CN211238184U - Novel square boat structure - Google Patents
Novel square boat structure Download PDFInfo
- Publication number
- CN211238184U CN211238184U CN201921786201.3U CN201921786201U CN211238184U CN 211238184 U CN211238184 U CN 211238184U CN 201921786201 U CN201921786201 U CN 201921786201U CN 211238184 U CN211238184 U CN 211238184U
- Authority
- CN
- China
- Prior art keywords
- boat
- plate
- boat plate
- electrode
- column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a novel ark structure, which comprises an ark frame, a first boat plate, a second boat plate and a uniform flow plate; flow equalizing plates are arranged at the top and the bottom of the square boat support; the first boat plate and the second boat plate are arranged between the top uniform flow plate and the bottom uniform flow plate at intervals; the utility model provides a novel square boat structure of electric field of formation enhancement between simple structure, the boat board.
Description
Technical Field
The utility model relates to a semiconductor or photovoltaic material processing field, more specifically the utility model relates to a novel ark structure of semiconductor or photovoltaic material processing equipment that says so.
Background
Semiconductor or photovoltaic material is widely applied to industries such as electronics, new energy and the like, the semiconductor and photovoltaic material can be applied to products generally through chemical treatment, the CVD technology is one of the treatment modes, CVD is chemical vapor deposition, the CVD technology is widely applied to semiconductor or photovoltaic material processing at present, common processing equipment comprises PECVD, LPCVD, APCVD and the like, diffusion processes such as phosphorus diffusion, boron diffusion and the like can be adopted to process raw materials except CVD, a plurality of related equipment exist in the industry at present, corresponding equipment can be selected to process according to specific processing requirements, the semiconductor or photovoltaic material processing is generally realized by feeding a sheet material into a furnace to react under the conditions of certain temperature and pressure, in the process of processing the semiconductor or photovoltaic material, devices are commonly used to load or move materials to be processed, in-process, or after-process, and such loaded or moved devices are commonly referred to in the industry as boats, graphite boats, or flower baskets.
The following problems exist in the current devices: the graphite ark is usually large in size, which can generally reach about 2 meters, and the electric field is transmitted from the tail part to the front part of the whole graphite ark to generate great difference, so that the uniform electric field is difficult to obtain. The boat plates of the graphite boat are vertically arranged, and corresponding processing materials such as silicon wafers are also vertically arranged between the boat plates and are attached to the graphite boat sheets. Because the silicon wafer needs to be vertically placed, the surface of the silicon wafer is not tightly attached to the surface of the boat plate, so that the conduction of the silicon wafer is poor, the silicon wafer after the process is subjected to winding plating, black edges are generated around the silicon wafer, the risk of wafer rewinding exists, and the defective product rate is increased. The overall capacity of the equipment is still low.
Disclosure of Invention
The utility model overcomes prior art's is not enough, provides a novel square boat structure of electric field of formation enhancement between simple structure, the boat board.
The technical scheme of the utility model as follows:
the novel ark structure comprises an ark frame, a first ark plate, a second ark plate and a uniform flow plate; flow equalizing plates are arranged at the top and the bottom of the square boat support; the first boat plate and the second boat plate are arranged between the top uniform flow plate and the bottom uniform flow plate at intervals.
Further, the ark frame comprises a fixed column, a bottom plate and a top fixed frame; the fixing column is connected with the bottom plate and the top fixing frame; electrode column fixing holes are formed in the corresponding positions of the top fixing frame and the bottom plate.
Furthermore, the top fixing frame is rectangular, and two ends of the fixing column are welded on the bottom plate and the top fixing frame.
Furthermore, grooves matched with the first boat plate and the second boat plate are distributed on the fixing columns.
Furthermore, a support column is arranged between the first boat plate and the second boat plate; the supporting columns are arranged at the corners of the first boat plate and the second boat plate and are made of insulating materials; and grooves for placing processed products are arranged at corresponding positions of the first boat plate and the second boat plate.
Further, an electrode column is arranged between the first boat plate of the upper layer and the first boat plate of the lower layer, and an electrode column is arranged between the second boat plate of the upper layer and the second boat plate of the lower layer; the electrode column arranged on the first boat plate and the electrode column arranged on the second boat plate are not on the same horizontal line; the first boat plate or the second boat plate at the uppermost layer is connected with the electrode column fixing hole of the top fixing frame, and the first boat plate or the second boat plate at the lowermost layer is connected with the electrode column fixing hole of the bottom plate.
Further, the electrode column comprises a bottom part and a top part, the bottom part is integrally in a circular cylindrical shape, the top part is integrally in a cylindrical shape, and the outer diameter of the bottom part is larger than that of the top part; the inner diameter of the bottom is matched with the diameter of the top, so that the electrode columns are overlapped.
Furthermore, at least two electrode columns are arranged on the first boat plate, a conductive connecting rod is arranged between the electrode columns, at least two electrode columns are arranged on the second boat plate, and a conductive connecting rod is also arranged between the electrode columns; this arrangement allows the first boat plate and the second boat plate to be integrally formed as an electrode.
Furthermore, the bottom plate is provided with supporting legs; unfilled corners are arranged at the corresponding positions of the uniform flow plate, the first boat plate and the second boat plate, which are connected with the electrode posts; the bottom side of the electrode column is covered with an insulating material.
Furthermore, the support column is integrally cylindrical, and corresponding holes are formed in the positions, corresponding to the support column, where the first boat plate and the second boat plate are connected; the first boat plate and the second boat plate have the same overall shape and structure, the second boat plate is provided with a notch at the position corresponding to the electrode pole arranged on the first boat plate, and the first boat plate is provided with a notch at the position corresponding to the electrode pole arranged on the second boat plate.
The utility model has the advantages that:
the space for placing the first boat plate and the second boat plate which are alternately arranged is provided by the square boat frame. The ark frame comprises a fixing column, a bottom plate and a top fixing frame. Two ends of the fixing column are fixed on the bottom plate and the top fixing frame in a welding mode. Electrode column fixing holes are formed in the corresponding positions of the top fixing frame and the bottom plate. The fixed columns are distributed with grooves matched with the first boat plate and the second boat plate, so that space for stabilizing the first boat plate and the second boat plate is further provided, and the situation that the connection of the square boat is unstable and the frames are scattered is avoided. The groove on the fixing column is a concave groove, the height of the groove is matched with the thickness of the first boat plate and the second boat plate, and the first boat plate and the second boat plate can be conveniently inserted into the frame of the square boat.
This scheme support column sets up in the corner position of first boat board, second boat board, and adopts insulating material, can not influence the setting of first boat board, second boat board, can also improve holistic stability. This scheme is through crisscross a plurality of first boat boards and the second boat board of distributing, and the productivity can promote by a wide margin like this, and direction of height can effectively be controlled simultaneously. The first boat plate and the second boat plate are provided with grooves, and when the square boat is placed in the furnace body out of level, the first boat plate or the second boat plate in the square boat can be attached to the product materials to be produced. After the anti-reflection film plating process, the product material can not generate the phenomenon of plating winding. The first boat plate and the second boat plate which are arranged in parallel have better thermal fields, heat is radiated from four sides to the inside of the furnace body, the heat can radiate the surface of the whole square boat, no barrier exists, and therefore uniform and consistent temperature fields can be effectively obtained.
This scheme electrically conductive connecting rod both ends cup joint at the top of electrode post, and this sets up the even effect that promotes whole ark electric field, and the electric field will be introduced simultaneously from the both sides electrode post of first boat board, second boat board, has ensured the uniformity of electric field on the whole area of every first boat board, second boat board, and the electric field that produces in the messenger ark is more even, and the thick homogeneity of membrane of processing material is better.
Drawings
FIG. 1 is a block diagram of the present invention;
fig. 2 is an exploded view between the first boat plate and the second boat plate of the present invention;
fig. 3 is a top view of the second boat deck of the present invention.
The labels in the figure are: the device comprises a first boat plate 1-1, a second boat plate 1-2, support columns 1-3, a square boat frame 2, a uniform flow plate 3, support legs 4, electrode columns 5, a conductive connecting rod 6, a square boat frame 7, fixed columns 8, a bottom plate 9, a top fixing frame 10 and fixing holes 11.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and the following detailed description. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
Example (b):
as shown in fig. 1, the novel ark structure comprises an ark frame 7, a first ark plate 1-1, a second ark plate 1-2 and a uniform flow plate 3; the top and the bottom of the square boat support are provided with flow equalizing plates 3; a plurality of first boat plates 1-1 and second boat plates 1-2 are arranged at intervals between the top uniform flow plate 3 and the bottom uniform flow plate 3. The whole boat frame 7 provides a space for placing the first boat plate 1-1 and the second boat plate 1-2 which are alternately arranged. Wherein, the setting of flow homogenizing plate 3 has removed the condition that top and bottom end technology treatment effect is not good.
The ark frame 7 comprises fixing posts 8, a bottom plate 9 and a top fixing frame 10. The fixed column 8 is connected with the bottom plate 9 and the top fixing frame 10; two ends of the fixing column 8 are fixed on the bottom plate 9 and the top fixing frame 10 in a welding mode. Electrode pole fixing holes 11 are formed in corresponding positions of the top fixing frame 10 and the bottom plate 9. The first boat board 1-1 and the second boat board 1-2 are generally rectangular, and therefore the rectangular top fixing frame 10 can better fix the first boat board 1-1 and the second boat board 1-2. The fixed column 8 is distributed with grooves matched with the first boat board 1-1 and the second boat board 1-2, so as to further provide a space for stabilizing the first boat board 1-1 and the second boat board 1-2, and avoid the situation that the connection of the square boat is unstable and the frame is scattered. The specific groove is a concave groove, the height of the groove is adapted to the thickness of the first boat plate 1-1 and the second boat plate 1-2, and the first boat plate 1-1 and the second boat plate 1-2 can be conveniently inserted into the square boat frame 7.
The bottom of the square boat frame 7 is provided with supporting legs 4 to stabilize the whole square boat. A certain number of unfilled corners are arranged on the uniform flow plate 3, for example, four unfilled corners are adopted, and the electrode columns 5 with the same polarity are arranged in a mutually diagonal staggered manner, so that the electrode forming of the first boat plate 1-1 and the second boat plate 1-2 is better completed.
The first boat plate 1-1 and the second boat plate 1-2 are arranged at intervals and horizontally arranged, so that a controllable-height and controllable-yield square boat is formed, namely the first boat plate 1-1 and the second boat plate 1-2 are multiple, and one second boat plate 1-2 is inserted between every two first boat plates 1-1. Because the placing amount of the materials to be processed on each of the first boat plate 1-1 and the second boat plate 1-2 in the square boat is easy to design to reach 12 pieces or more, the production capacity can be greatly improved. The first boat plate 1-1 and the second boat plate 1-2 have the same shape and structure, and notches at different positions and holes for connecting the electrode columns 5 are required to be arranged on the first boat plate 1-1 and the second boat plate 1-2 only because the corresponding electrode columns 5 are arranged. As shown in fig. 2 and 3, the first boat plate 1-1 is not provided with the material to be processed, and the second boat plate 1-2 is provided with the material to be processed.
A support column 1-3 is arranged between the first boat plate 1-1 and the second boat plate 1-2. The support columns 1-3 are arranged at the corner positions of the first boat board 1-1 and the second boat board 1-2, are made of insulating materials, and are cylindrical as a whole. The first boat plate 1-1 and the second boat plate 1-2 are connected with corresponding positions of the support columns 1-3 and are provided with corresponding holes, so that the first boat plate 1-1 and the second boat plate 1-2 are connected and fixed through the support columns 1-3, and a high-stability and height-controllable square boat is formed. The parallel boat plates have better thermal field than the traditional boat plates, and heat is radiated to the interior of the furnace body from four sides. The first boat plate 1-1 and the second boat plate 1-2 are parallel to the plane of the material to be processed and the heat radiation direction, so that the heat can radiate the whole square boat, and a uniform temperature field can be effectively obtained.
Grooves for placing materials to be processed, such as silicon wafers, are formed in corresponding positions of the first boat plate 1-1 and the second boat plate 1-2, so that the silicon wafers do not drift when placed on the first boat plate 1-1 or the second boat plate 1-2. The shape of the groove can be rectangular, cylindrical and the like, as long as a space for placing the material to be processed can be provided. The grooves avoid the adsorption effect of process gas around the material to be processed, and improve the process coating quality. When the square boat is not placed horizontally in the furnace body, the material to be processed arranged in the square boat can be attached to the first boat plate 1-1 and the second boat plate 1-2 of the square boat. The design ensures that the winding plating phenomenon of the processing material can not occur after the anti-reflection film plating process.
An electrode column 5 is arranged between the first boat plate 1-1 of the upper layer and the first boat plate 1-1 of the lower layer, and the electrode column 5 is arranged between the second boat plate 1-2 of the upper layer and the second boat plate 1-2 of the lower layer. The first boat plate 1-1 or the second boat plate 1-2 at the uppermost layer is connected with the electrode pole fixing hole 11 of the top fixing frame, and the first boat plate 1-1 or the second boat plate 1-2 at the lowermost layer is connected with the electrode pole fixing hole 11 of the bottom plate. The electrode column 5 comprises a bottom and a top, the bottom is integrally in a circular cylindrical shape, the top is integrally in a cylindrical shape, and the outer diameter of the bottom is larger than that of the top. The inner diameter of the bottom is matched with the diameter of the top, so that the electrode columns 5 are stacked, and the electrode columns 5 are nested in a complete interlayer. The top of the electrode column 5 is connected with the first boat plate 1-1 or the second boat plate 1-2, the electrode column 5 realizes that each first boat plate 1-1 forms a positive electrode, each second boat plate 1-2 forms a negative electrode, or the positive and negative electrodes of the two are mutually exchanged. The ark is connected with a power supply through the electrode column 5 to form an even electric field, so that the film thickness uniformity of the material to be processed is better. If the electrode column 5 connected to the first boat 1-1 is introduced into the positive electrode and the electrode column 5 connected to the second boat 1-2 is introduced into the negative electrode, the first boat 1-1 forms the positive electrode and the second boat 1-2 forms the negative electrode, thereby forming a uniform electric field. Wherein, the side surface of the bottom of the electrode column 5 is covered by an insulating material, so that the short circuit between the electrode column 5 and the first boat plate 1-1 and the second boat plate 1-2 is avoided.
Preferably, the electrode posts 5 on the first boat 1-1 are disposed at least two and at both sides of the first boat 1-1. A conductive connecting rod 6 is arranged between the electrode columns 5 of the first boat plate 1-1 which is closest to the power supply access in the ark; at least two electrode columns 5 are arranged on the second boat plate 1-2 and are arranged at two sides of the second boat plate 1-2. A conductive connecting rod 6 is also arranged between the electrode columns 5 of the second boat plate 1-2 which is closest to the power supply access in the ark; this arrangement allows the first boat 1-1 and the second boat 1-2 to be integrally formed as an electrode. The conductive connection bar 6 is covered with an insulating material, and only both ends of the conductive connection bar 6 are exposed. The two ends of the conductive connecting rod 6 are generally sleeved at the top of the electrode column 5, obviously, the conductive connecting rod can also be connected with the bottom, the setting improves the uniform effect of the electric field of the whole ark, the electric field is introduced from the electrode columns at the two sides of the first boat plate 1-1 and the second boat plate 1-2 simultaneously, the consistency of the electric field on the whole area of each first boat plate 1-1 and the second boat plate 1-2 is ensured, the electric field generated in the ark is more uniform, and the uniformity of the film thickness of the processed material is better.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the concept of the present invention, and these improvements and decorations should also be considered as the protection scope of the present invention.
Claims (10)
1. Novel ark structure, its characterized in that: comprises a square boat frame, a first boat plate, a second boat plate and a uniform flow plate; flow equalizing plates are arranged at the top and the bottom of the square boat support; the first boat plate and the second boat plate are arranged between the top uniform flow plate and the bottom uniform flow plate at intervals.
2. The novel ark structure of claim 1, wherein: the ark frame comprises a fixing column, a bottom plate and a top fixing frame; the fixing column is connected with the bottom plate and the top fixing frame; electrode column fixing holes are formed in the corresponding positions of the top fixing frame and the bottom plate.
3. The novel ark structure of claim 2, wherein: the top fixing frame is rectangular, and two ends of the fixing column are welded on the bottom plate and the top fixing frame.
4. The novel ark structure of claim 2, wherein: grooves matched with the first boat plate and the second boat plate are distributed on the fixing columns.
5. The novel ark structure of claim 1, wherein: a support column is arranged between the first boat plate and the second boat plate; the supporting columns are arranged at the corners of the first boat plate and the second boat plate and are made of insulating materials; and grooves for placing processed products are arranged at corresponding positions of the first boat plate and the second boat plate.
6. The novel ark structure of claim 2, wherein: an electrode column is arranged between the first boat plate of the upper layer and the first boat plate of the lower layer, and an electrode column is arranged between the second boat plate of the upper layer and the second boat plate of the lower layer; the electrode column arranged on the first boat plate and the electrode column arranged on the second boat plate are not on the same horizontal line; the first boat plate or the second boat plate at the uppermost layer is connected with the electrode column fixing hole of the top fixing frame, and the first boat plate or the second boat plate at the lowermost layer is connected with the electrode column fixing hole of the bottom plate.
7. The novel ark structure of claim 6, wherein: the electrode column comprises a bottom and a top, the bottom is integrally in a circular cylindrical shape, the top is integrally in a cylindrical shape, and the outer diameter of the bottom is larger than that of the top; the inner diameter of the bottom is matched with the diameter of the top, so that the electrode columns are overlapped.
8. The novel ark structure of claim 6, wherein: at least two electrode columns are arranged on the first boat plate, a conductive connecting rod is arranged between the electrode columns, at least two electrode columns are arranged on the second boat plate, and a conductive connecting rod is also arranged between the electrode columns; this arrangement allows the first boat plate and the second boat plate to be integrally formed as an electrode.
9. The novel ark structure of claim 7, wherein: the bottom plate is provided with supporting legs; unfilled corners are arranged at the corresponding positions of the uniform flow plate, the first boat plate and the second boat plate, which are connected with the electrode posts; the bottom side of the electrode column is covered with an insulating material.
10. The novel ark structure of claim 5, wherein: the supporting column is integrally cylindrical, and corresponding holes are formed in the positions, corresponding to the supporting column, where the first boat plate and the second boat plate are connected; the first boat plate and the second boat plate have the same overall shape and structure, the second boat plate is provided with a notch at the position corresponding to the electrode pole arranged on the first boat plate, and the first boat plate is provided with a notch at the position corresponding to the electrode pole arranged on the second boat plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921786201.3U CN211238184U (en) | 2019-10-23 | 2019-10-23 | Novel square boat structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921786201.3U CN211238184U (en) | 2019-10-23 | 2019-10-23 | Novel square boat structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211238184U true CN211238184U (en) | 2020-08-11 |
Family
ID=71915457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921786201.3U Active CN211238184U (en) | 2019-10-23 | 2019-10-23 | Novel square boat structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211238184U (en) |
-
2019
- 2019-10-23 CN CN201921786201.3U patent/CN211238184U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101420816A (en) | Capacitively coupled plasma reactor | |
| TW200920192A (en) | Capacitively coupled plasma reactor | |
| US20160194776A1 (en) | Device for vertical galvanic metal deposition on a substrate | |
| US4113926A (en) | Cell racks | |
| US20090139856A1 (en) | Multiple electrode stack and structure for the electrolysis of water | |
| CN103250470A (en) | Plasma generator | |
| CN211238184U (en) | Novel square boat structure | |
| CN211238182U (en) | Square boat structure | |
| CN114197007A (en) | Conductor wire thermoelectric chemical oxidation treatment device | |
| CN110993543B (en) | Structure of ark | |
| KR101181222B1 (en) | A boat to transfer substrate | |
| TWI530593B (en) | Multi-anode control device and electroplating equipment having the same | |
| CN114455588A (en) | Method for growing polycrystalline silicon rods by combining multiple silicon core assemblies | |
| KR101101751B1 (en) | Plasma generation apparatus | |
| CN207831930U (en) | A kind of sintering frame | |
| CN206505900U (en) | A kind of graphite boat of stuck point position optimization | |
| CN215799889U (en) | Coating device and coating equipment | |
| KR102025064B1 (en) | Electrode Support Structures for Coaxial Electrolytic Cells | |
| CN217052393U (en) | Graphite boat piece and graphite boat | |
| CN110931339B (en) | Processing device for semiconductor or photovoltaic material | |
| KR102241621B1 (en) | Multi-type electrode apparatus by atmosphere type plasma | |
| CN217009145U (en) | Graphite boat | |
| CN117026214A (en) | Conductive carrier and semiconductor processing equipment | |
| CN220468126U (en) | Graphite boat and processing equipment | |
| CN220934034U (en) | Quartz boat |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |