CN212676229U

CN212676229U - Graphite boat suitable for photovoltaic super large silicon chip

Info

Publication number: CN212676229U
Application number: CN202021519143.0U
Authority: CN
Inventors: 刘世强; 王斯海; 姚骞; 王亚楠; 王广华; 李冬玫
Original assignee: Tongwei Solar Meishan Co Ltd
Current assignee: Tongwei Solar Meishan Co Ltd
Priority date: 2020-07-28
Filing date: 2020-07-28
Publication date: 2021-03-09
Anticipated expiration: 2030-07-28

Abstract

The utility model discloses a graphite boat suitable for photovoltaic super large silicon chip for improve the graphite boat, belong to solar cell technical field, this graphite boat includes the graphite boat piece that the multirow links together, be equipped with graphite boat groove on the graphite boat piece, be provided with the stuck point subassembly that is used for fixed silicon chip on the graphite boat piece, the stuck point subassembly distributes around graphite boat groove, the stuck point subassembly includes bottom stuck point, side stuck point and top stuck point, two and divide and establish in the both sides of graphite boat groove of side stuck point; the utility model discloses a design the checkpoint subassembly, the perfect heavy problem of battery piece edge bypassing degree has been solved to the silicon chip of having avoided between two adjacent graphite boat pieces contacts together, has avoided producing the short circuit in glow discharge, causes the heavy industry of stopping work, has effectively guaranteed the efficiency and the productivity of equipment production, has reduced production staff's intensity of labour simultaneously.

Description

Graphite boat suitable for photovoltaic super large silicon chip

Technical Field

The utility model provides a graphite boat suitable for photovoltaic super large silicon chip, belongs to solar cell technical field, especially relates to graphite boat technical field.

Background

In the tubular PECVD, a graphite boat is required to carry silicon wafers to enter a furnace tube for processing, the graphite boat is composed of a plurality of graphite boat blades, and a plurality of graphite clamping points are arranged on each graphite boat blade to fix the silicon wafers.

At present, because the specification of a produced battery piece is 158.75 mm-166 mm, a silicon chip can be fixed on a boat blade by using 3 clamping points, the attaching degree of the boat blade and the silicon chip is ensured, and the winding degree generated at the edge of the silicon chip after the silicon chip carried by a graphite boat enters a furnace tube process is controlled.

With the expansion and development of the specification of the battery piece by manufacturers, the specification of the battery piece is larger, the technical breakthrough is made continuously, and the purposes of increasing efficiency and reducing cost are achieved by manufacturing the large-specification battery piece. However, the silicon wafer and the boat blade cannot be well attached when 3-point silicon wafers are used due to the fact that the weight and the area of a large silicon wafer are increased, the edge wrap degree is too heavy after the process, and the efficiency of the battery piece is affected; and because the laminating is not good, cause the warp degree of battery piece too big for the silicon chip drops into the piece in transportation process, or fall out half and lead to producing the high frequency when carrying out the technology in the boiler tube, influence output and defective rate.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a: the utility model provides a graphite boat suitable for photovoltaic super large silicon chip, through designing the checkpoint subassembly, perfect solution battery piece edge around degree overweight problem, make the laminating between silicon chip and graphite boat piece better, avoided the silicon chip between two adjacent graphite boat pieces to contact together, avoided producing the short circuit in glow discharge, cause the heavy industry of stopping work, effectively guaranteed the efficiency and the productivity of equipment production, reduced production staff's intensity of labour simultaneously.

The utility model adopts the technical scheme as follows:

the utility model provides a graphite boat suitable for photovoltaic super large silicon chip, includes the graphite boat piece that the multirow links together, be equipped with a plurality of graphite boat grooves on the graphite boat piece, be provided with the stuck point subassembly that is used for fixed silicon chip on the graphite boat piece, the stuck point subassembly distributes around graphite boat groove, the stuck point subassembly includes end stuck point, side stuck point and top stuck point, the side stuck point has two and divides to establish in the both sides in graphite boat groove.

Preferably, at least two bottom clamping points are arranged.

Preferably, the top clamping point is arranged at the top edge of the graphite boat groove.

Preferably, the two side clamping points are not at the same level, wherein one side clamping point is positioned at the upper part of one side of the graphite boat groove, and the other side clamping point is positioned at the lower part of the other side of the graphite boat groove.

To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:

1. the utility model discloses a design the stuck point subassembly, when fixing the battery piece, two bottom stuck points hold up the silicon chip, bear the weight of sharing the silicon chip uniformly, and two side stuck points are fixed the both sides of silicon chip respectively, prevent that the angularity from appearing in both sides, and the existence of top stuck point will retrain the top of silicon chip simultaneously, and the angularity of the top edge of steerable silicon chip, consequently the utility model provides an uncontrollable silicon chip's angularity and produce serious degree of winding when fixed big specification silicon chip, make the laminating between silicon chip and graphite boat piece better.

2. The utility model discloses a design the checkpoint subassembly, the perfect heavy problem of battery piece edge bypassing degree has been solved to the silicon chip of having avoided between two adjacent graphite boat pieces contacts together, has avoided producing the short circuit in glow discharge, causes the heavy industry of stopping work, has effectively guaranteed the efficiency and the productivity of equipment production, improves product A level rate, has reduced production staff's intensity of labour simultaneously.

Drawings

The invention will now be described, by way of example, with reference to the accompanying drawings, in which:

FIG. 1 is a schematic diagram of a prior art graphite boat;

fig. 2 is a schematic structural diagram of the present invention.

Labeled as: 1-graphite boat piece, 2-graphite boat groove, 3-bottom clamping point, 4-side clamping point, 5-top clamping point and 6-silicon chip.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are only some embodiments, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Example 1

Referring to fig. 2, the embodiment provides a graphite boat suitable for photovoltaic super-large silicon wafers, which includes a plurality of rows of graphite boat pieces 1 connected together, wherein the rows of graphite boat pieces 1 are parallel to each other and are arranged in sequence at equal intervals; the silicon wafer fixing device is characterized in that a plurality of graphite boat grooves 2 are formed in the graphite boat sheet 1, clamping point assemblies used for fixing the silicon wafer 6 are arranged on the graphite boat sheet 1, the clamping point assemblies are distributed on the periphery of the graphite boat grooves 2, each clamping point assembly comprises a bottom clamping point 3, side clamping points 4 and a top clamping point 5, and the number of the side clamping points 4 is two, and the side clamping points are respectively arranged on two sides of the graphite boat grooves 2.

The number of the bottom clamping points 3 is at least two, the two bottom clamping points 3 are arranged in the embodiment, the bottom clamping points 3 are used for supporting the bottom of the silicon wafer 6, and the two bottom clamping points 3 are symmetrically distributed about the central axis of the graphite boat groove 2, so that uniform bearing capacity can be provided for the silicon wafer 6.

The top clamping point 5 is arranged at the top edge of the graphite boat groove 2, the top clamping point 5 is used for restraining the top of the silicon wafer 6, the warping degree of the upper edge of the silicon wafer 6 can be controlled, and the phenomenon that the silicon wafers 6 between the adjacent graphite boat pieces 1 are contacted together to cause short circuit is avoided.

The two side clamping points 4 are not positioned at the same horizontal height, wherein one side clamping point 4 is positioned at the upper part of one side of the graphite boat groove 2, the other side clamping point 4 is positioned at the lower part of the other side of the graphite boat groove 2, and the left and right side clamping points 4 are matched with the bottom clamping point 3 to effectively fix the silicon wafer 6.

This embodiment is when using, heavy at the weight of battery piece, when the area is big, because the influence of gravity, if adopt the stuck point design among the prior art (like fig. 1), then there can be the regional great problem of the angularity that produces in silicon chip 6 above and the base, and adopt this novel design of use, put into the back when the battery piece, two end stuck points 3 hold up silicon chip 6, bear the weight of sharing silicon chip 6 evenly, two side stuck points 4 are fixed the both sides of silicon chip 6 respectively, prevent that the angularity from appearing in both sides, the existence of top stuck point 5 will be retrained the top of silicon chip 6 simultaneously, the angularity of the upper edge of steerable silicon chip 6. Consequently, use this to use behind the neotype graphite boat, the angularity of silicon chip 6 receives control, and 6 laminating degrees of whole silicon chips are good, through producing the line manipulator and inserting and unloading piece and process test, have obtained perfect solution around plating the problem.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the scope of the embodiments of the present invention, and are intended to be covered by the claims and the specification.

Claims

1. The utility model provides a graphite boat suitable for photovoltaic super large silicon chip, includes graphite boat piece (1) that the multirow links together, be equipped with a plurality of graphite boat grooves (2) on graphite boat piece (1), its characterized in that, be provided with the stuck point subassembly that is used for fixed silicon chip (6) on graphite boat piece (1), the stuck point subassembly distributes around graphite boat groove (2), the stuck point subassembly includes end stuck point (3), side stuck point (4) and top stuck point (5), side stuck point (4) have two and divide and establish the both sides in graphite boat groove (2).

2. The graphite boat for photovoltaic ultra-large silicon wafers as claimed in claim 1, wherein at least two bottom clamping points (3) are provided.

3. The graphite boat for photovoltaic ultra-large silicon wafers as claimed in claim 1, wherein the top clamping point (5) is arranged at the top edge of the graphite boat groove (2).

4. The graphite boat for photovoltaic super large silicon wafers as claimed in claim 1, wherein two side clamping points (4) are not at the same level, wherein one side clamping point (4) is located at the upper part of one side of the graphite boat groove (2), and the other side clamping point (4) is located at the lower part of the other side of the graphite boat groove (2).