CN215163110U - Supporting device and plasma enhanced chemical vapor deposition equipment - Google Patents
Supporting device and plasma enhanced chemical vapor deposition equipment Download PDFInfo
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- CN215163110U CN215163110U CN202120099969.4U CN202120099969U CN215163110U CN 215163110 U CN215163110 U CN 215163110U CN 202120099969 U CN202120099969 U CN 202120099969U CN 215163110 U CN215163110 U CN 215163110U
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Abstract
The embodiment of the application provides a supporting device, because two arbitrary trays stagger each other along tray thickness direction, polylith tray on the skeleton is roughly along plane distribution. When the supporting device is positioned between two adjacent electrode plates, the two adjacent electrode plates are respectively positioned at two sides of the tray along the thickness direction of the tray, and the plurality of trays on the framework are distributed along the plane between the two adjacent electrode plates, which is equivalent to that the whole tray between the two adjacent electrode plates in the prior art is divided into the framework and the relatively smaller trays of the plurality of trays arranged on the framework. The area of the single tray of the embodiment of the application is small, the deformation resistance of the tray is improved, and the deformation of the tray in the carrying process is relieved or even eliminated. The total area of the plurality of trays on the framework is still large enough, so that the capacity of single equipment can be ensured. Can realize the transport to all trays on the skeleton through the transport to the skeleton, improve production efficiency. The framework and the tray are separated parts, and the material selection is more flexible.
Description
Technical Field
The application relates to the technical field of solar cells, in particular to a supporting device and plasma enhanced chemical vapor deposition equipment.
Background
In the process of manufacturing a solar cell, a cell needs to be coated, and commonly used coating methods are Plasma Enhanced Chemical Vapor Deposition (PECVD), which is classified into tubular PECVD and plate PECVD. During the use process, the tray for holding the battery piece can be greatly deformed, so that the form and position tolerance and the control precision of the tray are beyond the allowable range.
SUMMERY OF THE UTILITY MODEL
In view of the above, embodiments of the present disclosure are directed to a supporting apparatus and a plasma enhanced chemical vapor deposition apparatus to reduce deformation of a tray.
In order to achieve the above object, an aspect of the embodiments of the present application provides a supporting device, including:
the tray is configured to support a battery piece, and the battery piece and the tray are overlapped along the thickness direction of the tray; and
the skeleton is formed with a plurality of chambeies that hold, every hold the intracavity be provided with the tray that the skeleton is connected, two arbitrary trays are followed tray thickness direction staggers each other.
In one embodiment, the skeleton comprises:
a frame; and
the separating net is positioned in an area surrounded by the frame so as to divide the area surrounded by the frame into a plurality of accommodating cavities, and the separating net is connected with the frame.
In one embodiment, the separator web comprises a first separator strip and a second separator strip connected to each other, the first separator strip intersecting the second separator strip.
In one embodiment, the material of the frame has a higher elastic modulus than the material of the tray.
In one embodiment, the tray is provided with a supporting groove, the supporting groove is configured to support the battery piece, and the depth of the supporting groove is 0.1-2 mm.
In one embodiment, the tray is rectangular, a plurality of trays are distributed in a matrix, each tray is provided with a plurality of supporting grooves, the supporting grooves are configured to support the battery pieces, the supporting grooves are rectangular, and the supporting grooves are distributed in a matrix.
In one embodiment, the accommodating cavity is a through hole, the framework is provided with support hooks, each through hole is correspondingly provided with the support hook, and the tray is arranged on the support hook.
In one embodiment, the accommodating cavity is a through hole, the tray is exposed out of the through hole, a supporting groove is formed in the tray, the supporting groove is configured to support the battery piece, the supporting groove is located on one side of the tray in the thickness direction of the tray, and one side of the tray, which is far away from the supporting groove, is isolated from the supporting groove.
A second aspect of embodiments of the present application provides a plasma enhanced chemical vapor deposition apparatus, including:
a plurality of electrode plates; and
the corresponding supporting device is configured to be capable of moving in or out between two adjacent electrode plates; when the bearing device is positioned between two adjacent electrode plates, the two adjacent electrode plates are respectively positioned at two sides of the tray along the thickness direction of the tray.
In one embodiment, the accommodating cavity is a through hole, the framework is provided with a support hook, each through hole is correspondingly provided with the support hook, and the tray is arranged on the support hook; two adjacent one of them plate electrode of plate electrode is the contact electrode board, works as the contact electrode board with the tray butt, the support hook is located the skeleton is towards one side of contact electrode board.
This application embodiment supporting device because two arbitrary trays stagger each other along tray thickness direction, and the polylith tray on the skeleton is roughly along plane distribution. When the supporting device is positioned between two adjacent electrode plates, the two adjacent electrode plates are respectively positioned at two sides of the tray along the thickness direction of the tray, and the plurality of trays on the framework are distributed along the plane between the two adjacent electrode plates, which is equivalent to that the whole tray between the two adjacent electrode plates in the prior art is divided into the framework and the relatively smaller trays of the plurality of trays arranged on the framework. Compared with the whole tray between two adjacent electrode plates in the prior art, the single tray provided by the embodiment of the application has a smaller area, can improve the deformation resistance of the tray to a certain extent, and relieves or even eliminates the deformation of the tray in the carrying process, so that the form and position tolerance and the control precision of the tray can be basically in an allowable range. Although the area of a single tray is reduced, the total area of a plurality of trays on the framework is still large enough, and a sufficient number of battery pieces can be placed, so that the coating treatment of the sufficient number of battery pieces can be completed by carrying out PECVD coating on two adjacent electrode plates once, and the capacity of a single device can be ensured. Scattered trays are arranged on the framework, and the transportation of all trays on the framework can be realized through the transportation of the framework, so that batteries on the multiple trays and the trays move in or out of two adjacent electrode plates together along with the framework, the transportation of the multiple trays and the batteries on the trays can be realized rapidly, and the production efficiency is improved. In the embodiment of the application, the supporting device that is located between two adjacent plate electrodes includes the skeleton and sets up the polylith tray on the skeleton, and skeleton and tray are the spare part of two separations, and for the monoblock tray that is located between two adjacent plate electrodes among the prior art, the material of skeleton and tray can carry out the selection of pertinence respectively, and the selection of the material of skeleton and tray is more nimble, can only choose a material for use unlike the monoblock tray between two adjacent plate electrodes among the prior art. The deformation resistance of the single tray is improved due to the small area of the single tray, the tray cannot deform greatly even if the deformation resistance of the framework is general, the deformation tolerance and the control precision of the tray can still be basically within an allowable range, the battery piece on the tray cannot be influenced greatly, and the shape and the material of the framework can be selected more.
Drawings
FIG. 1 is a schematic structural diagram of an electrode plate and a supporting device of a PECVD apparatus according to an embodiment of the present disclosure;
FIG. 2 is a schematic view of a supporting apparatus according to an embodiment of the present application;
FIG. 3 is a schematic structural diagram of a frame according to an embodiment of the present application;
FIG. 4 is a schematic structural diagram of a tray according to an embodiment of the present application;
FIG. 5 is a cross-sectional view at location A-A in FIG. 4;
description of reference numerals: an electrode plate 1; a supporting device 2; a tray 21; a bearing groove 211; a skeleton 22; a housing chamber 221; a frame 222; a separation net 223; a first parting strip 2231; a second separator 2232; a bracket hook 224.
Detailed Description
It should be noted that, in the present application, technical features in examples and embodiments may be combined with each other without conflict, and the detailed description in the specific embodiment should be understood as an explanation of the gist of the present application and should not be construed as an improper limitation to the present application.
In the description of the embodiments of the present application, "upper", "lower", "top", "bottom", orientation or positional relationship is based on the orientation or positional relationship shown in fig. 1. In the description of the embodiments of the present application, please refer to fig. 5, the thickness direction of the tray is the direction indicated by arrow B in the figure. It is to be understood that such directional terms are merely for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the present application.
Before describing the embodiments of the present application, it is necessary to analyze the reason why the tray is deformed in the prior art, and obtain the technical solution of the embodiments of the present application through reasonable analysis.
For plate-type PECVD, in the prior art, a whole tray is usually moved into between two electrode plates, and all the battery pieces on the whole tray are subjected to PECVD coating together, each time PECVD coating is performed, only one tray is arranged between the two electrode plates, and after the coating is completed, the battery pieces need to be moved out from between the electrode plates together with the whole tray. Along with the development of technology, the area of plate electrode is bigger and bigger, carries out the PECVD coating film to more quantity of battery piece for the plate electrode of make full use of area increase, and the area of putting into the monoblock tray between two plate electrodes is also bigger and bigger correspondingly, and the area of monoblock tray is big to certain extent makes the tray can take place great deformation in handling and leads to the form and position tolerance and the control accuracy of tray to surpass the scope of permitting.
In view of this, the present embodiment provides a plasma enhanced chemical vapor deposition apparatus, please refer to fig. 1, which includes a supporting device 2 and a plurality of electrode plates 1. The holding device 2 is configured to be movable into and out of between two adjacent electrode plates 1.
In one embodiment, referring to fig. 1, two adjacent electrode plates 1 are generally arranged in an up-down direction.
In one embodiment, two adjacent electrode plates 1 may be arranged along other directions than the up-down direction.
It should be explained that, when the electrode plate 1 performs the PECVD coating process on the cell on the supporting device 2, the supporting device 2 is usually in a vacuum state.
It should be explained that the vacuum state is also a negative pressure state, and in the process of coating the battery piece, the negative pressure degree is larger and the air is thinner.
In one embodiment, the pecvd apparatus further comprises a plurality of process chambers, and at least one process chamber is provided with an electrode plate 1. When the electrode plate 1 coats the battery plate on the supporting device 2, the process chamber is vacuumized, so that the supporting device 2 is in a vacuum state.
In an embodiment, the pecvd apparatus further comprises a clamp, which picks up the supporting device 2 and moves the supporting device 2 into or out of between two adjacent electrode plates 1.
In one embodiment, the gripper picks up the holding device 2 and transfers the holding device 2 from one of the process chambers to the other process chamber. It should be noted that one of the process chambers may be a process chamber with an electrode plate 1, or a process chamber without an electrode plate 1 for transporting the support device 2. The other process chamber may be a process chamber with an electrode plate 1 or a process chamber without an electrode plate 1 for transferring the support means 2.
In one embodiment, the clamp may be a robot, a suction cup, a linkage mechanism, or the like.
The supporting device 2 of the embodiment of the present application, please refer to fig. 2, which includes a tray 21 and a framework 22. The tray 21 is configured to hold the battery pieces, and the battery pieces are stacked on the tray 21 in the thickness direction of the tray. The framework 22 is provided with a plurality of accommodating cavities 221, each accommodating cavity 221 is internally provided with a tray 21 connected with the framework 22, and any two trays 21 are staggered in the thickness direction of the trays.
When the supporting device 2 is located between two adjacent electrode plates 1, the two adjacent electrode plates 1 are respectively located on two sides of the tray 21 along the thickness direction of the tray.
Since any two of the trays 21 are staggered from each other in the thickness direction of the trays, the plurality of trays 21 on the framework 22 are distributed substantially along a plane. When the supporting device 2 is located between two adjacent electrode plates 1, two adjacent electrode plates 1 are located tray 21 along the both sides of tray thickness direction respectively, and polylith tray 21 on the skeleton 22 roughly distributes along the plane between two adjacent electrode plates 1, has cut apart into skeleton 22 and has set up the relatively less tray 21 of polylith on the skeleton 22 with the monoblock tray 21 between two adjacent electrode plates 1 in the prior art equivalently. Compared with the whole tray 21 between two adjacent electrode plates 1 in the prior art, the single tray 21 of the embodiment of the present application has a smaller area, which can improve the deformation resistance of the tray 21 to a certain extent, and alleviate or even eliminate the deformation of the tray 21 during the transportation process, so that the form and position tolerance and the control precision of the tray 21 can be substantially within the allowable range. Although the area of the single tray 21 is reduced, the total area of the plurality of trays 21 on the framework 22 is still large enough to place a sufficient number of cells, so that the two adjacent electrode plates 1 can complete the film coating treatment of the sufficient number of cells every time the PECVD film coating is performed, and the capacity of a single device can be ensured. Scattered tray 21 sets up on skeleton 22, can realize the transport to all tray 21 on skeleton 22 through the transport to skeleton 22 to make the battery on polylith tray 21 and the tray 21 move into or shift out two adjacent plate electrodes 1 along with skeleton 22 together, can realize the transport to the battery piece on polylith tray 21 and the tray 21 comparatively fast, improve production efficiency. In this application embodiment, the supporting device 2 that is located between two adjacent electrode boards 1 includes skeleton 22 and the polylith tray 21 of setting on skeleton 22, skeleton 22 and tray 21 are the spare part of two separations, lie in the monoblock tray 21 between two adjacent electrode boards 1 among the prior art, the material of skeleton 22 and tray 21 can carry out the pertinence selection respectively, the selection of the material of skeleton 22 and tray 21 is more nimble, can only choose a material for use unlike the monoblock tray 21 between two adjacent electrode boards 1 among the prior art. Because the single tray 21 of the embodiment of the application has a small area, the deformation resistance of the single tray 21 is improved, even if the framework 22 has general deformation resistance, the tray 21 cannot be greatly deformed, the form and position tolerance and the control precision of the tray 21 can still be basically within an allowable range, the battery sheets on the tray 21 cannot be greatly influenced, and the shape and the material of the framework 22 can be selected more.
It can be understood that, by reducing the area of the single tray 21 to improve the deformation resistance of the tray 21, the thickness of the tray 21 does not need to be increased in order to improve the deformation resistance of the tray 21, and even the thickness of the tray 21 can be reduced to a certain extent, so that the consumption of heat on the tray 21 is reduced, which is beneficial for the electrode plate 1 to transfer heat to the battery cell more quickly through the tray 21, so that the battery cell is heated quickly, and the production efficiency is improved. The area of the single tray 21 is small, the thickness of the tray 21 does not need to be increased, so that the tray 21 is convenient to manufacture, the process cost of the tray 21 can be reduced, and the material cost of the tray 21 can be reduced due to the fact that the tray 21 is thin.
It should be noted that the tray 21 is disposed on the framework 22 and moves together with the framework 22, and the transportation of the tray 21 is usually realized by the transportation of the framework 22. The handling process of the tray 21 includes a process of moving the frame 22 and the tray 21 together into or out of the adjacent two electrode plates 1.
The handling of the tray 21 when the holding device 2 is transferred from one of the process chambers to the other process chamber also includes the transfer of the frame 22 and the tray 21 together from one of the process chambers to the other process chamber.
It should be noted that any two trays 21 are offset from each other in the tray thickness direction, that is, any two trays 21 do not overlap in the tray thickness direction.
It can be understood that the battery piece is placed on the tray 21, the purpose of carrying the battery piece is achieved through carrying of the tray 21, the tray 21 can play a role in protecting the battery piece, damage to the battery piece caused by direct carrying of the battery piece is avoided, and the yield of the device is improved.
In one embodiment, the cell of the solar photovoltaic cell may be a silicon wafer.
In one embodiment, the size of the battery piece is 125 mm-300 mm.
In one embodiment, the jig picks up the frame 22, and moves the frame 22 and all the trays 21 on the frame 22 into or out of between two adjacent electrode plates 1.
In one embodiment, the gripper picks up the frame 22 and transfers the frame 22 and all of the trays 21 on the frame 22 from one of the process chambers to the other process chamber.
In one embodiment, the tray 21 may be made of aluminum alloy, carbon-carbon composite, graphite, titanium alloy, carbon fiber, stainless steel, glass, or the like.
In one embodiment, the skeleton 22 may be made of aluminum alloy, carbon-carbon composite, graphite, titanium alloy, carbon fiber, stainless steel, glass, or the like.
In one embodiment, the material of the frame 22 has a higher elastic modulus than the material of the tray 21. With this configuration, the greater elastic modulus of the material of the frame 22 enables the frame 22 to have a greater deformation resistance, the frame 22 does not deform significantly during the transportation of the tray 21 by the frame 22, and the load applied to the tray 21 by the frame 22 due to the deformation is smaller, so that even if the tray 21 is made of a material having a relatively smaller elastic modulus, the deformation resistance of the tray 21 can be substantially satisfied, and the deformation tolerance and the control accuracy of the tray 21 can be substantially within the allowable range. The material with a large elastic modulus is generally more expensive than the material with a small elastic modulus, and compared with the situation that the whole tray 21 between two adjacent electrode plates 1 is made of the same material, the structure can ensure that the tray 21 does not deform greatly, so that the form and position tolerance and the control precision of the tray 21 can be basically in an allowable range, and on the other hand, the material cost can be reduced because the material with a small elastic modulus of the tray 21 is adopted.
In one embodiment, the framework 22 is made of carbon-carbon composite material, and the tray 21 is made of aluminum alloy.
In one embodiment, referring to fig. 3, the accommodating cavity 221 may be a through hole. So, tray 21 can expose to electrode plate 1 through the through-hole, and electrode plate 1 can directly butt with tray 21, and electrode plate 1 accessible tray 21 is favorable to improving heat transfer efficiency with heat transfer to the battery piece of placing on tray 21. The heat of the electrode plate 1 is prevented from being transferred to the framework 22, then transferred to the tray 21 through the framework 22 and then transferred to the battery piece on the tray 21. The accommodating cavity 221 is a through hole, so that the material of the framework 22 is relatively less, and the cost can be saved to a certain extent.
In one embodiment, the accommodating cavity 221 may be located on a side of the framework 22, and a side of the framework 22 facing away from the accommodating cavity 221 is isolated from the accommodating cavity 221. That is, the accommodating cavity 221 has an opening for the battery piece to enter and exit on one side and is closed on the other side.
In one embodiment, referring to FIG. 3, frame 22 includes a frame 222 and a spacer 223. The partition net 223 is located in an area enclosed by the frame 222 to partition the area enclosed by the frame 222 into a plurality of receiving cavities 221, and the partition net 223 is connected to the frame 222. In this structure, the frame 222 and the partition net 223 are connected to form the framework 22 for placing the tray 21, and the partition net 223 divides the space in the frame 222 into a plurality of accommodating cavities 221 to facilitate placing the tray 21.
In one embodiment, referring to fig. 3, the separator 223 includes a first separator 2231 and a second separator 2232 connected to each other, wherein the first separator 2231 intersects the second separator 2232. In this structure, the first and second dividing bars 2231 and 2232 are crisscrossed to divide the region enclosed by the frame 222 into the plurality of accommodating cavities 221.
It will be appreciated that, since the partition net 223 is located in the area enclosed by the frame 222, that is, the frame 222 is enclosed around the partition net 223, the area enclosed by the frame 222 is divided into the plurality of accommodating chambers 221 by the first and second partition bars 2231 and 2232, and the accommodating chambers 221 are actually through holes.
In one embodiment, referring to fig. 3, the partial accommodating cavity 221 is defined by a frame 222, a first dividing bar 2231 and a second dividing bar 2232.
In one embodiment, the number of the first dividing strips 2231 is multiple, and multiple first dividing strips 2231 are arranged in parallel and at intervals.
In an embodiment, referring to fig. 3, the number of the second division bars 2232 is multiple, and the multiple second division bars 2232 are arranged in parallel and at intervals.
In one embodiment, when the first parting strips 2231 are disposed in parallel and at intervals, and the second parting strips 2232 are disposed in parallel and at intervals, the partial accommodating cavity 221 is defined by two adjacent first parting strips 2231 and two adjacent second parting strips 2232.
In one embodiment, referring to fig. 3, the first parting strip 2231 and the second parting strip 2232 are perpendicular to each other. This allows the rectangular tray 21 to be suitably fitted.
In one embodiment, referring to fig. 3, the accommodating cavity 221 is a through hole, the frame 22 is formed with a support hook 224, each through hole is correspondingly provided with a support hook 224, and the tray 21 is disposed on the support hook 224. Thus, the tray 21 in the accommodating cavity 221 is held by the holding hook 224, so that the tray 21 can be supported on the frame 22, and the tray 21 is prevented from passing through the through hole.
In one embodiment, referring to fig. 3, the first dividing strip 2231 and the frame 222 are formed with hooks 224.
In one embodiment, referring to fig. 3, the hooks 224 in each accommodating cavity 221 are disposed opposite to each other.
In one embodiment, referring to fig. 3, the supporting hook 224 in each accommodating cavity 221 is disposed along the circumferential direction of the accommodating cavity 221.
In one embodiment, one electrode plate 1 of two adjacent electrode plates 1 is a contact electrode plate 1, and when the contact electrode plate 1 abuts against the tray 21, the support hook 224 is located on one side of the framework 22 facing the contact electrode plate 1. With such a structure, the position of the tray 21 on the framework 22 is closer to the side of the framework 22 facing the contact electrode plate 1, which is beneficial for the tray 21 to contact with the contact electrode plate 1.
In one embodiment, referring to fig. 1, when two adjacent electrode plates 1 are disposed along the vertical direction, the electrode plate 1 located below is a contact electrode plate 1, and the support hook 224 is located below the framework 22.
In one embodiment, referring to fig. 2, 4 and 5, the tray 21 is formed with a holding groove 211, and the holding groove 211 is configured to hold the battery piece. Therefore, the battery pieces are placed in the bearing grooves 211, so that the battery pieces are orderly arranged and placed on the tray 21.
It can be understood that the depth H of the support groove 211 should not be too deep or too shallow, which would be unfavorable for the support groove 211 to limit the battery cell, the battery cell may slide out of the support groove 211, and too deep would be unfavorable for the plasma thin film to deposit on the surface of the battery cell. In one embodiment, referring to FIG. 5, the depth H of the supporting groove 211 is 0.1mm to 0.2 mm. Therefore, the depth H of the bearing groove 211 is proper, the purpose of limiting the cell can be achieved, and the PECVD coating can be well carried out on the cell.
It is understood that the shape of the cell sheet of the solar photovoltaic cell is generally rectangular. In one embodiment, referring to fig. 2 and 4, the shape of the supporting groove 211 is rectangular. In this way, the shape of the support groove 211 can be adapted to the shape of the battery piece supported thereby.
In one embodiment, referring to fig. 2 and 4, when the supporting slot 211 is rectangular, the tray 21 is rectangular. In this way, a large number of the receiving grooves 211 can be laid in a space of the tray 21, and the space of the tray 21 is prevented from being wasted.
In one embodiment, referring to fig. 2 and 4, the tray 21 is rectangular, and a plurality of trays 21 are arranged in a matrix. The supporting slots 211 are rectangular, and a plurality of supporting slots 211 on each tray 21 are distributed in a matrix. Structural style like this for the distribution of holding groove 211 and the distribution of tray 21 are all comparatively compact, and the edge of adjacent holding groove 211 can coincide betterly, and the edge of adjacent tray 21 can coincide betterly, is favorable to the space between two adjacent electrode pads 1 of make full use of to lay more battery piece, avoids the space waste between two adjacent electrode pads 1.
In one embodiment, referring to fig. 2 and 4, the tray 21 is rectangular in shape, and 10 trays 21 are arranged in a matrix of 5 rows and 2 columns. The supporting grooves 211 are rectangular, each tray 21 is provided with 10 supporting grooves 211, and the 10 supporting grooves 211 are distributed in a matrix of 2 rows and 5 columns.
It will be appreciated that the matrix distribution of the plurality of trays 21 on the skeleton 22 may take a variety of forms. Illustratively, the plurality of pallets 21 on the skeleton 22 may be in a matrix distribution of 1 row and 2 columns, a matrix distribution of 1 row and 3 columns, a matrix distribution of 2 rows and 2 columns, a matrix distribution of 2 rows and 3 columns, a matrix distribution of 2 rows and 4 columns, a matrix distribution of 3 rows and 3 columns, a matrix distribution of 3 rows and 4 columns, a matrix distribution of 3 rows and 5 columns, a matrix distribution of 10 rows and 10 columns, or the like.
It will be appreciated that the matrix distribution of the plurality of support slots 211 on each pallet 21 may take a variety of forms. Illustratively, the plurality of receiving slots 211 on each tray 21 may be in a 1 row by 1 column matrix distribution, a 1 row by 2 column matrix distribution, a 1 row by 3 column matrix distribution, a 2 row by 2 column matrix distribution, a 2 row by 3 column matrix distribution, a 2 row by 4 column matrix distribution, a 3 row by 3 column matrix distribution, a 3 row by 4 column matrix distribution, a 3 row by 5 column matrix distribution, or a 10 row by 10 column matrix distribution, etc.
In one embodiment, all the supporting brackets 211 between two adjacent electrode plates 1 may be in a matrix distribution of 8 rows and 8 columns, a matrix distribution of 9 rows and 9 columns, or a matrix distribution of 10 rows and 10 columns, etc.
It should be explained that, when two adjacent electrode plates 1 perform PECVD coating on the cell located between the two adjacent electrode plates 1, the electrode plates 1 and the supporting device 2 are both in a vacuum state.
It can be understood that, during the PECVD coating process, the battery piece needs to be heated, and since the electrode plate 1 and the supporting device 2 are both in a vacuum state during the PECVD coating process, even if the accommodating cavity 221 is a through hole, the flat-plate-shaped electrode plate 1 is difficult to directly contact with the battery piece, and the electrode plate 1 contacts with the tray 21 exposed from the through hole so that the electrode plate 1 transfers heat to the battery piece through the tray 21. In one embodiment, referring to fig. 5, the accommodating cavity 221 is a through hole, the tray 21 is exposed from the through hole, the supporting groove 211 is located on one side of the tray 21 along the thickness direction of the tray, and one side of the tray 21 away from the supporting groove 211 is isolated from the supporting groove 211. Structural style like this has increased tray 21 and electrode plate 1's area of contact, and the battery piece that is located support groove 211 can the whole face and tray 21 contact, has increased battery piece and tray 21's area of contact, therefore makes electrode plate 1 can be comparatively fast to battery piece heat transfer, makes battery piece rapid heating, improves production efficiency.
In one embodiment, referring to fig. 1, when two adjacent electrode plates 1 are disposed along the vertical direction, the electrode plate 1 located below is usually abutted against the bottom of the tray 21 exposed from the through hole.
It can be understood that, because the single tray 21 has improved deformation resistance without increasing the thickness of the tray 21, and even can reduce the thickness of the tray 21, the thinner tray 21 is beneficial to the electrode plate 1 to transfer heat to the battery cells more quickly through the tray 21, thereby reducing the heat loss of the tray 21, enabling the battery cells to be heated quickly, and improving the production efficiency.
According to the plasma enhanced chemical vapor deposition equipment, a single process chamber is subjected to PECVD coating, and 100-400 battery pieces can be coated.
The embodiment of the application provides a using method of plasma enhanced chemical vapor deposition equipment, the plasma enhanced chemical vapor deposition equipment is any one of the plasma enhanced chemical vapor deposition equipment, and the using method comprises the following steps:
placing the battery pieces on the tray 21;
moving the framework 22 to enable the supporting device 2 to move between two adjacent electrode plates 1;
and carrying out plasma enhanced chemical vapor deposition coating on the battery piece between two adjacent electrode plates 1.
Through removing skeleton 22, make polylith tray 21 on the skeleton 22 immigrate between two adjacent electrode plates 1 together for polylith tray 21 can immigrate two adjacent electrode plates 1 fast and improved production efficiency.
The various embodiments/implementations provided herein may be combined with each other without contradiction.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. A racking device, comprising:
the tray is configured to support a battery piece, and the battery piece and the tray are overlapped along the thickness direction of the tray; and
the skeleton is formed with a plurality of chambeies that hold, every hold the intracavity be provided with the tray that the skeleton is connected, two arbitrary trays are followed tray thickness direction staggers each other.
2. The support apparatus of claim 1 wherein the frame comprises:
a frame; and
the separating net is positioned in an area surrounded by the frame so as to divide the area surrounded by the frame into a plurality of accommodating cavities, and the separating net is connected with the frame.
3. The support apparatus of claim 2 wherein the divider web includes a first divider strip and a second divider strip connected to each other, the first divider strip intersecting the second divider strip.
4. The support apparatus defined in any one of claims 1 to 3 wherein the frame is made of a material having a modulus of elasticity greater than the material of the tray.
5. The support device as claimed in any one of claims 1 to 3 wherein the tray is formed with a support slot configured to support the battery plate, the support slot having a depth of 0.1mm to 2 mm.
6. The support device as claimed in any one of claims 1 to 3 wherein the tray is rectangular in shape and a plurality of trays are arranged in a matrix, each tray is formed with a plurality of support slots configured to support the battery cells, the support slots are rectangular in shape and a plurality of support slots are arranged in a matrix.
7. The supporting device as claimed in any one of claims 1 to 3 wherein the receiving cavities are through holes, the frame is formed with hooks, each through hole is provided with a corresponding hook, and the tray is arranged on the hook.
8. The supporting device as claimed in any one of claims 1 to 3, wherein the accommodating cavity is a through hole, the tray is exposed from the through hole, the tray is formed with a supporting groove, the supporting groove is configured to support the battery plate, the supporting groove is located on one side of the tray along the thickness direction of the tray, and one side of the tray away from the supporting groove is isolated from the supporting groove.
9. A plasma enhanced chemical vapor deposition apparatus, comprising:
a plurality of electrode plates; and
the support device of any one of claims 1 to 6 or 8, wherein the support device is configured to be movable in and out between two adjacent electrode plates; when the bearing device is positioned between two adjacent electrode plates, the two adjacent electrode plates are respectively positioned at two sides of the tray along the thickness direction of the tray.
10. The apparatus according to claim 9, wherein the accommodating cavity is a through hole, the frame is formed with a support hook, each through hole is correspondingly provided with the support hook, and the tray is arranged on the support hook; two adjacent one of them plate electrode of plate electrode is the contact electrode board, works as the contact electrode board with the tray butt, the support hook is located the skeleton is towards one side of contact electrode board.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202120099969.4U CN215163110U (en) | 2021-01-14 | 2021-01-14 | Supporting device and plasma enhanced chemical vapor deposition equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202120099969.4U CN215163110U (en) | 2021-01-14 | 2021-01-14 | Supporting device and plasma enhanced chemical vapor deposition equipment |
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| CN215163110U true CN215163110U (en) | 2021-12-14 |
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| CN202120099969.4U Active CN215163110U (en) | 2021-01-14 | 2021-01-14 | Supporting device and plasma enhanced chemical vapor deposition equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114763607A (en) * | 2021-01-14 | 2022-07-19 | 营口金辰机械股份有限公司 | Supporting device and plasma enhanced chemical vapor deposition equipment |
| WO2022152023A1 (en) * | 2021-01-14 | 2022-07-21 | 营口金辰机械股份有限公司 | Plasma enhanced chemical vapor deposition device and use method therefor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114763607A (en) * | 2021-01-14 | 2022-07-19 | 营口金辰机械股份有限公司 | Supporting device and plasma enhanced chemical vapor deposition equipment |
| WO2022152023A1 (en) * | 2021-01-14 | 2022-07-21 | 营口金辰机械股份有限公司 | Plasma enhanced chemical vapor deposition device and use method therefor |
| WO2022152020A1 (en) * | 2021-01-14 | 2022-07-21 | 营口金辰机械股份有限公司 | Bearing apparatus, and plasma-enhanced chemical vapor deposition device and method for using same |
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