CN216698322U

CN216698322U - Silicon chip edge sculpture sucking disc positioning mechanism

Info

Publication number: CN216698322U
Application number: CN202123002250.3U
Authority: CN
Inventors: 马胜南
Original assignee: Nanxuan Tianjin Technology Co ltd
Current assignee: Nanxuan Tianjin Technology Co ltd
Priority date: 2021-12-02
Filing date: 2021-12-02
Publication date: 2022-06-07
Anticipated expiration: 2031-12-02

Abstract

The utility model discloses a silicon wafer edge etching sucker positioning mechanism which comprises a base, a mounting seat and a fixing table, wherein the mounting seat is arranged right above the base, the top end of the mounting seat is fixedly connected with the fixing table, a plurality of fixing tables are arranged at equal intervals, a limiting pad is fixedly glued at the top end of each fixing table, a first through hole is formed in the top end of each fixing table, a cavity is formed in each fixing table, a sucker body and an exhaust tube are arranged in each cavity, the top end of each sucker body is fixedly connected with the inner wall of the top end of each cavity, the bottom end of each sucker body is fixedly connected with the top end of each exhaust tube, a first mounting cavity is formed in each mounting seat, an exhaust pump and a first power supply are arranged in each first mounting cavity, a second mounting cavity is formed in the base, an electric push rod is arranged in each second mounting cavity, and the top end of each electric push rod is connected with a piston rod. The silicon chip can adsorb on the top of fixed station, realizes the purpose of prescribing a limit to the silicon chip position.

Description

Silicon chip edge etching sucker positioning mechanism

Technical Field

The utility model relates to the technical field of silicon wafers, in particular to a positioning mechanism of a silicon wafer edge etching sucker.

Background

Silicon chips are a key component of integrated circuits, such as those used to power computers, cell phones, and various other devices. The silicon wafer consists of a thin piece of silicon wafer that can be processed in various ways depending on the type of electronic product in which it is used. Silicon is a very high quality semiconductor making it an ideal material for producing such circuits. The silicon wafer etching equipment is needed in the production process, but the existing etching equipment cannot effectively limit the position of the silicon wafer, and the silicon wafer is easy to move in the production process.

Therefore, a positioning mechanism of a silicon wafer edge etching sucker is provided.

SUMMERY OF THE UTILITY MODEL

The utility model mainly aims to provide a positioning mechanism of a silicon wafer edge etching sucker, which can effectively solve the problems in the background technology.

In order to realize the purpose, the utility model adopts the technical scheme that:

a silicon wafer edge etching sucker positioning mechanism comprises a base, a mounting seat and a fixing table, wherein the mounting seat is arranged right above the base, the top end of the mounting seat is fixedly connected with the fixing table, a plurality of fixing tables are arranged at equal intervals, limiting pads are fixedly glued to the top end of the fixing table, a first through hole is formed in the top end of the fixing table, a cavity is formed in the fixing table, a sucker body and an exhaust tube are arranged in the cavity, the top end of the sucker body is fixedly connected with the inner wall of the top end of the cavity, the bottom end of the sucker body is fixedly connected with the top end of the exhaust tube, the first through hole is communicated with the cavity, and the sucker body exhausts air opposite to the first through hole;

the air pump is characterized in that a first installation cavity is arranged in the installation seat, an air pump and a first power supply are arranged in the first installation cavity, a second installation cavity is arranged in the base, an electric push rod is arranged in the second installation cavity, the top end of the electric push rod is connected with a piston rod, and one end, far away from the electric push rod, of the piston rod penetrates through the base and is fixedly connected with the bottom end of the installation seat.

Further, base bottom fixedly connected with universal wheel, the universal wheel is equipped with a plurality ofly.

Further, aspiration pump, first power bottom all with first installation cavity bottom inner wall fixed connection, the aspiration pump is equipped with a plurality ofly, aspiration pump and first power electric connection.

Furthermore, a second through hole is formed in the position, where the fixing table is located, of the top end of the mounting seat, and one end, far away from the sucker body, of the exhaust pipe penetrates through the second through hole to be connected with the air pump.

Further, electric putter is equipped with a plurality ofly, electric putter bottom and second installation cavity bottom inner wall fixed connection, second installation cavity bottom inner wall is fixedly connected with second power still, second power and electric putter electric connection.

Furthermore, a groove is formed in the outer side of the fixing table, and a matching hole communicated with the first through hole is formed in the middle of the top end of the limiting pad.

Compared with the prior art, the utility model has the following beneficial effects: through the design of universal wheel, be convenient for remove the mount pad to the below of edge etching machine, thereby be convenient for process the silicon chip, electric putter promotes the mount pad through the piston rod and is upward movement, thereby can adjust the height of mount pad, until adjusting the mount pad to suitable position, then place the silicon chip that will process on the spacing pad on fixed station top, spacing pad can increase the frictional force between silicon chip and the fixed station, the aspiration pump bleeds the sucking disc body through the exhaust tube, thereby make the silicon chip can adsorb the top at the fixed station, the realization carries out the purpose of injecing to the silicon chip position.

Drawings

FIG. 1 is a schematic structural diagram of a chuck positioning mechanism for etching the edge of a silicon wafer according to the present invention.

FIG. 2 is a schematic diagram of the internal structure of a chuck positioning mechanism for etching the edge of a silicon wafer according to the present invention.

FIG. 3 is an enlarged view of the portion A of the positioning mechanism of the chuck for etching the edge of a silicon wafer in FIG. 2.

In the figure: 1. a base; 2. a universal wheel; 3. a mounting seat; 4. a fixed table; 5. a limiting pad; 6. a groove; 7. a first through hole; 8. a first power supply; 9. an air pump; 10. a suction cup body; 11. a second through hole; 12. an electric push rod; 13. a second power supply; 14. a cavity; 15. and an air exhaust pipe.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the utility model easy to understand, the utility model is further described with the specific embodiments.

As shown in fig. 1-3, a positioning mechanism for a silicon wafer edge etching sucker comprises a base 1, a mounting seat 3 and a fixing table 4, wherein the mounting seat 3 is arranged right above the base 1, the top end of the mounting seat 3 is fixedly connected with the fixing table 4, a plurality of fixing tables 4 are arranged at equal intervals, a limiting pad 5 is fixedly glued on the top end of each fixing table 4, a first through hole 7 is formed in the top end of each fixing table 4, a cavity 14 is formed in each fixing table 4, a sucker body 10 and an exhaust tube 15 are arranged in each cavity 14, the top end of each sucker body 10 is fixedly connected with the inner wall of the top end of each cavity 14, the bottom end of each sucker body 10 is fixedly connected with the top end of the exhaust tube 15, each first through hole 7 is communicated with each cavity 14, and each sucker body 10 is used for exhausting air opposite to each first through hole 7;

be equipped with first installation cavity in the mount pad 3, be equipped with aspiration pump 9 and first power 8 in the first installation cavity, be equipped with the second installation cavity in the base 1, be equipped with electric putter 12 in the second installation cavity, electric putter 12 top is connected with the piston rod, the piston rod is kept away from electric putter 12 one end and is passed base 1 and mount pad 3 bottom fixed connection.

Wherein, 1 bottom fixedly connected with universal wheel 2 of base, universal wheel 2 is equipped with a plurality ofly.

The bottom ends of the air pump 9 and the first power supply 8 are fixedly connected with the inner wall of the bottom end of the first installation cavity, the air pump 9 is provided with a plurality of air pumps, and the air pump 9 is electrically connected with the first power supply 8.

The top end of the mounting base 3 is provided with a second through hole 11 at the position of the fixed table 4, and one end of the air suction pipe 15, which is far away from the suction cup body 10, penetrates through the second through hole 11 and is connected with the air suction pump 9.

Wherein, electric putter 12 is equipped with a plurality ofly, 12 bottoms of electric putter and second installation cavity bottom inner wall fixed connection, second installation cavity bottom inner wall is fixedly connected with second power 13 still, second power 13 and electric putter 12 electric connection.

Wherein, fixed station 4 outside is seted up recess 6, the matching hole with first through-hole 7 intercommunication is seted up to 5 top departments placed in the middle of the spacing pad.

When the positioning mechanism is used, the positioning mechanism is moved to the position below an edge etching machine through a universal wheel 2, an electric push rod 12 pushes an installation seat 3 to move upwards through a piston rod, so that the height of the installation seat 3 can be adjusted until the installation seat 3 is adjusted to a proper position, then a silicon wafer to be processed is placed on a limiting pad 5 at the top end of a fixed table 4, an air suction pump 9 sucks air from a suction cup body 10 through an air suction pipe 15, so that the silicon wafer can be adsorbed at the top end of the fixed table 4, the purpose of limiting the position of the silicon wafer is achieved, and then the silicon wafer is processed through the edge etching machine.

The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. A silicon wafer edge etching sucker positioning mechanism comprises a base (1), a mounting seat (3) and a fixing table (4), and is characterized in that the mounting seat (3) is arranged right above the base (1), the top end of the mounting seat (3) is fixedly connected with the fixing table (4), a plurality of fixing tables (4) are arranged at equal intervals, a limiting pad (5) is fixedly glued to the top end of the fixing table (4), a first through hole (7) is formed in the top end of the fixing table (4), a cavity (14) is formed in the fixing table (4), a sucker body (10) and an exhaust pipe (15) are arranged in the cavity (14), the top end of the sucker body (10) is fixedly connected with the inner wall of the top end of the cavity (14), and the bottom end of the sucker body (10) is fixedly connected with the top end of the exhaust pipe (15);

be equipped with first installation cavity in mount pad (3), be equipped with aspiration pump (9) and first power (8) in the first installation cavity, be equipped with the second installation cavity in base (1), be equipped with electric putter (12) in the second installation cavity, electric putter (12) top is connected with the piston rod, the piston rod is kept away from electric putter (12) one end and is passed base (1) and mount pad (3) bottom fixed connection.

2. The positioning mechanism of claim 1, wherein: the base (1) bottom fixedly connected with universal wheel (2), universal wheel (2) are equipped with a plurality ofly.

3. The positioning mechanism of claim 1, wherein: the bottom ends of the air pump (9) and the first power supply (8) are fixedly connected with the inner wall of the bottom end of the first installation cavity, and the air pump (9) is provided with a plurality of air pumps.

4. The positioning mechanism of claim 1, wherein: the top end of the mounting seat (3) is located at the position of the fixed table (4) and is provided with a second through hole (11), and one end, far away from the sucker body (10), of the exhaust pipe (15) penetrates through the second through hole (11) to be connected with the air pump (9).

5. The positioning mechanism of claim 1, wherein: electric putter (12) are equipped with a plurality ofly, electric putter (12) bottom and second installation cavity bottom inner wall fixed connection, second installation cavity bottom inner wall is fixedly connected with second power (13) still.

6. The positioning mechanism of claim 1, wherein: a groove (6) is formed in the outer side of the fixed table (4), and a matching hole communicated with the first through hole (7) is formed in the middle of the top end of the limiting pad (5).