CN216821810U - Electronic cigarette MEMS airflow sensor with oil-proof structure - Google Patents
Electronic cigarette MEMS airflow sensor with oil-proof structure Download PDFInfo
- Publication number
- CN216821810U CN216821810U CN202122953046.3U CN202122953046U CN216821810U CN 216821810 U CN216821810 U CN 216821810U CN 202122953046 U CN202122953046 U CN 202122953046U CN 216821810 U CN216821810 U CN 216821810U
- Authority
- CN
- China
- Prior art keywords
- mems
- sensor
- electronic cigarette
- oil
- upper cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000003571 electronic cigarette Substances 0.000 title claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 235000019504 cigarettes Nutrition 0.000 claims description 17
- 239000003292 glue Substances 0.000 claims description 10
- 239000004519 grease Substances 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 230000000391 smoking effect Effects 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 239000000779 smoke Substances 0.000 abstract description 4
- 241000208125 Nicotiana Species 0.000 description 5
- 235000002637 Nicotiana tabacum Nutrition 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 235000019615 sensations Nutrition 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Landscapes
- Micromachines (AREA)
Abstract
The utility model relates to the technical field of MEMS sensors, and particularly discloses an electronic cigarette MEMS airflow sensor with an oil-proof structure, which comprises a PCB substrate and an upper cover plate, wherein the PCB substrate and the upper cover plate are connected through a hollow frame body to form a middle cavity capable of accommodating an MEMS sensor and an ASIC chip, the upper cover plate is provided with an air inlet, the bottom of the upper cover plate is provided with a waterproof and oil-proof breathable film, the PCB substrate is provided with PCB air vents, and the MEMS sensor and the PCB substrate are electrically connected with the ASIC chip through signal lines. The electronic cigarette smoke can be effectively prevented from entering the sensor cavity through the air inlet and further being adsorbed on the MEMS sensor, so that the MEMS sensor in the sensor is well protected, and the problems of sensitivity reduction (smoking suction needs to be large), false triggering and even failure of an electronic cigarette product after the electronic cigarette product is used for a period of time are solved.
Description
Technical Field
The utility model relates to the technical field of MEMS sensors, in particular to an electronic cigarette MEMS airflow sensor with an oil-proof structure.
Background
The electronic cigarette is an electronic product simulating a cigarette, and has the same appearance, smoke, taste and sensation as the cigarette. It is mainly used for stopping smoking and substituting cigarette. It has the same appearance and taste as cigarette, even has more taste than common cigarette, and can suck cigarette and taste like cigarette. The electronic cigarette has no tar, suspended particles and other harmful components in the cigarette. The electronic cigarette MEMS airflow sensor is an important component installed in an electronic cigarette product for controlling the electronic cigarette to work.
The MEMS airflow sensor of the existing electronic cigarette has the main structure that an MEMS sensor capable of sensing airflow change and an ASIC chip for signal processing are packaged in a cavity consisting of a PCB substrate and a metal shell with air holes.
At present electron cigarette MEMS airflow sensor in the use tobacco tar pass through the inlet port easily and enter into sensor cavity inside, adsorb on the MEMS sensor, can appear sensitivity to reduce (smoking suction need increase), the risk of false triggering or even inefficacy after the tobacco tar on the MEMS sensor accumulates to the certain degree in the time.
Disclosure of Invention
Aiming at the defects in the prior art, the utility model provides the electronic cigarette MEMS airflow sensor with the oil-proof structure, the water-proof and oil-proof breathable film can effectively prevent electronic cigarette smoke from entering the sensor cavity through the air inlet, and the MEMS sensor in the sensor cavity is well protected.
The utility model provides an electronic cigarette MEMS airflow sensor with an oil-proof structure, which comprises a PCB substrate and an upper cover plate, wherein the PCB substrate and the upper cover plate are connected through a hollow frame body to form a middle cavity capable of accommodating an MEMS sensor and an ASIC chip, the upper cover plate is provided with an air inlet, the bottom of the upper cover plate is provided with a waterproof and oil-proof breathable film, the PCB substrate is provided with PCB air vents, and the MEMS sensor and the PCB substrate are electrically connected with the ASIC chip through signal lines.
Furthermore, the signal line is a gold wire or an alloy wire.
Further, the hollow frame body is a square frame with a closed circumferential direction.
Further, the bottom of the upper cover plate is bonded with the waterproof and oil-proof breathable film through glue.
Further, the MEMS sensor and the ASIC chip are fixed on the PCB substrate through glue bonding.
The electronic cigarette MEMS airflow sensor with the oil-proof structure provided by the utility model has the following advantages: inside waterproof grease proofing ventilated membrane can effectually prevent the electron cigarette tobacco tar to enter into the sensor cavity through the inlet port, and then adsorb on the MEMS sensor, play a fine guard action to the inside MEMS sensor of sensor, and then avoided the electron cigarette product to appear sensitivity after using a period and reduce (smoking suction needs very big), the false triggering, even the problem that became invalid.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model and not to limit the utility model.
Fig. 1 is a cross-sectional view of an electronic cigarette MEMS airflow sensor with an oil-proof structure according to the present invention.
Fig. 2 is a top view of the hollow frame provided by the present invention.
Description of reference numerals: 1-waterproof and oil-proof breathable film; 2-air inlet holes; 3-a signal line; 4-upper cover plate; 5-PCB air holes; 6-MEMS sensor; 7-an ASIC chip; 8-a hollow frame body; 9-PCB substrate.
Detailed Description
To further illustrate the technical means and effects of the present invention for achieving the intended purpose of the present invention, the following detailed description will be given to the specific embodiments, structures, features and effects of the MEMS airflow sensor with oil-proof structure according to the present invention with reference to the accompanying drawings and preferred embodiments. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without any inventive step, are within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged as appropriate in order to facilitate the embodiments of the utility model described herein. Moreover, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In the explanation of the present invention, it should be noted that the terms "mounted," "connected," and "connected" should be construed broadly unless otherwise indicated. For example, the connection may be a fixed connection, a connection through a special interface, or an indirect connection via an intermediate medium. The specific meanings of the above terms in the present invention can be understood in a specific case to those of ordinary skill in the art.
The utility model provides an electron cigarette MEMS airflow sensor with grease proofing structure in this embodiment, as shown in fig. 1-2, electron cigarette MEMS airflow sensor with grease proofing structure, including PCB base plate 9 and upper cover plate 4, connect into the middle cavity that can hold MEMS sensor 6 and ASIC chip 7 through cavity framework 8 between PCB base plate 9 and the upper cover plate 4, inlet port 2 has been seted up on the upper cover plate 4, the bottom of upper cover plate 4 is equipped with waterproof grease proofing ventilated membrane 1, PCB bleeder vent 5 has been seted up on the PCB base plate 9, MEMS sensor 6 and PCB base plate 9 all through signal line 3 with ASIC chip 7 electricity is connected.
Preferably, the signal line 3 is a gold wire or an alloy wire.
Preferably, the hollow frame 8 is a square frame with a certain height and a closed circumference.
Preferably, the bottom of the upper cover plate 4 is bonded with the waterproof and oil-proof breathable film 1 through glue.
Preferably, the MEMS sensor 6 and the ASIC chip 7 are fixed on the PCB substrate 9 by glue bonding.
Specifically, the upper cover plate 4 with the waterproof and oilproof air-permeable membrane 1, the hollow frame 8 and the PCB substrate 9 form a shell structure.
The working principle of the electronic cigarette MEMS airflow sensor with the oil-proof structure provided by the utility model is as follows: the electronic cigarette MEMS airflow sensor is generally installed in an electronic cigarette airflow channel, in a smoking state, airflow enters an air inlet 2 through the airflow channel and acts on a vibrating diaphragm of the MEMS sensor 6 through the waterproof and oil-proof air-permeable film 1, the vibrating diaphragm deforms to generate capacitance change, the capacitance change is output to an ASIC chip 7 through a signal line 3, the ASIC chip 7 converts the change into a control signal, and the electronic cigarette atomizer is controlled to work to generate smoke; inside waterproof grease proofing ventilated membrane 1 can effectually prevent the electron cigarette tobacco tar to enter into the sensor cavity through inlet port 2, and then adsorb on MEMS sensor 6, play a fine guard action to the inside MEMS sensor 6 of sensor cavity.
The utility model also discloses a manufacturing method of the electronic cigarette MEMS airflow sensor with the oil-proof structure, which comprises the following steps of:
s1: uniformly coating the bottom of the upper cover plate 4 (with the air inlet hole 2) with bonding glue by using glue dispensing equipment;
s2: the waterproof and oilproof breathable film 1 is smoothly adhered to the bottom of the upper cover plate 4, so that good sealing is ensured;
s3: the ASIC chip 7 is fixed on the PCB substrate 9 (with the PCB vent holes 5) by dispensing ASIC glue by using Die bond equipment;
s4: the MEMS sensor 6 is fixed on the PCB substrate 9 after MEMS glue is scribed on the periphery of the Die bond equipment;
s5: the ASIC chip 7, the MEMS sensor 6 and the PCB substrate 9 are electrically connected by a signal wire 3 through wire bond equipment;
s6: uniformly coating adhesive glue on the periphery of the upper surface of the PCB substrate 9 and the periphery of the upper surface of the hollow frame body 8 by using glue dispensing equipment;
s7: the upper cover plate 4, the hollow frame body 8 and the PCB substrate 9 which are adhered with the waterproof and oil-proof air-permeable film 1 are pressed together through a pressing jig to form a complete electronic cigarette MEMS airflow sensor with an oil-proof structure.
The production process of the electronic cigarette MEMS airflow sensor with the oil-proof structure can be finished by a mature three-layer stacking process in the existing semiconductor packaging process, the electronic cigarette MEMS airflow sensor with the oil-proof structure can be packaged by using a makeup full-page pasting water-proof and oil-proof breathable film 1 and then cut into individual electronic cigarette MEMS airflow sensors with the oil-proof structure, and the production process is simple and low in cost.
According to the electronic cigarette MEMS airflow sensor with the oil-proof structure, a metal shell used in the prior art is changed into a shell structure consisting of an upper cover plate 4, a water-proof and oil-proof breathable film 1 and a hollow frame body 8; inside waterproof and oilproof ventilated membrane 1 can effectually prevent the electron cigarette tobacco tar to enter into the sensor cavity through inlet port 2, adsorb on MEMS sensor 6, play a fine guard action to the inside MEMS sensor 6 of sensor cavity, and then avoided the electron cigarette product to appear sensitivity after using a period and reduce (smoking suction needs very big), the problem of spurious triggering, even inefficacy.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the utility model as defined by the appended claims.
Claims (5)
1. The utility model provides an electron cigarette MEMS airflow sensor with grease proofing structure, its characterized in that, includes PCB base plate (9) and upper cover plate (4), connect into the middle cavity that can hold MEMS sensor (6) and ASIC chip (7) through cavity framework (8) between PCB base plate (9) and upper cover plate (4), inlet port (2) have been seted up on upper cover plate (4), the bottom of upper cover plate (4) is equipped with waterproof grease proofing ventilated membrane (1), PCB bleeder vent (5) have been seted up on PCB base plate (9), MEMS sensor (6) and PCB base plate (9) all through signal line (3) with ASIC chip (7) electricity is connected.
2. The electronic cigarette MEMS airflow sensor with the oil-proof structure as claimed in claim 1, characterized in that the signal line (3) is a gold wire or an alloy wire.
3. The electronic cigarette MEMS air flow sensor with the oil-proof structure as claimed in claim 1, wherein the hollow frame body (8) is a square frame with a closed circumference.
4. The electronic cigarette MEMS air flow sensor with the oil-proof structure as claimed in claim 1, wherein the bottom of the upper cover plate (4) is adhered with the water-proof and oil-proof air permeable membrane (1) by glue.
5. The electronic cigarette MEMS airflow sensor with oil-proof structure as claimed in claim 1 is characterized in that the MEMS sensor (6) and the ASIC chip (7) are fixed on the PCB substrate (9) by glue adhesion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122953046.3U CN216821810U (en) | 2021-11-29 | 2021-11-29 | Electronic cigarette MEMS airflow sensor with oil-proof structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122953046.3U CN216821810U (en) | 2021-11-29 | 2021-11-29 | Electronic cigarette MEMS airflow sensor with oil-proof structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216821810U true CN216821810U (en) | 2022-06-28 |
Family
ID=82105089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122953046.3U Active CN216821810U (en) | 2021-11-29 | 2021-11-29 | Electronic cigarette MEMS airflow sensor with oil-proof structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216821810U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024207151A1 (en) * | 2023-04-03 | 2024-10-10 | 瑞声声学科技(深圳)有限公司 | Electronic cigarette |
-
2021
- 2021-11-29 CN CN202122953046.3U patent/CN216821810U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024207151A1 (en) * | 2023-04-03 | 2024-10-10 | 瑞声声学科技(深圳)有限公司 | Electronic cigarette |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104249990B (en) | MEMS device and its manufacturing process comprising fluid path | |
| WO2022227672A1 (en) | Bone voiceprint sensor and manufacturing method therefor, and electronic device | |
| CN101815235B (en) | Miniature MEMS condenser microphone packages and fabrication method thereof | |
| CN216821810U (en) | Electronic cigarette MEMS airflow sensor with oil-proof structure | |
| US6781231B2 (en) | Microelectromechanical system package with environmental and interference shield | |
| CN102131139B (en) | Microphone package of micro-electro-mechanical system and manufacturing method thereof | |
| CN216723156U (en) | Waterproof and oil-proof electronic cigarette MEMS airflow sensor | |
| CN210641073U (en) | Bone voiceprint sensor and electronic equipment | |
| US20090057876A1 (en) | Stacked package structure for reducing package volume of an acoustic micro-sensor | |
| CN102214665A (en) | Wafer level image sensor packaging structure and manufacturing method of the same | |
| US20130228937A1 (en) | Micromechanical Sound Transducer Arrangement and a Corresponding Production Method | |
| CN211091902U (en) | Electronic cigarette product applying integrated sensing and controller | |
| CN203238029U (en) | MEMS element provided with structure reducing packaging stress | |
| CN112075672A (en) | Sensing device and electronic cigarette | |
| CN209526835U (en) | A kind of encapsulating structure of microphone and environmental sensor | |
| CN209117240U (en) | A kind of airflow sensing sensor | |
| CN209105453U (en) | MEMS microphone and electronic equipment | |
| CN114098171A (en) | Electronic smoke gas flow sensing chip and electronic cigarette | |
| CN206940423U (en) | A kind of encapsulating structure of chip | |
| CN211205617U (en) | Airflow detection sensor and electronic equipment | |
| CN205616568U (en) | Packaging structure of integrated sensor | |
| CN204180270U (en) | A kind of MEMS silicon microphone of small size high sensitivity high s/n ratio | |
| CN206302569U (en) | The integrating device of MEMS microphone and environmental sensor | |
| CN206940424U (en) | A kind of encapsulating structure of chip | |
| CN212414754U (en) | Sensing device and electronic cigarette |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240511 Address after: 214135 China Sensor Network International Innovation Park F2, 200 Linghu Avenue, Xinwu District, Wuxi City, Jiangsu Province Patentee after: SV SENSTECH (WUXI) CO.,LTD. Country or region after: China Address before: 214131 F2, China Sensor Network International Innovation Park, 200 Linghu Avenue, Xinwu District, Wuxi City, Jiangsu Province Patentee before: Huajing Technology Wuxi Co.,Ltd. Country or region before: China |
|
| TR01 | Transfer of patent right |