CN217207501U - Active and passive parallel micro-vibration prevention device - Google Patents
Active and passive parallel micro-vibration prevention device Download PDFInfo
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- CN217207501U CN217207501U CN202221072980.2U CN202221072980U CN217207501U CN 217207501 U CN217207501 U CN 217207501U CN 202221072980 U CN202221072980 U CN 202221072980U CN 217207501 U CN217207501 U CN 217207501U
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- 230000002265 prevention Effects 0.000 title claims description 5
- 238000002955 isolation Methods 0.000 claims abstract description 32
- 238000006073 displacement reaction Methods 0.000 claims abstract description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model provides an active passive parallelly connected little device that shakes of preventing, including roof and landing leg, the landing leg is four, the landing leg top is connected with passive vibration isolation device, passive vibration isolation device top is connected with four angle departments of roof bottom respectively, be connected with the entablature between the landing leg upper end, air spring is installed to entablature top intermediate position, the air spring top is connected with the roof bottom, the landing leg lower extreme is connected with the bottom end rail, the bottom end rail is two and connects respectively between two landing legs on left side, right side, be connected with the backup pad between two landing legs of bottom end rail and rear side, install speedtransmitter and displacement sensor on the entablature respectively, install the controller in the backup pad. The utility model discloses system natural frequency can be real to be less than 0.5Hz, has better vibration isolation effect to 0.5Hz ~150Hz vibration interference, and application scope is wider.
Description
Technical Field
The utility model relates to a vibration isolation mounting technical field specifically is an active and passive parallelly connected device that prevents microvibration.
Background
At present, the semiconductor industry is rapidly developed, the precision requirement of semiconductor production equipment is higher and higher, the requirement of the equipment on environments such as micro-vibration is more and more sensitive, a little micro-vibration can reduce the yield of the equipment, and even the equipment can not work normally, so that the isolation of the micro-vibration becomes more and more important.
The micro-vibration caused by the vibration of the external environment and the reaction force inside the equipment is one of the key factors restricting the measurement precision of the ultra-precision instrument and the manufacturing precision of the ultra-precision machining equipment, and the high-performance precise isolation micro-vibration technology becomes a core key technology in the fields of precision engineering, ultra-precision manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration control part is the core of the vibration isolation platform, and passive vibration isolation is mostly adopted for medium-high frequency vibration, and the passive vibration isolation has a simple structure, works reliably, does not depend on a power supply, and can effectively isolate medium-high frequency vibration interference. Aiming at low frequency vibration or even ultra-low frequency vibration, active vibration isolation is adopted mostly, pneumatic active vibration isolation has good adaptivity, low frequency vibration is counteracted through the reverse force output by an actuator, and the pneumatic active vibration isolation has excellent low frequency or ultra-low frequency vibration isolation performance. However, the environment of the precision instrument is complex, not only is single low-frequency vibration or high-frequency vibration, but also often low-frequency vibration and high-frequency vibration exist at the same time, and the traditional pneumatic vibration isolation device is difficult to meet the vibration isolation requirement of the complex environment vibration and has a narrow application range.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an active and passive parallelly connected microvibration prevention device to solve the problem that exists among the above-mentioned background art.
The technical scheme of the utility model is realized like this:
the utility model provides an active passive parallelly connected little device that shakes, includes roof and landing leg, the landing leg is four, the landing leg top is connected with passive vibration isolation device, passive vibration isolation device top is connected with four angles departments of roof bottom respectively, be connected with the entablature between the landing leg upper end, air spring is installed to entablature top intermediate position, the air spring top is connected with the roof bottom, the landing leg lower extreme is connected with the bottom end rail, the bottom end rail is two and connects respectively between two landing legs on left side, right side, be connected with the backup pad between two landing legs of bottom end rail and rear side, install speedtransmitter and displacement sensor on the entablature respectively, install the controller in the backup pad.
Further, the passive vibration isolation device is formed in a rectangular shape by erecting four cylindrical rubber rods.
Further, the top plate is made of a stainless steel plate into a rectangular structure.
Furthermore, the supporting legs are made of square steel pipes, and concrete is poured inside the supporting legs.
Furthermore, the upper cross beam and the lower cross beam are both made of square steel tubes.
Further, the support plate is made of a stainless steel plate into a rectangular structure.
