vibration isolation body. Therefore, it is possible to provide an active anti-vibration apparatus which is light in weight, occupies a small space, and has few restrictions on an installation place.

[0010]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view showing a schematic configuration of a first embodiment of an active vibration isolator according to the present invention, FIG. 2 is an explanatory view showing a state of FIG. 1 viewed from a cross section taken along line A1A1, and FIG. FIG. 4 is an explanatory view showing a state viewed from a line section, FIG. 4 is an explanatory view showing a state viewed from the A3A3 line section, and FIG. 5 is a plan view showing an arrangement of the active vibration isolator of the first embodiment. It is a figure, (A) is an arrangement | positioning figure which shows the case where one anti-vibration mechanism part is used, (B) is an arrangement view which shows the case where three anti-vibration mechanism parts are used, (C) is an anti-vibration mechanism part. It is an arrangement view showing a case where four are used. FIG. 6 is a block diagram showing a configuration example of the control system, and FIG. 7 is a block diagram showing another configuration example of the control system.

The active vibration isolator 1000 according to the first embodiment shown in FIGS. 1 to 4 is configured to vibrate vibrations in the vertical direction. First, the configuration of the active vibration isolation device 1000 will be described with reference to FIGS. The active vibration isolator 1000 includes a case 10
0 (corresponding to the base part in the claims), the intermediate frame 200, the mounting plate 300 (corresponding to the mounting means in the claims), the small displacement actuator 400 (corresponding to the displacement means in the claims), large displacement Actuator 500 (corresponding to the displacement means in the claims), vibration sensor 600 (corresponding to the vibration detection means in the claims), air spring 700
(Corresponding to the second support member in the claims) and a control device unit 900 (shown in FIGS. 6 and 7) for controlling the vibration isolation mechanism 800. I have.

The case 100 is composed of a disc-shaped bottom wall 102 and a cylindrical side wall 104 erected from the periphery thereof. The bottom wall 102 is adapted to be fixed to a substructure 10 provided on a lower structure (not shown) composed of a building floor or the like. The upper surface 102A of the bottom wall 102 and the inner surface 104A of the side wall 104 form the intermediate frame 20.
A column-shaped accommodation space 106 for accommodating 0 is formed.

The intermediate frame 200 has a disc-shaped side wall 20.
2 and a cylindrical side wall 204 erected from the periphery thereof
And an annular flange wall 206 extending horizontally from the upper end of the side wall 204. The outer side surface 202A of the side wall 202 of the intermediate frame 200 is slidably supported by the inner side surface 104A of the case 100 in the vertical direction, that is, along the center axis of the cylindrical side wall 104 of the case 100. The outer side surface 202A and the inner side surface 104A are provided with a sliding member at a position where they contact each other.
The frictional resistance force (corresponding to the frictional resistance force generated between the intermediate frame and the base portion in the claims) acting between the inner surface 104A and the inner side surface 104A is set to a predetermined value described later. .

The small displacement actuator 400 is a case 1
00 and the intermediate frame 20
The bottom frame 202 is disposed between the bottom frame 202 and the lower surface 202A, and is configured to vertically displace the position of the intermediate frame 200 with respect to the case 100. The small displacement actuator 400 is constituted by a solid actuator, for example, a giant magnetostrictive actuator, which is excellent in response but has a small displacement amount and can effectively remove vibrations having a small amplitude at a high frequency. A giant magnetostrictive element (not shown) that generates a strain (magnetostriction) extending in the longitudinal direction of the case 402 based on the above, a case 402 that accommodates the giant magnetostrictive element and protects the giant magnetostrictive element from the outside, Rod 40 that is connected to
4 is provided. This giant magnetostrictive element is made of an alloy material that generates a large amount of magnetostriction when it is affected by a magnetic field. In addition, since this giant magnetostrictive actuator has a substantially linear displacement characteristic, which is the amount of magnetostriction with respect to the magnitude of the drive signal given thereto, the process of generating a drive signal for driving this giant magnetostrictive actuator is relatively simple. There is an advantage that it is good. The small-displacement actuator 400 is disposed with the axial direction directed vertically, and the upper end of the rod 404 is attached to the attachment plate 300 via an elastic body 410 and an adjustment screw 420.
The elastic body 410 is made of, for example, rubber which is rigid in the displacement direction (vertical direction) of the small displacement actuator 410 and soft in the direction (horizontal direction) orthogonal to the displacement direction of the small displacement actuator 410. While transmitting the force acting on the small displacement actuator 410 in the direction of displacement to the mounting plate 300 as it is, the shear force acting in the direction perpendicular to the direction of displacement and the small vibration in the shear direction are absorbed. Plays the role of. Also, the case 402 of the small displacement actuator 400
Bottom surface of the bottom wall 202 of the intermediate frame 200
It is fixed to a substantially central portion of 2B.

A pre-compression force adjusting screw 420 (hereinafter referred to as an adjusting screw) is screwed into a screw hole 302 provided with a screw portion 422 extending vertically in the mounting plate 300. The connected head 424 is the elastic body 44
It is rotatably supported by zero.

The large displacement actuator 500 is composed of, for example, an air actuator, and is disposed between the upper surface 102A of the bottom wall 102 of the case 100 and the lower surface 202A of the bottom wall 202 of the intermediate frame 200. Is configured to shift the position of the intermediate frame 200 with respect to the vertical direction.

The mounting plate 300 has a disk shape, and its upper surface 304 is connected to the vibration-removed body 20. Vibration isolation body 20
May be, for example, a device from which vibration is to be removed, or a surface plate to which such a device is attached. The vibration sensor 600 is attached to the lower surface 306 of the mounting plate 300, and is configured to detect vertical acceleration of the mounting plate 300. Intermediate frame 20
An annular air spring 700 is disposed between the upper surface 206A of the flange wall 206 and the lower surface 306 of the mounting plate 300, and the annular air spring 700 is provided with the small displacement actuator 400 and the vibration sensor 600. It is arranged so that it surrounds. The mounting plate 300 and the vibration-isolated body 20 are supported by the air spring 700 on the intermediate frame 200 in a vertically movable state. That is, the mounting plate 300 is vertically movably supported by the lower structure 10 via the air spring 700 and the intermediate frame 200.

Here, the outer surface 20 of the intermediate frame 200
A description will be given of a predetermined value at which the frictional resistance of the two sliding members provided at the position where the 2A and the inner side surface 104A of the case 100 contact each other is set. Intermediate frame 200
When the small displacement actuator 400 attached to the mounting plate 300 is vertically displaced, the force generated by the small displacement actuator 400 is applied to the mounting plate 300 as a force in the direction of displacing the mounting plate 300. A force (reaction force) in a direction opposite to the applied direction is applied to the intermediate frame 200 from the small displacement actuator 400. At this time, if the intermediate frame 200 moves due to the reaction force, the mounting plate 300 cannot be displaced as intended. Therefore, even if the small displacement actuator 400 generates the maximum force that can be generated in the vertical direction,
It is necessary that the intermediate frame 200 be kept stationary with respect to the case 100. Therefore, the outer surface 202A of the intermediate frame 200 and the case 10
The predetermined value of the frictional resistance of the two sliding members provided at the locations where the inner surfaces 104A of the zero-contact surface are in contact with each other is set to a value equal to or greater than the maximum force that the small displacement actuator 400 can generate in the predetermined direction. . Note that the large displacement actuator 500 resists the above-mentioned predetermined value of frictional resistance set on two slip members provided at locations where the outer side surface 202A of the intermediate frame 200 and the inner side surface 104A of the case 100 contact each other. As a matter of course, it is configured to be able to generate a force required to displace the intermediate frame 200 in the vertical direction.

Next, with reference to FIG. 5, a description will be given of a specific example in which the vibration isolating mechanism 800 of the first embodiment is mounted on the vibration damping body 20. FIG. 5A shows an example in which one vibration isolation mechanism 800 is used. The air spring 30 (corresponding to an elastic support member and a support means in the claims) supports portions near the four corners of the bottom of the vibration-isolated body 20 having a rectangular shape in a plan view with respect to an unillustrated basic structure. An example is shown in which the mounting plate 300 of one vibration isolation mechanism 800 is attached to the center of the bottom of the vibration receiving body 20. FIG. 5B shows the vibration isolating mechanism 8.
This is an example using four 00s. Vibration isolation mechanism sections 80 are respectively provided at locations near the four corners at the bottom of the rectangular vibration isolation body 20 in a plan view.
10 shows an example in which a No. 0 mounting plate 300 is mounted. FIG.
(C) is an example in which three vibration isolation mechanisms 800 are used.
Vibration isolation mechanism units 8 are provided at three positions corresponding to the vertices of an equilateral triangle surrounding the center of the bottom of the vibration-isolated body 20 having a rectangular shape in a plan view.
14 shows an example in which a mounting plate 300 of No. 00 is mounted. As described above, the vibration isolation mechanism unit 800 moves the vibration isolation
One or a plurality of them can be provided, and their arrangement positions can be set arbitrarily. Note that the vibration isolation mechanism 80
In a case where the non-vibration body 20 is supported only by the zeros, that is, when no supporting means other than the vibration isolation mechanism 800 is used, in order to stably support the vibration-removed body 20, at least three vibration isolation bodies are used. It is necessary to support the vibration damping body 20 by the mechanism section 800.

Next, the configuration of the control unit will be described with reference to FIG. One control unit 900 is provided corresponding to one vibration isolation mechanism unit 800, and includes a vibration sensor amplifier 902, a control device 904, an actuator drive amplifier 906, and an air actuator pressure control device 908. The vibration meter amplifier 902 amplifies the detection signal S1 indicating the vertical acceleration input from the vibration sensor 600. The control device 904 includes a small displacement actuator 400 and a large displacement actuator necessary for removing the vibration from the vibration-isolated body 20 based on the detection signal S1 indicating the acceleration in the vertical and horizontal directions input from the vibration sensor amplifier 902. A drive signal corresponding to 500 drive amounts is calculated and generated. Actuator drive amplifier 9
Reference numeral 06 is configured to drive the small displacement actuator 400 by inputting the drive signal D1 obtained by amplifying the drive signal. The air actuator pressure control device 908 determines the air pressure D for driving the air actuator based on the drive signal.
The small displacement actuator 500 is driven by controlling and supplying 2.

Next, the operation and effect will be described. First, the giant magnetostrictive actuator and the pre-compression force applied thereto will be described. Generally, in a giant magnetostrictive actuator, the amount of deformation (elongation or contraction) of the magnetostrictive actuator is the largest and the amount of deformation of the giant magnetostrictive actuator changes linearly with respect to a drive signal given to the giant magnetostrictive actuator. It is preferable to make the state of making the most of the performance of the giant magnetostrictive actuator.
In the giant magnetostrictive actuator, by adjusting the precompression force applied thereto to an optimum value, the giant magnetostrictive actuator can be brought into the above-described preferable state.

In the first embodiment, the following advantages are obtained by adjusting the small displacement actuator 400 to the above-described preferable state. That is, since the amount of displacement given to the mounting plate 300 by the small displacement actuator 400 is the largest with respect to the drive signal given to the small displacement actuator 400, it is possible to eliminate a larger external vibration. In addition, the amount of displacement applied to the mounting plate 300 by the small displacement actuator 400 changes linearly with respect to the drive signal applied to the small displacement actuator 400.
Is applied to the mounting plate 300 faithfully with respect to the drive signal, so that the drive control of the actuator is performed more faithfully. In other words, by optimally adjusting the pre-compression force of the small displacement actuator 400, it is possible to make the vibration isolator have the best vibration isolating ability.

Therefore, the small displacement actuator 400
Adjust the pre-compression force. The pre-compression force indicates a load received from the mounting plate 300 when the giant magnetostrictive actuator constituting the actuator is not driven.

The adjustment of the pre-compression force of the giant magnetostrictive actuator (optimization of the amount of magnetostriction) is performed when the mounting plate 300 vibrates most when a drive signal (for example, a sine wave signal) having a predetermined frequency and a predetermined amplitude is input to the actuator 420. That is, the pre-compression force of the small displacement actuator 400 is adjusted so that the displacement of the mounting plate 300 increases. The pre-compression force of the small displacement actuator 400 can be easily adjusted by rotating the adjusting screw 420 to adjust the load applied to the small displacement actuator 400 in the same direction as the displacement direction.

When the adjustment of the pre-compression force of the small displacement actuator 400 is completed, the power of the control unit 900 is turned on, so that the active vibration isolator 1000 operates. The vertical vibration transmitted through the substructure 10 is transmitted to the mounting plate 300 and the vibration-isolated body attached thereto via the case 100, the large displacement actuator 500, the intermediate frame 200, and the small displacement actuator 400. The vibration isolator vibrates. Therefore, the sensor 600 detects acceleration indicating the vibration of the mounting plate 300, and inputs a detection signal indicating the acceleration to the vibration sensor amplifier 902. The vibration sensor amplifier 902 inputs the amplified detection signal S1 to the control device 904. The control device 904 detects the detection signal S indicating the acceleration input from the vibration sensor amplifier 902.
1, a drive signal corresponding to the drive amount of the small displacement actuator 400 and a drive amount corresponding to the drive amount of the large displacement actuator 500 necessary for removing the vibration from the vibration-free body 20 attached to the attachment plate 300. A drive signal is generated and input to the actuator drive amplifier 906 and the air actuator pressure control device 908. The actuator drive amplifier 906 inputs the drive signal D1 obtained by amplifying the drive signal to the small displacement actuator 400 and drives it. The air actuator pressure control device 908 drives the large displacement actuator 500 by controlling and supplying the air pressure D2 for driving the air actuator based on the input drive signal. As a result, the vibration isolation mechanism 80
By virtue of 0, the vibration of the vibration-isolated body attached to the mounting plate 300 is eliminated, and the vibration-eliminated body maintains a high stationary state.

A small displacement actuator such as a giant magnetostrictive actuator has a high accuracy in the amount of generated displacement, but has a small amount of generated displacement and a high frequency response of the generated amount of displacement. Excellent vibration damping ability. On the other hand, large displacement actuators, such as air actuators, have low accuracy in the amount of displacement that occurs, but have a large amount of displacement and low frequency response of the amount of displacement that occurs. Excellent ability to shake. Therefore, the control device 9
04 generates a drive signal to be applied to the small displacement actuator and the large displacement actuator according to the frequency component of the detection signal of the vibration sensor 600 to be inputted, thereby removing vibrations from low frequency to high frequency from the vibration receiving body 20. Can be shaken.

The advantage of removing vibration from low frequency to high frequency from the vibration receiving body 20 will be described in more detail. In the conventional active vibration isolation device, a small displacement actuator is used, so that regarding the vibration due to the earthquake, the small vibration due to the small earthquake can be effectively removed, but a large vibration with a seismic intensity of 2 or more occurs, for example. When,
Its amplitude reaches several to several tens of millimeters. The small displacement actuator has a very small displacement amount, so it is difficult to cope with a large amplitude. On the other hand, if a large displacement actuator with a large displacement such as an air actuator or a linear motor is used, it is possible to cope with a large amplitude, but the response is poor. Is difficult. That is, since the amplitude and frequency of the vibration that can be effectively removed are different between the small displacement actuator and the large displacement actuator, a wide range of vibration, for example, small It has been difficult to satisfactorily suppress vibration from amplitude to large amplitude, or vibration from low to high frequency. On the contrary,
In the first embodiment, the action of the small-displacement actuator and the large-displacement actuator causes the vibration-removing member 20 to move from low-frequency, large-amplitude vibration to high-frequency, small-amplitude vibration.
It is possible to remove vibrations from.

In the example described above, one anti-vibration mechanism 800
The case where one control device unit 900 is provided in correspondence with the above, that is, the case where each active vibration isolation device 1000 is configured to be independently controlled has been described. Correspondingly, it is also possible to provide and configure one control device unit 900. FIG. 7 shows the state shown in FIG.
When four vibration isolation mechanisms 800 are provided as shown in FIG.
A configuration is shown in which a single control unit 900 controls the four vibration isolation mechanisms 800. In this case, the detection signals S11 to S14 output from the vibration sensor 600 of each vibration isolation mechanism 800 are input to the vibration sensor amplifier 902 of the control device 900. The vibration sensor amplifier 902 is configured to amplify each of the detection signals S11 to S14 and input the amplified signals to the control device 904. The control device 904 computes and generates drive signals based on the input detection signals S11 to S14, and inputs the drive signals to the actuator drive amplifier 906 and the air actuator pressure control device 908. The actuator drive amplifier 906 determines whether each of the vibration isolation mechanism units 800 is based on the input drive signal corresponding to each of the vibration isolation mechanism units 800.
The drive signals D11 to D14 to be input to the small displacement actuators are generated and input to each of the vibration isolation mechanisms 800. The air actuator pressure control device 908 generates drive signals D21 to D24 to be input to the large displacement actuator 500 of each vibration isolation mechanism 800 based on the input drive signal corresponding to each vibration isolation mechanism 800, and performs each vibration removal. It is input to the vibration mechanism 800. As a result, the small displacement actuator 400 and the large displacement actuator 500 of each vibration isolation mechanism 800 are driven, the vibration of the vibration isolation body attached to the mounting plate 300 is removed, and the vibration isolation body enters a highly stationary state. maintain.

According to the above-described first embodiment, the vibration isolation mechanism can be directly attached to the vibration-free body, and a surface plate is not required. Therefore, the weight of the active vibration damping device is reduced, and the space occupied by the active vibration damping device is reduced. In addition, since each vibration isolation mechanism can be freely arranged with respect to the vibration isolation target, there is little restriction on the installation location. Further, the control device section may be provided one by one for each vibration isolation mechanism section, or may be configured to control a plurality of vibration isolation mechanism sections collectively by one control device section. The configuration of the control unit can be freely performed.

Next, a second embodiment will be described. FIG. 8 is a longitudinal sectional view showing a schematic configuration according to the second embodiment of the present invention, FIG. 9 is an explanatory view showing FIG. 8 as viewed from the cross section taken along the line BB, and FIG. 10 is an active-type filter according to the second embodiment. It is a diagram showing a state of the arrangement of the vibration device viewed from a plane,
(A) is a layout diagram showing a case where one vibration isolation mechanism is used,
(B) is a layout diagram showing a case where two vibration isolation mechanisms are used,
(C) is an arrangement view showing a case where four vibration isolation mechanisms are used. The active vibration isolator 2000 according to the second embodiment shown in FIGS. 8 and 9 is configured to vibrate horizontal vibrations. First, the configuration of the active vibration isolation device 2000 will be described with reference to FIGS. The active vibration isolator 2000 includes a case 150 (corresponding to a base in the claims), an intermediate frame 250, a mounting plate 350 (corresponding to a mounting means in the claims), and a small displacement actuator 450 (corresponding to the claims). , A large displacement actuator 550 (corresponding to the displacement means in the claims), a vibration sensor 650 (corresponding to the vibration detection means in the claims), and an air spring 750 (position holding in the claims) And a control unit (not shown).

The case 150 has a rectangular bottom wall 1 in plan view.
52 and side walls 154A, 154 erected from the periphery thereof
B, 154C and 154D. The bottom wall 152 is configured to be fixed to a foundation structure 10 provided on a lower structure (not shown) including a floor of a building. Of the side walls, two side walls 154A and 154B that are erected from the longitudinal peripheral edge of the bottom wall 152, and the bottom wall 1
One side wall 154C erected from one of the peripheral edges of the direction perpendicular to the longitudinal direction of the bottom wall 52 has an upper end at the same height position, The upper end of one side wall 154D erected from the other is
The three side walls 154A to 154C are configured to be lower than the upper ends. The upper surface 152A of the bottom wall 152 and the inner surface 154 of each of the side walls 154A to 154D.
A1 to 154D1, the intermediate frame 250, the small displacement actuator 450, and the large displacement actuator 55
0, an accommodation space 158 for accommodating the air spring 750 is formed.

The intermediate frame 250 includes a rectangular bottom wall 252 in plan view and a side wall 254 erected from a side edge of the bottom wall 252 facing the side wall 154C of the case 150. Then, the bottom wall 252 of the intermediate frame 250
Lower surface 252A, two opposite side surfaces 25 of side wall 254
4A and 254B are the upper surface 1 of the bottom wall 152 of the case 150.
52A, side wall 154A, side wall 154A, side wall 154B
Are supported slidably in the horizontal direction, that is, along the longitudinal central axis of the bottom wall 152 of the case 150. The lower surface 252A and the upper surface 152
A, the side surface 254A and the side surface 154A1, and the side surface 254B and the side surface 154B1 are provided with sliding members at locations where they contact each other.
A and the upper surface 152A, the side surface 254A and the side surface 154B1, and the frictional resistance force acting between the side surface 254B and the side surface 154B1 (corresponding to the frictional resistance generated between the intermediate frame and the base portion in the claims) ) Is a predetermined value described later.

The small displacement actuator 450 is fixed to the upper surface 252B of the bottom wall 252 of the intermediate frame 250, and is configured to horizontally displace the position of the mounting plate 350 with respect to the side wall 254 of the intermediate frame 250. I have. That is, the small displacement actuator 450
A giant magnetostrictive element (not shown) which is configured similarly to the small displacement actuator 400 of the first embodiment and generates a strain (magnetostriction) extending in the longitudinal direction of the case 452 based on a given drive signal, A case 452 for accommodating the magnetostrictive element and protecting the giant magnetostrictive element from the outside;
And a rod 454 that advances and retreats in two longitudinal directions.
The small displacement actuator 450 is disposed so that the axial direction is horizontal and parallel to the moving direction of the intermediate frame 250, and the tip of the rod 454 is attached to a mounting plate (described later) via an elastic body 460. Inner surface 354A of the vertical plate 354 facing the small displacement actuator 450
Mounted on This elastic body 460 is rigid in the direction of displacement of the small displacement actuator 450 (the left-right direction in the plane of FIG. 8) and is orthogonal to the direction of displacement of the small displacement actuator 450 (in the plane of FIG. 8). It is made of, for example, rubber or the like having soft characteristics in the vertical direction or the direction perpendicular to the paper surface, and transmits the force acting on the small displacement actuator 450 in the displacement direction to the mounting plate 350 as it is. It acts to absorb the shearing force acting in the direction perpendicular to the direction of displacement. In addition, the side surface of the case 452 of the small displacement actuator 450 is fixed to a location along the longitudinal central axis of the upper surface 252B of the bottom wall 252 of the intermediate frame 250.

The mounting plate 350 includes an upper plate 352 having a rectangular shape in a plan view and a case 150 of the peripheral portion of the upper plate 352.
The side wall 154 of the case 150 is erected downward from one of the peripheral portions extending in a direction orthogonal to the longitudinal direction of the bottom wall 152 of the case 150.
D and a vertical plate 354 facing at an interval.
The upper surface 352 </ b> A of the upper plate 352 is coupled to the vibration receiving body 20. The vibration-removed body 20 may be, for example, a device from which vibration is to be removed or a surface plate to which such a device is attached. On the other hand, the vertical plate 354 of the upper plate 352
The elastic body 460 is attached to the inner side surface 354A of the device as described above. The vibration sensor 650 is attached to the lower end 354B of the vertical plate 354 of the mounting plate 350.
It is configured to detect the horizontal acceleration at 50. On the side surface 524A of the side wall 524 of the intermediate frame 250 facing the small displacement actuator 450, the bottom of the small displacement actuator 450 is fixed.

The large displacement actuator 550 includes a side surface 254B opposite to the side surface 254A of the side wall 254 of the intermediate frame 250 and a side surface 154 of the side wall 154C of the case 150.
It is arranged between C1. Large displacement actuator 5
The position of the intermediate frame 250 in the horizontal direction with respect to the side wall 154C of the case 150 is displaced by 50. The air spring 750 has an end surface 252 facing the inner surface 154D1 of the side wall 154D of the case 150 and the inner surface 154D1 of the bottom wall 252 of the intermediate frame 250.
C. Due to the action of the air spring 750, the case 1 does not have a horizontal vibration.
The configuration is such that the horizontal position of the intermediate frame 250 with respect to 50 is maintained at a predetermined position.

Here, lower surface 252A and upper surface 152A, side surface 254A and side surface 154A1, side surface 254B and side surface 15
A description will be given of a predetermined value at which the frictional resistance of the sliding members provided at the locations where the sliding members 4B1 contact each other is set. When the small displacement actuator 450 attached to the intermediate frame 250 is displaced in the horizontal direction, the force generated by the small displacement actuator 450 is applied to the attachment plate 350 as a force in the direction to displace the attachment plate 350. A force (reaction force) in a direction opposite to that applied to the plate 350 is applied to the intermediate frame 250 from the small displacement actuator 450.

At this time, if the intermediate frame 250 is moved by the reaction force, the mounting plate 350 cannot be displaced as intended. For this reason,
Even if the small displacement actuator 450 generates the maximum force that can be generated in the vertical direction, the intermediate frame 250 is
It is necessary that the stationary state is maintained for 0. Therefore, the lower surface 252A and the upper surface 152
A, the frictional resistance of the sliding member provided at the side of the side 254A and the side 154A1 and the side of the side 254B and the side 154B1 is set to a value not less than the maximum force that the small displacement actuator 450 can generate in the horizontal direction. ing.
The large displacement actuator 550 includes a lower surface 252A and an upper surface 152A, a side surface 254A and a side surface 154A1, and a side surface 2A.
It is possible to generate a force required to displace the intermediate frame 250 in the horizontal direction against the above-mentioned predetermined value of the frictional resistance set on the sliding member provided at the place where the 54B and the side surface 154B1 contact each other. Of course, it is constituted so that it may become.

The unillustrated control unit has the same configuration as the control unit 800 in the first embodiment, and differs only in that the direction of vibration to be removed is horizontal. A description of the configuration and operation of the control unit will be omitted.

Next, with reference to FIG. 10, a description will be given of a specific example when the vibration isolating mechanism 850 of the second embodiment is mounted on the vibration damping body 20. FIG. 10A shows a vibration isolation mechanism 85.
This is an example in which one 0 is used to remove vibration in one direction out of the horizontal direction. The vibrating member 20 is configured to be supported by a pneumatic spring 30 at locations near the four corners at the bottom of the rectangular member 20 having a rectangular shape in a plan view.
Mounting plate 3 for one anti-vibration mechanism 850 at the center of the bottom of
55 is attached. 10A to 10C.
In, the arrow indicates the direction of horizontal vibration that is removed by the vibration removing mechanism 850.

FIG. 5B shows an example in which two vibration isolation mechanisms 850 are used. The portions near the four corners of the bottom of the vibration-isolated body 20 having a rectangular shape in a plan view are connected to an unillustrated basic structure by an air spring 3.
0, and a vibration-receiving body 2 having a rectangular shape in a plan view.
At the bottom portion of the mounting plate 355, the two vibration isolation mechanisms 850 are attached such that the directions of vibration isolation are orthogonal to each other.
Is installed. With such a configuration, the vibration receiving body 2
The horizontal vibration (mainly translational vibration) generated at 0
Vibration can be removed by a combination of the two vibration removing mechanisms 850.

FIG. 5C shows an example in which four vibration isolation mechanisms 850 are used. The portions near the four corners of the bottom of the vibration-isolated body 20 having a rectangular shape in a plan view are connected to an unillustrated basic structure by an air spring 3.
0, and a vibration-receiving body 2 having a rectangular shape in a plan view.
At four locations near the four peripheral edges at the bottom of the zero, the mounting plates 355 of the respective vibration isolation mechanisms 850 are arranged such that the direction of vibration isolation by each of the vibration isolation mechanisms 850 is parallel to the peripheral edge of the vibration receiving body 20. Is installed. By arranging each of the vibration isolation mechanisms 850 in this manner, the horizontal vibration generated in the vibration isolation body 20 is vibrated by a combination of the four vibration isolation mechanisms 850, and the vibration isolation body 20 is placed on a horizontal plane. Vibration can be removed even when the vibration in the torsional direction is received. As described above, one or a plurality of vibration isolation mechanisms 850 can be provided for the vibration-removed body 20, and the arrangement position thereof can be set arbitrarily. In the examples shown in FIGS. 10A to 10C, the air spring 30 forms an elastic support member and a support means in the claims.

FIG. 11 shows a configuration in which vibrations in the vertical and horizontal directions are eliminated by combining the vibration isolation mechanism 800 of the first embodiment with the vibration isolation mechanism 850 of the second embodiment. This is an example. Three vibration isolation mechanisms 800 are used, and mounting plates 300 of the vibration isolation mechanism 800 are respectively provided at three positions corresponding to the vertices of an equilateral triangle surrounding the center of the bottom of the vibration isolation body 20 having a rectangular shape in plan view. Is attached. Three vibration isolation mechanisms 850 are used, and a mounting plate for the two vibration isolation mechanisms 850 is provided near the peripheral edge of the bottom of the vibration-removed body 20 so that the direction of vibration isolation is parallel to the peripheral edge. 355
Is attached, and one vibration damping mechanism part 850 is provided at a position between the two vibration damping mechanism parts 850 so as to vibrate vibration in a direction orthogonal to the direction in which these two vibration damping mechanism parts 850 vibrate.
Mounting plate 355 is mounted. With such a configuration, the vibration in the vertical direction of the vibration-free body 20 is vibrated by a combination of the three vibration-vibration mechanisms 800, and
The vibration in the horizontal direction of the vibration-isolated body 20 is reduced by three vibration-isolating mechanisms 85.
Vibration is removed by a combination of 0. In the example shown in FIG. 11, the air spring 700 provided in the vibration isolation mechanism 800 constitutes an elastic support member and a support means in the claims.

As described above, one or a plurality of anti-vibration mechanisms 850 can be provided for the anti-vibration body 20, and the arrangement position thereof can be set arbitrarily.

Of course, the second embodiment has the same function and effect as the first embodiment. Further, the control device section may be provided one by one for each vibration isolation mechanism section, or may be configured to control a plurality of vibration isolation mechanisms collectively by one control device section. The configuration of the control unit can be freely set as in the case of the first embodiment.

Next, a third embodiment will be described. 12 is a plan view showing a schematic configuration according to the third embodiment of the present invention, FIG. 13 is an explanatory diagram showing a state of FIG. 12 viewed from the line C1C1, and FIG. 14 shows a state of FIG. 12 viewed from the line C2C2. FIG. 15 shows C3C3 in FIG.
FIG. 16 is an explanatory diagram showing a state viewed from a line cross section, and FIG. 16 is a layout diagram showing a state in which the layout of the active vibration isolator of the third embodiment is viewed from a plane. The active vibration damping device 3000 according to the third embodiment shown in FIGS. 12 to 15 is configured to vibrate vibrations in the vertical and horizontal directions.

First, the configuration of the active vibration isolator 3000 will be described with reference to FIGS. The active type anti-vibration device 3000 includes a case 1100 (corresponding to a base part in the claims), an intermediate frame 120.
0, mounting plate 1300 (corresponding to the attaching means in the claims), small displacement actuators 1400, 1450 (corresponding to the displacing means in the claims), large displacement actuators 1500, 1550 (corresponding to the displacing means in the claims) Vibration sensors 1600, 1650 (corresponding to the vibration detecting means in the claims), air spring 1700 (corresponding to the second support member in the claims), and air spring 1750 (position holding means in the claims) ), And a control unit (not shown) for controlling the vibration isolation mechanism 860.

The case 1100 has a bottom wall 1102 having a rectangular shape in a plan view and side walls 11 erected from four peripheral portions thereof.
04A, 1104B, 1104C, and 1104D. The bottom wall 1102 is a base structure 10 provided on a lower structure (not shown) composed of a building floor or the like.
Is to be fixed to. Top surface 1 of bottom wall 1102
102A and inner surface 1 of each side wall 1104A to 1104D
Intermediate frame 1 is provided by 104A1 to 1104D1.
200, small displacement actuators 1400, 1450, large displacement actuators 1500, 1550, air spring 17
An accommodation space 1060 for accommodating 00 and 1750 is formed.

The intermediate frame 1200 includes a bottom wall 1202 having a rectangular shape in a plan view, and side walls 1204A, 1204B, 1204C, and 1400 standing from four peripheral edges of the bottom wall 1202.
204D, and an intermediate wall portion 1206 provided at the center of the bottom wall 1202 and defining a housing space for housing the small displacement actuator 1450. Outer side surface 12 of side walls 1204A, 1204B of intermediate frame 1200
04A1 and 1204B1 are the side walls 11 of the case 1100.
04A, 1104B inner surface 1104A1, 1104B
1 supports the inner side surfaces 1104A1 and 1104B1 so as to be slidable in the extending direction, that is, vertically and horizontally. The outer surfaces 1204A1, 12
04B1 and the inner surfaces 1104A1 and 1104B1 are provided with a slip member at a position where they come into contact with each other, and the frictional resistance acting between them (the frictional force generated between the intermediate frame and the base portion in the claims). (Corresponding to the frictional resistance force) is set to a predetermined value described later.

Upper surface 11 of bottom wall 1102 of case 1100
02A and the lower surface 1 of the bottom wall 1202 of the intermediate frame 1200
Between 202A, a large displacement actuator 1500 for removing vibration in the vertical direction is provided. Case 11
A large displacement actuator 1550 is provided between the inner side surface 1204C1 of the side wall 1204C and the outer side surface 1204C1 of the side wall 1204C of the intermediate frame 1200.

The intermediate wall portion 1206 provided on the bottom wall 1202 of the intermediate frame 1200 extends in a direction parallel to the central axis at a position facing the central axis in a direction orthogonal to the longitudinal direction of the bottom wall 1202 at intervals. Existing two side walls 1206
A, 1206B and these two sidewalls 1206A, 126A
And an upper wall 1206C that connects the upper end of the second part 06B. Then, as shown in FIGS.
A small displacement actuator 1450 for removing vibrations in the horizontal direction is provided in a housing space defined by 06A, 1206B, upper wall 1206C, and bottom wall 1202. As in the case of the second embodiment, the small-displacement actuator 1450 has a horizontal axial direction and an intermediate frame 1200.
The distal end of the rod 1454 is connected to the small displacement actuator 145 of the vertical plate 1304 of the mounting plate 1300 via an elastic body 1460.
It is attached to the inner side surface 1304A facing the zero. The side of the case 1452 of the small displacement actuator 1450 is connected to the upper surface 1 of the bottom wall 1202 of the intermediate frame 1200.
202B.

The side wall 120 of the intermediate frame 1200
4D is provided with an opening 1204D2.
An opening 1104D2 is provided at a position corresponding to the opening 1204D2 on the side wall 1104D of 100. The rod 1454 of the small displacement actuator 1450
Is connected to the elastic body 1460 through the openings 1204D2 and 1104D2. The configuration of the elastic body 1460 is the same as that of the elastic body 460 in the second embodiment, and thus the description thereof is omitted.

The side wall 120 of the intermediate frame 1200
4A, 1204C, 1204D, the accommodation space defined by the side wall 1206A of the intermediate wall portion 1206, and the intermediate frame 1
A small displacement actuator 1400 for removing vibrations in the vertical direction is provided in the accommodation space defined by the side walls 1204B, 1204C, 1204D of the 200 and the side wall 1206B of the intermediate wall portion 1206. Each of the small displacement actuators 1400 is disposed with the axial direction thereof oriented vertically, and the upper end of the rod 1404 is connected to the elastic body 14.
10 and the upper plate 1 of the mounting plate 300 via the adjusting screw 1420
It is attached to 302. Further, the bottom surface of the case 1402 of each small displacement actuator 1400 is fixed to the location of the upper surface 1202B of the bottom wall 1202 of the intermediate frame 1200. Note that the elastic body 1410 has the same configuration as the elastic body 410 of the first embodiment, and a description thereof will be omitted. The adjusting screw 1420 is screwed into a screw hole 1303 provided in the upper plate 1302 of the mounting plate 1300 so as to extend in the vertical direction, and the head portion 1424 connected to the screw portion 1422. Is an elastic body 144
It is rotatably supported by zero.

The mounting plate 1300 stands vertically downward from one of the upper plate 1302 having a rectangular shape in a plan view and one of the peripheral edges of the upper plate 1302 extending in a direction orthogonal to the moving direction of the intermediate frame 1200. Side wall 1 of case 1100
104D and a vertical plate 1304 facing at an interval. The upper plate 1302A of the upper plate 1302 is coupled to the vibration-isolated body 20. The vibration-removed body 20 may be, for example, a device from which vibration is to be removed or a surface plate to which such a device is attached.

The vibration sensor 1600 is attached to the upper plate 1302 of the mounting plate 1300, and is configured to detect the vertical acceleration of the mounting plate 1300.
The vibration sensor 1650 is connected to the vertical plate 1304 of the mounting plate 1300.
Of the mounting plate 1300
Is configured to detect the horizontal acceleration at.

Four side walls 120 of the intermediate frame 1200
4A to 1204D, upper wall 1206 of intermediate wall portion 1206
An air spring 1700 having a ring shape in plan view is provided between C and the upper plate 1302 of the mounting plate 1300. Each air spring 1700 having a ring shape is provided with a small displacement actuator 14.
00 is arranged. This air spring 170
By 0, the mounting plate 1300 and the vibration-removed body 20 are supported by the intermediate frame 1200 in a vertically movable state. That is, the mounting plate 1300 is supported by the lower structure 10 via the air spring 1700 and the intermediate frame 1200 so as to be vertically movable and horizontally movable. Also, the inner surface 1204D of the side wall 1204D of the intermediate frame 1200
3 and the inner surface 110 of the side wall 1104D of the case 1100
An air spring 1750 having a ring shape in a plan view is arranged between the air spring 1750 and 4D1. The ring-shaped air spring 1750 is arranged to surround the rod 1454 of the small displacement actuator 1450. Due to the action of the air spring 1750, the case 1100 in a case where there is no horizontal vibration.
, The horizontal position of the intermediate frame 1200 with respect to is maintained at a predetermined position.

According to the above configuration, the intermediate frame 120
Numeral 0 is supported by the case 1100 and the air springs 1700 and 1750 so as to be movable vertically and horizontally with respect to the case 1100. When the intermediate frame 1200 vibrates in the vertical direction, the horizontal large displacement actuator 1550 and the horizontal air spring 1750 are deformed by receiving a vertical force.
The effect of the air spring 550 and the air spring 1750 on the vertical movement of the intermediate frame 1200 is negligible. On the contrary, when the intermediate frame 1200 vibrates in the horizontal direction, the large displacement actuator 1500 in the vertical direction and the air spring 1700 in the horizontal direction are deformed by receiving the force in the horizontal direction.
The effect of the air spring 1700 and the air spring 1700 on the horizontal movement of the intermediate frame 1200 is negligible.

Here, the outer surface 1 of the intermediate frame 1200
204A1, 1204B1 and inner surface 1 of case 1100
The predetermined value at which the frictional resistance of the sliding member provided at the location where the sliding members 104A1 and 1104B1 are in contact with each other will be described. When the small displacement actuators 1400 and 1450 attached to the intermediate frame 1200 are displaced in the vertical and horizontal directions, the force generated by the small displacement actuator 1400450 is applied to the mounting plate 1300 as a force in the direction for displacing the mounting plate 1300. At the same time, a force (reaction force) in the opposite direction to that applied to the mounting plate 1300 is applied to the intermediate frame 1200 from the small displacement actuators 1400, 1450.

At this time, if the intermediate frame 1200 moves due to the above-mentioned reaction force, the mounting plate 1300 cannot be displaced as intended. For this reason, even if the small displacement actuators 1400 and 1450 generate the maximum force that can be generated in the vertical and horizontal directions, the intermediate frame 1200 needs to be kept stationary with respect to the case 1100. It is. Therefore, the outer surfaces 1204A1, 124 of the intermediate frame 1200
04B1 and inner surface 1104A1, 11 of case 1100
The frictional resistance of the sliding members provided at the places where the members 04B1 contact each other is small.
0 is set to a value equal to or greater than the maximum force that can be generated in the vertical and horizontal directions. The large displacement actuator 150
0, 1550 are the outer surfaces 120 of the intermediate frame 1200.
4A1, 1204B1 and inner surface 110 of case 1100
4A1 and 1104B1 to generate a force required to displace the intermediate frame 1200 in the vertical and horizontal directions against the frictional force of the predetermined value set in the sliding material provided at the contacting portion of each other. It is needless to say that the configuration is made possible.

The control unit (not shown) has the same configuration as the control unit in the first and second embodiments, except that the direction of vibration to be removed is both in the vertical direction and in the horizontal direction. There is only one thing. Therefore, the vibration sensor 160
Numerals 0 and 1650 input the respective detection signals to the control device in correspondence with the vertical direction and the horizontal direction of the vibration. And
The control device unit is configured to generate a drive signal for driving the vertical and horizontal small displacement actuators based on the input vertical and horizontal detection signals and to input the drive signal to each small displacement actuator, The air pressure for driving the large displacement actuators in the vertical and horizontal directions is generated and input to each large displacement actuator. The configuration and operation of the control device are the same as those in the first embodiment, and thus description thereof is omitted. The procedure for adjusting the pre-compression force using the adjustment screw 1420 in the small vertical actuator 1400 is the same as that in the first embodiment, and a description thereof will be omitted.

Next, with reference to FIG. 16, a description will be given of a specific example in which the vibration isolation mechanism 860 according to the third embodiment is attached to the vibration isolation member 20. FIG. 16A shows the vibration isolation mechanism 80.
This is an example using three 0s. Vibration isolation body 2 having a rectangular shape in plan view
3 corresponding to the vertex of an equilateral triangle surrounding the center of the bottom of 0
The mounting plate 1300 of the vibration isolation mechanism 860 is mounted at each location. Three vibration isolation mechanism units 860 are used, and a mounting plate for the two vibration isolation mechanism units 860 is provided near the peripheral edge of the bottom of the vibration receiving body 20 so that the direction of vibration isolation is parallel to the peripheral edge. 1300 is attached, and the two vibration isolation mechanisms 860 are provided at a location between the two vibration isolation mechanisms 860.
The mounting plate 1300 of one anti-vibration mechanism 860 is mounted so that vibrations in a direction orthogonal to the direction in which the anti-vibration is performed. The arrow in the figure indicates the horizontal direction in which each of the anti-vibration mechanisms 860 performs anti-vibration. With this configuration, vibrations in the vertical direction and the horizontal direction of the vibration-removed body 20 are vibration-removed by a combination of the three vibration-removal mechanism units 860.

FIG. 16B shows an example in which four vibration isolation mechanisms 860 are used. Each of the anti-vibration mechanisms 860 is provided at a position near the four corners at the bottom of the anti-vibration body 20 having a rectangular shape in a plan view. The mounting plate 1300 of each anti-vibration mechanism unit 860 is set in a vibration-isolated body such that the direction in which each anti-vibration mechanism unit 860 performs vibration isolation is a direction in which the adjacent anti-vibration mechanism units 860 are orthogonal to each other. 20. In this way, each vibration isolation mechanism 8
By arranging 60, vibration in the horizontal direction generated in the vibration-removed body 20 can be removed by a combination of the four vibration-removing mechanism units 860.

As described above, one or a plurality of vibration isolation mechanisms 860 can be provided for the vibration-removed body 20, and the arrangement position thereof can be set arbitrarily.

According to the third embodiment, the first
It is needless to say that the same operation and effect as those of the embodiment can be obtained. Further, the control device section may be provided one by one for each vibration isolation mechanism section, or may be configured to control a plurality of vibration isolation mechanisms collectively by one control device section. The configuration of the control unit can be freely set as in the case of the first embodiment.

Next, a fourth embodiment will be described. FIG. 17 is a longitudinal sectional view showing a schematic configuration according to the fourth embodiment of the present invention, FIG. 18 is an explanatory view showing FIG. 17 as viewed from the direction of arrow D, and FIG. It is an arrangement view showing the state where the arrangement of the vibration damping device is viewed from a plane. The active vibration damping device 4000 according to the fourth embodiment shown in FIGS. 17 to 19 is configured to dampen vertical and horizontal fine vibrations.

The active vibration isolator 3000 includes a base 2100, a mounting plate 2300 (corresponding to the mounting means in the claims), small displacement actuators 2400 and 2450.
(Corresponding to the displacement means in the claims), the vibration sensor 26
00, 2650 (corresponding to a vibration detecting means in the claims), an air spring 2700 (corresponding to a first support member in the claims), and the like. A control unit (not shown) for performing control is provided.

The base 2100 has an upper surface 2102 having a rectangular shape in a plan view and four side surfaces 2104A, 2104B, 2104C,
104D and a bottom surface 2106 opposed to the top surface 2102
And is configured. The bottom surface 2106 is fixed to a substructure 10 provided on a lower structure (not shown) composed of a building floor or the like.

The mounting plate 2300 has an upper plate 2302 having a rectangular shape in a plan view, and a vertical plate 2304 erected downward from one of the peripheral portions of the upper plate 2302 and facing the side surface 2104D of the base portion 2100 at an interval. And Mounting plate 2
300 indicates that the upper surface 2302A of the upper plate 2302 is
Tied to 0. Four screw holes 230 for attachment are provided near four corners on the upper surface 2302A side of the upper plate 2302.
2B is provided, and a screw (not shown) penetrating the vibration receiving body 20 is screwed into these four screw holes 2302B, so that the mounting plate 2300 is attached to the vibration receiving body 20. I have. The vibration-removed body 20 may be, for example, a device from which vibration is to be removed or a surface plate to which such a device is attached.

The vibration sensor 2600 is attached to the upper plate 2302 of the mounting plate 2300, and is configured to detect the vertical acceleration of the mounting plate 2300.
Further, the vibration sensor 2650 is connected to the upper plate 2 of the mounting plate 2300.
It is attached to 302 and is configured to detect horizontal acceleration of the mounting plate 2300.

The base 2100 is provided with a housing 2108 for housing the small displacement actuator 2400 at the center of the upper surface 2102 so as to extend in the vertical direction. A bottom wall 2108 </ b> A extending horizontally in a position above the bottom surface 2106 is provided at the bottom of the housing portion 2108. The bottom wall 2108A is provided with a screw hole 2108B coaxially with the central axis of the housing 2108, and the screw hole 2108B
406A is screwed. The tip of the screw portion 2406A of the adjustment screw 2406 is configured to be in contact with the bottom of the case 2402 of the small displacement actuator 2400. It is configured such that the pre-compression force can be adjusted by displacing the position.
The rod 2404 of the small displacement actuator 2400 is attached to the upper plate 2302 of the attachment plate 2300 via an elastic body 2408. The elastic body 2408 is made of, for example, rubber which is rigid in the direction of displacement (vertical direction) of the small displacement actuator 2400 and soft in the direction (horizontal direction) orthogonal to the direction of displacement of the small displacement actuator 2400. While transmitting the force acting on the small displacement actuator 2400 in the direction of displacement to the mounting plate 2300 as it is, the shear force acting in the direction perpendicular to the direction of displacement and the small vibration in the shear direction are absorbed. Plays the role of.

The side surface 2104D of the base portion 2100
The housing 2110 for housing the small displacement actuator 2450 at a position where the height direction is near the upper surface 2102 at the center in the horizontal direction is a direction perpendicular to the side surface 2104D (horizontal direction).
Is provided to extend. At the position of the vertical plate 2304 of the mounting plate 2300 facing the housing 2110, the housing 21
A screw hole 2304A is provided coaxially with the center axis of the screw 10, and a screw portion 2456A of an adjusting screw 2456 is screwed into the screw hole 2304A. Adjusting screw 2456
Is configured such that the tip of the screw portion 2456A is in contact with the rod 2454 of the small displacement actuator 2450 via the elastic body 2458, and the adjusting screw 2456
Of the small displacement actuator 24 by rotating the head 2456B of the
The pre-compression force of 50 can be adjusted.

That is, the small displacement actuator 2450
Rod 2454 is attached to the mounting plate 2 via an elastic body 2458.
It is attached to 300 vertical plates 2304. This elastic body 2
458 is rigid in the displacement direction (horizontal direction) of the small displacement actuator 2450,
In the direction (vertical direction) perpendicular to the direction of displacement of 450, it is made of, for example, rubber or the like having a soft characteristic. On the other hand, it acts to absorb the shear force acting in the direction orthogonal to the displacement direction and the small vibration in the shear direction.

Between the upper surface 2102 of the base portion 2100 and the upper plate 2302 of the mounting plate 2300, a ring-shaped air spring 2700 is provided in plan view. Ring-shaped air spring 2
Reference numeral 700 is arranged so as to surround the small displacement actuator 2400. The mounting plate 2300 and the vibration-isolated body 20 are supported by the air spring 2700 so as to be able to move up and down and horizontally with respect to the base 2100.

An unillustrated control unit has the same configuration as the control unit in the first and second embodiments, except that the direction of vibration to be removed is both in the vertical direction and in the horizontal direction. That is, only the small displacement actuator performs the anti-vibration operation. Therefore, the vibration sensor 260
Numerals 0 and 2650 are configured to input the respective detection signals to the control unit in correspondence with the vertical direction and the horizontal direction of the vibration. The control unit is configured to generate a drive signal for driving the vertical and horizontal small displacement actuators based on the input vertical and horizontal detection signals and to input the drive signal to each small displacement actuator. Have been. The control device section is different from the first embodiment only in that it controls only the small displacement actuator, and the other operations are the same as those in the first embodiment, so that the description is omitted.
The procedure for adjusting the pre-compression force using the adjustment screws 2406 and 2456 in the small displacement actuators 2400 and 2450 is the same as that in the first embodiment, and a description thereof will be omitted.

Next, with reference to FIG. 19, a description will be given of a specific example when the vibration isolation mechanism 870 according to the fourth embodiment is mounted on the vibration isolation member 20. FIG. FIG. 19 shows that the anti-vibration
This is an example of using one. The mounting plate 2 of each vibration isolation mechanism 870 is provided at a position near the four corners of the bottom of the vibration isolation body 20 having a rectangular shape in a plan view.
Attach 300. The mounting plate 2300 of each of the vibration isolation mechanisms 870 is set in the horizontal direction so that the directions in which the vibration is removed by the adjacent vibration isolation mechanisms 870 are orthogonal to each other. 20. By arranging the respective vibration isolation mechanisms 870 in this way, the vibration isolation
The vertical vibration and the horizontal vibration generated in the vibration can be removed by a combination of the four vibration removing mechanisms 870.
Note that the number of vibration isolation mechanisms 870 attached to the vibration-isolated body 20 and the arrangement of the vibration isolation mechanisms 870 can be arbitrarily set in the same manner as in the first to third embodiments. is there.

According to the above-described fourth embodiment, the same operation and effect as those of the first embodiment can be obtained except that large amplitude vibration cannot be removed by the large displacement actuator. Of course. Further, the control device section may be provided one by one for each vibration isolation mechanism section, or may be configured to control a plurality of vibration isolation mechanisms collectively by one control device section. ,
The configuration of the control unit can be freely set as in the case of the first embodiment.

In the first to third embodiments described above, the intermediate frame is slidably provided by the case forming the base portion, and the frictional resistance generated at the place where the intermediate frame and the case come into contact with each other is reduced. By setting the predetermined value, the intended displacement amount can be reliably given to the mounting plate from the small displacement actuator. However,
By setting the intermediate frame and the case not to contact each other, and by setting the weight of the intermediate frame to a predetermined value,
It is also possible to surely give the intended displacement amount to the mounting plate from the small displacement actuator. Below,
Fifth to seventh embodiments employing such a configuration will be described. Since the fifth to seventh embodiments have substantially the same configurations as those of the above-described first to third embodiments, the same reference numerals are given to the same components, and the same components are denoted by the same reference numerals. The description will be omitted, and different portions will be mainly described.

FIG. 20 is a longitudinal sectional view showing a schematic configuration of an active vibration isolator according to a fifth embodiment of the present invention, FIG. 21 is a horizontal sectional view of FIG. 20, and FIG.
FIG. 21 is an explanatory diagram showing a state of the “0” as viewed from the cross section along the line D1D1.
(B) is an explanatory diagram showing a state of FIG. 20 viewed from a cross section along line D2D2, FIG. 21 (C) is an explanatory diagram showing a state of FIG. 20 viewed from a cross section of line D3D3, and FIG. 21 (D) is a cross section of FIG. It is explanatory drawing which shows the state seen. In the fifth embodiment, as in the first embodiment, the active vibration isolator 4000 includes a case 100 (corresponding to a base in the claims), an intermediate frame 200, and a mounting plate 300.
(Corresponding to the attachment means in the claims), small displacement actuator 400 (corresponding to the displacement means in the claims), large displacement actuator 500 (corresponding to the displacement means in the claims), and vibration sensor 600 (corresponding to the claim). A vibration isolation unit 880 including an air spring 700 (corresponding to a second support member in the claims) and the like.
A control unit (not shown) for controlling the vibration isolation mechanism 880 is provided.

The intermediate frame 3200 has a disc-shaped side wall 3.
202 and a cylindrical side wall 32 erected from the periphery thereof
04 and an annular flange wall 3206 extending horizontally from the upper end of the side wall 3204. As shown in FIGS. 20 and 21C, four laminated rubbers 3210 are provided between the outer side surface 3202A of the side wall 3202 of the intermediate frame 3200 and the inner side surface 104A of the case 100. (Corresponding to the intermediate frame supporting means in the range) are arranged at the same position in the vertical direction, and at equal intervals in the circumferential direction of the intermediate frame 3200 and the case 100. The portions of the laminated rubber 3210 facing the outer side surface 3202A of the side wall 3202 of the intermediate frame 3200 and the inner side surface 104A of the case 100 are the outer side surfaces 3202, respectively.
A and the inner side surface 104A. Intermediate frame 3
200 is the case 10
The case 100 is supported so as to be movable in the vertical direction, that is, along the central axis of the cylindrical side wall 104 of the case 100. In addition, the laminated rubber 3210 is
Is configured such that a resistance force generated when moving in the vertical direction with respect to the case 100 is reduced as much as possible.

As described above, in the fifth embodiment,
The intermediate frame 3200 and the case 100 do not contact each other. Here, the intermediate frame 3200
Maintains the stationary state with respect to the case 100 even when the small displacement actuator 400 generates the maximum force that can be generated in the vertical direction, in order to reliably apply the intended displacement amount from the small displacement actuator 400 to the mounting plate 300. There is a need to. That is, the intermediate frame 3200 is set to a predetermined weight, and the predetermined weight is set to be equal to or greater than the maximum force by the intermediate frame 3200 when the small displacement actuator 400 generates the maximum force that can be generated in the predetermined direction. This is set to a value at which a reaction force is generated, whereby it is possible to reliably apply the intended displacement amount from the small displacement actuator 400 to the mounting plate 300. In the fifth embodiment, the same operation and effect as those of the first embodiment can be obtained.

As shown in FIGS. 20 and 21, instead of supporting the mounting plate 300 and the vibration damping body 20 with respect to the intermediate frame 200 in a vertically movable state by an air spring 700 (second support member). As shown in FIG. 22, a rubber member 710 (second support member) having the same action as that of the air spring 700 allows the mounting plate 300 and the vibration damping body 20 to move up and down with respect to the intermediate frame 200. You may comprise so that it may support. Also, the mounting plate 300 and the vibration-isolated body 20
If the weight of the second support member is allowed to be added to the small displacement actuator 400, the second support member may be omitted as shown in FIG.

Further, as shown in FIG.
The intermediate frame support means for supporting the intermediate frame 3200 with respect to the laminated rubber 32 shown in FIGS.
Instead of 10, U-shaped leaf springs 321 whose both ends are fixed to the outer surface 3202A of the side wall 3202 of the intermediate frame 3200 and the inner surface 104A of the case 100, respectively.
2 may be used.

FIG. 25 is a longitudinal sectional view showing a schematic configuration of an active vibration isolator according to a sixth embodiment of the present invention, FIG. 26 is an explanatory view showing a state of FIG. 25 viewed from a section taken along line E1E1, and FIG. It is explanatory drawing which shows the state which looked at FIG. 25 from the E2E2 line cross section. In the sixth embodiment, as in the second embodiment, the active vibration damping device 5000
Case 150 (corresponding to the base in the claims), intermediate frame 250, mounting plate 350 (corresponding to the attaching means in the claims), small displacement actuator 450 (corresponding to the displacing means in the claims), very Position actuator 5
50 (corresponding to a displacement means in the claims), a vibration sensor 650 (corresponding to a vibration detecting means in the claims), an air spring 750 (corresponding to a position holding means in the claims), and the like. A mechanism unit 885 and a control unit (not shown) are provided.

The intermediate frame 4250 has a rectangular bottom wall 4252 in plan view and a side wall 4 having a thickness erected from the side edge of the bottom wall 4252 facing the side wall 154C of the case 150.
254. The small displacement actuator 450 is fixed to the side wall 4254 of the intermediate frame 4250,
The position of the mounting plate 350 with respect to 54 is configured to be displaced in the horizontal direction. Then, the intermediate frame 425
0 bottom wall 4252 faces lower surface 4252A of bottom wall 152 of case 150 at a predetermined interval, and two opposite side surfaces 4254A of intermediate frame 4250,
4254B are disposed so as to face the side surface 154A1 of the side wall 154A of the case 150 and the side surface 154B1 of the side wall 154B at a predetermined interval.

The bottom wall 425 of the intermediate frame 4250
Between the lower surface 4252A of the second frame 4 and the upper surface 152A of the bottom wall 152 of the case 150, four laminated rubbers 4210 (corresponding to the intermediate frame supporting means in the claims) are provided on the lower surface 4252A of the bottom wall 4252 of the intermediate frame 4250. Are located at each of the four corners. Lower surface 4252A of bottom wall 4252 of intermediate frame 4250 of laminated rubber 4210
And the portions facing the upper surface 152A of the bottom wall 152 of the case 150 are fixed to the lower surface 4252A and the upper surface 152A, respectively. On the other hand, the side 425 of the intermediate frame 4250
4A and the side surface 154A1 of the side wall 154A of the case 150.
And two laminated rubbers 4212 (corresponding to the intermediate frame supporting means in the claims) between the intermediate frame 425
0 at both ends in the longitudinal direction. The side surface 4254A of the intermediate frame 4250 of the laminated rubber 4212
The portions facing the side surface 145A1 of the side wall 154A of the case 150 are fixed to the side surface 4254A and the side surface 145A1, respectively. Also, the side surface 4 of the intermediate frame 4250
254B and the side surface 154 of the side wall 154B of the case 150.
B1 and two laminated rubbers 4212 (corresponding to the intermediate frame supporting means in the claims) between the intermediate frame 4
250 are provided at both ends in the longitudinal direction. The side surface 425 of the intermediate frame 4250 of the laminated rubber 4212
4B and side surface 145B1 of side wall 154B of case 150 are side surface 4254B and side surface 145B, respectively.
Fixed to 1.

The intermediate frame 4250 is supported by these laminated rubbers 4210 and 4212 so as to be movable in the horizontal direction, that is, along the central axis in the longitudinal direction of the bottom wall 152 of the case 150. In addition, the laminated rubber 4210,
The 212 is configured so that the resistance generated when the intermediate frame 4250 moves in the horizontal direction with respect to the case 150 is reduced as much as possible.

As described above, in the sixth embodiment,
The structure is such that the intermediate frame 4250 and the case 100 do not contact each other. Here, the intermediate frame 4250
In order to reliably apply the intended displacement from the small displacement actuator 450 to the mounting plate 350, even if the small displacement actuator 450 generates the maximum force that can be generated in the water direction, the intermediate frame 4250 will It is necessary to keep still. That is, the intermediate frame 4
The predetermined weight 250 is set to a predetermined weight. When the small displacement actuator 450 generates the maximum force that can be generated in a predetermined direction, the intermediate frame 4250 generates an inertia reaction force equal to or more than the maximum force. This is set to the state value, whereby the small displacement actuator 450
Thus, it is possible to reliably apply the intended displacement amount to the mounting plate 350. In the sixth embodiment, the same functions and effects as those of the second embodiment can be obtained.

As shown in FIGS. 25 to 27, an air spring 750 (corresponding to the position holding means in the claims)
Case 15 in a state where there is no horizontal vibration.
Instead of the configuration in which the horizontal position of the intermediate frame 4250 is maintained at a predetermined position with respect to the air spring 750, as shown in FIG. The horizontal position of the intermediate frame 4250 may be held at a predetermined position by a holding unit.

Also, as shown in FIG.
As an intermediate frame supporting means for supporting the intermediate frame 4250, the laminated rubber 4 shown in FIGS.
Instead of 212, both ends are the side 4254A of the intermediate frame 4250 and the side 1 of the side wall 154A of the case 150.
54A1, two U-shaped leaf springs 3212 respectively fixed thereto, both ends of the side surface 4254B of the intermediate frame 4250, and the side surface 15 of the side wall 154B of the case 150.
4B1 and two U-shaped leaf springs 3212 fixed to each other. Although not shown, instead of the laminated rubber 4210 shown in FIGS. 25 to 27, both ends are formed on the lower surface 4252A of the bottom wall 4252 of the intermediate frame 4250 and the upper surface 15 of the bottom wall 152 of the case 150.
U-shaped leaf springs each fixed between 2A and 2A may be used.

FIG. 30 is a longitudinal sectional view showing a schematic configuration of an active vibration isolator according to a seventh embodiment of the present invention. FIG. 31 is an explanatory view showing FIG. 30 as viewed from the direction of arrow F.
32 is an explanatory view showing the state of FIG. 30 viewed from the cross section taken along the line F1F1, FIG. 33 is an explanatory view showing the state viewed from the cross section taken along the line F2F2 of FIG. 30, and FIG. FIG. The seventh shown in FIGS. 30 to 34
The active vibration damping device 6000 of this embodiment is configured to vibrate vibrations in the vertical and horizontal directions, similarly to the above-described third embodiment.

In FIGS. 30 to 34, components corresponding to those in FIGS. 12 to 15 showing the third embodiment are denoted by the same reference numerals, and description thereof is omitted. Also in the seventh embodiment, as in the third embodiment,
The active vibration isolator 6000 includes a case 1100 (corresponding to a base in the claims), an intermediate frame 520,
0, mounting plate 1300 (corresponding to the attaching means in the claims), small displacement actuators 1400, 1450 (corresponding to the displacing means in the claims), large displacement actuators 1500, 1550 (corresponding to the displacing means in the claims) Vibration isolator 890 provided with vibration sensors 1600 and 1650 (corresponding to vibration detecting means in the claims), laminated rubber 5300 (corresponding to intermediate frame supporting means in the claims), and the like. An unillustrated control device for controlling the vibration mechanism 890 is provided. The difference between the seventh embodiment and the third embodiment is that an intermediate frame 5200
There are no air springs between the first and second mounting plates 1300, the shape of the intermediate frame 5200 is different, and the number of small displacement actuators 1400 in the vertical direction is different. Hereinafter, parts different from the third embodiment will be mainly described.

The case 1100 has a bottom wall 1102 having a square shape in plan view and side walls 11 standing upright from four peripheral portions thereof.
04A, 1104B, 1104C, and 1104D. The bottom wall 1102 is a base structure 10 provided on a lower structure (not shown) composed of a building floor or the like.
Is to be fixed to. Top surface 1 of bottom wall 1102
102A and inner surface 1 of each side wall 1104A to 1104D
104A1 to 1104D1, the accommodation space 10 for accommodating the lower portion 5220 of the intermediate frame 1200 described below.
60 are formed.

The intermediate frame 5200 includes an upper part 5210 having a block shape and a lower part 5220 connected to the lower surface of the upper part 5210. The upper portion 5210 is provided with a rectangular hole 5214 in a plan view extending in the vertical direction at the center of a rectangular upper surface 5212 in a plan view.
The bottom surface 5214A of the hole 5214 and the bottom surface 5214A
5214 that connects each peripheral portion of upper surface and upper surface 5212
B forms a housing space for housing the small displacement actuator 1400. Small displacement actuator 14
00 is accommodated in the accommodation space with its displacement direction being the up and down direction, and is fixed at the position of the bottom surface 5214A. Note that the configuration is such that the precompression force of the small displacement actuator 1400 can be adjusted by rotating the head 1424 of the adjustment screw 1420, as in the third embodiment.

Also, on the side surface 5216 of the upper part 5210,
A housing portion 5217 for housing the small displacement actuator 1450 is provided at a position where the height direction is the center of the horizontal direction and the vertical direction center of the side surface 5216 and extends in the direction (horizontal direction) orthogonal to the side surface 5116. A screw hole 1304A is provided coaxially with the central axis of the housing portion 5217 at a position of the vertical plate 1304 of the mounting plate 1300 facing the housing portion 5217, and an adjusting screw 148 is provided in the screw hole 1304A.
No thread portion 1480A is screwed. Adjustment screw 14
80 is that the tip of the screw portion 1480A is elastic body 1460
Through the rod 145 of the small displacement actuator 1450
4 so as to be in contact with the adjusting screw 14.
The configuration is such that the head 1480B of the 80 can be rotated to adjust the pre-compression force of the small displacement actuator 1450.

In the housing space 1060 of the case 1100, the lower portion 5220 of the intermediate frame 1200 has a bottom surface 5222 and side surfaces 5224A to 5524D formed by an upper surface 1102A of a bottom wall 1102 of the case 1100 and each side wall 1224.
Inner side surfaces 1104A1 to 11A of 104A to 1104D
04D1 and a predetermined interval.

The side surface 5224A of the intermediate frame 5200,
5224B, the inner surface 1104A1 of the case 1100,
A laminated rubber 5300 is provided between the laminated rubber 5300 and 1104B1. The laminated rubber 5300 is provided at both ends of the side surfaces 5224A and 5224B of the intermediate frame 5200, respectively.
Each of them is arranged in total of four. Laminated rubber 5300
Side surfaces 5224A, 5224 of the intermediate frame 5200
B and inner surface 1104A1, 1104 of case 1100
The portions facing B1 are the side surfaces 5224A and 522, respectively.
4B and the inner surfaces 1104A1 and 1104B1. As a result, the intermediate frame 5200 is
100 vertical direction (large displacement actuator 150
0) and a horizontal direction (a direction parallel to the displacement direction of the large displacement actuator 1550). The laminated rubber 5300 is formed by moving the intermediate frame 5200 in the vertical direction and the horizontal direction. It is configured such that the resistance generated when moving is reduced as much as possible.

The laminated rubber 5300 also functions as a position holding means for holding the vertical position and the horizontal position of the intermediate frame 5200 with respect to the case 1100 at a predetermined position when there is no vertical and horizontal vibrations. The intermediate frame 5200 is supported with respect to the case 1100 in a state where movement in the direction orthogonal to the displacement direction of the large displacement actuator 1550 (the thickness direction of the laminated rubber 5300) is regulated by the laminated rubber 5300.

Upper surface 11 of bottom wall 1102 of case 1100
A large displacement actuator 1500 for removing vibration in the vertical direction is disposed between the second frame 02A and the bottom surface 5222 of the intermediate frame 5200. Side wall 12 of case 1100
04C and the side surface 5224C of the intermediate frame 5200, and between the inner surface 1204D1 of the side wall 5224D of the case 1100 and the intermediate frame 520.
The large displacement actuators 1550 for removing vibration in the horizontal direction are arranged between the large displacement actuator 1550 and the side surface 5224D.

In the seventh embodiment, unlike the third embodiment, the upper surface 5212 of the intermediate frame 5200 is different from the third embodiment.
An air spring or the like is not arranged between the mounting plate 1300 and the upper plate 1302. That is, the mounting plate 1300 is
Adjusting screw 1420, elastic body 1410, small displacement actuator 1400, adjusting screw 1480, elastic body 1460, small displacement actuator 1450, intermediate frame 5200,
Laminated rubber 5300, large displacement actuator 1500, 1
It is supported by the case 1100 and the lower structure 10 via 550 so as to be vertically movable and horizontally movable.

As described above, in the seventh embodiment,
The configuration is such that the intermediate frame 5200 and the case 1100 do not contact each other. Here, the intermediate frame 5200
Is the mounting plate 1 from the small displacement actuators 400 and 450.
Even if the small displacement actuators 400 and 450 generate the maximum force that can be generated in the vertical and horizontal directions, the intermediate frame 520 may be used in order to reliably apply the intended displacement to the 300.
0 must remain stationary with respect to case 1100. That is, the intermediate frame 5200 is set to a predetermined weight, and the predetermined weight is set when the small displacement actuators 400 and 450 generate the maximum forces that can be generated in the vertical and horizontal directions, respectively.
Is set to a value at which an inertial reaction force equal to or greater than the maximum force is generated, whereby it is possible to reliably apply the intended displacement amount to the mounting plate 1300 from the small displacement actuators 400 and 450. it can. In addition,
Also in the seventh embodiment, the same operation and effect as in the third embodiment can be obtained. Also, in the seventh embodiment, the upper surface 5212 of the intermediate frame 5200,
Although the second support member made of an air spring or the like is not provided between the upper plate 1302 of the mounting plate 1300 and the second support member, the second support member may be provided.

In the present invention, the small displacement actuator is not limited to the giant magnetostrictive actuator, and a solid actuator other than the giant magnetostrictive actuator may be used. Solid actuators other than giant magnetostrictive actuators operate by thermal expansion due to temperature,
Some of them operate by electrostriction or piezoelectric strain caused by an electric field (piezo actuator), others operate by light-induced phase transition by light. These solid actuators also have a substantially linear displacement characteristic with respect to the magnitude of the drive signal given thereto, like the giant magnetostrictive actuator. Good. The relationship between the solid actuator and the precompression force applied thereto is the same as in the case of the above-described giant magnetostrictive actuator. Further, in the present invention, the large displacement actuator is not limited to a pneumatic actuator, and may be, for example, a linear motor.

[0101]

As is clear from the above description, the present invention
An anti-vibration mechanism for supporting the anti-vibration body on the lower structure and a control device thereof are provided. The anti-vibration mechanism can be attached to the base provided on the lower structure and the anti-vibration body. Mounting means provided on the lower structure, supporting means for movably supporting the vibration-isolated body in a predetermined direction with respect to the lower structure, and vibration detecting means for detecting acceleration of vibration of the mounting means in the predetermined direction. And a displacement means for displacing the attachment means in the predetermined direction with respect to the base portion, wherein the base portion, the attachment means, the support means, the vibration detection means, and the displacement means are provided integrally. The controller is configured to remove the vibration of the vibration-removed body in a predetermined direction by driving the displacement means in response to the acceleration in the predetermined direction detected by the vibration detection means. I have. Therefore, the base portion, the mounting means, the support means, the vibration detecting means, and the displacement means are integrally provided to constitute a vibration isolating mechanism, and the vibration transmitted to the lower structure is Is transmitted to the vibration-removed body to which the mounting means is mounted via the vibration-removing mechanism. This vibration is detected by the vibration detecting means. The control unit removes the vibration of the vibration-free body in the predetermined direction by driving the displacement unit in accordance with the acceleration in the predetermined direction detected by the vibration detection unit. Therefore, unlike the related art, the active vibration isolation device can be configured by attaching the mounting means of the vibration isolation mechanism to the vibration isolation body without providing a surface plate for attaching the vibration isolation body. Therefore, it is possible to provide an active anti-vibration apparatus which is light in weight, occupies a small space, and has few restrictions on an installation place.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a schematic configuration of a first embodiment of an active vibration isolator according to the present invention.

FIG. 2 is an explanatory diagram showing a state when FIG. 1 is viewed from a cross section taken along line A1A1.

FIG. 3 is an explanatory diagram showing a state in which FIG. 1 is viewed from a cross section taken along line A2A2.

FIG. 4 is an explanatory diagram showing a state of FIG. 1 viewed from a cross section taken along line A3A3.

FIGS. 5A and 5B are views showing a state in which the arrangement of the active vibration isolation device of the first embodiment is viewed from a plane, and FIG. FIG. 4 is a layout diagram showing a case where three vibration isolation mechanisms are used, and FIG. 4C is a layout diagram showing a case where four vibration isolation mechanisms are used.

FIG. 6 is a block diagram illustrating a configuration example of a control system.

FIG. 7 is a block diagram showing another configuration example of the control system.

FIG. 8 is a longitudinal sectional view illustrating a schematic configuration according to a second embodiment of the present invention.

FIG. 9 is an explanatory diagram showing a state of FIG. 8 viewed from a cross section taken along line BB.

10A and 10B are diagrams illustrating a layout of the active vibration damping device according to the second embodiment viewed from a plane, and FIG. 10A is a layout diagram illustrating a case where one vibration damping mechanism is used; (B) is a layout diagram showing a case where two vibration isolation mechanisms are used, and (C) is a layout diagram showing a case where four vibration isolation mechanisms are used.

FIG. 11 is a layout view showing an example of an active vibration isolator configured to vibrate vibrations in a vertical direction and a horizontal direction by combining the vibration isolation mechanisms of the first and second embodiments. .

FIG. 12 is a plan view illustrating a schematic configuration according to a third embodiment of the present invention.

FIG. 13 is an explanatory diagram showing a state of FIG. 12 viewed from a cross section taken along line C1C1.

FIG. 14 is an explanatory diagram showing a state of FIG. 12 viewed from a cross section taken along line C2C2.

FIG. 15 is an explanatory diagram showing a state of FIG. 12 viewed from a cross section taken along line C3C3.

FIG. 16 is an arrangement diagram showing an arrangement of the active vibration damping device according to the third embodiment as viewed from a plane.

FIG. 17 is a longitudinal sectional view illustrating a schematic configuration according to a fourth embodiment of the present invention.

FIG. 18 is an explanatory diagram showing a state in which FIG. 17 is viewed from the direction of arrow D.

FIG. 19 is a layout diagram showing a layout of an active vibration damping device according to a fourth embodiment viewed from a plane.

FIG. 20 is a longitudinal sectional view showing a schematic configuration of an active vibration damping device according to a fifth embodiment of the present invention.

21 is a horizontal cross-sectional view of FIG. 20, wherein FIG. 21 (A) is an explanatory view showing a state of FIG. 20 viewed from a cross section taken along line D1D1, and FIG. 21 (B) is a view showing a state of FIG. FIG. 21 (C) is an explanatory view showing a state of FIG. 20 viewed from a cross section taken along line D3D3, and FIG. 21 (D) is a view showing FIG. 20 as D4D.
It is explanatory drawing which shows the state seen from 4 line cross sections.

FIG. 22 is a main part explanatory view showing another example of the second support member in the fifth embodiment.

FIG. 23 is an explanatory view of a main part showing an example in which a second support member according to the fifth embodiment is omitted.

FIG. 24 is an explanatory view of a main part showing another example of the intermediate frame supporting means in the fifth embodiment.

FIG. 25 is a longitudinal sectional view showing a schematic configuration of an active vibration damping device according to a sixth embodiment of the present invention.

FIG. 26 is an explanatory diagram showing a state of FIG. 25 viewed from a cross section taken along line E1E1.

FIG. 27 is an explanatory diagram showing a state of FIG. 25 viewed from a cross section taken along line E2E2.

FIG. 28 is an explanatory diagram of a main part showing another example of the position holding unit in the sixth embodiment.

FIG. 29 is an explanatory view of a main part showing another example of the intermediate frame supporting means in the sixth embodiment.

FIG. 30 is a longitudinal sectional view showing a schematic configuration of an active vibration isolator according to a seventh embodiment of the present invention.

FIG. 31 is an explanatory diagram showing a state of FIG. 30 viewed from the direction of arrow F;

FIG. 32 is an explanatory diagram showing a state of FIG. 30 viewed from a cross section taken along line F1F1.

FIG. 33 is an explanatory diagram showing a state viewed from a cross section taken along line F2F2 in FIG. 30;

FIG. 34 is an explanatory diagram showing a state of FIG. 30 viewed from a cross section taken along line F3F3.

[Explanation of symbols]

1000, 2000, 3000, 4000, 5000,
6000, 7000 active vibration isolator 800, 850, 860, 870, 880, 885, 8
90 Vibration isolation mechanism 900 Controller 100, 150, 1100, 2100 Case (base) 2100 Base 200, 250, 1200, 3200, 4250 Intermediate frame 300, 350, 1300, 2300 Mounting plate (mounting means) 400 450 Small displacement actuator (displacement means) 500, 550 Large displacement actuator (displacement means) 600 Vibration sensor (vibration detection means) 700, 1700 Air spring (second support member) 2700 Air spring (first support member) 750, 1750 Air Springs (position holding means) 410, 460, 1410, 1420, 2408, 24
58 Elastic body 420, 1410, 1420, 2406, 2456 Adjusting screw (pre-compression force adjusting means) 3210, 4210, 4212, 5300 Laminated rubber 10 Basic structure 30 Air spring (supporting means)

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Masanao Nakayama 4-6-115 Sendagaya, Shibuya-ku, Tokyo Inside Fujita Co., Ltd. (72) Keiji Masuda 4-6-1-15 Sendagaya, Shibuya-ku, Tokyo Stock Company Fujita Co., Ltd. (72) Inventor Masashi Yasuda 10-13 Minami Hatsushima-cho, Amagasaki City, Hyogo Prefecture Patent Equipment Co., Ltd. (72) Inventor Akira Matsuura 10-13 Minami Hatsushima-cho, Amagasaki City, Hyogo Prefecture 133 Patent Equipment Co., Ltd. Term (reference) 3J048 AA02 AB07 AD03 BA02 BA08 BE02 CB19 DA01 EA13 5F046 AA23 DA30 DB14 DC14

Claims (24)

[Claims] An anti-vibration mechanism for supporting an anti-vibration body on a lower structure, and a control device thereof, wherein the anti-vibration mechanism includes a base provided on the lower structure; Mounting means provided so as to be attachable to the vibration body, support means for supporting the vibration-removed body in a predetermined direction with respect to the lower structure, and acceleration of the vibration of the mounting means in the predetermined direction. A vibration detecting means for detecting, and a displacing means for displacing the mounting means in the predetermined direction with respect to the base part, wherein the base part, the mounting means, the supporting means, the vibration detecting means, and the displacing means are The control unit is provided integrally, and drives the displacement unit in response to the acceleration in the predetermined direction detected by the vibration detection unit, thereby removing vibration in the predetermined direction of the vibration-free body. Is configured so that Active anti-vibration apparatus according to symptoms. 2. The active vibration isolator according to claim 1, wherein one or two or more vibration isolation mechanisms are attached to the vibration isolation body. 3. The active vibration isolator according to claim 1, wherein one control device is provided for one vibration isolation mechanism. 4. The apparatus according to claim 1, wherein one of the control units is provided for a plurality of the vibration isolating units, and the control unit is configured to control the predetermined vibration detected separately by the vibration detecting unit of each of the vibration isolating units. 3. The active vibration isolator according to claim 1, wherein the displacement means of each of the vibration isolation mechanisms is separately driven in accordance with the acceleration in the direction. 5. The displacement means includes a small displacement actuator configured to apply a relatively small displacement to the mounting means, and the small displacement actuator has the same displacement direction as the predetermined direction. The active vibration isolator according to any one of claims 1 to 4, wherein the active vibration isolator is disposed between a base portion and the mounting means. 6. The small displacement actuator comprises a solid actuator.
The active type anti-vibration apparatus as described in the above. 7. The active vibration isolator according to claim 6, wherein the solid actuator is a giant magnetostrictive actuator or a piezo actuator. 8. The small displacement actuator has a high accuracy of a generated displacement amount, but a small generated displacement amount, and
8. The active vibration isolator according to claim 5, wherein the displacement amount generated has a high frequency response. 9. The support means has a first support member disposed between the base portion and the mounting means, and the support of the vibration-free body by the support means is performed by the first support member. The active vibration isolator according to any one of claims 1 to 8, wherein the active vibration is removed. 10. The displacement means further comprises a large displacement actuator configured to apply a relatively large displacement to the mounting means, wherein the small displacement actuator and the large displacement actuator have the same displacement in the predetermined direction. The active vibration isolator according to any one of claims 5 to 9, wherein the active vibration isolator is disposed between the base portion and the mounting means so as to have a direction. 11. The active vibration damping device according to claim 10, wherein said large displacement actuator comprises an air actuator or a linear motor. 12. The large displacement actuator according to claim 10, wherein accuracy of the generated displacement amount is low, but the generated displacement amount is large, and frequency response of the generated displacement amount is low. Active vibration isolator. 13. An intermediate frame provided between the base portion and the mounting means and movably provided in the predetermined direction, wherein the small displacement actuator is mounted on the intermediate frame, and the large displacement actuator is mounted on the intermediate frame. The active vibration isolator according to claim 10, 11 or 12, wherein the device is disposed between the intermediate frame and the base portion. 14. The support means has a second support member disposed between the mounting means and the intermediate frame, and the mounting means is supported by the intermediate frame via the second support member. 14. The active vibration isolator according to claim 13, wherein: 15. A position holding means provided between the base and the intermediate frame, wherein the position holding means holds the position of the intermediate frame in the predetermined direction with respect to the base at a predetermined position when no vibration occurs. The active vibration isolator according to claim 13, wherein the active vibration isolator is configured. 16. The active vibration isolator according to claim 15, wherein said position holding means is constituted by an air spring. 17. The intermediate frame is slidably supported in the predetermined direction by the base portion, and a frictional resistance in the predetermined direction generated between the intermediate frame and the base portion is set to a predetermined value. 17. The method according to claim 13, wherein the predetermined value is a value equal to or greater than a maximum force that the small displacement actuator can generate in the predetermined direction.
The active vibration isolator according to any one of claims 1 to 4. 18. The intermediate frame is configured to have a predetermined weight, and the predetermined weight is set by the intermediate frame when the small displacement actuator generates a maximum force that can be generated in the predetermined direction. The active vibration damping device according to any one of claims 13 to 16, wherein the value is set to a value at which an inertial reaction force equal to or greater than a maximum force occurs. 19. The active type according to claim 18, wherein said intermediate frame is movably supported in said predetermined direction by intermediate frame supporting means provided between said intermediate frame and said case. Anti-vibration device. 20. The small displacement actuator is configured to apply a displacement in the predetermined direction to the mounting means via an elastic body, and the elastic body absorbs a shear force acting on the small displacement actuator. The active vibration isolator according to any one of claims 5 to 19, wherein the active vibration isolator is configured. 21. A pre-compression force adjusting means for adjusting a pre-compression force applied to the small displacement actuator in the non-driven state in the displacement direction.
21. The active vibration isolator according to any one of the above items 20 to 20. 22. The active vibration isolator according to claim 1, wherein the predetermined direction is at least one of a vertical direction and a horizontal direction or both. 23. The active type vibration isolator according to claim 1, wherein said support means has an elastic support member for supporting said vibration damped body with respect to said lower structure. Shaker. 24. The active vibration damping device according to claim 24, wherein said elastic support member is constituted by an air spring.