CN216749832U - Multi-row boat structure - Google Patents
Multi-row boat structure Download PDFInfo
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- CN216749832U CN216749832U CN202122907620.1U CN202122907620U CN216749832U CN 216749832 U CN216749832 U CN 216749832U CN 202122907620 U CN202122907620 U CN 202122907620U CN 216749832 U CN216749832 U CN 216749832U
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a multiseriate formula boat structure, including apron, bottom plate, strutting arrangement and at least a set of load-bearing device, apron and bottom plate pass through strutting arrangement and connect, and load-bearing device installs between apron and bottom plate, and apron, bottom plate, strutting arrangement and load-bearing device form the chamber of placing the wafer, the utility model discloses a load-bearing device separates into a plurality of chambers of placing with total cavity, forms the boat structure of many ranks, can bear more wafers, and the space utilization of boat structure is higher, the utility model discloses an apron and bottom plate preferred parallel arrangement realize providing the space of placing the wafer to the maximize as far as, have improved space utilization; the utility model discloses a bear the device and separate into a plurality of chambeies of placing with total cavity about or the fore-and-aft direction, a plurality of widths of placing the chamber can be different to place not unidimensional wafer, satisfy the demand of different wafers.
Description
Technical Field
The utility model belongs to photovoltaic or semiconductor trade field relates to a boat structure of multiseriate formula.
Background
Semiconductor or photovoltaic material is widely applied to industries such as electronics, new energy and the like, the semiconductor and photovoltaic material can be applied to products through chemical treatment, the semiconductor or photovoltaic material is processed, the sheet material is generally sent into a furnace to react under the conditions of certain temperature and pressure, in the process of processing the semiconductor or photovoltaic material, some devices are generally adopted to load or move the material to be processed, processed or processed, the device which is loaded or moved is generally called as a boat, a graphite boat, a small boat or a flower basket in the industry, the existing equipment can only store a single row of wafers 7, and when the rectangular wafers 7 are stored, the problems of space waste and non-compact structure exist, and the utility model effectively solves the problems.
Disclosure of Invention
The utility model provides a boat structure of many rows of formula for overcome prior art's not enough.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a boat structure of multiseriate formula which characterized in that: the wafer placing device comprises a cover plate, a bottom plate, a supporting device and at least one group of bearing devices, wherein the cover plate is connected with the bottom plate through the supporting device, the bearing devices are installed between the cover plate and the bottom plate, and a placing cavity for placing wafers is formed by the cover plate, the bottom plate, the supporting device and the bearing devices.
Further, the method comprises the following steps of; the supporting device comprises at least two groups of supporting structures, the two groups of supporting structures are positioned on two sides of the cover plate and the bottom plate and used for connecting and supporting the cover plate and the bottom plate, the two groups of supporting structures are positioned in the vertical direction in which the wafers are placed, and the supporting structures, the cover plate and the bottom plate form a total cavity.
Further, the method comprises the following steps of; the supporting structure at least comprises a group of groove plates, the groove plates are located between the cover plate and the bottom plate, the upper ends of the groove plates are connected with the cover plate, the lower ends of the groove plates are connected with the bottom plate, notches are fixedly arranged on the groove plates and located on the opposite surfaces of the supporting structures, and the cavities are placed towards the opening directions of the notches.
Further, the method comprises the following steps of; the supporting device comprises two groups of supporting structures, one group of supporting structures comprise two groups of groove plates, and the four groups of groove plates are distributed at four corners of the cover plate and the bottom plate.
Further, the method comprises the following steps of; still include the stabilizer bar, the stabilizer bar is used for connecting a plurality of frids to every group bearing structure, and the stabilizer bar has set firmly the handle, and the focus of handle and quartz boat structure is in same horizontal plane.
Further, the method comprises the following steps of; the bearing device comprises at least one group of bearing plates, the bearing plates are positioned in the main cavity and connected with the cover plate or/and the bottom plate, and the main cavity is divided into a plurality of placing cavities on the left and right or/and front and back in the horizontal direction.
