CN215103541U

CN215103541U - Plasma enhanced chemical vapor deposition equipment

Info

Publication number: CN215103541U
Application number: CN202120098265.5U
Authority: CN
Inventors: 杨宝海; 杨娜; 潘家永; 许伟伟; 宋玉超; 李轶军; 李翔; 李敦信; 李义升
Original assignee: Yingkou Jinchen Machinery Co ltd
Current assignee: Yingkou Jinchen Machinery Co ltd
Priority date: 2021-01-14
Filing date: 2021-01-14
Publication date: 2021-12-10
Anticipated expiration: 2031-01-14

Abstract

The embodiment of the application provides a plasma reinforcing chemical vapor deposition equipment, be located between two adjacent plate electrodes when the tray group, arbitrary two blocks of trays stagger each other along tray thickness direction, make the polylith tray roughly along the plane distribution, two adjacent plate electrodes are located the both sides of tray along tray thickness direction respectively, be the polylith tray roughly along the plane distribution between two adjacent plate electrodes, be equivalent to and cut apart into the polylith tray with the monoblock tray that originally is in between two adjacent plate electrodes, the area of monoblock tray has been reduced. The area of the single tray is reduced, the total area of the plurality of trays is still large enough, a sufficient number of battery pieces can be placed, the capacity of a single device can be ensured, the area of the single tray is relatively small, the deformation resistance of the tray can be improved to a certain extent, the deformation of the tray in the conveying process is relieved or even eliminated, and the deformation tolerance and the control precision of the tray can be basically within an allowable range.

Description

Plasma enhanced chemical vapor deposition equipment

Technical Field

The application relates to the technical field of solar cells, in particular to a plasma enhanced chemical vapor deposition device.

Background

In the process of manufacturing a solar cell, a cell needs to be coated, and commonly used coating methods are Plasma Enhanced Chemical Vapor Deposition (PECVD), which is classified into tubular PECVD and plate PECVD. During the use process, the tray for holding the battery piece can be greatly deformed, so that the form and position tolerance and the control precision of the tray are beyond the allowable range.

SUMMERY OF THE UTILITY MODEL

In view of the above, embodiments of the present application are directed to providing a plasma enhanced chemical vapor deposition apparatus to mitigate deformation of a tray.

To achieve the above object, an embodiment of the present invention provides a plasma enhanced chemical vapor deposition apparatus, including:

a plurality of electrode plates; and

the tray set is configured to be capable of moving in or out between two adjacent electrode plates, the tray set comprises a plurality of trays for bearing battery pieces, and the battery pieces and the trays are overlapped along the thickness direction of the trays; when the tray set is positioned between two adjacent electrode plates, any two trays are staggered along the thickness direction of the trays, and the two adjacent electrode plates are respectively positioned at two sides of the tray along the thickness direction of the tray.

In one embodiment, the plasma enhanced chemical vapor deposition apparatus further comprises a plurality of process chambers, at least one of the process chambers having the electrode plate disposed therein, and a jig configured to transfer the tray in one of the process chambers into another process chamber.

In one embodiment, the clamp comprises:

a main body support;

a first transfer drive in driving communication with the body support, the first transfer drive configured to drive the body support between the process chambers; and

and the hand grip is connected to one side of the main body support, which is far away from the first conveying driving device, and is configured to take and place the tray.

In an embodiment, each tray is provided with one corresponding gripper.

In one embodiment, the clamp comprises:

a support member;

a second transfer drive coupled to the support, the second transfer drive configured to drive the support between the process chambers; and

the bearing arm is connected with the supporting piece and is configured to take and place the tray.

In one embodiment, the number of the support arms is multiple, the plurality of support arms are arranged in parallel, and each support arm supports a plurality of trays arranged along the length direction of the support arm in the process that the support arm transfers the trays in one process chamber to another process chamber.

In one embodiment, the tray is formed with a supporting groove, the supporting groove is configured to support the battery piece, the supporting groove is located on one side of the tray along the thickness direction of the tray, and one side of the tray, which is far away from the supporting groove, is isolated from the supporting groove; when the tray set is positioned between two adjacent electrode plates, in the two adjacent electrode plates, the electrode plate positioned on one side of the tray, which deviates from the bearing groove, is abutted to the tray.

In one embodiment, the tray is provided with a supporting groove, the supporting groove is configured to support the battery piece, and the depth of the supporting groove is 0.1-2 mm.

In one embodiment, the tray is rectangular, a plurality of trays are distributed in a matrix, each tray is provided with a plurality of supporting grooves, the supporting grooves are configured to support the battery pieces, the supporting grooves are rectangular, and the supporting grooves are distributed in a matrix.

In one embodiment, each of the trays is formed with positioning holes configured to determine a position of the tray between two adjacent ones of the electrode plates.

The utility model provides a plasma reinforcing chemical vapor deposition equipment, be located between two adjacent plate electrodes when the tray group, two arbitrary trays stagger each other along tray thickness direction, make the polylith tray roughly along the plane distribution, two adjacent plate electrodes are located the both sides of tray along tray thickness direction respectively, be the polylith tray of roughly following the plane distribution between two adjacent plate electrodes, be equivalent to and cut apart into the polylith tray with the monoblock tray that originally is in between two adjacent plate electrodes, the area of monoblock tray has been reduced. The area of a single tray is reduced, the total area of a plurality of trays is still large enough, a sufficient number of battery pieces can be placed, the coating treatment of the sufficient number of battery pieces can be completed by carrying out PECVD coating on two adjacent electrode plates once, the capacity of a single device can be ensured, the area of the single tray is relatively small, the deformation resistance of the tray can be improved to a certain extent, the deformation of the tray in the carrying process is relieved or even eliminated, and the form and position tolerance and the control precision of the tray can be basically in an allowable range.

Drawings

FIG. 1 is a schematic structural diagram of an electrode plate and a tray set of a PECVD apparatus according to an embodiment of the present application;

FIG. 2 is a schematic structural diagram of a tray set according to an embodiment of the present application;

FIG. 3 is a schematic structural diagram of a tray according to an embodiment of the present application;

FIG. 4 is a cross-sectional view taken at location A-A of FIG. 3;

FIG. 5 is a schematic diagram of a gripper according to an embodiment of the present application picking up an entire tray stack at a time, wherein the trays in the tray stack are picked up by the gripper;

FIG. 6 is a schematic view of a clamp of an embodiment of the present application picking up an entire stack of trays at once with a holding arm;

FIG. 7 is a schematic view of an assembly of the tray set and the frame according to an embodiment of the present application;

fig. 8 is a schematic structural diagram of a framework according to an embodiment of the present application.

Description of reference numerals: an electrode plate 1; a tray group 2; a tray 21; a positioning hole 211; a bearing groove 212; a clamp 3; a main body support 31; a first conveyance drive 32; a hand grip 33; the hook portion 331; a support 34; the second conveyance driving device 35; a support arm 36; a framework 4; a separation net 41; a first dividing strip 411; a second separator bar 412; a frame 42; the accommodation chamber 43; a support hook 44.

Detailed Description

It should be noted that, in the present application, technical features in examples and embodiments may be combined with each other without conflict, and the detailed description in the specific embodiment should be understood as an explanation of the gist of the present application and should not be construed as an improper limitation to the present application.

In the description of the embodiments of the present application, "upper", "lower", "top", "bottom", orientation or positional relationship is based on the orientation or positional relationship shown in fig. 1. In the description of the embodiments of the present application, please refer to fig. 4, wherein the direction indicated by arrow B is the thickness direction of the tray. In describing the embodiments of the present application, please refer to fig. 6, wherein the direction indicated by the arrow C is the length direction of the supporting arm. It is to be understood that such directional terms are merely for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the present application.

Before describing the embodiments of the present application, it is necessary to analyze the reason why the tray is deformed in the prior art, and obtain the technical solution of the embodiments of the present application through reasonable analysis.

For plate-type PECVD, in the prior art, a whole tray is usually moved into between two electrode plates, and all the battery pieces on the whole tray are subjected to PECVD coating together, each time PECVD coating is performed, only one tray is arranged between the two electrode plates, and after the coating is completed, the battery pieces need to be moved out from between the electrode plates together with the whole tray. Along with the development of technology, the area of plate electrode is bigger and bigger, carries out the PECVD coating film to more quantity of battery piece for the plate electrode of make full use of area increase, and the area of putting into the monoblock tray between two plate electrodes is also bigger and bigger correspondingly, and the area of monoblock tray is big to certain extent makes the tray can take place great deformation in handling and leads to the form and position tolerance and the control accuracy of tray to surpass the scope of permitting.

In view of this, the embodiment of the present application provides a plasma enhanced chemical vapor deposition apparatus, referring to fig. 1, including a tray set 2 and a plurality of electrode plates 1. The tray group 2 is configured to be capable of moving in and out between two adjacent electrode plates 1, and the tray group 2 includes a plurality of trays 21 for holding battery pieces, and the battery pieces are stacked on the trays 21 in the thickness direction of the trays. When the tray set 2 is located between two adjacent electrode plates 1, any two trays 21 are staggered with each other along the thickness direction of the trays, and the two adjacent electrode plates 1 are respectively located at two sides of the trays 21 along the thickness direction of the trays. Structural style like this, be located between two adjacent plate electrodes 1 when tray group 2, arbitrary two blocks of trays 21 stagger each other along tray thickness direction, make polylith tray 21 roughly along the plane distribution, two adjacent plate electrodes 1 are located the both sides of tray 21 along tray thickness direction respectively, be polylith tray 21 roughly along the plane distribution between two adjacent plate electrodes 1, be equivalent to and cut apart into polylith tray 21 with the monoblock tray 21 that originally is in between two adjacent plate electrodes 1, the area of monoblock tray 21 has been reduced. The area of the single tray 21 is reduced, the total area of the plurality of trays 21 is still large enough, a sufficient number of battery pieces can be placed, so that the coating treatment of the sufficient number of battery pieces can be completed by performing PECVD coating on two adjacent electrode plates 1 every time, the capacity of a single device can be ensured, the area of the single tray 21 is relatively small, the deformation resistance of the tray 21 can be improved to a certain extent, the deformation of the tray 21 in the conveying process is relieved or even eliminated, and the deformation tolerance and the control precision of the tray 21 can be basically in an allowable range. In addition, the deformation resistance of the tray 21 is improved by reducing the area of the single tray 21, the thickness of the tray 21 does not need to be increased in order to improve the deformation resistance of the tray 21, and even the thickness of the tray 21 can be reduced to a certain extent, so that the consumption of heat on the tray 21 is reduced, the heat can be more quickly transferred to the battery cell by the electrode plate 1 through the tray 21, the battery cell is quickly heated, and the production efficiency is improved. The area of the single tray 21 is small, the thickness of the tray 21 does not need to be increased, so that the tray 21 is convenient to manufacture, the process cost of the tray 21 can be reduced, and the material cost of the tray 21 can be reduced due to the fact that the tray 21 is thin.

It should be explained that the tray set 2 moves in or out between two adjacent electrode plates 1, that is, all the trays 21 of the tray set 2 move in or out between two adjacent electrode plates 1, and the handling process of the trays 21 includes a process of moving the trays 21 in or out of two adjacent electrode plates 1.

It should be noted that any two trays 21 are offset from each other in the tray thickness direction, that is, any two trays 21 do not overlap in the tray thickness direction.

It can be understood that the battery piece is placed on the tray 21, the purpose of carrying the battery piece is achieved through carrying of the tray 21, the tray 21 can play a role in protecting the battery piece, damage to the battery piece caused by direct carrying of the battery piece is avoided, and the yield of the device is improved.

In one embodiment, referring to fig. 1, two adjacent electrode plates 1 are generally arranged in an up-down direction.

In one embodiment, two adjacent electrode plates 1 may be arranged along other directions than the up-down direction.

In one embodiment, the tray 21 may be made of aluminum alloy, carbon-carbon composite, graphite, titanium alloy, carbon fiber, stainless steel, glass, or the like.

It will be appreciated that the tray 21 does not necessarily need to be made of a material having a greater resistance to deformation, since the reduced area of the single tray 21 increases the resistance to deformation of the tray 21. In one embodiment, the tray 21 may be made of aluminum alloy, which is relatively cheap, and is beneficial to reducing the cost.

In one embodiment, the cell is typically a silicon wafer.

In one embodiment, the cell pieces have a size of about 125mm to 300 mm.

In one embodiment, referring to fig. 2 and 3, each tray 21 is formed with a positioning hole 211, and the positioning hole 211 is configured to determine the position of the tray 21 between two adjacent electrode plates 1. Structural style like this, fix a position respectively every tray 21 through locating hole 211, make polylith tray 21 can arrange in order between two adjacent plate electrodes 1, be favorable to putting more tray 21 and corresponding battery piece, ensure the productivity of single equipment betterly, avoid the polylith tray 21 unordered range of tray group 2 to cause the space waste between two adjacent plate electrodes 1.

In one embodiment, a positioning hole 211 is provided at a diagonal position of each tray 21.

In one embodiment, referring to fig. 2 to 4, each tray 21 is formed with a plurality of supporting slots 212, and the supporting slots 212 are configured to support the battery cells. Thus, the battery pieces are placed in the supporting groove 212, so that the battery pieces are orderly arranged on the tray 21.

In one embodiment, the receiving groove 212 is located on a side of the tray 21 along the thickness direction of the tray, and a side of the tray 21 facing away from the receiving groove 212 is isolated from the receiving groove 212.

It can be understood that the depth H of the support groove 212 should not be too deep or too shallow, which is not conducive to the support groove 212 limiting the cell, the cell can slide out of the support groove 212, and too deep is not conducive to the deposition of the plasma film on the surface of the cell. In one embodiment, the depth H of the supporting slot 212 is 0.1-2 mm. Therefore, the depth H of the bearing groove 212 is proper, the purpose of limiting the cell can be achieved, and the PECVD coating can be well performed on the cell.

It is understood that the shape of the cell sheet of the solar photovoltaic cell is generally rectangular. In one embodiment, the shape of the holding groove 212 is rectangular.

In one embodiment, referring to fig. 2-4 and fig. 6, the supporting trough 212 is rectangular, the supporting troughs 212 are arranged in a matrix, the tray 21 is rectangular, and the trays 21 are arranged in a matrix. Structural style like this for the distribution of holding groove 212 and the distribution of tray 21 are all comparatively compact, and the edge of adjacent holding groove 212 can coincide betterly, and the edge of adjacent tray 21 can coincide betterly, is favorable to the space between two adjacent electrode pads 1 of make full use of to lay more battery piece, avoids the space waste between two adjacent electrode pads 1.

In one embodiment, referring to fig. 2 and 3, the tray 21 is rectangular, and 9 trays 21 are arranged in a matrix of 3 rows and 3 columns. The shape of the supporting slots 212 is rectangular, each tray 21 has 4 supporting slots 212, and the 4 supporting slots 212 are distributed in a matrix of 2 rows and 2 columns.

In one embodiment, the plurality of trays 21 of the tray set 2 may be in a matrix distribution of 1 row and 2 columns, a matrix distribution of 1 row and 3 columns, a matrix distribution of 2 rows and 2 columns, a matrix distribution of 2 rows and 3 columns, a matrix distribution of 2 rows and 4 columns, a matrix distribution of 3 rows and 3 columns, a matrix distribution of 3 rows and 4 columns, a matrix distribution of 3 rows and 5 columns, a matrix distribution of 10 rows and 10 columns, or the like.

In one embodiment, the plurality of supporting brackets 212 of each tray 21 may be in a 1-row and 1-column matrix distribution, a 1-row and 2-column matrix distribution, a 1-row and 3-column matrix distribution, a 2-row and 2-column matrix distribution, a 2-row and 3-column matrix distribution, a 2-row and 4-column matrix distribution, a 3-row and 3-column matrix distribution, a 3-row and 4-column matrix distribution, a 3-row and 5-column matrix distribution, a 10-row and 10-column matrix distribution, or the like.

In one embodiment, all the supporting brackets 212 between two adjacent electrode plates 1 may be in a matrix distribution of 8 rows and 8 columns, a matrix distribution of 9 rows and 9 columns, or a matrix distribution of 10 rows and 10 columns, etc.

In one embodiment, referring to fig. 6, the tray 21 is rectangular, and 10 trays 21 are arranged in a matrix of 2 rows and 5 columns. The support grooves 212 are rectangular in shape, and each tray 21 has 10 support grooves 212, and the 10 support grooves 212 are arranged in a matrix distribution of 5 rows and 2 columns.

In one embodiment, when two adjacent electrode plates 1 perform a film coating process on the battery piece on the tray 21 between two adjacent electrode plates 1, the tray 21 and the battery piece on the tray 21 are usually in a vacuum state.

It should be explained that the vacuum state is also a negative pressure state, and in the process of coating the battery piece, the negative pressure degree is larger and the air is thinner.

In one embodiment, the apparatus further includes a jig 3 and a plurality of process chambers, at least one of the process chambers having the electrode plate 1 disposed therein, the jig 3 being configured to transfer the tray 21 in one of the process chambers to another process chamber. According to the structure, the electrode plates 1 are arranged in at least one process chamber, PECVD coating treatment of the battery plates on the tray 21 is usually carried out in the corresponding process chamber, the tray 21 of the tray set 2 can be transferred from one process chamber to another process chamber with the electrode plates 1 through the clamp 3, the tray set 2 is moved between the two adjacent electrode plates 1, when the tray set 2 is positioned between the two adjacent electrode plates 1, the electrode plates 1 carry out PECVD coating treatment on the battery plates on the tray 21, after coating is finished, the tray set 2 is taken out from between the two adjacent electrode plates 1, the battery plates are transferred from the process chamber with the electrode plates 1 to other process chambers through the clamp 3, and the transfer of the tray 21 between different process chambers is realized through the clamp 3.

It should be explained that the trays 21 of the tray set 2 can be transferred from one of the process chambers to another process chamber with the electrode plate 1 by the jig 3, where one of the process chambers may be either the process chamber with the electrode plate 1 or the chamber for transferring the tray 21 without the electrode plate 1.

It should be explained that the battery plate is transferred from the process chamber with the electrode plate 1 to other process chambers through the clamp 3, wherein the other process chambers can be the process chamber with the electrode plate 1 or the chamber for transferring the tray 21 without the electrode plate 1

It is understood that the handling process of the tray 21 includes a process of transferring the tray 21 between different process chambers, in addition to the movement of the tray 21 into or out of the adjacent two electrode plates 1.

In one embodiment, the tray set 2 can be moved into or out of two adjacent electrode plates 1 by the clamp 3.

In one embodiment, all the trays 21 in the tray group 2 can be moved together into or out of the adjacent two electrode plates 1 by the clamp 3.

In one embodiment, all the trays 21 in the tray group 2 can be moved into or out of two adjacent electrode plates 1 in sequence by the clamp 3.

In one embodiment, the process chamber is usually under vacuum during the process of coating the battery plate on the tray 21 by the electrode plate 1 in the process chamber.

In one embodiment, referring to fig. 5, the clamp 3 includes a main body frame 31, a first transfer driving device 32, and a gripper 33. The first transfer driving device 32 is drivingly connected to the main body support 31, and the first transfer driving device 32 is configured to drive the main body support 31 to move between the process chambers. A hand grip 33 is attached to the side of the main body frame 31 facing away from the first transfer drive 32, the hand grip 33 being configured to take and place the tray 21. According to the structure, the tray 21 is taken and placed by the hand grip 33, the main body support 31 is driven to move by the first conveying driving device 32, and the main body support 31 drives the hand grip 33 carrying the tray 21 to move, so that the tray 21 is conveyed among different chambers.

In one embodiment, the first transmission driving device 32 may be a roller driving device, and the power source drives the roller to roll on the corresponding track to move the main body frame 31.

In one embodiment, the first transfer drive 32 may be a link drive. The power source drives the link mechanism to drive the main body support 31 to move.

In one embodiment, referring to fig. 5, each tray 21 is provided with a handle 33. In this way, all trays 21 in the tray stack 2 can be gripped in their entirety at once and transferred to the respective positions. All trays 21 of the tray stack 2 are moved together into or out of the adjacent two electrode plates 1, for example by gripping by a gripper 33.

In one embodiment, the plurality of grippers 33 are distributed in a matrix.

In one embodiment, when 9 pallets 21 are arranged in a 3-row and 3-column matrix, 9 fingers 33 are arranged in a 3-row and 3-column matrix, and the fingers 33 correspond to the pallets 21 one by one.

In an embodiment, all trays 21 in the tray set 2 can be moved into or out of two adjacent electrode plates 1 in sequence by the hand grip 33.

In one embodiment, the gripper 33 may be an active gripper that is capable of actively releasing or gripping the pallet 21.

In one embodiment, referring to FIG. 5, the gripper 33 may be a passive gripper that does not actively release or grip the pallet 21. Illustratively, the bottom of the passive grip is formed with a hook 331, and the tray 21 is held by the hook 331 abutting below the tray 21 to achieve gripping of the tray 21.

In one embodiment, the gripper 33 may be a vacuum robot, and the tray 21 is sucked by the vacuum robot.

In one embodiment, all the trays 21 of the tray set 2 may be sucked together by a vacuum robot to realize the grabbing of all the trays 21 of the tray set 2.

In one embodiment, all the trays 21 of the tray set 2 sucked by the vacuum robot may be released together to realize the corresponding position placement of all the trays 21 of the tray set 2.

In one embodiment, the gripper 33 may be replaced with a suction cup.

In one embodiment, referring to fig. 6, the fixture 3 includes a supporting member 34, a second transmission driving device 35, and a supporting arm 36. A second transfer device is coupled to the support 34 and a second transfer drive 35 is configured to drive the support 34 between the process chambers. A holding arm 36 is connected to the support 34, and the holding arm 36 is configured to take and place the tray 21. In this configuration, the second conveying driving device 35 drives the supporting member 34 to move, and the supporting member 34 drives the supporting arm 36 holding the tray 21 to move, so that the tray 21 is conveyed between different process chambers through the supporting arm 36.

In one embodiment, the tray set 2 can be moved into or out of two adjacent electrode plates 1 by the supporting arm 36.

In one embodiment, referring to fig. 6, the number of the support arms 36 is plural, and the plurality of support arms 36 are arranged in parallel, and each of the support arms 36 supports a plurality of trays 21 arranged along the length direction of the support arm 36 during the process of transferring the tray 21 in one of the process chambers to another process chamber by the support arm 36. Like this structural style, to being the polylith tray 21 of matrix distribution, the support arm 36 can support a competent tray 21 or a tray 21 of tray group 2, can comparatively conveniently get tray 21 and put, can snatch all trays 21 of tray group 2 together through a plurality of support arms 36 of parallel arrangement, therefore can move into or shift out between two adjacent electrode pads 1 with all trays 21 of tray group 2 together.

It can be understood that, during the coating process of the battery piece, the electrode plate 1, the tray 21 and the battery piece are usually in a vacuum state, the electrode plate 1 is usually a flat plate and is difficult to contact the battery piece on the tray 21 to heat the battery piece, and in the vacuum state, the heat of the electrode plate 1 is difficult to be rapidly transferred to the battery piece in an empty state, which affects the production efficiency. In one embodiment, referring to fig. 1 and 4, the supporting slot 212 is located on one side of the tray 21 along the thickness direction of the tray, and the side of the tray 21 away from the supporting slot 212 is isolated from the supporting slot 212. When the tray set 2 is located between two adjacent electrode plates 1, in two adjacent electrode plates 1, the electrode plate 1 located on one side of the tray 21 departing from the support bracket 212 abuts against the tray 21. Structural style like this, because one side that tray 21 deviates from holding groove 212 is kept apart with holding groove 212, and is located tray 21 and deviates from electrode plate 1 and the tray 21 butt of holding groove 212 one side, the battery piece that is located in holding groove 212 can the whole face and the contact of tray 21, and has increased tray 21 and electrode plate 1's area of contact, is favorable to electrode plate 1 to the battery piece heat transfer comparatively fast. Furthermore, the thickness of the single tray 21 is small, which is beneficial to rapidly transferring the heat of the electrode plate 1 to the battery piece.

It will be appreciated that, in general, the electrode plate 1 facing the support slot 212 generally forms a gap with the cell sheet so that process gas enters the gap to form plasma.

In one embodiment, referring to fig. 1 and 4, two adjacent electrode plates 1 are arranged in the vertical direction, the supporting groove 212 faces upward, and the bottom of the tray 21 abuts against the lower electrode plate 1.

In one embodiment, the number of the battery pieces coated in a single process chamber at a time can reach about 100-400.

In one embodiment, referring to fig. 7 and 8, the pecvd apparatus further comprises a frame 4, and all trays of the tray set are placed on the frame 4. The framework 4 is formed with accommodating cavities 43, and each tray is correspondingly provided with one accommodating cavity 43. Structural style like this, all trays of tray group are placed on a holistic skeleton 4, can realize carrying all trays of tray group together through the transport to skeleton 4, and all trays of tray group can comparatively fast immigration or shift out between two adjacent plate electrodes along with the skeleton together, improve production efficiency. Moreover, the deformation resistance of the single tray is improved due to the small area of the single tray, even if the deformation resistance of the framework 4 is poor, the battery pieces on the tray are not greatly affected, and the framework 4 is relatively free in shape setting and material selection.

In one embodiment, referring to fig. 8, the accommodating cavity 43 is a through hole. With the structure, the solid material part of the framework 4 is basically arranged around each tray, and the material of the framework 4 is relatively less, so that the cost can be saved to a certain extent.

In an embodiment, the accommodating cavity 43 may also be formed on one side of the framework 4, and the side of the framework 4 facing away from the accommodating cavity 43 is isolated from the accommodating cavity 43.

In an embodiment, when the accommodating cavity 43 is a through hole, the tray 21 can be exposed to the electrode plate 1 through the through hole, the electrode plate 1 can be directly abutted to the tray 21, and the electrode plate 1 can transfer heat to the battery cell placed on the tray 21 through the tray 21, which is beneficial to improving heat transfer efficiency. The heat of avoiding the electrode board transmits skeleton 4 earlier, and rethread skeleton 4 transmits the tray, then transmits the battery piece on the tray again.

In one embodiment, the material of the frame 4 may be aluminum alloy, carbon-carbon composite, graphite, titanium alloy, carbon fiber, stainless steel, glass, or the like.

In one embodiment, when the accommodating cavity 43 is a through hole, the elastic modulus of the material of the frame 4 is greater than that of the material of the tray. With such a configuration, since the modulus of elasticity of the material of the frame 4 is large, the deformation resistance of the frame 4 can be improved to some extent, and the load applied to the pallet due to the deformation of the frame 4 can be reduced, so that the pallet is not largely deformed or even not deformed even if the modulus of elasticity of the material of the pallet is small. The great material of elasticity modulus is comparatively expensive usually, and skeleton 4 and tray adopt the material of two kinds of different elasticity moduli according to actual conditions, can alleviate the deformation of tray to a certain extent on the one hand, and on the other hand all adopts the material of higher elasticity modulus indiscriminately for skeleton 4 and tray, can reduction in production cost.

In one embodiment, referring to fig. 8, the framework 4 includes a frame 42 and a partition net 41, the partition net 41 is located in an area enclosed by the frame 42 to partition the area enclosed by the frame 42 into a plurality of accommodating cavities 43, and the partition net 41 is connected to the frame 42. In this configuration, by providing the partition net 41 in the frame 42, the area surrounded by the frame 42 is partitioned into the plurality of accommodating chambers 43 for accommodating the trays.

In one embodiment, referring to fig. 8, the separation net 41 includes a first separation bar 411 and a second separation bar 412 connected to each other, and the first separation bar 411 and the second separation bar 412 form a predetermined angle. In this structure, the first and second dividing strips 411 and 412 form a crisscross network, so that the area enclosed by the frame 42 is divided into a plurality of accommodating cavities 43.

It can be understood that, since the shape of the battery piece is generally rectangular, the shape of the supporting groove on the tray and the shape of the tray are both rectangular correspondingly. In one embodiment, the predetermined included angle is 90 degrees. Therefore, the shape of the accommodating cavity 43 can be adapted to the shape of the tray as much as possible, so that the tray can be accommodated in the smallest space, the space can be fully utilized, and the space waste can be avoided.

In an embodiment, referring to fig. 8, when the receiving grooves are through holes, the frame 4 is formed with a support hook 44, each receiving groove is provided with a support hook 44, and the tray is arranged on the support hook 44. With the structure, the tray in the accommodating groove is supported by the supporting hook 44, so that the tray can be supported on the framework 4, and the tray is prevented from passing through the through hole.

In one embodiment, the first dividing strip 411 and the rim 42 are formed with hooks 44.

In one embodiment, one electrode plate 1 of two adjacent electrode plates 1 is a contact electrode plate, and when the contact electrode plate abuts against the tray, the support hook 44 is located on the side of the framework 4 facing the contact electrode plate. Structural style like this for the position of tray on skeleton 4 is close to skeleton 4 one side towards the contact electrode board, is favorable to tray and contact electrode board contact.

In an embodiment, referring to fig. 1, two adjacent electrode plates 1 are arranged along the up-down direction, and the electrode plate 1 located below is a contact electrode plate. The bracket hook 44 is located on the underside of the skeleton 4.

In one embodiment, the clamp 3 may move the frame 4 and the tray group 2 on the frame 4 into or out of the space between two adjacent electrode plates 1 by grabbing the frame 4.

In a second aspect of the embodiments of the present application, there is provided a method for using a plasma enhanced chemical vapor deposition apparatus, where the plasma enhanced chemical vapor deposition apparatus is any one of the plasma enhanced chemical vapor deposition apparatuses. The using method comprises the following steps:

placing the battery pieces on a tray 21;

all trays 21 of the tray group 2 are moved into the space between two adjacent electrode plates 1;

and carrying out plasma enhanced chemical vapor deposition coating on the battery piece between two adjacent electrode plates 1.

Therefore, all the trays 21 in the tray set 2 are moved into the space between two adjacent electrode plates 1 together, so that the tray set 2 can be quickly moved into or out of the two adjacent electrode plates 1, the time is saved, and the production efficiency is improved.

The various embodiments/implementations provided herein may be combined with each other without contradiction.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A plasma enhanced chemical vapor deposition apparatus, comprising:

a plurality of electrode plates; and

2. The apparatus of claim 1, further comprising a plurality of process chambers and a chuck, at least one of the process chambers having the electrode plate disposed therein, the chuck configured to transfer a tray in one of the process chambers to another of the process chambers.

3. The apparatus of claim 2, wherein the chuck comprises:

a main body support;

4. The apparatus of claim 3, wherein each of the trays is provided with one of the fingers.

5. The apparatus of claim 2, wherein the chuck comprises:

a support member;

6. The apparatus of claim 5, wherein the number of the support arms is plural, and the plurality of support arms are arranged in parallel, and each support arm supports a plurality of the trays arranged along a length direction of the support arm during the process of the support arm transferring the trays in one of the process chambers to another process chamber.

7. The PECVD apparatus as claimed in any one of claims 1-6, wherein the tray is formed with a supporting groove configured to support the battery plate, the supporting groove is located at one side of the tray along the thickness direction of the tray, and the side of the tray away from the supporting groove is isolated from the supporting groove; when the tray set is positioned between two adjacent electrode plates, in the two adjacent electrode plates, the electrode plate positioned on one side of the tray, which deviates from the bearing groove, is abutted to the tray.

8. The PECVD apparatus as claimed in any one of claims 1-6, wherein the tray is formed with a supporting groove, the supporting groove is configured to support the battery plate, and the supporting groove has a depth of 0.1 mm-2 mm.

9. The PECVD apparatus as claimed in any one of claims 1-6, wherein the tray is rectangular, a plurality of trays are arranged in a matrix, each tray is formed with a plurality of supporting grooves, the supporting grooves are configured to support the battery plate, the supporting grooves are rectangular, and a plurality of supporting grooves are arranged in a matrix.

10. The apparatus according to any one of claims 1 to 6, wherein each of the trays is formed with positioning holes configured to determine a position of the tray between two adjacent electrode plates.