IGBT bonder DBC adsorbs fixing device
Technical Field
The utility model belongs to the technical field of the DBC base plate processing equipment, concretely relates to IGBT bonding machine DBC adsorbs fixing device.
Background
An insulated Gate Bipolar transistor (igbt) is a core device for energy conversion and transmission, and is widely applied in the fields of rail transit, smart grid, aerospace, electric vehicles, new energy equipment, and the like. In order to improve the heat dissipation performance of the power device and increase the service life and reliability, a modular packaging form with smaller volume, higher efficiency and higher reliability has become a main packaging form of the high-power IGBT.
In the bonding process in the production process of the IGBT module, chips on the DBC substrate and the chips and the DBC substrate are connected through bonding and routing to form a complete circuit structure. The bonding process has extremely high requirements on the position accuracy and the flatness of the DBC, the DBC substrate needs to be reliably fixed at an accurate position in the bonding process, and position deviation cannot occur in the bonding process. At present, a bonding machine adopts a fixing mode that a DBC substrate is manually placed in a special jig for fixing through installation of the special jig. This kind of fixed mode can only fix a slice DBC base plate once, and when the product changes, needs frequently to change the tool, and degree of automation is low, and production efficiency is low, so needs the pertinence to carry out the improved design.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an IGBT bonder DBC adsorbs fixing device and comes into operation to solve the problem that proposes in the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a DBC adsorption fixing device of an IGBT bonder comprises two fixed plates arranged in parallel, a DBC flitch conveyed between the fixed plates through a conveying belt and a plurality of DBC substrates arranged on the DBC flitch, wherein a DBC positioning plate capable of vertically moving is horizontally arranged between the two fixed plates, a sucker assembly capable of vertically moving is arranged below the DBC positioning plate in parallel relatively, and the DBC flitch is movably arranged on a plane between the DBC positioning plate and the sucker assembly;
the sucking disc subassembly is provided with by the bottom plate upper surface and constitutes with the corresponding a plurality of absorption units of DBC base plate, the absorption unit passes through the gas pocket and the inside gas circuit intercommunication of bottom plate, and the export of gas circuit passes through branch pipe and the external vacuum suction equipment of vacuum solenoid valve, and is provided with the vacuum pressure gauge on the vacuum solenoid valve, vacuum pressure gauge and equipment controller electric connection.
Preferably, a plurality of grooves which are communicated with each other are formed in the adsorption unit, and the air holes are formed in the bottoms of the grooves.
Preferably, the DBC positioning plate is formed by a plurality of stepped grooves which are formed in the inner side of a flat plate and correspond to the DBC substrate one to one, and when the DBC positioning plate is pressed on the DBC material plate, the stepped grooves are pressed on the edges of the upper ends of the corresponding DBC substrates.
Preferably, two fixed plates are symmetrically and fixedly provided with jacking cylinders on opposite sides and far sides, and the two groups of jacking cylinders are fixedly connected with the DBC positioning plate and the sucker component respectively.
Preferably, fixed mounting has the cover body on the lower terminal surface of DBC locating plate, the inboard of the cover body is provided with the spring, insert on the DBC locating plate and be equipped with connecting bolt, and the rod end fixed mounting of the jacking cylinder that the DBC locating plate corresponds has the support base, connecting bolt passes the cover body and spring and supports the screw hole threaded connection on the base, and the lower extreme pressure of spring is held in the up end that supports the base.
The utility model discloses a technological effect and advantage: the DBC adsorption fixing device of the IGBT bonder,
1. drag the DBC flitch to carry between DBC locating plate and the sucking disc subassembly through parallel arrangement's conveyer belt on the fixed plate, stimulate the DBC locating plate earlier through the jacking cylinder and press the DBC base plate on the DBC flitch and hold the realization preliminary location, rethread sucking disc subassembly promotes and adsorbs the location to the DBC base plate, and is high to the location effect of DBC base plate, and is efficient, and degree of automation is high, saves manual positioning operation for production efficiency, labour saving and time saving.
2. Through the negative pressure that sets up the inside gas circuit of vacuum pressure table real time monitoring sucking disc subassembly, avoid producing too strong negative pressure and cause the DBC base plate to damage, perhaps the negative pressure is low excessively, adsorbs the condition of failure, sets up many mutual slots that communicate on the unit of adsorbing simultaneously, and the gas pocket is seted up in the bottom of slot. Through setting up the slot that communicates each other, guarantee that the unit of adsorbing has bigger negative pressure area to produce the adsorption affinity of bigger area, thereby realize the stable absorption location to the DBC base plate, the practicality is stronger.
Drawings
Fig. 1 is a schematic structural diagram of the present invention (with the DBC material plate removed);
fig. 2 is a top view of the present invention;
fig. 3 is a side view of the present invention;
FIG. 4 is a top view of the chuck assembly;
fig. 5 is a cross-sectional view taken at a-a in fig. 4.
In the figure: 1. a fixing plate; 2. a DBC flitch; 3. a DBC substrate; 4. a sucker component; 41. a base plate; 42. an adsorption unit;
5. a DBC positioning plate; 51. a flat plate; 52. a stepped groove;
6. air holes; 7. a gas circuit; 8. a vacuum solenoid valve; 9. a vacuum pressure gauge; 10. a trench; 11. a support base; 12. jacking a cylinder; 13. a sleeve body; 14. a spring; 15. and connecting the bolts.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The utility model provides a DBC adsorption fixing device of IGBT bonder as shown in figures 1-5, which comprises two fixed plates 1 arranged in parallel, a DBC flitch 2 conveyed between the fixed plates 1 through a conveyor belt and a plurality of DBC substrates 3 arranged on the DBC flitch 2, wherein a DBC positioning plate 5 capable of vertically moving is horizontally arranged between the two fixed plates 1, a sucker component 4 capable of vertically moving is arranged below the DBC positioning plate 5 in a relatively parallel way, and the DBC flitch 2 is movably arranged on a plane between the DBC positioning plate 5 and the sucker component 4;
sucking disc subassembly 4 is provided with by bottom plate 41 upper surface and constitutes with the corresponding a plurality of absorption units 42 of DBC base plate 3, absorption unit 42 passes through gas pocket 6 and the inside 7 intercommunications of gas circuit of bottom plate 41, and the export of gas circuit 7 passes through branch pipe and the external vacuum suction equipment of vacuum solenoid valve 8, and is provided with vacuum pressure gauge 9 on the vacuum solenoid valve 8, vacuum pressure gauge 9 and equipment control ware electric connection.
The working process is as follows: when a DBC material disc loaded with a plurality of DBC substrates 3 reaches a position between the DBC positioning plate 5 and the sucker component 4, a lifting cylinder piston rod corresponding to the DBC positioning plate 5 retracts to drive the DBC positioning plate 5 to descend, and when the DBC positioning plate 5 is pressed on the DBC material plate 2, a stepped groove 52 on the DBC positioning plate 5 is pressed on the edge of the upper end of the corresponding DBC substrate 3 to preliminarily position the DBC substrate 3;
then the sucker component 4 moves upwards under the driving of the corresponding jacking cylinder 12, contacts with the lower surface of the DBC substrate 3, lifts the DBC substrate from the DBC tray, then opens the vacuum solenoid valve 8 to suck air in the air passage 7 through vacuum, so that negative pressure suction is generated at the position of the adsorption unit 42, the corresponding DBC substrate 3 is adsorbed, and then the bonding process can be carried out through the IGBT bonding machine above.
After the bonding is completed, the DBC positioning plate 5 is lifted through the lifting cylinder, so that the DBC positioning plate 5 is separated from the DBC material plate 2, the lifting cylinder drives the sucker component 4 to descend, the adsorption unit 42 is separated from the DBC substrate 3, the vacuum is released, the DBC substrate 3 falls back into the material plate, and the whole action process is completed.
The adsorption unit 42 is provided with a plurality of grooves 10 which are communicated with each other, and the air holes 6 are arranged at the bottoms of the grooves 10. Through setting up the slot 10 that communicates each other, guarantee that absorption unit 42 has bigger negative pressure area to produce the adsorption affinity of bigger area, thereby realize the stable absorption location to DBC base plate 3.
The DBC positioning plate 5 is formed by arranging a plurality of stepped grooves 52 corresponding to the DBC substrates 3 one by one on the inner side of a flat plate 51, and when the DBC positioning plate 5 is pressed on the DBC material plate 2, the stepped grooves 52 are pressed on the edges of the upper ends of the corresponding DBC substrates 3. Guarantee DBC locating plate 5 and hold spacing stability to DBC base plate 3 pressure, tentatively realize the location to DBC base plate 3. The positioning effect to DBC base plate 3 is high, and is efficient, and degree of automation is high, saves manual positioning operation for production efficiency, and sets up the negative pressure of the inside gas circuit 7 of vacuum pressure gauge 9 real time monitoring sucking disc subassembly 4, avoids producing too strong negative pressure and causes the damage of DBC base plate 3, perhaps the negative pressure is low excessively, adsorbs the condition of failure, and the practicality is stronger.
Two the opposite side of fixed plate 1 is all fixed with the jacking cylinder 12 with keeping away from the side symmetry, and two sets of jacking cylinders 12 respectively with DBC locating plate 5 and sucking disc subassembly 4 fixed connection. Through the flexible of jacking cylinder 12, realize that DBC locating plate 5 and sucking disc subassembly 4 fix a position DBC base plate 3 between to, location effect is good to jacking cylinder 12 control accuracy is high, and is small conveniently to install and arrange.
Fixed mounting has cover body 13 on the lower terminal surface of DBC locating plate 5, the inboard of cover body 13 is provided with spring 14, it is equipped with connecting bolt 15 to insert on the DBC locating plate 5, and the pole end fixed mounting of the jacking cylinder 12 that DBC locating plate 5 corresponds has support base 11, connecting bolt 15 passes cover body 13 and spring 14 and the screw hole threaded connection on the support base 11, and the lower extreme pressure of spring 14 holds in the up end of supporting base 11. Through clockwise rotation connecting bolt 15 for connecting bolt 15's lower extreme is towards the screw hole activity on the support base 11, promotes DBC locating plate 5 translation downwards, and DBC locating plate 5 and the compression of receiving of spring 14 between the support base 11 support DBC locating plate 5, anticlockwise rotation connecting bolt 15 like the same, and DBC locating plate 5 is translation upwards, thereby adjusts DBC locating plate 5's height, with the DBC base plate 3 product of adaptation different thickness, and the suitability is stronger.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.