CN212414754U

CN212414754U - Sensing device and electronic cigarette

Info

Publication number: CN212414754U
Application number: CN202022196029.5U
Authority: CN
Inventors: 吕萍; 李刚
Original assignee: Memsensing Microsystems Suzhou China Co Ltd
Current assignee: Memsensing Microsystems Suzhou China Co Ltd
Priority date: 2020-09-30
Filing date: 2020-09-30
Publication date: 2021-01-29
Anticipated expiration: 2030-09-30

Abstract

The application discloses sensing device and electron cigarette, this sensing device are used for detecting the inside air current of air current passageway, and sensing device includes the micro electromechanical structure, and the micro electromechanical structure includes: a vibrating membrane; and the back plate is arranged opposite to the vibrating membrane to form a capacitor, the back plate is provided with at least one through hole, a gap is formed between the back plate and the vibrating membrane, the first surface of the vibrating membrane is communicated with the inside of the airflow channel, the second surface of the vibrating membrane is communicated with the external atmosphere through the gap, the vibrating membrane blocks the communication between the inside of the airflow channel and the gap, the vibrating membrane deforms under the action of the pressure difference between the first surface and the second surface, and the change of the capacitance value of the capacitor at least represents the gas flow speed in the airflow channel.

Description

Sensing device and electronic cigarette

Technical Field

The present application relates to the field of semiconductor device manufacturing, and more particularly, to a sensing device and an electronic cigarette.

Background

The electronic cigarette is an electronic product simulating a cigarette, and has the same appearance, smoke, taste and sensation as the cigarette. It is a product which is absorbed by users after nicotine and the like are changed into steam by means of atomization and the like. The electronic cigarette sensor serves as a key part of the electronic cigarette and is used for detecting smoking actions of a user.

Currently, there are two sensing methods for the electronic cigarette sensor that are popular in the market: capacitive microphone sensing and dual pressure sensor sensing. A condenser microphone is an energy conversion device for converting a sound signal into an electrical signal, and an electret microphone is usually used for sound-electricity conversion. When a user smokes, the capacitance between the diaphragm of the electret microphone and the metal back plate changes, so that the inhalation action of the user is responded. However, the capacitance between the electret membrane and the metal plate is relatively small, and is generally dozens of picofarads. Thus, its output impedance value is high, about several tens of mega ohms or more. The high impedance can not be used directly, so a junction field effect transistor is connected in the microphone for impedance conversion. The traditional electret microphone can only realize the switching action, and is sensitive to temperature and mechanical vibration, weak in anti-interference capability and short in service life.

The other electronic cigarette with the double pressure sensors adopts two absolute pressure chips, one is used for detecting atmospheric pressure, and the other is used for detecting air pressure of an air suction channel. And the reference atmospheric pressure is combined to judge the pressure change amount in the air suction channel, thereby triggering the response action. The use of two air pressure sensors results in increased cost of the electronic device; the two air pressure sensors occupy the space and greatly influence the miniaturization design of the product; moreover, the two air pressure sensors have strong mutual dependency, and the damage of any one of the two air pressure sensors can cause the failure of the whole product, so that the failure risk of the electronic equipment is large.

Therefore, it is desirable to provide a sensor device with simple structure, high reliability and long service life to improve the performance of the product.

SUMMERY OF THE UTILITY MODEL

In view of this, the utility model provides an improved sensing device and electron cigarette forms variable capacitance through vibrating diaphragm and backplate to obtain the gas velocity of flow in the airflow channel through the change of capacitance value, thereby simplified sensing device's structure, and improved the reliability.