The beneficial effects of the utility model are that:
the utility model discloses a passive vibration isolation mounting that four rubber sticks are constituteed realizes bearing and high frequency vibration isolation to realize the low frequency vibration isolation through air spring, system natural frequency can be actually less than 0.5Hz, and the vibration interference to 0.5Hz ~150Hz has better vibration isolation effect, and application scope is wider.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
In the figure, 1-a top plate, 2-supporting legs, 3-a passive vibration isolation device, 4-an air spring, 5-an upper cross beam, 6-a lower cross beam, 7-a supporting plate, 8-a speed sensor, 9-a displacement sensor and 10-a controller.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1, an active-passive parallel micro-vibration prevention device comprises a top plate 1 and four support legs 2, wherein the support legs 2 are four, the tops of the support legs 2 are connected with passive vibration isolation devices 3, the tops of the passive vibration isolation devices 3 are respectively connected with four corners of the bottom of the top plate 1, an upper cross beam 5 is connected between the upper ends of the support legs 2, an air spring 4 is installed in the middle of the top of the upper cross beam 5, the top of the air spring 4 is connected with the bottom of the top plate 1, the lower ends of the support legs 2 are connected with lower cross beams 6, the lower cross beams 6 are two and are respectively connected between the two support legs 2 on the left side and the right side, a support plate 7 is connected between the lower cross beams 6 and the two support legs 2 on the rear side, a speed sensor 8 and a displacement sensor 9 are respectively installed on the upper cross beam 5, and a controller 10 is installed on the support plate 7.
The passive vibration isolation device 3 is formed by four cylindrical rubber rods vertically in a rectangular shape.
The top plate 1 is made of a stainless steel plate into a rectangular structure.
The supporting legs 2 are made of square steel pipes, and concrete is poured inside the supporting legs 2.
The upper cross beam 5 and the lower cross beam 6 are both made of square steel pipes.
The support plate 7 is made of a stainless steel plate into a rectangular structure.
During operation, a precision instrument is installed on the top plate 1, bearing and high-frequency vibration isolation are achieved through the top plate 1, the supporting legs 2 and the passive vibration isolation devices 3, vibration signals are collected through the speed sensor 8 and the displacement sensor 9, the collected signals are conveyed to the controller 10, the controller 10 controls the air springs 4 to drive, and low-frequency vibration isolation is achieved.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. The utility model provides an active passive parallelly connected little device that shakes of preventing, includes roof and landing leg, its characterized in that, the landing leg is four, the landing leg top is connected with passive vibration isolation device, passive vibration isolation device top is connected with four angles departments of roof bottom respectively, be connected with the entablature between the landing leg upper end, air spring is installed to entablature top intermediate position, the air spring top is connected with the roof bottom, the landing leg lower extreme is connected with the bottom end rail, the bottom end rail is two and connects respectively between two landing legs on left side, right side, be connected with the backup pad between two landing legs of bottom end rail and rear side, install speedtransmitter and displacement sensor on the entablature respectively, install the controller in the backup pad, passive vibration isolation device erects by four cylindrical rubber rods and constitutes the rectangle shape.
2. The active-passive parallel micro-vibration preventing device as claimed in claim 1, wherein the top plate is made of stainless steel plate into a rectangular structure.
3. The active and passive parallel micro-vibration prevention device as claimed in claim 1, wherein the supporting legs are made of square steel pipes, and concrete is poured inside the supporting legs.
4. The active-passive parallel micro-vibration preventing device as claimed in claim 1, wherein the upper and lower beams are made of square steel tubes.
5. The active-passive parallel anti-fretting device of claim 1, wherein the support plate is made of stainless steel plate in a rectangular configuration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221072980.2U CN217207501U (en) | 2022-05-07 | 2022-05-07 | Active and passive parallel micro-vibration prevention device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221072980.2U CN217207501U (en) | 2022-05-07 | 2022-05-07 | Active and passive parallel micro-vibration prevention device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217207501U true CN217207501U (en) | 2022-08-16 |
Family
ID=82778338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221072980.2U Active CN217207501U (en) | 2022-05-07 | 2022-05-07 | Active and passive parallel micro-vibration prevention device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217207501U (en) |
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2022
- 2022-05-07 CN CN202221072980.2U patent/CN217207501U/en active Active
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Address after: 116000 room a434, 4th floor, saibole building, 133 Guangxian Road, high tech Industrial Park, Dalian, Liaoning Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: 116000 room a434, 4th floor, saibole building, 133 Guangxian Road, high tech Industrial Park, Dalian, Liaoning Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |