CN216482251U - Clamping mechanism and sintering furnace automatic feeding device - Google Patents

Abstract

The utility model relates to the technical field of semiconductor manufacturing, in particular to a clamping mechanism and an automatic feeding device of a sintering furnace, which are used for adapting to the automatic feeding of chip sintering; the clamping mechanism comprises a main body platform, and the main body platform is used for being fixed at the execution tail end of the robot; the material taking platform and the clamping jaw assembly are arranged on the main body platform, the material taking platform is used for extending into the space between two adjacent graphite close sheets of the feeding trolley, the clamping jaw assembly comprises two clamping jaw heads, the clamping surfaces of the two clamping jaw heads are vertically arranged, and the two clamping jaw heads can be used for clamping two side edges of the graphite close sheets respectively. The utility model discloses collect the flush end and get material and put material loading function in an organic whole, can adapt to the material loading requirement and the current production condition that the material graphite closed the piece, do benefit to the automatic transformation of the whole technology line in later stage, liberation labour, improvement production efficiency.

Description

Clamping mechanism and sintering furnace automatic feeding device

Technical Field

The utility model relates to a semiconductor manufacturing technical field, especially a fixture and fritting furnace automatic feeding device.

Background

The chip sintering is to take a graphite plate as a carrier, place a chip frame and a chip between an upper graphite plate and a lower graphite plate (which are collectively called as 'graphite laminating') with a fit gap, and solidify liquid tin paste on the chip by using a sintering furnace, so as to realize the solidification of the chip on the frame; the graphite sheet should be kept in a flat state as much as possible without inclination and overstocking.

Before feeding, placing a plurality of processed graphite lamination sheets on a material rack of a feeding trolley in a layering manner in advance, so as to avoid direct mutual stacking of the graphite lamination sheets; and then transferred to a sintering procedure feeding area by a feeding trolley. Because the end effector of the existing multi-axis robot is generally of a gas claw or sucking disc structure, the gas claw cannot stably clamp the graphite laminated sheet and the gas claw can generate overlarge local clamping force on the upper surface and the lower surface of the graphite laminated sheet; the sucking disc can only act on the graphite dish, is not suitable for wholly snatching graphite and close the piece, and graphite closes getting of piece space narrow and small, does not have suitable fixture can be applicable to getting of graphite and close the piece and expect with the material at present.

Therefore, the graphite sheet feeding and carrying process usually adopts manual material taking and feeding, a worker places the graphite plate at the two horizontal ends on the rails in a fixed period, the working technology difficulty is low, the labor intensity is high, repeated labor is easy to generate fatigue, the working state, proficiency and the like of the worker can influence the quality of a final product, and the production efficiency is low. Therefore, it is necessary to design a clamping mechanism and a related automatic feeding device for fixing at the end of a robot to adapt to the automatic feeding production of chip sintering.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a: the clamping mechanism and the automatic loading device of the sintering furnace are used for adapting to automatic loading of chip sintering.

In order to realize the purpose, the utility model discloses a technical scheme be:

a clamping mechanism comprises a main body platform, a clamping mechanism body and a clamping mechanism body, wherein the main body platform is used for being fixed at the execution tail end of a robot;

a material taking platform is arranged on the main body platform and can extend into the feeding trolley between two adjacent graphite sheets;

still be equipped with clamping jaw assembly on the main part platform, clamping jaw assembly includes two clamping jaw heads, and the equal vertical setting of clamping face of two clamping jaw heads, two clamping jaw heads can be used for the centre gripping graphite respectively and close the both sides limit of piece.

The utility model provides a clamping mechanism, which firstly utilizes a material taking platform to extend into a feeding trolley to take out the whole graphite laminating piece in a flat support manner, thereby providing an operable space for clamping the graphite laminating piece by a clamping jaw assembly; when the clamping jaw assembly is used for feeding, the two clamping jaw heads of the clamping jaw assembly are respectively clamped on the two opposite sides of the graphite sheet to be taken out, so that the situation that external pressure is applied to a processed product between the upper graphite plate and the lower graphite plate to damage the processed product is avoided.