Further, the method comprises the following steps of; the bearing plate is fixedly provided with a plurality of bearing ports, the bearing ports are opposite to the placing cavity, the opening direction of the bearing ports faces the placing cavity, one group of bearing ports in the placing cavity are matched with the number of the notches or/and the two groups of bearing ports, the corresponding bearing ports and the notches or/and the two groups of bearing ports are positioned on the same horizontal plane, the wafers are placed in the bearing ports and the notches or/and the two groups of bearing ports, the wafers are placed in parallel, and the wafers placed in parallel are parallel to the heat radiation direction.
Further, the method comprises the following steps of; the wafer bearing device is characterized by further comprising at least one group of partition plates, the partition plates are located between the cover plate and the bottom plate and divide the total cavity into a plurality of sub-cavities in the vertical direction, the bearing device is installed on at least one group of sub-cavities and divides the sub-cavities into a plurality of placing cavities in the horizontal direction, and the sub-cavities without the bearing device are used for bearing wafers.
Further, the method comprises the following steps of; the supporting device comprises three groups of supporting structures, wherein the two groups of supporting structures are positioned in the vertical direction in which the wafers are placed and used for connecting and supporting the cover plate and the bottom plate, and the other group of supporting structures are positioned in the parallel direction in which the wafers are placed and used for connecting and supporting the cover plate and the bottom plate.
Further, the method comprises the following steps of; the cover plate and the bottom plate are of flat plate structures, the cover plate is located above the bottom plate, the bottom plate supports the quartz boat structure, the cover plate is arranged in parallel with the bottom plate, the bearing plate is detachably connected with the cover plate or/and the bottom plate, and the bearing plate is movably connected in the main cavity and controls the width of the placing cavity.
To sum up, the utility model discloses an useful part lies in:
the utility model divides the total cavity into a plurality of placing cavities by the bearing device, forms a multi-row boat structure, can bear more wafers, and has higher space utilization rate; the utility model discloses a bear the device and separate into a plurality of chambeies of placing with total cavity about or/and fore-and-aft direction, a plurality of widths of placing the chamber can be different to place not unidimensional wafer, satisfy the demand of different wafers.
Drawings
Fig. 1 is a schematic view of an apparatus according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of a second embodiment of the present invention.
The labels in the figure are: the device comprises a cover plate 1, a bottom plate 2, a groove plate 3, a notch 31, a stabilizing rod 4, a handle 5, a bearing plate 6, a bearing opening 61, a wafer 7, a placing cavity 8 and a partition plate 9.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can also be implemented or applied through other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic concept of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the form, amount and ratio of the components in actual implementation may be changed at will, and the layout of the components may be more complicated.
All directional indicators (such as upper, lower, left, right, front, rear, horizontal, vertical … …) in the embodiments of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture, if the specific posture changes, the directional indicator changes accordingly.
The first embodiment is as follows:
as shown in fig. 1, the boat structure of a multi-row type comprises a cover plate 1, a bottom plate 2, a supporting device and at least one group of bearing devices, wherein the cover plate 1 and the bottom plate 2 are connected through the supporting device, the bearing devices are installed between the cover plate 1 and the bottom plate 2, and the cover plate 1, the bottom plate 2, the supporting device and the bearing devices form at least two groups of placing cavities 8 for placing wafers 7.
In this embodiment, the front-back direction of the cover plate 1 and the bottom plate 2 is parallel to the placement direction of the wafer 7, i.e., parallel to the diffusion gas flow direction, and the left-right direction of the cover plate 1 and the bottom plate 2 is perpendicular to the placement direction of the wafer 7, i.e., perpendicular to the diffusion gas flow direction.
In this embodiment, apron 1 and bottom plate 2 adopt the flat structure, apron 1 is located bottom plate 2's top, and bottom plate 2 supports the quartz boat structure, and apron 1 and the preferred parallel arrangement of bottom plate 2 realize that the maximize provides the space of placing wafer 7 as far as, because apron 1 and bottom plate 2 when non-parallel arrangement, can make partial space can't be used for the level to place wafer 7 to the unnecessary space has been wasted.
The supporting device comprises at least two groups of supporting structures, the two groups of supporting structures are positioned in the left and right directions of the cover plate 1 and the bottom plate 2 to connect and support the cover plate 1 and the bottom plate 2, the supporting structures, the cover plate 1 and the bottom plate 2 form a total cavity, and the front and back directions of the cover plate 1 and the bottom plate 2 are the directions for placing and taking out the wafer 7; bearing structure includes a set of frid 3 at least, frid 3 is located between apron 1 and the bottom plate 2, frid 3's upper end and apron 1 are connected, frid 3's lower extreme and bottom plate 2 are connected, notch 31 has set firmly on frid 3, notch 31 is located each bearing structure's opposite face, notch 31 opening direction is towards placing chamber 8, in this embodiment, strutting arrangement includes two sets of bearing structure, a set of bearing structure includes two sets of frid 3, four sets of frid 3 of group distribute on apron 1 and bottom plate 2's four angles, guarantee the stability that apron 1 and bottom plate 2 are connected.
For further guaranteeing the stability of quartz boat structure, in this embodiment, quartz boat structure still includes stabilizer bar 4, stabilizer bar 4 is used for connecting a plurality of frids 3 to every group bearing structure, thereby firm quartz boat structure, and high strength, stabilizer bar 4 has set firmly handle 5, and handle 5 is in same horizontal plane with the focus of quartz boat structure, prevents that quartz boat structure from taking place the skew in the transportation, causes the collision of wafer 7 and drops, has guaranteed the stability of quartz boat structure.
The bearing device comprises at least one group of bearing plates 6, the bearing plates 6 are located in a main cavity, the bearing plates 6 are connected with the cover plate 1 or/and the bottom plate 2, the length of the bearing plates 6 is matched with that of the groove plates 3, the main cavity is divided into a plurality of placing cavities 8 left and right or/and front and back in the horizontal direction, the widths of the placing cavities 8 can be the same or different, wafers 7 with different sizes can be placed according to needs, and the requirements of the wafers 7 with different sizes are met.
The bearing plate 6 is fixedly provided with a plurality of bearing openings 61, the bearing openings 61 are opposite to the placing cavity 8, the opening direction of the bearing openings 61 faces the placing cavity 8, the bearing openings 61 in one group of placing cavities 8 are matched with the notches 31 or/and the two groups of bearing openings 61, the corresponding bearing openings 61 and the notches 31 or/and the two groups of bearing openings 61 are positioned on the same horizontal plane, specifically, one group of bearing devices divides the total cavity body into two groups of placing cavities 8 in the left-right reverse direction, the bearing openings 61 are matched with the notches 31 in number, the corresponding bearing openings 61 and the notches 31 are positioned on the same horizontal plane, or the two groups of bearing devices divide the total cavity body into three groups of placing cavities 8 in the left-right reverse direction, the bearing openings 61 and the notches 31 in the placing cavities 8 positioned on two sides are matched in number, the corresponding bearing openings 61 and the notches 31 are positioned on the same horizontal plane, the placing cavity 8 positioned in the middle part, and the two groups of bearing openings 61 are matched in number, and the two corresponding groups of bearing ports 61 are positioned on the same horizontal plane; the wafer 7 is placed in the bearing openings 61 and the notches 31 or/and the two groups of bearing openings 61, so that the wafer 7 is placed in parallel, the wafer 7 placed in parallel is parallel to the heat radiation direction, a uniform temperature field can be effectively obtained, and the phenomenon of plating winding is effectively avoided.
In this embodiment, the total cavity is divided into a plurality of placing cavities 8 in the horizontal direction by the bearing devices to form a multi-row boat structure shown in fig. 1, which can bear more wafers 7, and has a higher space utilization rate, specifically, one group of bearing devices form a double-row boat structure, and two groups of bearing devices form a three-row boat structure; the plurality of bearing devices form a multi-row boat structure.
In order to reduce the weight of the quartz boat structure, the supporting device and the bearing device can also adopt a rod-shaped structure shown in the figure.
The second embodiment:
as shown in fig. 2, the difference between the present embodiment and the first embodiment is that the supporting plate 6 divides the total cavity into a plurality of placing cavities 8 in the horizontal direction, and in the present embodiment, the supporting plate 6 divides the total cavity into a plurality of placing cavities 8 in the horizontal direction.
In this embodiment, the wafer carrier further comprises at least one group of partition plates 9, the partition plates 9 are located between the cover plate 1 and the bottom plate 2, the total cavity is divided into a plurality of sub-cavities in the vertical direction, the bearing device is installed in the at least one group of sub-cavities, the sub-cavities are divided into a plurality of placing cavities 8 in the horizontal direction, and the sub-cavities without the bearing device are used for bearing wafers 7, so that the requirement of bearing wafers 7 with different sizes is met.
As shown in fig. 2, in this embodiment, a set of partition boards 9 is included, the partition boards 9 divide the total cavity into two sets of cavities in the vertical direction, and the bearing device is installed in the upper sub-cavity to divide the sub-cavity into two sets of placing cavities 8 in the horizontal direction.
In other embodiments, the supporting device may also include three sets of supporting structures, wherein two sets of supporting structures are located at the left and right directions of the cover plate 1 and the base plate 2 to connect and support the cover plate 1 and the base plate 2, and the other set of supporting structures are located at the front or rear directions of the cover plate 1 and the base plate 2 to connect and support the cover plate 1 and the base plate 2, i.e. to support the wafer 7 in three directions.
In other embodiments, the carrier plate 6 can be detachably connected to the cover plate 1 or/and the bottom plate 2, after the carrier plate 6 is detached, the wafer 7 is directly placed in the overall cavity, and after the carrier plate 6 is installed, the carrier plate can move behind the overall cavity, so as to control the width of the placement cavity 8, so as to meet the requirements of the wafers 7 with different sizes.
It is obvious that the described embodiments are only some of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall fall within the protection scope of the present invention.
Claims (10)
1. A boat structure of multiseriate formula which characterized in that: the wafer placing device comprises a cover plate, a bottom plate, a supporting device and at least one group of bearing devices, wherein the cover plate is connected with the bottom plate through the supporting device, the bearing devices are installed between the cover plate and the bottom plate, and a placing cavity for placing wafers is formed by the cover plate, the bottom plate, the supporting device and the bearing devices.
2. The multi-row boat structure of claim 1 wherein: the supporting device comprises at least two groups of supporting structures, the two groups of supporting structures are positioned on two sides of the cover plate and the bottom plate and used for connecting and supporting the cover plate and the bottom plate, the two groups of supporting structures are positioned in the vertical direction in which the wafers are placed, and the supporting structures, the cover plate and the bottom plate form a total cavity.
3. The multi-row boat structure of claim 2 wherein: the supporting structure at least comprises a group of groove plates, the groove plates are located between the cover plate and the bottom plate, the upper ends of the groove plates are connected with the cover plate, the lower ends of the groove plates are connected with the bottom plate, notches are fixedly arranged on the groove plates and located on the opposite surfaces of the supporting structures, and the cavities are placed towards the opening directions of the notches.
4. The boat structure of claim 1, wherein: the supporting device comprises two groups of supporting structures, one group of supporting structures comprise two groups of groove plates, and the four groups of groove plates are distributed at four corners of the cover plate and the bottom plate.
5. A multi-column boat structure of claim 3, wherein: still include the stabilizer bar, the stabilizer bar is used for connecting a plurality of frids to every group bearing structure, and the stabilizer bar has set firmly the handle, and the focus of handle and quartz boat structure is in same horizontal plane.
6. A multi-column boat structure of claim 3, wherein: the bearing device comprises at least one group of bearing plates, the bearing plates are positioned in the main cavity and connected with the cover plate or/and the bottom plate, and the main cavity is divided into a plurality of placing cavities on the left and right or/and front and back in the horizontal direction.
7. The boat structure of claim 6, wherein: the bearing plate is fixedly provided with a plurality of bearing openings, the bearing openings are opposite to the placing cavity, the opening direction of the bearing openings faces the placing cavity, the number of the bearing openings and the number of the notches or/and the two groups of the bearing openings in the placing cavity are matched, the corresponding bearing openings and the notches or/and the two groups of the bearing openings are/is positioned on the same horizontal plane, the wafers are placed in the bearing openings and the notches or/and the two groups of the bearing openings, the wafers are placed in parallel, and the wafers placed in parallel are parallel to the heat radiation direction.
8. The boat structure of claim 1, wherein: the wafer bearing device is characterized by further comprising at least one group of partition plates, the partition plates are located between the cover plate and the bottom plate and divide the total cavity into a plurality of sub-cavities in the vertical direction, the bearing device is installed on at least one group of sub-cavities and divides the sub-cavities into a plurality of placing cavities in the horizontal direction, and the sub-cavities without the bearing device are used for bearing wafers.
9. The multi-row boat structure of claim 1 wherein: the supporting device comprises three groups of supporting structures, wherein the two groups of supporting structures are positioned in the vertical direction in which the wafers are placed and used for connecting and supporting the cover plate and the bottom plate, and the other group of supporting structures are positioned in the parallel direction in which the wafers are placed and used for connecting and supporting the cover plate and the bottom plate.
10. The multi-row boat structure of claim 2 wherein: the cover plate and the bottom plate are of flat plate structures, the cover plate is located above the bottom plate, the bottom plate supports the quartz boat structure, the cover plate is arranged in parallel with the bottom plate, the bearing plate is detachably connected with the cover plate or/and the bottom plate, and the bearing plate is movably connected in the main cavity and controls the width of the placing cavity.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122907620.1U CN216749832U (en) | 2021-11-25 | 2021-11-25 | Multi-row boat structure |
| PCT/CN2022/131269 WO2023093541A1 (en) | 2021-11-25 | 2022-11-11 | Boat structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122907620.1U CN216749832U (en) | 2021-11-25 | 2021-11-25 | Multi-row boat structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216749832U true CN216749832U (en) | 2022-06-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122907620.1U Active CN216749832U (en) | 2021-11-25 | 2021-11-25 | Multi-row boat structure |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN216749832U (en) |
| WO (1) | WO2023093541A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023093541A1 (en) * | 2021-11-25 | 2023-06-01 | 拉普拉斯新能源科技股份有限公司 | Boat structure |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060020943A (en) * | 2004-09-01 | 2006-03-07 | 삼성전자주식회사 | Wafer boat for semiconductor manufacturing apparatus |
| CN101303993A (en) * | 2007-05-10 | 2008-11-12 | 南亚科技股份有限公司 | Wafer bearing device |
| CN208309003U (en) * | 2018-06-05 | 2019-01-01 | 深圳市拉普拉斯能源技术有限公司 | A kind of large capacity horizontal proliferation boat |
| CN209700754U (en) * | 2018-08-31 | 2019-11-29 | 蒂森克虏伯发动机系统(大连)有限公司 | Transport device for workpiece |
| CN210006707U (en) * | 2019-05-28 | 2020-01-31 | 东泰高科装备科技有限公司 | Bearing device |
| CN211107484U (en) * | 2019-08-22 | 2020-07-28 | 广州硅能照明有限公司 | Baking cart and baking device |
| CN216749832U (en) * | 2021-11-25 | 2022-06-14 | 深圳市拉普拉斯能源技术有限公司 | Multi-row boat structure |
-
2021
- 2021-11-25 CN CN202122907620.1U patent/CN216749832U/en active Active
-
2022
- 2022-11-11 WO PCT/CN2022/131269 patent/WO2023093541A1/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023093541A1 (en) * | 2021-11-25 | 2023-06-01 | 拉普拉斯新能源科技股份有限公司 | Boat structure |
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| Publication number | Publication date |
|---|---|
| WO2023093541A1 (en) | 2023-06-01 |
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Address after: No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |