CN216818291U - Silicon wafer basket of flowers and silicon wafer production system - Google Patents

Abstract

The application discloses silicon chip basket of flowers and silicon chip production system relates to silicon chip processing equipment field. The silicon wafer flower basket comprises an end plate assembly, a plurality of flower basket side rods and a flower basket middle rod, wherein the end plate assembly comprises a first end plate and a second end plate which are arranged in parallel relatively; the flower basket side rod is arranged between the first end plate and the second end plate; basket teeth are arranged on the side faces, facing the middle bar of the basket, of the side bars of the basket, and left bearing teeth and right bearing teeth are arranged on the left side face and the right side face, facing the left side bar of the basket and the right side bar of the basket, of the middle bar of the basket respectively; at least one of the basket teeth, the left bearing teeth and the right bearing teeth is provided with a coating which is a high-temperature-resistant non-metallic coating; in the first state, two ends of the middle rod of the flower basket are respectively connected with the first end plate and the second end plate; in the second state, the two ends of the rod in the flower basket are not connected with the first end plate and the second end plate. The silicon wafer basket has high temperature resistance, enables the silicon wafer to be in non-metal contact with the basket, and can bear the silicon wafers of different sizes for use.

Description

Silicon wafer basket of flowers and silicon wafer production system

Technical Field

The application belongs to the technical field of silicon wafer processing equipment, and particularly relates to a silicon wafer basket and a silicon wafer production system.

Background

The flower basket is a production tool widely applied to the field of manufacturing semiconductors such as solar cells, IC chips and LED chips, and can be mainly used for storing, etching, carrying and the like of silicon wafers. In recent years, with the rapid development of the photovoltaic industry, competition in the industry is increasingly stronger, and the use requirement of the flower basket is continuously changed. Most of the original flower baskets can only be used in a common non-high-temperature environment, and cannot meet the requirement of being used in a high-temperature environment at present.

Therefore, in view of the fact that the conventional silicon wafer basket can only carry and convey silicon wafers in a common non-high-temperature environment and does not have the capability of bearing high temperature, the development of a silicon wafer basket capable of working at high temperature for a long time is urgently needed, and the silicon wafers can be in non-metal contact with the basket; in addition, the flower basket can bear silicon wafers with different sizes, and is expected in the related field.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned problems, the present invention is directed to solving, at least to some extent, one of the technical problems in the related art. Therefore, the silicon wafer basket and the silicon wafer production system provided by the utility model can improve the high temperature resistance of the silicon wafer basket, enable the silicon wafer to be in non-metal contact with the basket, and overcome the defects in the prior art.

In order to solve the technical problem, the present application is implemented as follows:

according to an aspect of the present application, an embodiment of the present application provides a silicon wafer basket, including:

the end plate assembly comprises a first end plate and a second end plate which are arranged in parallel;

the side flower basket rods are arranged between the first end plate and the second end plate and are positioned at the edges of the first end plate or the second end plate;

the flower basket middle rod is provided with basket teeth in a manner of facing the side face of the flower basket middle rod, and the flower basket middle rod is respectively provided with a left bearing tooth and a right bearing tooth in a manner of facing the left side face and the right side face of the left side flower basket side rod and the right side flower basket side rod; at least one of the basket teeth, the left bearing teeth and the right bearing teeth is provided with a coating which is a high-temperature-resistant non-metallic coating;

in a first state, two ends of the middle rod of the flower basket are respectively connected with the first end plate and the second end plate, and the silicon wafer flower basket is used for bearing half silicon wafers;

and in a second state, the two ends of the middle rod of the flower basket are not connected with the first end plate and the second end plate, and the silicon wafer flower basket is used for bearing the whole silicon wafer.

In some embodiments thereof, the left and right receiving teeth are each provided with the high temperature resistant non-metallic coating;

and/or, the flower basket middle rod comprises an upright post and a left bearing tooth and a right bearing tooth which are arranged on the left side and the right side of the upright post respectively, and the high-temperature-resistant non-metal coating is coated on the outer sides of the upright post, the left bearing tooth and the right bearing tooth.

In some embodiments, the high temperature resistant non-metallic coating is a polytetrafluoroethylene layer.

In some embodiments, the number of the flower basket side rods is four, and four flower basket side rods surround a square space corresponding to a whole silicon wafer;

the number of the flower basket middle rods is two, and the two flower basket middle rods and the flower basket side rods on the left side and the right side respectively enclose a rectangular space corresponding to half silicon wafers.

In some embodiments, the basket teeth on the side basket bars and the left bearing teeth and the right bearing teeth on the middle basket bars are longitudinally arranged at equal intervals, and the basket teeth correspond to the left bearing teeth and the basket teeth correspond to the right bearing teeth one by one.

In some embodiments, a limiting rod is further disposed between the first end plate and the second end plate, and the limiting rod is located at the rear middle part of the adjacent side rod and middle rod of the flower basket.

In some embodiments, the stop rod is a polished rod.

In some embodiments, the side of the first end plate facing away from the side bars of the basket and the middle bar of the basket is provided with a manipulator grabbing structure.

In some embodiments, one end of the side basket bar is detachably connected to the first end plate, and the other end of the side basket bar is detachably connected to the second end plate;

and/or one end of the flower basket middle rod is detachably connected with the first end plate, and the other end of the flower basket middle rod is detachably connected with the second end plate.

According to another aspect of the application, the embodiment of the application provides a silicon wafer production system, which comprises the silicon wafer basket.

The technical scheme of the utility model at least has the following beneficial effects:

in the embodiment of the application, the silicon wafer basket is provided with a plurality of basket side rods and basket middle rods between a first end plate and a second end plate, the plurality of basket side rods are arranged at the edges, and the plurality of basket middle rods are arranged at the middle part, so that the plurality of basket side rods and the plurality of basket middle rods can enclose a plurality of silicon wafer storage spaces; meanwhile, one or more of the basket teeth on the side lever of the basket and the left bearing teeth and the right bearing teeth on the middle lever of the basket are provided with high-temperature resistant coatings. Therefore, the silicon wafer basket can be used in a high-temperature environment, has the capacity of bearing high temperature, can enable the silicon wafer to be in non-metal contact with the basket, achieves the design purpose that the basket has high temperature resistance and is not in metal contact, can adapt to the requirement of automatic production of half silicon wafer batteries in structural design, and can keep the original production capacity. In addition, utilize the silicon chip basket of flowers that this application provided to can bear half silicon chip or whole silicon chip, can realize depositing of half silicon chip, can also make full use of the basket of flowers structure of whole silicon chip, realize the basket of flowers structure that can bear not unidimensional silicon chip to can bear high temperature.

The silicon wafer production system provided by the application comprises the silicon wafer basket, so that the silicon wafer basket at least has all the characteristics and advantages of the silicon wafer basket, and is not repeated herein. Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.

Drawings

FIG. 1 is a schematic structural diagram of a silicon wafer basket according to some embodiments of the present invention;

FIG. 2 is a schematic diagram of a rod in a flower basket according to some embodiments of the present invention;

FIG. 3 is a schematic drawing in section of a portion of a stem of a flower basket according to some embodiments of the present invention;

fig. 4 is a schematic structural diagram of a flower basket side rod according to some embodiments of the present invention.

Description of reference numerals:

100-a first end plate; 200-a second end plate; 300-a manipulator grabbing structure;

400-side rod of flower basket; 401-basket teeth;

500-flower basket middle rod; 501-left bearing teeth; 502-right bearing teeth; 503-column;

600-high temperature resistant non-metallic coating;

700-limiting rod.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making any creative effort belong to the protection scope of the present application.

The terms first, second and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that embodiments of the application may be practiced in sequences other than those illustrated or described herein, and that the terms "first," "second," and the like are generally used herein in a generic sense and do not limit the number of terms, e.g., the first term can be one or more than one. Furthermore, the term "and/or"/"as used in the specification and claims is merely an associative relationship describing associated objects, meaning that three relationships may exist, e.g., a and/or B, may mean: a exists alone, A and B exist simultaneously, and B exists alone.

In the present invention, unless stated to the contrary, use of the directional terms "upper, lower, left, right" are generally with respect to the orientation shown in the drawings, or with respect to the component itself in a vertical, or gravitational orientation. Similarly, for ease of understanding and description, the definitions of "inner and outer" are consistent with the usual definitions of inner and outer, such as "inner and outer" referring to the inner and outer contours of the respective components themselves, but the above directional words are not intended to limit the utility model.

The embodiments of the present application are described in detail below with reference to the accompanying drawings through specific embodiments and application scenarios thereof.

Referring to fig. 1 to 4, in some embodiments of the present application, there is provided a silicon wafer basket comprising an end plate assembly, a plurality of basket side rods 400 and a plurality of basket middle rods 500:

wherein the end plate assembly comprises a first end plate 100 and a second end plate 200 arranged in parallel; the flower basket side rod 400 is arranged between the first end plate 100 and the second end plate 200, and the flower basket side rod 400 is positioned at the edge of the first end plate 100 or the second end plate 200; the basket middle rod 500 is arranged between the first end plate 100 and the second end plate 200, and the basket middle rod 500 is positioned on the central line of the first end plate 100 or the second end plate 200;

each side of the side bar 400 of the basket is provided with a basket tooth 401 toward the side of the middle bar 500 of the basket, and each side bar 500 of the basket is provided with a left receiving tooth 501 and a right receiving tooth 502 toward the left and right sides of the side bar 400 of the basket on the left and right sides; at least one of the basket teeth 401, the left carrying teeth 501 and the right carrying teeth 502 is provided with a coating which is a high-temperature-resistant non-metal coating 600.

In a first state, two ends of a middle rod 500 of the basket are respectively connected with the first end plate 100 and the second end plate 200, and the silicon wafer basket is used for bearing half silicon wafers;

in the second state, two ends of the middle rod 500 of the basket are not connected to the first end plate 100 and the second end plate 200, and the silicon wafer basket is used for bearing a whole silicon wafer.

This embodiment has protected a silicon chip basket of flowers, and this silicon chip basket of flowers can be used to the photovoltaic trade, and the main effect is for bearing the weight of the silicon chip. When the silicon wafer battery basket is used, the middle rod 500 of the flower basket with the high-temperature-resistant non-metal coating 600 can be increased, so that a silicon wafer can not contact with metal of the flower basket, namely, the non-metal contact mode of the silicon wafer can meet the requirement of automatic production of half silicon wafer batteries, the original production capacity can be kept, especially, high temperature can be borne, and the flower basket has high temperature resistance. The silicon wafer basket of this embodiment can alleviate current silicon wafer basket of flowers can only bear and transport the silicon wafer under ordinary non-high temperature environment, does not have the problem of the ability that bears the high temperature. Specifically, the silicon wafer basket comprises an end plate assembly, a plurality of basket side rods 400 and a plurality of basket middle rods 500, wherein the end plate assembly comprises a first end plate 100 and a second end plate 200, the first end plate 100 and the second end plate 200 are arranged in parallel, the first end plate 100 and the second end plate 200 may be an upper end plate and a lower end plate, respectively, and a space between the first end plate 100 and the second end plate 200 may be a space for storing silicon wafers. Herein, a plurality means two and more.

Further, a plurality of flower basket side bars 400 are provided between the first end plate 100 and the second end plate 200, and the plurality of flower basket side bars 400 are located at the edge of the first end plate 100 or the second end plate 200. In this embodiment, when describing the position of the side rod 400 of the flower basket or the middle rod 500 of the flower basket, reference may be made to the first end plate 100 or reference may be made to the second end plate 200. In order to make the structure simpler and more symmetrical, in some embodiments, the first end plate 100 and the second end plate 200 may have the same size, for example, the first end plate 100 and the second end plate 200 may have a square shape with an equal area. Therefore, for convenience of description, in describing the arrangement position of the side basket lever 400 or the middle basket lever 500, the first end plate 100 will be mainly referred to hereinafter. In some embodiments, a plurality of side basket bars 400 may be evenly distributed circumferentially along the first end plate 100.

A plurality of flower basket middle rods 500 are further disposed between the first end plate 100 and the second end plate 200, and the plurality of flower basket middle rods 500 may be disposed on the center line of the first end plate 100, for example, when the first end plate 100 is square, the plurality of flower basket middle rods 500 are equally spaced along the center line of the first end plate 100. Like this, a plurality of basket of flowers side lever 400 and a plurality of basket of flowers pole 500 can enclose and enough form a plurality of storage silicon chip spaces, can increase the quantity that can bear of silicon chip, improve production efficiency.

Further, the side of the side basket lever 400 facing the middle basket lever 500 is provided with a basket tooth 401, i.e., the side basket lever 400 is provided with a single row of basket teeth 401, the direction of the single row of basket teeth 401 is toward the middle basket lever 500. The middle rod 500 of the flower basket is positioned between the two side rods 400 of the flower basket, the left side and the right side of the middle rod 500 of the flower basket are respectively provided with the side rods 400 of the flower basket, the middle rod 500 of the flower basket can be provided with two or more rows of bearing teeth (also can be called as basket teeth), if the middle rod 500 of the flower basket is provided with a left bearing tooth 501 towards the left side face on the left side of the middle rod, the middle rod 500 of the flower basket is provided with a right bearing tooth 502 towards the right side face on the right side of the middle rod 500 of the flower basket. Silicon chips can be loaded between the side basket lever 400 and the middle basket lever 500, namely, the silicon chips can be loaded by the matching of the basket teeth 401 of the side basket lever 400 and the left bearing teeth 501 or the right bearing teeth 502 of the middle basket lever 500. Wherein, one or more of the basket teeth 401 on the side bar 400 of the flower basket and the left and right receiving teeth 501 and 502 on the middle bar 500 of the flower basket are provided with high temperature resistant coatings; that is, the basket teeth 401 of the side basket lever 400 are provided with a high temperature resistant coating, or the left receiving teeth 501 of the middle basket lever 500 are provided with a high temperature resistant coating, or the right receiving teeth 502 of the middle basket lever 500 are provided with a high temperature resistant coating, or the left receiving teeth 501 and the right receiving teeth 502 of the middle basket lever 500 are both provided with a high temperature resistant coating, or the left receiving teeth 501 and the right receiving teeth 502 of the middle basket lever 500 and the basket teeth 401 of the side basket lever 400 are both provided with a high temperature resistant coating.

From this, can make this silicon chip basket of flowers can use under high temperature environment, have the ability of bearing the high temperature, and can make silicon chip and basket of flowers nonmetal contact, reached the basket of flowers and had high temperature resistant and no metal contact's design purpose, the structural design of above-mentioned silicon chip basket of flowers can adapt to half silicon chip battery automated production's needs in addition, can also keep original production productivity. In addition, utilize the silicon chip basket of flowers that this application provided to can bear half silicon chip, can realize depositing of half silicon chip, can also make full use of the basket of flowers structure of whole silicon chip, realize the basket of flowers structure that can bear not unidimensional silicon chip to can bear high temperature, prolong the life of silicon chip basket of flowers, improve the intensity and the dimensional stability of silicon chip basket of flowers.

It should be noted that in the silicon wafer basket of the present application, the number of the rods in the basket may be multiple or one, and is preferably multiple. The silicon wafer basket can be provided with or without a basket middle rod, namely, the silicon wafer basket can have two states, namely, in one state (in a first state), the basket middle rod is arranged, and two ends of the basket middle rod are respectively connected with the first end plate and the second end plate, so that the silicon wafer basket can be used for bearing half silicon wafers; in another state (in a second state), the flower basket middle rod is not arranged, the flower basket middle rod is also detached, two ends of the flower basket middle rod are not connected with the first end plate and the second end plate, and at the moment, the flower basket side rod can be used for bearing the whole silicon wafer.

It should be noted that the material of the high temperature resistant non-metallic coating 600 is a plastic with high temperature resistance. The plastic with high temperature resistance may be made of various plastic materials with high temperature resistance known in the art, for example, a high temperature resistant plastic with a heat distortion temperature of 200 ℃ or more, or 210 ℃ or more, or 220 ℃ or more is adopted, and the specific heat distortion temperature of the high temperature resistant plastic is not limited in this embodiment.

According to the embodiment of the application, all can be provided with high temperature resistant coating in the tooth 401 of basket side pole 400 and the left of basket middle pole 500 accept tooth 501 and the right accept tooth 502, and it is especially outstanding that this embodiment has increased basket middle pole 500 to accept tooth 501 and the right of basket middle pole 500 and all set up high temperature resistant coating in the left of basket middle pole 502, make the basket have high temperature resistance and the silicon chip carries out the design of no metal contact. Therefore, the following description mainly uses the high temperature resistant coating provided on the rod in the flower basket as an example, but it should be understood that the high temperature resistant coating is not limited thereto.

As shown in fig. 2 and 3, in some embodiments, the left receiving tooth 501 and the right receiving tooth 502 are both provided with the high temperature resistant non-metallic coating 600. In some embodiments, the basket center pole 500 includes a vertical column 503, and a left receiving tooth 501 and a right receiving tooth 502 respectively disposed at the left and right sides of the vertical column 503, and the high temperature resistant non-metal coating 600 covers the outer sides of the vertical column 503, the left receiving tooth 501, and the right receiving tooth 502.

According to this embodiment, the basket middle rod 500 may be made of a high temperature resistant plastic material, or only a high temperature resistant plastic layer may be plated on the outer surface of the basket middle rod 500. For example, the basket center pole 500 may include a vertical column 503, a left receiving tooth 501 is disposed on a left side of the vertical column 503, a right receiving tooth 502 is disposed on a right side of the vertical column 503, and a high temperature resistant plastic layer may be coated on the vertical column 503 and the outer sides of the left receiving tooth 501 and the right receiving tooth 502 by injection molding. Thus, the flower basket can have high temperature resistance, and the silicon wafers are in metal-free contact.

In some embodiments, the high temperature resistant non-metal coating 600 is a polytetrafluoroethylene (PTFE, teflon) layer, that is, the high temperature resistant non-metal coating 600 is a teflon layer, and the left receiving tooth 501 and the right receiving tooth 502 of the rod 500 in the flower basket are provided with the teflon layer. Therefore, the high-temperature-resistant flower basket has the advantages of high temperature resistance, high strength, light weight, firmness and durability, and the strength of the side rods or the middle rods of the flower basket is improved.

From this, through the structural design of above-mentioned silicon chip basket of flowers, the material that conventional basket of flowers used has been changed to this embodiment, and at basket tooth or accept outside such as tooth and plate high temperature resistant non-metallic coating like teflon layer, make the silicon chip can not contact basket of flowers metal. In addition, the silicon wafer basket can be used for bearing the whole silicon wafer and/or half silicon wafers to be dried and solidified at high temperature, and can reach the capacity of producing silicon wafers in a conventional furnace.

In some embodiments, the first end panel 100 and the second end panel 200 may both be polyetheretherketone. Therefore, the silicon wafer basket has certain high temperature resistance, and the strength and the size stability of the silicon wafer basket can be improved.

As shown in fig. 1, in some embodiments, the number of the flower basket side rods 400 is four, and four flower basket side rods 400 enclose a square space corresponding to an entire silicon wafer; the number of the flower basket middle rods 500 is two, the two flower basket middle rods 500 are located on the center line of the square space, and the two flower basket middle rods 500 and the flower basket side rods 400 on the left side and the right side enclose a rectangular space corresponding to half silicon wafers.

The specific number of the side basket rods 400 and the middle basket rods 500 is not limited in this embodiment, and may be four or two, or may be other numbers, and may be set according to the actual size of the silicon wafer or the specific actual requirements. For example, in other embodiments, the number of the side rods of the flower basket can also be six, and the number of the rods in the flower basket can also be three; for example, three flower basket side rods are arranged at the left side of the flower basket at intervals, three flower basket side rods are arranged at the right side of the flower basket at intervals, and three flower basket middle rods are arranged at the middle of the flower basket at intervals. Alternatively, in other embodiments, the number of the side basket rods 400 may be four, and the number of the middle basket rods 500 may be four, the middle basket rods are arranged in multiple rows, and each row is provided with multiple middle basket rods; if the basket of flowers midpole divide into two and arrange, every row sets up two basket of flowers midpole. Thus, the yield of the unit flower basket is increased, and the production efficiency is improved.

As shown in fig. 1, fig. 2 or fig. 4, in some embodiments, the basket teeth 401 on the side basket bars 400 and the left receiving teeth 501 and the right receiving teeth 502 on the middle basket bar 500 are arranged at equal intervals in the longitudinal direction, and the basket teeth 401 correspond to the left receiving teeth 501, the basket teeth 401 correspond to the right receiving teeth 502 one by one. Above-mentioned flower basket side lever 400 is equipped with a row of basket tooth 401, and the basket of flowers pole 500 is equipped with a row of left and holds tooth 501 and hold tooth 502 on the right side, and the basket tooth 401, hold tooth 501 and right and hold tooth 502 and all follow vertical equidistant range, and lie in the basket tooth 401 of left flower basket side lever 400 and hold tooth 501 one-to-one with a left side, lie in the basket tooth 401 of right side lever 400 and hold tooth 502 one-to-one with the right side.

According to the embodiment of the application, the flower basket side rod 400 is provided with a plurality of basket teeth 401, each basket tooth 401 is distributed along the axial direction of the flower basket side rod 400 in sequence, and a groove for supporting a silicon wafer can be formed between every two adjacent basket teeth 401. Similarly, a plurality of left receiving teeth 501 are arranged on the left side surface of the flower basket middle rod 500, each left receiving tooth 501 is sequentially distributed along the axial direction of the flower basket middle rod 500, and a groove for supporting a silicon wafer can be formed between every two adjacent left receiving teeth 501; the right side surface of the flower basket middle rod 500 is provided with a plurality of right bearing teeth 502, each right bearing tooth 502 is distributed along the axial direction of the flower basket middle rod 500 in sequence, and a groove for supporting silicon wafers can be formed between the adjacent right bearing teeth 502. The cross section of the groove is narrowed from top to bottom, when the silicon wafer is supported, the bottom of the groove faces upwards, the contact area of the silicon wafer is smaller and smaller, and the silicon wafer is easy to manufacture and improve the performance.

Alternatively, the cross-sectional shape of the basket teeth 401 may be a trapezoid, such as an isosceles trapezoid, which is simple in structure and easy to manufacture. Similarly, the cross-sectional shapes of the left receiving tooth 501 and the right receiving tooth 502 on the flower basket middle rod 500 can be trapezoids, such as isosceles trapezoids, which is simple in structure and easy to manufacture.

Optionally, the basket teeth 401 on the side basket bar 400 may be eccentric prismatic teeth for limiting the placement of the silicon wafer. Of course, the basket teeth 401 may also comprise a variety of shapes including, but not limited to, eccentric prismatic teeth, trapezoidal shapes, or the like. Similarly, the left receiving tooth 501 and the right receiving tooth 502 on the middle rod 500 of the flower basket can be eccentric prismatic teeth for limiting the placement of silicon wafers. Of course, the left receiving tooth 501 and the right receiving tooth 502 may also include a variety of shapes including, but not limited to, an eccentric prismatic tooth or a trapezoid, etc.

In some embodiments, as shown in fig. 1, a spacing rod 700 is further disposed between the first end plate 100 and the second end plate 200, and the spacing rod 700 is located at the rear middle portion of the adjacent side basket rod 400 and middle basket rod 500. In the silicon wafer flower basket, the flower basket side rods 400, the flower basket middle rods 500 and the limiting rods 700 can be surrounded to form a half-surrounding structure for storing half silicon wafers. Through the setting of gag lever post 700, can play spacing effect to the silicon chip, easy to assemble, stable in structure is reliable.

In order to match with the actual automatic production requirement, a limiting rod is additionally arranged in the silicon wafer basket. When the silicon wafer basket is full of silicon wafers, the limiting rod 700 is installed between the first end plate 100 and the second end plate 200, is rotated and locked after being installed in place, and is matched with the peripheral auxiliary mechanical arm, so that the silicon wafers stored in the silicon wafer basket structure are more regular.

Optionally, the first end plate 100 and the second end plate 200 are correspondingly provided with limiting holes, and the limiting rod 700 extends into the limiting holes to lock the first end plate 100 and the second end plate 200. Further, the end of the limiting rod 700 comprises a limiting pin, and the limiting hole comprises a central hole and a notch communicated with the central hole and used for accommodating the limiting pin; when the stop pin is used, the stop pin at the end of the stop rod 700 extends into one side of the first end plate 100 facing the second end plate 200 from the notch, and the stop pin is screwed to the area dislocated with the notch.

In some embodiments, there may be a total of two stop rods 700.

In some embodiments, the gag lever post 700 is a polished rod. The stop rod 700 is not provided with a tooth structure such as a basket tooth or a receiving tooth, and the stop rod 700 is a rod-shaped structure with a smooth outer surface. The cross section of the stop lever 700 may be circular, square, pentagonal, hexagonal, or other polygonal shape, and the specific structural shape of the stop lever is not limited in this embodiment.

Therefore, the silicon wafer basket of the embodiment is additionally provided with the left bearing tooth 501 and the basket middle rod 500 of the right bearing tooth 502 which are provided with the Teflon layers on the basis of the conventional silicon wafer basket, so that the conventional basket is divided into a plurality of silicon wafer storage spaces, the silicon wafer in-place limiting rod 700 is installed behind different spaces, the basket can have high temperature resistance, the silicon wafers are in non-metal contact, the silicon wafer basket can adapt to the automatic production needs of half silicon wafer batteries, and the original production capacity is kept.

In some embodiments, one end of the side basket 400 is detachably connected to the first end plate 100, and the other end of the side basket 400 is detachably connected to the second end plate 200; such as the basket side rod 400, is detachably connected to the first end plate 100 at the upper end thereof and to the second end plate 200 at the lower end thereof.

And/or one end of the basket middle rod 500 is detachably connected with the first end plate 100, and the other end of the basket middle rod 500 is detachably connected with the second end plate 200; such as a basket middle rod 500, is detachably coupled at an upper end thereof to the first end plate 100 and at a lower end thereof to the second end plate 200.

According to the embodiment of the application, the silicon wafer basket can be used for receiving or storing the whole silicon wafer and can also be used for receiving or storing half silicon wafers. On the one hand, the side rod 400 and the middle rod 500 of the flower basket are detachably connected with the first end plate 100 and the second end plate 200 respectively, so that the flower basket can be conveniently assembled and disassembled, and the production is convenient. On the other hand, the flower basket side rods 400 and the flower basket middle rods 500 are detachably connected with the first end plate 100 and the second end plate 200 respectively, so that the silicon wafer flower basket can be switched freely between a whole silicon wafer bearing state and a half silicon wafer bearing state, the flower basket capable of bearing silicon wafers of various sizes is realized, and the adaptability is improved.

Alternatively, the detachable connection may be, for example, a threaded connection, so that disassembly for maintenance and repair is facilitated. Of course, the above-mentioned connection manner of the side basket bar 400 and the middle basket bar 500 to the first end plate 100 and the second end plate 200 is not limited to the screw connection, but various detachable connection manners well known in the related art may be adopted.

Optionally, the lower surface of the first end plate 100 is formed with mounting holes corresponding to the flower basket side rods 400 one by one, threaded holes are assembled on the mounting holes, and the upper ends of the flower basket side rods 400 are provided with threaded connecting ends corresponding to the threaded holes; the upper surface of the second end plate 200 is formed with mounting holes corresponding to the flower basket side rods 400 one to one, threaded holes are assembled on the mounting holes, and the lower ends of the flower basket side rods 400 have threaded connection ends corresponding to the threaded holes. Similarly, the lower surface of the first end plate 100 is formed with mounting holes corresponding to the basket middle rods 500 one to one, the mounting holes are provided with threaded holes, and the upper end of the basket middle rod 500 is provided with a threaded connection end corresponding to the threaded holes; the upper surface of the second end plate 200 is formed with mounting holes corresponding to the basket middle rods 500 one-to-one, the mounting holes are provided with threaded holes, and the lower end of the basket middle rod 500 is provided with a threaded connection end corresponding to the threaded holes.

The silicon wafer basket of the embodiment can be used for receiving a whole silicon wafer or a half silicon wafer. Wherein half of the silicon wafer can cover half of the whole silicon wafer. The first use condition of this silicon chip basket of flowers does, and this silicon chip basket of flowers is used for depositing half silicon chip, and the upper and lower both ends of basket of flowers king-rod 500 this moment need be connected with first end plate 100 and second end plate 200 respectively, and half silicon chip is accepted with the basket tooth 401 cooperation of left basket of flowers side lever 400 to the left tooth 501 that holds of basket of flowers king-rod 500, perhaps half silicon chip is accepted with the basket tooth 401 cooperation of the basket of flowers side lever 400 on right side to the right tooth 502 that holds of basket of flowers king-rod 500.

The second use condition of the silicon wafer basket is that the silicon wafer basket can also be used for storing whole silicon wafers. In this case, the basket middle rod 500 is not connected to the first end plate 100 and the second end plate 200, that is, the basket middle rod 500 is detached, and the basket teeth 401 between the adjacent basket side rods 400 receive the whole silicon wafer.

Therefore, the number of silicon wafers capable of bearing can be increased through the arrangement of the structure, the flower basket structure capable of bearing silicon wafers of various sizes is realized, the storage of half silicon wafers can be realized, the flower basket structure of the whole silicon wafer can be fully utilized, the silicon wafer flower basket replacement time in the production process is reduced, and the production efficiency is improved.

In some embodiments, the side of the first end plate 100 facing away from the side basket bar 400 and the middle basket bar 500 is provided with a robot grasping structure 300, for example, the side basket bar 400 and the middle basket bar 500 are provided on the lower surface of the first end plate 100, and the robot grasping structure 300 may be provided on the upper surface of the first end plate 100. In order to facilitate the matching of the silicon wafer basket and other devices in the silicon wafer production system, such as a manipulator, the manipulator grabbing structure 300 is arranged on the upper surface of the first end plate 100, so that the silicon wafer basket and other devices, such as the manipulator, can be conveniently matched for use, and the silicon wafer is more conveniently conveyed.

In some embodiments, a silicon wafer production system is also provided, and comprises the silicon wafer basket.

The silicon wafer production system provided by the embodiment comprises the silicon wafer basket, so that at least all the characteristics and advantages of the silicon wafer basket are achieved. The silicon wafer production system can further comprise other partial structures such as a controller and a mechanical arm besides the silicon wafer basket, and the other partial structures of the silicon wafer production system are referred to the prior art and are not described in detail herein.

While the present embodiments have been described with reference to the accompanying drawings, it is to be understood that the utility model is not limited to the precise embodiments described above, which are meant to be illustrative and not restrictive, and that various changes may be made therein by those skilled in the art without departing from the spirit and scope of the utility model as defined by the appended claims.

Claims (10)

1. A silicon wafer basket, comprising:

the end plate assembly comprises a first end plate and a second end plate which are arranged in parallel;

the side flower basket rods are arranged between the first end plate and the second end plate and are positioned at the edges of the first end plate or the second end plate;

the flower basket middle rod is provided with basket teeth in a manner of facing the side face of the flower basket middle rod, and the flower basket middle rod is respectively provided with a left bearing tooth and a right bearing tooth in a manner of facing the left side face and the right side face of the left side flower basket side rod and the right side flower basket side rod; at least one of the basket teeth, the left bearing teeth and the right bearing teeth is provided with a coating which is a high-temperature-resistant non-metallic coating;

in a first state, two ends of the middle rod of the flower basket are respectively connected with the first end plate and the second end plate, and the silicon wafer flower basket is used for bearing half silicon wafers;

and in a second state, the two ends of the middle rod of the flower basket are not connected with the first end plate and the second end plate, and the silicon wafer flower basket is used for bearing the whole silicon wafer.

2. The silicon wafer basket according to claim 1, wherein the left and right bearing teeth are each provided with the high temperature resistant non-metallic coating;

and/or, the flower basket middle rod comprises an upright post and a left bearing tooth and a right bearing tooth which are arranged on the left side and the right side of the upright post respectively, and the high-temperature-resistant non-metal coating is coated on the outer sides of the upright post, the left bearing tooth and the right bearing tooth.

3. The silicon wafer flower basket according to claim 1, wherein the high temperature resistant non-metallic material coating is a polytetrafluoroethylene layer.

4. The silicon wafer basket according to claim 1, wherein the number of the side bars of the basket is four, and four side bars of the basket surround a square space corresponding to the whole silicon wafer;

the number of the flower basket middle rods is two, and the two flower basket middle rods and the flower basket side rods on the left side and the right side respectively enclose a rectangular space corresponding to half silicon wafers.

5. The silicon wafer basket according to claim 4, wherein the basket teeth on the side bars of the basket and the left and right receiving teeth on the middle bar of the basket are longitudinally arranged at equal intervals, and the basket teeth correspond to the left receiving teeth and the basket teeth and the right receiving teeth one to one.

6. The silicon wafer basket according to any one of claims 1 to 5, wherein a limiting rod is further arranged between the first end plate and the second end plate, and the limiting rod is located in the rear middle of the adjacent side rods and middle rod of the basket.

7. The silicon wafer basket according to claim 6, wherein the stop rod is a polished rod.

8. The silicon wafer basket according to any one of claims 1 to 5, wherein the side of the first end plate facing away from the side bars of the basket and the middle bar of the basket is provided with a manipulator grabbing structure.

9. The silicon wafer basket according to any one of claims 1 to 5, wherein one end of the side basket bar is detachably connected to the first end plate, and the other end of the side basket bar is detachably connected to the second end plate;

and/or one end of the flower basket middle rod is detachably connected with the first end plate, and the other end of the flower basket middle rod is detachably connected with the second end plate.

10. A silicon wafer production system comprising the silicon wafer basket according to any one of claims 1 to 9.

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