CN217633642U - Active and passive parallel vibration isolation platform - Google Patents
Active and passive parallel vibration isolation platform Download PDFInfo
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- CN217633642U CN217633642U CN202220222558.4U CN202220222558U CN217633642U CN 217633642 U CN217633642 U CN 217633642U CN 202220222558 U CN202220222558 U CN 202220222558U CN 217633642 U CN217633642 U CN 217633642U
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- vibration isolation
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- bracing piece
- isolation platform
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- 238000002955 isolation Methods 0.000 title claims abstract description 31
- 239000002184 metal Substances 0.000 claims abstract description 20
- 230000008878 coupling Effects 0.000 claims abstract description 3
- 238000010168 coupling process Methods 0.000 claims abstract description 3
- 238000005859 coupling reaction Methods 0.000 claims abstract description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model provides an active and passive parallel vibration isolation platform, including roof, base and support frame, its characterized in that, the support frame rigid coupling is in base top surface both sides, roof below joint support pole A, inside bracing piece A inserted the support frame, bracing piece A lower extreme is connected with the backup pad, the backup pad passes through metal spring A and is connected with the top surface below of support frame, the bottom surface of backup pad is connected with metal spring B, metal spring B sub-unit connection has rubber backing plate, roof bottom surface middle part is connected with bracing piece B, bracing piece B sub-unit connection has air spring, air spring sub-unit connection has additional air chamber, the base top surface is connected with digital controller, the roof bottom surface is connected with position sensor. The utility model discloses simple structure, the vibration isolation bandwidth, the vibration isolation effect is accurate, and the natural frequency of system can be realistic and be less than 0.5Hz.
Description
Technical Field
The utility model relates to a vibration isolation device technical field specifically is an active passive parallel vibration isolation platform.
Background
At present, the semiconductor industry is rapidly developed, the precision requirement of semiconductor production equipment is higher and higher, the requirement of the equipment on environments such as micro-vibration is more and more sensitive, a little micro-vibration can reduce the yield of the equipment, and even the equipment can not work normally, so that the isolation of the micro-vibration becomes more and more important.
The micro-vibration caused by the vibration of the external environment and the reaction force in the equipment is one of the key factors restricting the measurement precision of an ultra-precise instrument and the manufacturing precision of ultra-precise processing equipment, and the high-performance precise micro-vibration isolation technology becomes a key core technology in the fields of precision engineering, ultra-precise manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration control part is the core of the vibration isolation platform, and passive vibration isolation is adopted for medium-high frequency vibration, so that the passive vibration isolation structure is simple, the work is reliable, the power supply is not relied on, and the medium-high frequency vibration interference can be effectively isolated. Aiming at low frequency vibration or even ultra-low frequency vibration, active vibration isolation is adopted mostly, pneumatic active vibration isolation has good adaptivity, low frequency vibration is counteracted through the reverse force output by an actuator, and the pneumatic active vibration isolation has excellent low frequency or ultra-low frequency vibration isolation performance. The environment of the precision instrument is not single high-frequency vibration or low-frequency vibration, but is a complex vibration environment with various frequencies, and the vibration isolation capability of the current platform for single high-frequency or low-frequency vibration is poor for the complex vibration environment.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an active and passive parallel vibration isolation platform to solve the problem that exists among the above-mentioned background art.
The technical scheme of the utility model is realized like this:
the utility model provides an active and passive parallel vibration isolation platform, includes roof, base and support frame, the support frame rigid coupling is in base top surface both sides, roof below joint support pole A, inside bracing piece A inserted the support frame, bracing piece A lower extreme is connected with the backup pad, the backup pad passes through metal spring A and is connected with the top surface below of support frame, the bottom surface of backup pad is connected with metal spring B, metal spring B sub-unit connection has rubber backing plate, roof bottom surface middle part is connected with bracing piece B, bracing piece B sub-unit connection has air spring, the air spring sub-unit connection has additional air chamber, the base top surface is connected with digital controller, the roof bottom surface is connected with position sensor.
Furthermore, the top plate, the base and the supporting plate are all made of stainless steel materials and are all rectangular in structure.
Further, the support frame is made of a stainless steel plate into a cuboid with a hollow structure.
Further, the number of the support rods a is four, and the four support rods a are respectively arranged at four corners below the top plate, two support rods a on the left side are inserted into the support frame on the left side, and the support rods a on the right side are inserted into the support frame on the right side.
Furthermore, the number of the metal springs A is four, and the four metal springs A are respectively connected to four corners of the supporting plate.
Further, the digital controller is connected to the position sensor and the additional air chamber through a cable.
The utility model has the advantages that:
the utility model adopts the arrangement of the upper and lower double-layer springs and the left and right systems, and forms a parallel system structure with the active air spring, thereby realizing the accurate vibration isolation effect in the vertical direction, realizing the high-frequency vibration isolation by utilizing the metal spring and the rubber cushion plate, reducing the energy consumption of the air spring during the high-frequency vibration, and simultaneously obtaining a wider vibration isolation belt; the utility model discloses simple structure, the vibration isolation bandwidth, the vibration isolation effect is accurate, and system natural frequency can be realistic and be less than 0.5Hz.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
In the figure, 1-a top plate, 2-a base, 3-a support frame, 4-a support rod A, 5-a support plate, 6-a metal spring A, 7-a metal spring B, 8-a rubber cushion plate, 9-a support rod B, 10-an air spring, 11-an additional air chamber and 12-a position sensor A, 13-a digital controller.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
As shown in fig. 1, an active and passive parallel vibration isolation platform comprises a top plate 1, a base 2 and a support frame 3, wherein the support frame 3 is fixedly connected to two sides of the top surface of the base 2, a support rod A4 is connected to the lower portion of the top plate 1, the support rod A4 is inserted into the support frame 3, a support plate 5 is connected to the lower end of the support rod A4, the support plate 5 is connected to the lower portion of the top surface of the support frame 3 through a metal spring A6, a metal spring B7 is connected to the bottom surface of the support plate 5, a rubber base plate 8 is connected to the lower portion of the metal spring B7, the middle portion of the bottom surface of the top plate 1 is connected to a support rod B9, an air spring 10 is connected to the lower portion of the support rod B9, an additional air chamber 11 is connected to the lower portion of the air spring 10, a digital controller 13 is connected to the top surface of the base 2, and a position sensor 12 is connected to the bottom surface of the top plate 1.
Roof 1, base 2, backup pad 5 are made by stainless steel, all are the rectangle structure.
The support frame 3 is a cuboid with a hollow structure made of stainless steel plates.
The number of the support rods A4 is four, the four support rods A4 are respectively arranged at four corners below the top plate 1, the two support rods A4 at the left side are inserted into the support frame 3 at the left side, and the support rods A4 at the right side are inserted into the support frame 3 at the right side.
The number of the metal springs A6 is four, and the four metal springs A6 are respectively connected to four corners of the supporting plate 5.
The digital controller 13 is connected to the position sensor 12 and the additional air chamber 11 by a cable.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides an active and passive parallel vibration isolation platform, includes roof, base and support frame, its characterized in that, the support frame rigid coupling is in base top surface both sides, roof below joint support pole A, inside bracing piece A inserted the support frame, bracing piece A lower extreme is connected with the backup pad, the backup pad passes through metal spring A and is connected with the top surface below of support frame, the bottom surface of backup pad is connected with metal spring B, metal spring B sub-unit connection has the rubber backing plate, roof bottom surface middle part is connected with bracing piece B, bracing piece B sub-unit connection has air spring, the air spring sub-unit connection has additional air chamber, the base top surface is connected with digital controller, the roof bottom surface is connected with position sensor.
2. An active and passive parallel vibration isolation platform according to claim 1, wherein the top plate, the base and the supporting plate are made of stainless steel and have a rectangular structure.
3. An active and passive parallel vibration isolation platform according to claim 1, wherein the support frame is made of stainless steel plate into a rectangular parallelepiped with a hollow structure.
4. An active and passive parallel vibration isolation platform according to claim 1, wherein four support rods a are arranged at four corners under the top plate, two support rods a at the left side are inserted into the support frame at the left side, and the support rods a at the right side are inserted into the support frame at the right side.
5. An active and passive parallel vibration isolation platform according to claim 1, wherein four metal springs A are respectively connected to four corners of the supporting plate.
6. An active and passive parallel vibration isolation platform according to claim 1, wherein the digital controller is respectively connected with the position sensor and the additional air chamber through cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220222558.4U CN217633642U (en) | 2022-01-27 | 2022-01-27 | Active and passive parallel vibration isolation platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220222558.4U CN217633642U (en) | 2022-01-27 | 2022-01-27 | Active and passive parallel vibration isolation platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217633642U true CN217633642U (en) | 2022-10-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220222558.4U Active CN217633642U (en) | 2022-01-27 | 2022-01-27 | Active and passive parallel vibration isolation platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217633642U (en) |
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2022
- 2022-01-27 CN CN202220222558.4U patent/CN217633642U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 116000 room a434, 4th floor, saibole building, 133 Guangxian Road, high tech Industrial Park, Dalian, Liaoning Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: 116000 room a434, 4th floor, saibole building, 133 Guangxian Road, high tech Industrial Park, Dalian, Liaoning Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |