CN216563195U

CN216563195U - Semiconductor particle leakage repairing device for semiconductor refrigerating sheet production

Info

Publication number: CN216563195U
Application number: CN202123272940.0U
Authority: CN
Inventors: 张金良
Original assignee: Jiangsu Singhe Electronic Technology Co ltd
Current assignee: Jiangsu Singhe Electronic Technology Co ltd
Priority date: 2021-12-24
Filing date: 2021-12-24
Publication date: 2022-05-17
Anticipated expiration: 2031-12-24

Abstract

A semiconductor particle leakage repairing device for semiconductor refrigeration piece production comprises a workbench, a conveying belt arranged on the workbench, a front end detection frame, a rear end material supplementing frame and a control center, wherein a front end positioning sensor is arranged at the front end of the front end detection frame, a detection device is arranged at the bottom of the front end detection frame, infrared detectors are uniformly distributed on the detection device, a rear end positioning sensor is arranged at the front end of the rear end material supplementing frame, a cylinder is rotatably connected onto the rear end material supplementing frame, a material supplementing device is arranged below the cylinder, a telescopic rod and an air pipe fixedly connected with the telescopic rod are arranged in the material supplementing device, the air pipe is communicated with the cylinder, a sucking disc is arranged at the tail end of the air pipe, the material supplementing device is divided into an N-type part and a P-type part, the front end positioning sensor, the rear end positioning sensor, the front end detection frame, the rear end material supplementing frame, the conveying belt and the control center are electrically connected, the infrared detectors on the end detection frame are the same as the semiconductor particles to be detected, realize one-to-one detection, through the range finding to compare measured distance and predetermine reasonable scope, judge that the survey position has the granule to lack, in case find the disappearance, the material supplementing device on the feed supplement frame of rear end carries out the feed supplement operation, realizes detecting the feed supplement automation.

Description

Semiconductor particle leakage repairing device for semiconductor refrigerating sheet production

Technical Field

The utility model relates to the field of semiconductor production equipment, in particular to a semiconductor.

Background

In the production process of the semiconductor refrigerating sheet, N-type semiconductor particles and P-type semiconductor particles need to be arranged in sequence, and the existing production process still adopts manual observation to carry out leakage repairing operation at places where the semiconductor refrigerating sheet cannot have defects. The manual observation efficiency is slow, and mistakes are easy to make.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a semiconductor particle leakage repairing device for semiconductor refrigerating sheet production, which solves the problem of low leakage repairing efficiency in manual inspection in the prior art.

In order to realize the purpose, the utility model adopts the following technical scheme:

a semiconductor particle leakage repairing device for semiconductor refrigeration sheet production is characterized by comprising a workbench, a conveying belt arranged on the workbench, a front end detection frame, a rear end material supplementing frame and a control center, the front end of the front end detection frame is provided with a front end positioning sensor, the bottom of the front end detection frame is provided with a detection device, the detection device is uniformly distributed with infrared detectors, the front end of the rear end material supplementing frame is provided with a rear end positioning sensor, the rear end material supplementing frame is rotatably connected with an air cylinder, a material supplementing device is arranged below the air cylinder, the material supplementing device internally comprises a telescopic rod and an air pipe fixedly connected with the telescopic rod, the air pipe is communicated with the air cylinder, the tail end of the air pipe is provided with a sucker, the material supplementing device is divided into an N-type part and a P-type part, the front end positioning sensor, the rear end positioning sensor, the front end detection frame, the rear end material supplementing frame and the conveying belt are electrically connected with the control center.

Furthermore, two groups of limiting strips are arranged on the workbench, a flow channel area is arranged between the two groups of limiting strips, and the conveying belt is arranged in the flow channel area.

Furthermore, the infrared detectors are uniformly distributed on the detection device according to the arrangement density of the semiconductor particles.

Furthermore, a case is arranged on the rear-end material supplementing frame, a rotating shaft and a motor in transmission connection with the rotating shaft are arranged in the case, the rotating shaft is fixedly connected with the air cylinder through a connecting rod, an arc-shaped notch is formed in the side edge of the case, and the connecting rod is arranged in the arc-shaped notch.

Further, the cylinder and the case are movably connected, specifically, a sliding groove matched with the connecting rod is arranged on the side edge of the case, and the connecting rod can horizontally slide in the sliding groove.

Furthermore, the material supplementing device is provided with a plurality of groups of telescopic rods which are uniformly distributed and air pipes which are fixedly connected with the telescopic rods.

Furthermore, the air pipes are provided with independent ventilation switches.

Furthermore, the plurality of groups of telescopic rods respectively and independently operate.

Furthermore, an infrared distance meter is adopted as the infrared detector on the front-end detection frame.

Further, the control center adopts a programmable logic controller.

Compared with the prior art, the utility model has the following beneficial effects: the infrared detector on the front end detection frame is the same with the semiconductor particle density of arranging on waiting to detect the semiconductor, realizes one-to-one detection, through the range finding to compare measured distance and predetermineeing reasonable range, judge whether the survey position has the granule to lack, in case discover to lack, the feed supplement device on the feed supplement frame of rear end carries out the feed supplement operation, realizes detecting the feed supplement automation.

Drawings

FIG. 1 is a schematic view of the structure of the present invention.

FIG. 2 is a diagram of the front end inspection frame according to the present invention.

FIG. 3 is a distribution diagram of an infrared detector according to the present invention.

Fig. 4 is a structural diagram of the chassis of the present invention.

FIG. 5 is a schematic diagram of a feeding apparatus of the present invention.

Fig. 6 shows the tray according to the utility model.

Shown in the figure: 1. the device comprises a workbench 2, a front end detection frame 3, a rear end feeding frame 4, a limiting strip 5, a flow channel region 6, a front end positioning sensor 7, a detection device 701, an infrared detector 8, a rear end positioning sensor 9, a case 901, an arc-shaped notch 10, a cylinder 11, a feeding device 12, an expansion link 13, an air pipe 14, a sucker 15 and a rotating shaft.

Detailed Description

The utility model is further described below with reference to fig. 1-6.

A semiconductor particle leakage repairing device for semiconductor refrigeration piece production comprises a workbench 1, a conveying belt arranged on the workbench 1, a front end detection frame 2, a rear end material supplementing frame 3, a control center and a material tray. Two groups of limiting strips 4 are arranged on the workbench 1, a flow channel area 5 is arranged between the two groups of limiting strips 4, and the conveying belt is arranged in the flow channel area 5. The front end of the front end detection frame 2 is provided with a front end positioning sensor 6, the bottom of the front end detection frame 2 is provided with a detection device 7, the detection device 7 is uniformly distributed with infrared detectors 701, and the infrared detectors 701 are uniformly distributed on the detection device according to the arrangement density of semiconductor particles. The infrared detector 701 is an infrared distance meter. When the semiconductor particle detection device works specifically, firstly, the height of semiconductor particles to be detected is integrated, a reasonable distance range is input into a control center, the semiconductor to be detected is placed in a material tray, when the material tray passes through a front end positioning sensor 6, the control center receives signals and controls the infrared detectors to work, the uniformly distributed infrared detectors 701 detect the distances from the top surfaces of the semiconductor particles to the infrared detectors 701 one by one and transmit the distance data to the control center, the control center compares the detection data with the reserved reasonable distance range data, if the detection data are in the reasonable range, the semiconductor particles are placed completely, if the distance is found to be too large and exceeds the range, the semiconductor particles are lost, and the infrared detectors for detecting the positions belong to N-type semiconductor particles or P-type semiconductor particles, and the specific data are transmitted to the control center, and the control center records the data and sends a feeding instruction to the rear-end feeding frame 3 according to the data.

The front end of the rear end material supplementing frame 3 is provided with a rear end positioning sensor 8, the rear end material supplementing frame is rotatably connected with a cylinder 10, a material supplementing device 11 is arranged below the cylinder 10, specifically, the rear end material supplementing frame 3 is provided with a case 9, a rotating shaft 15 and a motor in transmission connection with the rotating shaft 15 are arranged in the case 9, the rotating shaft 15 is fixedly connected with the cylinder 10 through a connecting rod, an arc-shaped notch 901 is formed in the side edge of the case 9, and the connecting rod is arranged in the arc-shaped notch 901. The rotating shaft 15 rotates to drive the cylinder 10 to rotate within the range of the arc notch 901. The feeding device 11 comprises an expansion link 12 and an air pipe 13 fixedly connected with the expansion link 12, the air pipe 13 is communicated with the cylinder 10, a suction cup 14 is arranged at the tail end of the air pipe 13, and the feeding device 11 is provided with a plurality of groups of expansion links 12 which are uniformly distributed and the air pipe 13 fixedly connected with the expansion links 12. The air pipes 13 are provided with independent ventilation switches. The plurality of sets of telescopic rods 12 operate independently, i.e., the telescopic rods can be independently telescopic. The specific distribution number is adjusted by itself based on actual use, and in this embodiment, 12 × 12 standard distribution is adopted. The feeding device is divided into an N-type part and a P-type part, as shown in FIG. 5, in this embodiment, the left side of the dotted line is N-type semiconductor particles, and the right side of the dotted line is P-type semiconductor particles. The front end positioning sensor, the rear end positioning sensor, the front end detection frame, the rear end material supplementing frame and the conveying belt are electrically connected with the control center. The front end positioning sensor and the rear end positioning sensor can be common positioning sensors in the prior art.

After the material detects through front end test rack 2, will need the position data of feed supplement to reach the feed supplement device via control center, after rear end positioning sensor detected, the conveyer belt stopped, the telescopic link that feed supplement device control corresponds the position descends, when descending preset position, the switch was opened on the trachea that corresponds, atmospheric pressure is lost, the sucking disc loses suction, the benefit of accomplishing the semiconductor granule leaks and places, reports control center simultaneously, control center record changes the sucking disc and has not had the semiconductor granule. And after the material is supplemented, the conveyer belt continues to run. When the particles need to be placed next time, the air cylinder is moved, and the particles at other positions are taken to be placed. When N type semiconductor particles or P type semiconductor particles are put, the rotating shaft rotates to drive the material supplementing device 11 to rotate to the side edge, then all suckers without semiconductor particles fall down under the control of the telescopic rod at the same time, the suckers suck the semiconductor particles which are put well, then corresponding air pipe switches are closed, an enterprise is maintained, the suckers have suction, and the semiconductor particles are supplemented.

The material tray comprises a material retaining groove 16, a material placing positioning hole 17 is formed in the material retaining groove, and conveying positioning holes 18 are formed in the corners of the material tray, so that automatic identification of automatic operation is facilitated. The semiconductor refrigerating sheet to be detected is placed in the material groove 16.

The specific working principle is as follows: the conveyer belt is installed in the region 5 that flows to, then will wait to detect the material and place in the material tray, put on the conveyer belt, then starting equipment, when the material moves to the testing stand department, front end testing stand 3 treats that it detects the semiconductor granule and carries out one-to-one detection to reach control center with the testing result, control center assigns the feed supplement instruction to the feed supplement device according to detection data, after the feed supplement is accomplished, collects corresponding material tray.

The above description is only for the preferred embodiment of the present invention, and the shown orientation or positional relationship is only for the convenience of describing the present invention and simplifying the description, the terms "disposed", "installed", "connected", "fixed", etc. should be understood in a broad sense, and various modifications and changes may be made to the present invention by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A semiconductor particle leakage repairing device for semiconductor refrigeration sheet production is characterized by comprising a workbench, a conveying belt arranged on the workbench, a front end detection frame, a rear end material supplementing frame and a control center, the front end of the front end detection frame is provided with a front end positioning sensor, the bottom of the front end detection frame is provided with a detection device, the detection device is uniformly distributed with infrared detectors, the front end of the rear end material supplementing frame is provided with a rear end positioning sensor, the rear end material supplementing frame is rotatably connected with an air cylinder, a material supplementing device is arranged below the air cylinder, the material supplementing device internally comprises a telescopic rod and an air pipe fixedly connected with the telescopic rod, the air pipe is communicated with the air cylinder, the tail end of the air pipe is provided with a sucker, the material supplementing device is divided into an N-type part and a P-type part, the front end positioning sensor, the rear end positioning sensor, the front end detection frame, the rear end material supplementing frame and the conveying belt are electrically connected with the control center.

2. The semiconductor particle leakage repairing device for semiconductor chilling plate production as claimed in claim 1, wherein two sets of limiting strips are arranged on the workbench, a flow channel area is arranged between the two sets of limiting strips, and the conveying belt is arranged in the flow channel area.

3. The semiconductor particle leakage repairing device for semiconductor chilling plate production as claimed in claim 1, wherein the infrared detector is uniformly distributed on the detection device according to the arrangement density of semiconductor particles.

4. The semiconductor particle leakage repairing device for semiconductor refrigeration sheet production as claimed in claim 1, wherein a case is arranged on the rear end material supplementing frame, a rotating shaft and a motor in transmission connection with the rotating shaft are arranged in the case, the rotating shaft is fixedly connected with a cylinder through a connecting rod, an arc-shaped notch is formed in a side edge of the case, and the connecting rod is arranged in the arc-shaped notch.

5. The semiconductor particle leakage repairing device for semiconductor refrigerating sheet production according to claim 4, wherein the leakage repairing device is provided with a plurality of groups of uniformly distributed telescopic rods and air pipes fixedly connected with the telescopic rods.

6. The semiconductor particle leakage repairing device for semiconductor chilling plate production according to claim 5, wherein said several groups of air pipes are provided with independent ventilation switches.

7. The semiconductor particle leakage repairing device for semiconductor chilling plate production according to claim 6, wherein said plurality of sets of telescopic rods operate independently.