According to the utility model discloses an aspect provides a sensing device, include: for detecting an internal gas flow of a gas flow channel, the sensing device comprising a microelectromechanical structure, the microelectromechanical structure comprising: a vibrating membrane; and the back plate is arranged opposite to the vibrating membrane to form a capacitor, the back plate is provided with at least one through hole, a gap is formed between the back plate and the vibrating membrane, the first surface of the vibrating membrane is communicated with the inside of the airflow channel, the second surface of the vibrating membrane is communicated with the outside atmosphere through the gap, the vibrating membrane blocks the inside of the airflow channel from being communicated with the gap, the vibrating membrane deforms under the action of the air pressure difference between the first surface and the second surface, and the capacitance value change of the capacitor at least represents the gas flow velocity in the airflow channel.

Optionally, the method further comprises: a chip structure electrically connected with the micro-electromechanical structure; and the packaging structure comprises a packaging shell and a substrate and is used for forming a first containing cavity, the micro-electromechanical structure and the chip structure are positioned in the first containing cavity and fixed on the substrate, wherein the packaging structure is provided with a first air hole and a second air hole, the first air hole is respectively communicated with the first surface of the vibrating membrane and the inside of the air flow channel, and the second air hole is respectively communicated with the gap and the external atmosphere.

Optionally, the display device further comprises an indicator light fixed on the substrate and electrically connected to the substrate, wherein the indicator light provides an indicating light when the capacitance value of the capacitor reaches a preset value.

According to the utility model discloses an on the other hand of the embodiment provides an electron cigarette, including sensing device and cigarette pole, sensing device is used for detecting the inside air current of air current passageway, sensing device includes the micro-electromechanical structure, the cigarette pole has the air current passageway, the micro-electromechanical structure includes: a vibrating membrane; and the back plate is arranged opposite to the vibrating membrane to form a capacitor, the back plate is provided with at least one through hole, a gap is formed between the back plate and the vibrating membrane, the first surface of the vibrating membrane is communicated with the inside of the airflow channel, the second surface of the vibrating membrane is communicated with the outside atmosphere through the gap, the vibrating membrane blocks the inside of the airflow channel from being communicated with the gap, the vibrating membrane deforms under the action of the air pressure difference between the first surface and the second surface, and the capacitance value change of the capacitor at least represents the gas flow velocity in the airflow channel.

Optionally, the sensing device further comprises: a chip structure electrically connected with the micro-electromechanical structure; and the packaging structure comprises a packaging shell and a substrate and is used for forming a first containing cavity, the micro-electromechanical structure and the chip structure are positioned in the first containing cavity and fixed on the substrate, wherein the packaging structure is provided with a first air hole and a second air hole, the first air hole is respectively communicated with the first surface of the vibrating membrane and the inside of the air flow channel, and the second air hole is respectively communicated with the gap and the external atmosphere.

Optionally, the cigarette rod further has a second accommodating cavity, and the sensing device is located in the second accommodating cavity.

Optionally, the tobacco rod comprises: an air suction pipe, the interior of which serves as the air flow passage; and the isolating piece is positioned outside the air suction pipe and surrounds the pipe wall of the air suction pipe to form the second accommodating cavity.

Optionally, a pipe wall of the air suction pipe has a first opening, the spacer has a second opening, the first opening communicates the interior of the air suction pipe with the first surface of the diaphragm, and the second opening communicates the external atmosphere with the gap.

Optionally, the substrate is located on the spacer, the package housing is fastened to the substrate, the diaphragm is farther away from the substrate relative to the back plate, the first air hole penetrates through the package housing and communicates with the first opening, and the second air hole penetrates through the substrate and communicates with the second opening.

Optionally, the sensing device further includes an indicator light electrically connected to the substrate, the indicator light and the micro-electromechanical structure are located on different sides of the substrate, wherein the indicator light provides corresponding indication light through a light-transmitting area on the spacer when the capacitance value of the capacitor reaches a preset value.

Optionally, the substrate is located on a tube wall of the air suction tube, the package housing is fastened to the substrate, the diaphragm is closer to the substrate than the back plate, the first air hole penetrates through the substrate and communicates with the first opening, and the second air hole penetrates through the package housing and communicates with the second opening.

Optionally, a pipe wall of the air suction pipe is further provided with a third opening, and the third opening is communicated with the inside of the air suction pipe and the second accommodating cavity.

Optionally, the sensing device further includes an indicator light electrically connected to the substrate, the indicator light and the micro-electromechanical structure are located on the same side of the substrate, wherein the indicator light provides corresponding indicator light through a light-transmitting area on the spacer when the capacitance value of the capacitor reaches a preset value.

Optionally, the indicator light is located in the first accommodating cavity, and the package housing is a transparent package housing.

Optionally, the material of the package housing includes a metal, and the chip structure and the package housing are electrically connected through the substrate.

Optionally, the power control device further comprises a control module and an atomizer, wherein the control module is electrically connected with the sensing device and the atomizer respectively, and is used for controlling the power of the atomizer according to the capacitance value change of the capacitor.

The embodiment of the utility model provides a sensing device includes the micro-electromechanical structure, and its backplate and vibrating diaphragm set up relatively in order to form electric capacity, and atmospheric pressure in the airflow channel acts on one side of vibrating diaphragm, and outside atmospheric pressure acts on the opposite side of vibrating diaphragm through the gas pocket and the clearance of backplate, and there is the atmospheric pressure difference in the vibrating diaphragm both sides under the condition, and the vibrating diaphragm takes place deformation, and the appearance value of electric capacity changes the gas flow rate in the at least sign airflow channel.

The embodiment of the utility model provides a gas flow rate in the airflow channel just can be represented to the appearance value change through variable capacitance only, and this variable capacitance is realized by a simple structure's micro-electromechanical structure, compares two pressure sensor among the prior art, and the cost is not only reduced is favorable to the miniaturization of product, can not have the product inefficacy problem that leads to because two baroceptor interdependencies are strong moreover.

The embodiment of the utility model provides an in, utilize the vibrating diaphragm to separate the inside of air current passageway and the intercommunication between the clearance, mean that there is not through-hole isotructure on the vibrating diaphragm of intercommunication air current passageway, and then has prevented to cause backplate and vibrating diaphragm to glue the problem glutinous, the short circuit in getting into the clearance because of the pollutant in the air current passageway.

The embodiment of the utility model provides an in, opening and closing of pilot lamp can let the user know whether variable capacitance's appearance value has reached the default.

The embodiment of the utility model provides an in, utilize the inside of breathing pipe as airflow channel to surround through the pipe wall of separator and breathing pipe and constitute the second holding chamber that is used for placing sensing device, not only utilized the pipe wall of breathing pipe to save the material of separator, with airflow channel and the adjacent setting in second holding chamber in addition, reduced airflow channel and the diaphragm first surface between the airflow path.

The embodiment of the utility model provides an in, set up to the metal through the material with the encapsulation shell to be connected encapsulation shell and base plate electricity, increased the radiating efficiency of chip architecture, thereby promote the performance when sensing device is applied to the electron cigarette.

Therefore, the utility model provides a sensing device can improve the performance of product with the electron cigarette greatly.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings of the embodiments will be briefly introduced below, and it is apparent that the drawings in the following description only relate to some embodiments of the present application and are not limiting on the present application.

Fig. 1 shows a schematic structural diagram of an electronic cigarette according to a first embodiment of the present invention.

Fig. 2a to 2c show schematic structural views of the sensing device of fig. 1.

Fig. 3 shows a schematic view of the microelectromechanical structure of fig. 2a to 2 c.

Figure 4 shows a schematic view of the structure of the tobacco rod of figure 1.

Fig. 5 shows a schematic structural diagram of an electronic cigarette according to a second embodiment of the present invention.

Fig. 6a and 6b show schematic structural views of the sensing device in fig. 5.

Fig. 7 shows a schematic view of the microelectromechanical structure of fig. 6a and 6 b.

Figure 8 shows a schematic view of the structure of the tobacco rod of figure 5.

Detailed Description

The invention will be described in more detail below with reference to the accompanying drawings. Like elements in the various figures are denoted by like reference numerals. For purposes of clarity, the various features in the drawings are not necessarily drawn to scale. In addition, certain well known components may not be shown. For simplicity, the semiconductor structure obtained after several steps can be described in one figure.

It will be understood that when a layer or region is referred to as being "on" or "over" another layer or region in describing the structure of the device, it can be directly on the other layer or region or intervening layers or regions may also be present. And, if the device is turned over, that layer, region, or regions would be "under" or "beneath" another layer, region, or regions.

If for the purpose of describing the situation directly on another layer, another area, the expressions "directly on … …" or "on … … and adjacent thereto" will be used herein.

Numerous specific details of the invention, such as structure, materials, dimensions, processing techniques and techniques of the devices are described below in order to provide a more thorough understanding of the invention. However, as will be understood by those skilled in the art, the present invention may be practiced without these specific details.

The present invention may be presented in a variety of forms, some of which are described below.

Fig. 1 shows a schematic structural diagram of an electronic cigarette according to a first embodiment of the present invention, fig. 2a to 2c show a schematic structural diagram of a sensing device in fig. 1, fig. 3 shows a schematic structural diagram of a micro-electromechanical structure in fig. 2a to 2c, and fig. 4 shows a schematic structural diagram of a smoke rod in fig. 1.

As shown in fig. 1, the electronic cigarette according to the first embodiment of the present invention includes: a sensing device 100, a tobacco rod 200, a nebulizer (not shown), and a control device (not shown). The sensing device 100 is used for detecting the internal airflow of the airflow channel of the electronic cigarette, and the control device is respectively electrically connected with the atomizer and the sensing device 100 and used for controlling the power of the atomizer according to the detection result of the sensing device 100.

As shown in fig. 2a, in some specific embodiments, the sensing device 100 includes: a micro-electromechanical structure 110, a chip structure 120, and a package structure 130. The micro-electromechanical structure 110 is electrically connected to the chip structure 120 through the binding line, and the chip structure 120 can perform filtering, amplifying and the like on the electrical signal from the micro-electromechanical structure 110. The package structure 130 includes a substrate 131 and a package housing 132, the substrate 131 is fixedly connected to the package housing 132 to form a first receiving cavity 1303, and the micro-electromechanical structure 110 and the chip structure 120 are located in the first receiving cavity 1303 and fixed on the substrate 131.

In this embodiment, the package structure 130 has a first air hole 1301 and a second air hole 1302, the first air hole 1301 passes through the package housing 132, and the second air hole 1302 passes through the substrate 131 and corresponds to the position of the micro-electromechanical structure 110. The substrate 131 includes a first substrate 131a and a second substrate 131b, the package housing 132 is fastened to the first substrate 131a to form a first receiving cavity 1303, and the first substrate 131a is soldered to the second substrate 131 b. The micro-electromechanical structure 100 and the chip structure 200 are fixed on the first substrate 131a by die bonding glue. In some preferred embodiments, the first substrate 131a has RCL circuits, which can filter input and/or output signals of the chip structure 200, thereby improving the sensitivity of the sensor.

The sensing device 100 further includes an input terminal 151, an output terminal 152, and a ground terminal 153 on the second substrate 131b, wherein the input terminal 151, the output terminal 152, and the ground terminal 153 are all disposable bonding wires that can be soldered to the circuit of the control module. The sensing device 100 further includes an indicator light 140, located on a different side of the substrate 130 from the sensing device 100, fixed on the second substrate 131b and electrically connected to the second substrate 131 b.

As shown in fig. 2b, in other specific embodiments, the package housing 132 is a metal housing, the first substrate 131a has a copper-clad region 160 on a surface thereof, and the package housing 132 and the chip structure 200 are bonded to the copper-clad region 160 through a silver paste or a solder paste, so that the substrate of the chip structure 200 is electrically connected to the metal housing, thereby increasing the heat dissipation efficiency of the chip structure 200, and improving the performance of the sensing device 100 when applied to an electronic cigarette.

In other embodiments, as shown in fig. 2c, chip structure 120 is a package, and the chip that has been subjected to the packaging step is packaged by, for example, a Flip-chip package. The chip structure 120 is electrically connected to the first substrate 131a through a solder bump 121(solder bump). The chip structure 120 of the package is power tolerant and small in size, thereby increasing sensing device performance and reducing overall size. However, the embodiments of the present invention are not limited thereto, and those skilled in the art can perform other arrangements on the package form of the chip structure 120 as required, for example, an SMT surface mount package, a dual in-line package, and the like.

As shown in fig. 3, the mems structure 110 includes a diaphragm 111 and a back plate 112, and the diaphragm 111 and the back plate 112 are disposed opposite to each other to form a capacitor. Wherein, the back plate 112 has at least one through hole 103, and a gap 104 is provided between the back plate 112 and the vibration film 111. The diaphragm 111 has opposing first and second surfaces 10 and 20. In the present embodiment, the diaphragm 111 does not have any through-hole structure.

The microelectromechanical structure 110 also includes a substrate 101 and a support structure 105. The substrate 101 has a cavity 102, a backplate 112 is located on the substrate 101, and the cavity 102 communicates with the gap 104 via a through hole 103. The support structure 105 is located between the diaphragm 111 and the backplate 112. In the sensing device 100, the substrate 101 surrounds the second air hole 1302 on the base plate 131, and the cavity 102 communicates with the second air hole 1302.

As shown in FIG. 4, the cigarette rod 200 has an airflow channel 210 and a second receiving cavity 220. In some embodiments, the smoke rod 200 includes an air suction pipe 21 and a partition 22, the interior of the air suction pipe 21 is used as an air flow channel 210, the partition 22 is located outside the air suction pipe 21 and surrounds the pipe wall of the air suction pipe 21 to form a second accommodating cavity 220, for example, any of the sensing devices 100 shown in fig. 2a to 2c is placed in the second accommodating cavity 220, and the substrate 130 is fixed on the partition 21. The pipe wall of the air suction pipe 21 is provided with a first opening 201, the isolation piece 22 is provided with a second opening 202, the first opening 201 corresponds to the position of the first air hole 1301, and the first surface of the vibration film 111 is communicated with the interior of the air flow channel through the first air hole 1301 and the first opening 201. The second opening 202 corresponds to the position of the second air hole 1302, the second surface of the diaphragm 111 is communicated with the external atmosphere through the gap 104, the through hole 103, the cavity 102, the second air hole 1302 and the second opening 202, and the inner part of the air flow channel 210 is blocked from communicating with the gap 104 because the diaphragm 111 does not have any through hole structure. The pipe wall of the air suction pipe 21 is further provided with a third opening 203, the partition 22 is further provided with a fourth opening 204 and a fifth opening 205, the air inlet 211 and the air outlet 212 of the air suction pipe are communicated through an air flow channel 210, the third opening 203 is communicated with the inside of the air flow channel 210 and the inside of the second accommodating cavity 220, the fourth opening 204 is used as a light-transmitting area and corresponds to the position of the indicator lamp 140, so that the indicator lamp 140 is exposed outside the cigarette rod, and the indicator lamp 140 provides corresponding indicator light through the light-transmitting area on the partition 22 when the capacitance value of the variable capacitor reaches a preset value. The fifth opening 205 corresponds to the positions of the input terminal 151, the output terminal 152, and the ground terminal 153 to expose the input terminal 151, the output terminal 152, and the ground terminal 153 to the outside of the cigarette rod.

As shown in fig. 1 to 4, when a user takes a smoking action, the indicator lamp 140 is turned on, and gas flows through the gas flow passage 210, wherein the direction of the arrow in fig. 1 indicates the flow direction of the gas. The diaphragm 111 deforms under the action of the air pressure difference between the first surface 11 and the second surface 12, so that the distance d between the diaphragm 111 and the backplate 112 becomes larger, and the capacitance formed by the diaphragm 111 and the backplate 112 becomes smaller. Within the predetermined range, the faster the gas flow speed in the gas flow channel 210, the greater the distance d between the diaphragm 111 and the back plate 112, and the control module can control the power of the atomizer according to the capacitance variation of the capacitor.

Fig. 5 shows a schematic structural diagram of an electronic cigarette according to a second embodiment of the present invention, fig. 6a and 6b show a schematic structural diagram of a sensing device in fig. 5, fig. 7 shows a schematic structural diagram of a micro-electromechanical structure in fig. 6a and 6b, and fig. 8 shows a schematic structural diagram of a smoke rod in fig. 5.

As shown in fig. 5, the electronic cigarette according to the first embodiment of the present invention includes: a sensing device 300, a tobacco rod 400, a nebulizer (not shown), and a control device (not shown). The sensing device 300 is used for detecting the internal airflow of the airflow channel of the electronic cigarette, and the control device is respectively electrically connected with the atomizer and the sensing device 300 and is used for controlling the power of the atomizer according to the detection result of the sensing device 300.

As shown in fig. 6a, in some specific embodiments, the sensing device 300 includes: a micro-electromechanical structure 310, a chip structure 320, and a package structure 330. The micro-electromechanical structure 300 is electrically connected to the chip structure 320 through the binding line, and the chip structure 320 can perform filtering, amplification and other processing on the electrical signal from the micro-electromechanical structure 310. The package structure 330 includes a substrate 331 and a package housing 332, the substrate 331 and the package housing 332 are fixedly connected to form a first cavity 3303, and the micro-electromechanical structure 310 and the chip structure 320 are located in the first cavity 3303 and fixed on the substrate 331.

In this embodiment, the package structure 330 has a first air hole 3301 and a second air hole 3302, the first air hole 3301 penetrates the substrate 331 and corresponds to the position of the micro-electromechanical structure 310, and the second air hole 3302 penetrates the package housing 332. The substrate 331 includes a first substrate 331a and a second substrate 331b, the package housing 332 is fastened to the first substrate 331a to form a first cavity 3303, and the first substrate 331a is bonded to the second substrate 331 b. The micro-electromechanical structure 300 and the chip structure 400 are fixed on the first substrate 331a by die attach glue, and in some other embodiments, the chip structure 400 and the package housing 332 may be fixed in a manner as shown in fig. 2b and fig. 2 c. In some preferred embodiments, the first substrate 331a has RCL circuits, which can filter the input and/or output signals of the chip structure 400, thereby improving the sensitivity of the sensor.

The sensing device 300 further includes an input terminal 351, an output terminal 352 and a ground terminal 354 on the second substrate 331b, wherein the input terminal 351, the output terminal 352 and the ground terminal 354 are all disposable bonding wires which can be soldered to the circuit of the control module. The sensing device 300 further includes an indicator 340, which is located on one side of the substrate 330 together with the sensing device 300, fixed on the second substrate 331b and electrically connected to the second substrate 331b, wherein the indicator 340 is located outside the first receiving cavity 3303.

In other embodiments, as shown in FIG. 6b, the package housing 332 is made of a transparent material, such as plastic. The indicator light 340 is located inside the first receiving cavity 3303.

As shown in fig. 7, the mems structure 310 includes a diaphragm 311 and a back plate 312, and the diaphragm 311 and the back plate 312 are disposed opposite to each other to form a capacitor. The back plate 312 has at least one through hole 303, and a gap 304 is formed between the back plate 312 and the diaphragm 311. The diaphragm 311 has opposing first and

second surfaces

31 and 32. In the present embodiment, the diaphragm 311 does not have any through-hole structure.

The microelectromechanical structure 310 also includes a substrate 301 and a support structure 305. The substrate 301 has a cavity 302, the diaphragm 311 is supported and fixed by the substrate 301 on the substrate 301, and the cavity 302 and the gap 304 are separated by the diaphragm 311. The support structure 305 is located between the diaphragm 311 and the backplate 312. In the sensing device 300, the substrate 301 surrounds the first air hole 3301 on the base plate 331, and the cavity 302 communicates with the first air hole 3301.

As shown in FIG. 8, the cigarette rod 400 has an air flow channel 410 and a second receiving chamber 420. In some embodiments, the smoke rod 400 includes an air suction pipe 41 and a partition 42, the interior of the air suction pipe 41 is used as an air flow channel 410, the partition 42 is located outside the air suction pipe 41 and surrounds the pipe wall of the air suction pipe 41 to form a second receiving cavity 420, for example, the sensing device 300 shown in fig. 6a and 6b is placed in the second receiving cavity 420, and the substrate 330 is fixed on the pipe wall of the air suction pipe 41. The pipe wall of the air suction pipe 41 has a first opening 401, the partition 42 has a second opening 402, the first opening 401 corresponds to the position of the first air hole 3301, and the first surface 31 of the diaphragm 311 communicates with the inside of the air flow passage through the first air hole 3301 and the first opening 401. The second opening 402 corresponds to the position of the second air hole 3302, and the second surface 32 of the diaphragm 311 communicates with the external atmosphere via the gap 304, the through hole 303, the cavity 302, the second air hole 3302, and the second opening 402, and the diaphragm 311 does not have any through hole structure, so that the inside of the air flow passage 410 is blocked from communicating with the gap 304. The isolating piece 42 is further provided with a fourth opening 404, the air suction pipe 41 is further provided with a fifth opening 405, an air inlet 411 and an air outlet 412 of the air suction pipe are communicated through an air flow channel 410, the fourth opening 404 serves as a light-transmitting area and corresponds to the position of the indicator lamp 340, so that light of the indicator lamp 340 can penetrate out of the cigarette rod, and the indicator lamp 340 provides corresponding indicator light through the light-transmitting area on the isolating piece 42 under the condition that the capacitance value of the variable capacitor reaches a preset value. The fifth opening 405 corresponds to the positions of the input terminal 351, the output terminal 352, and the ground terminal 354 to expose the input terminal 351, the output terminal 352, and the ground terminal 354 inside the airflow passage 410.

As shown in fig. 5 to 8, when the user takes a smoking action, the indicator lamp 340 is turned on, and the gas flows through the gas flow passage 410, wherein the direction of the arrow in fig. 1 indicates the flow direction of the gas. The diaphragm 311 deforms under the action of the air pressure difference between the first surface 31 and the second surface 32, so that the distance d between the diaphragm 311 and the back plate 312 becomes larger, and the capacitance formed by the diaphragm 311 and the back plate 312 becomes smaller. Within the predetermined range, the faster the gas flow rate in the gas flow channel 410, the greater the distance d between the diaphragm 311 and the back plate 312, and the control module can control the power of the atomizer according to the capacitance variation of the capacitor.

The embodiment of the utility model provides a sensing device can be used to electron cigarette or other needs detect the current channel interior and outside atmospheric pressure difference's sight.

In the above description, the technical details of patterning, etching, and the like of each layer are not described in detail. It will be appreciated by those skilled in the art that layers, regions, etc. of the desired shape may be formed by various technical means. In addition, in order to form the same structure, those skilled in the art can also design a method which is not exactly the same as the method described above. In addition, although the embodiments are described separately above, this does not mean that the measures in the embodiments cannot be used in advantageous combination.

The embodiments of the present invention have been described above. However, these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof. Various alternatives and modifications can be devised by those skilled in the art without departing from the scope of the present invention, and these alternatives and modifications are intended to fall within the scope of the present invention.

Claims

1. A sensing device for detecting an internal gas flow of a gas flow channel, the sensing device comprising a microelectromechanical structure, the microelectromechanical structure comprising:

a vibrating membrane; and

a back plate disposed opposite to the diaphragm to form a capacitor, the back plate having at least one through hole with a gap therebetween,

wherein a first surface of the diaphragm communicates with the inside of the airflow passage, a second surface of the diaphragm communicates with the outside atmosphere via the gap, the diaphragm blocks the inside of the airflow passage from communicating with the gap,

the vibrating membrane deforms under the action of the air pressure difference between the first surface and the second surface, and the capacitance value change of the capacitor at least represents the gas flow speed in the gas flow channel.

2. The sensing device of claim 1, further comprising:

a chip structure electrically connected with the micro-electromechanical structure; and

the packaging structure comprises a packaging shell and a substrate and is used for forming a first accommodating cavity, the micro-electromechanical structure and the chip structure are positioned in the first accommodating cavity and fixed on the substrate,

the packaging structure is provided with a first air hole and a second air hole, the first air hole is communicated with the first surface of the vibrating membrane and the interior of the airflow channel respectively, and the second air hole is communicated with the gap and the external atmosphere respectively.

3. The sensing device of claim 2, further comprising an indicator light secured to and electrically connected to the substrate,

wherein the indicator light provides indicating light when the capacitance value of the capacitor reaches a preset value.

4. An electronic cigarette comprising a sensing device for detecting an internal airflow in an airflow path and a tobacco rod, the sensing device comprising a microelectromechanical structure, the tobacco rod having the airflow path, the microelectromechanical structure comprising:

a vibrating membrane; and

5. The electronic cigarette of claim 4, wherein the sensing device further comprises:

6. The electronic cigarette of claim 5, wherein the tobacco rod further has a second receiving cavity, and the sensing device is located in the second receiving cavity.

7. The electronic cigarette of claim 6, wherein the tobacco rod comprises:

an air suction pipe, the interior of which serves as the air flow passage; and

and the isolating piece is positioned outside the air suction pipe and surrounds the pipe wall of the air suction pipe to form the second accommodating cavity.

8. The electronic cigarette of claim 7, wherein the tube wall of the suction tube has a first opening, the spacer has a second opening,

the first opening communicates the interior of the air intake duct with the first surface of the diaphragm, and the second opening communicates the external atmosphere with the gap.

9. The electronic cigarette of claim 8, wherein the substrate is on the spacer, the package housing snaps onto the substrate, the diaphragm is farther from the substrate relative to the backplate,

the first air hole penetrates through the packaging shell and is communicated with the first opening, and the second air hole penetrates through the substrate and is communicated with the second opening.

10. The electronic cigarette of claim 9, wherein the sensing device further comprises an indicator light electrically connected to the substrate, the indicator light and the microelectromechanical structure being located on different sides of the substrate,

the indicator light provides corresponding indicating light through the light-transmitting area on the isolating piece when the capacitance value of the capacitor reaches a preset value.

11. The electronic cigarette of claim 8, wherein the substrate is located on a wall of the inhalation duct, the package housing is fastened to the substrate, the diaphragm is closer to the substrate than the back plate,

the first air hole penetrates through the substrate and is communicated with the first opening, and the second air hole penetrates through the packaging shell and is communicated with the second opening.

12. The electronic cigarette of claim 11, wherein the tube wall of the air suction tube further has a third opening, and the third opening communicates the interior of the air suction tube with the second receiving cavity.

13. The electronic cigarette of claim 11, wherein the sensing device further comprises an indicator light electrically connected to the substrate, the indicator light located on a same side of the substrate as the microelectromechanical structure,

14. The electronic cigarette of claim 13, wherein the indicator light is located in the first receiving cavity, and the package housing is a transparent package housing.

15. The electronic cigarette of any of claims 5-13, wherein the material of the package housing comprises a metal, and the chip structure and the package housing are electrically connected through the substrate.

16. The electronic cigarette according to any one of claims 4 to 14, further comprising a control module and an atomizer, wherein the control module is electrically connected to the sensing device and the atomizer, respectively, and is configured to control the power of the atomizer according to the capacitance value variation of the capacitor.