The utility model provides a fixture, collect the flush end and get material and put material loading function in an organic whole, can adapt to the material loading requirement and the current production condition that have material graphite to close the piece, do benefit to the automatic transformation of the whole technology line in later stage, liberation labour, improvement production efficiency.

Preferably, the reclaiming platform is slidably connected with the main body platform. When the clamping mechanism uses the clamping jaw assembly to carry out feeding, the material taking platform can be retracted, so that the obstacle avoidance is facilitated, and the reduction of the operation space is facilitated.

Preferably, the material taking platform comprises a first platform, a second platform and at least two guide rods arranged in parallel, and the guide rods are connected with the first platform and the second platform; the main platform is provided with a movable cylinder and a guide seat corresponding to the guide rod, the movable rod of the movable cylinder is connected with the first platform and used for driving the material taking platform to do reciprocating linear movement relative to the main platform, the guide rod is sleeved in the guide seat, and the guide seat plays roles of supporting and limiting.

Preferably, the clamping direction of the two gripper heads is perpendicular to the sliding direction of the material taking platform. The space occupation of the clamping jaw head clamping mode is small, and the interference of the material taking platform or the main body platform with other structures can be avoided as much as possible. Therefore, the structure is more reasonable, and the environmental adaptability is better.

Preferably, the clamping jaw assembly and the material taking platform are respectively located on two side faces of the main body platform, and the structural arrangement is more reasonable and concise.

Preferably, above-mentioned fixture still including stretching out the attenuator, stretch out the attenuator and set up in the free end of main part platform, stretch out the attenuator and be used for contacting and get the material platform, can reduce and get the impact that the material platform put in place and produce when withdrawing. The free end of the main body platform is the end, far away from the execution tail end of the robot, of the main body platform and is consistent with the extending direction of the material taking platform.

Preferably, the clamping mechanism further comprises a first detection sensor, a second detection sensor and an extension sensor, wherein the first detection sensor is arranged at the upper part of the main platform and is used for detecting whether the graphite laminating sheet is arranged above the clamping mechanism or not; the second detection sensor is arranged at the lower part of the main body platform and is used for detecting whether a graphite laminating sheet or an empty graphite plate exists below the clamping mechanism; the extension sensor is used for detecting whether the extension position of the material taking platform reaches the designated position or not, and invalid operation is prevented.

The utility model also provides an automatic loading device of the sintering furnace, which comprises a transfer rack and a six-axis robot, wherein the end effector of the six-axis robot is the clamping mechanism; the transfer work or material rest includes the support of two relative settings, and the high position of two supports is unanimous, and the distance between two supports is less than the length/width that graphite closed the piece, and is greater than the width of getting the material platform. It should be noted that, the distance between two supports is decided by the actual placing mode of graphite alloy, and the graphite alloy sheet that the transfer work or material rest can supply on getting the material platform is placed on both sides support and can supply to get the material platform and break away from in the clearance can.

The utility model provides an automatic feeding device of a sintering furnace, which realizes material taking and feeding by controlling a six-axis robot to automatically clamp graphite sheets; when the materials are taken, the graphite lamination is taken out from the flat end of the feeding trolley and then flatly placed on the transfer rack by using the material taking platform of the clamping mechanism, so that the end effector of the six-axis robot is conveniently converted from a state of flat-end graphite lamination to a state of clamping the side edge of the graphite lamination by the clamping jaw assembly, the graphite lamination is stably flatly placed in the whole process from the material taking to the material loading, the automatic material loading of the chip frame sintering process is realized, the labor force is liberated, the influence on the product quality due to the proficiency and the state of workers is avoided, the product quality is stable and reliable, and the production efficiency is high.

Preferably, the automatic feeding device of the sintering furnace further comprises a positioning support device, and the positioning support device is used for positioning the feeding trolley.

Preferably, the feeding trolley is provided with two positioning blocks which are arranged oppositely; the positioning support device comprises a support main body, the support main body comprises a top plate, two side plates and a main plate, and the distance between the two side plates is more than or equal to the width of the feeding trolley for the feeding trolley to enter; a row of guide wheels are arranged on each of two sides of the top plate, the distance between the outer edges of the guide wheels on the two sides is matched with the gap between the two positioning blocks, the guide wheels are arranged to facilitate accurate positioning of the feeding trolley, reduce contact friction and limit left and right;

a distance measuring sensor is arranged on the top plate and can detect the position of the graphite lamination in the feeding trolley; the main board is provided with a proximity sensor and an electromagnet, the proximity sensor is used for detecting the in-place condition of the feeding trolley, and the electromagnet is used for attracting the feeding trolley and limiting the displacement of the feeding trolley.

When the feeding trolley is used, the feeding trolley is pushed into the positioning support device along the guide wheel, the electromagnet is automatically attracted and positioned after the proximity sensor detects that the graphite sheet on the feeding trolley is completely taken, and the electromagnet is automatically loosened to push away the empty feeding trolley after the distance measuring sensor detects that the graphite sheet on the feeding trolley is completely taken.

Preferably, the main board is further provided with a damping buffer, and the damping buffer is used for contacting the feeding trolley and preventing the feeding trolley from generating large impact on the positioning support device when in place.

Preferably, above-mentioned sintering furnace automatic feeding device still includes parting strip and parting strip pusher, and parting strip pusher is used for supplying six robots to snatch with parting strip propelling movement to the assigned position.

To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:

1. the utility model provides a fixture, collect the flush end and get material and put material loading function in an organic whole, can adapt to the material loading requirement and the current production condition that have material graphite to close the piece, do benefit to the automatic transformation of the whole technology line in later stage, liberation labour, improvement production efficiency.

2. The utility model provides a fritting furnace automatic feeding device can replace artifical completion to have the material graphite to close the material loading of piece, can enough close the piece completion with graphite in limited space and get the material, can switch graphite again through well commentaries on classics work or material rest and close piece clamping state, makes graphite close the piece and can both keep the steady state of not inclining from getting to the whole in-process of material loading, and product quality is reliable and stable, and to a great extent has reduced artifical intensity of labour, and production efficiency is high.

Drawings

Fig. 1 is a schematic perspective view of a clamping mechanism according to embodiment 1.

Fig. 2 is a front view of the clamping mechanism of fig. 1.

Fig. 3 is an enlarged view of a portion a in fig. 2.

Fig. 4 is a schematic view of the gripper mechanism with the reclaiming station extended.

Fig. 5 is a schematic view of the gripper mechanism from another perspective with the take-off platform extended.

Fig. 6 is a perspective view of the positioning frame device.

Fig. 7 is a front view of fig. 6.

Fig. 8 is a schematic view of the fitting state of the positioning bracket device when the feeding trolley is positioned.

FIG. 9 is a plan view of an automatic charging device for a sintering furnace in example 2 (sintering furnace equipment is omitted).

Icon: 100-a body platform; 110-a material taking platform; 111-a first platform; 112-a second platform; 113-a guide bar; 120-a jaw assembly; 121-gripper heads; 122-jaw cylinder; 130-a movable cylinder; 131-a movable rod; 140-a guide seat; 150-a first detection sensor; 160-a second detection sensor; 170-extension damper; 180-extension sensor;

200-transferring the material rack; 210-a six-axis robot; 220-positioning the bracket device; 221A-top plate; 221B-side panel; 221C-main board; 222-an electromagnet; 223-ranging sensor, 224-guide wheel; 225-proximity sensor; 226-a damping bumper; 230-a feeding trolley; 231-a positioning block; 240-spacer pushing means;

300-graphite lamination; 400-protective cover; 500-empty graphite disks; 600-controlling the display device.

Detailed Description

The present invention will be described in detail with reference to the accompanying drawings.

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.

Example 1

A clamping mechanism, as shown in fig. 1-5, comprises a main body platform 100, wherein the main body platform 100 is used for being fixed at the execution end of a robot; the main platform 100 is provided with a material taking platform 110, and the material taking platform 110 is used for extending into the feeding trolley 230 between two adjacent graphite sheets 300; the feeding trolley 230 is used for storing the graphite combined sheets 300 in a layered manner, so that the graphite combined sheets 300 are prevented from being directly stacked;

still be equipped with clamping jaw assembly 120 on main part platform 100, clamping jaw assembly 120 includes two clamping jaw heads 121, and the equal vertical setting of clamping face of two clamping jaw heads 121, two clamping jaw heads 121 can be used for the both sides limit of centre gripping graphite close piece 300 respectively.

The clamping mechanism firstly utilizes the material taking platform to extend into the feeding trolley to take out the whole graphite lamination flat support, and provides an operable space for the clamping jaw assembly to clamp the graphite lamination for feeding; when the clamping jaw assembly is used for feeding, the two clamping jaw heads of the clamping jaw assembly are respectively clamped on two opposite side edges of the graphite sheet to be taken out, so that the situation that external pressure is applied to a processed product between the upper graphite plate and the lower graphite plate to damage the processed product is avoided.

The bottom end of the clamping jaw head is controlled to clamp the lower graphite plate of the graphite laminated sheet without exceeding the bottom surface of the lower graphite plate during clamping, so that the lower graphite plate can be directly placed on a sintering furnace rail in a flat mode without inclination during feeding.

Above-mentioned fixture collects the flat end and gets material and put material loading function in an organic whole, can adapt to the material loading requirement and the current production condition that have material graphite to close the piece, does benefit to the automatic transformation of whole processing line in later stage, liberation labour, improvement production efficiency.

Specifically, the reclaiming platform 110 is slidably coupled to the main platform 100. The material taking platform 110 comprises a first platform 111, a second platform 112 and at least two guide rods 113 which are arranged in parallel, wherein the guide rods 113 are connected with the first platform 111 and the second platform 112; the middle part of the main body platform 100 is provided with a movable cylinder 130 along the length direction, and a movable rod 131 of the movable cylinder 130 is connected with the first platform 111 and used for driving the material taking platform 110 to do reciprocating linear movement relative to the main body platform 100.

Furthermore, two sides of the main body platform 100 along the width direction are respectively and integrally provided with two guide seats 140, the guide rod 113 of the material taking platform 110 is sleeved in the guide seats 140, and the guide seats 140 play a supporting role for the material taking platform 110; two guide seats 140 close to the free end are used for return limit of the first platform 111, and two guide seats 140 far away from the free end are used for extension limit of the second platform 111.

Further, a first detection sensor 150 is disposed on the upper portion of the main body platform 100, and the first detection sensor 150 is used for detecting whether the graphite sheet 300 is located at a set position above the clamping mechanism; the lower part of the main body platform 100 is provided with a second detection sensor 160 for detecting whether a graphite laminating sheet 300 or an empty graphite plate 500 is arranged at a set position below the clamping mechanism, so as to prevent the robot from idle operation. The free end of the main body platform 100 is also symmetrically provided with an extending sensor 180 and an extending damper 170 along the two sides of the width direction, and the extending sensor is used for detecting whether the extending position of the material taking platform 110 is in place; the end of the extension damper 170 extends beyond the edge of the body platform 100 for abutting the first platform 111 of the return stroke to reduce the impact of the first platform 111 in place when retracted; the extension sensor 180 and the extension damper 170 are detachably attached to the inner sides of the two guide bases 140 near the free ends, respectively.

The clamping jaw assembly 120 further comprises a clamping jaw cylinder 122, the two clamping jaw heads 121 are respectively arranged on two sides of the clamping jaw cylinder 122, the clamping direction of the two clamping jaw heads 121 is perpendicular to the sliding direction of the material taking platform 110, and the clamping openings are arranged downwards; the clamping jaw cylinder 122 is fixed at the bottom of the main body platform 100, and the clamping jaw cylinder 122 drives the two clamping jaw heads 121 to open and clamp; the gripper assembly and the material taking platform 110 are respectively disposed on two side surfaces of the main body platform 100.

Example 2

Based on embodiment 1, this embodiment provides an automatic feeding device of a sintering furnace, as shown in fig. 6 to 9, the device includes a transfer frame 200 and a six-axis robot 210, an end effector of the six-axis robot 210 is the above-mentioned clamping mechanism, and the transfer frame 200 is used for switching between a state where the six-axis robot 210 takes the graphite sheet 300 from a flat end of the material taking platform 110 to a state where the graphite sheet 300 is clamped by the clamping jaw assembly 120 during material taking. The body structure of the transfer rack 200 is two oppositely arranged supports, the height positions of the two supports are consistent, and the width of the gap between the two supports is smaller than the width/length (determined by the actual placing mode of graphite lamination) of the graphite disc and larger than the width of the material taking platform 110. The transfer support should have enough high space for the feeding platform to enter and change positions.

According to the automatic feeding device for the sintering furnace, the six-axis robot is controlled to automatically clamp the graphite lamination to realize material taking and feeding; when the materials are taken, the graphite lamination is taken out from the flat end of the feeding trolley and then flatly placed on the transfer rack by using the material taking platform of the clamping mechanism, so that the end effector of the six-axis robot is conveniently converted from a state of flat-end graphite lamination to a state of clamping the side edge of the graphite lamination by the clamping jaw assembly, the graphite lamination is stably flatly placed in the whole process from the material taking to the material loading, the automatic material loading of the chip frame sintering process is realized, the labor force is liberated, the influence on the product quality due to the proficiency and the state of workers is avoided, the product quality is stable and reliable, and the production efficiency is high.

The automatic feeding device of the sintering furnace further comprises a feeding trolley 230, a positioning support device 220, a control display device 600, a spacing bar and spacing bar pushing device 240, an empty graphite plate 500, a graphite plate positioning and identifying device, an external protective cover 400 and the like.

Specifically, the feeding trolley 230 comprises a graphite sheet placing area and a positioning area, the graphite sheet placing area is used for placing the graphite sheets 300 in a layered manner, the positioning area is used for being matched and positioned with the positioning bracket device 220, and the positioning area is located below the graphite sheet placing area; two oppositely arranged positioning blocks 231 are arranged in the positioning area, a gap between the two positioning blocks 231 is arranged along the feeding direction, and two baffle plates are further arranged on one surface facing the positioning bracket device 220.

The positioning bracket device 220 is used for positioning the feeding trolley 230 and detecting the placement (such as the number and the position) of the graphite laminates 300 in the feeding trolley 230, and is used for transmitting a detection signal to the six-axis robot 210; the positioning bracket device 220 comprises a bracket main body, an electromagnet 222, a distance measuring sensor 223, a guide wheel 224 and a proximity sensor 225;

the bracket main body comprises a top plate 221A, two side plates 221B and a main plate 221C, wherein the distance between the two side plates 221B is larger than or equal to the width of the feeding trolley 230; two rows of guide wheels 224 are arranged on the top plate 221A, the distance between the outer edges of the two rows of guide wheels 224 is matched with the gap between the two positioning blocks 231, and the arrangement of the guide wheels 224 is convenient for the accurate positioning of the feeding trolley 230 and the reduction of contact friction;

the distance measuring sensor 223 is positioned on the top plate 221A and is used for detecting the position and the number of the graphite laminating sheets 300 in the feeding trolley 230, and the distance measuring sensor 223 can be a laser sensor or an acoustic wave sensor; the proximity sensor 225 and the electromagnet 222 are both arranged on the side surface of the main board 221C facing the feeding trolley 230, the proximity sensor 225 is used for detecting the arrival condition of the feeding trolley 230, and the electromagnet 222 is used for attracting the feeding trolley 230.

When the device is used, the feeding trolley 230 is pushed into the positioning bracket device 220 along the guide wheel 224, the electromagnet 222 is automatically attracted and positioned after the proximity sensor 225 detects that the graphite sheet 300 on the feeding trolley 230 is completely taken, and the electromagnet 222 is automatically released after the distance measuring sensor 223 detects that the empty feeding trolley 230 can be pushed away.

The positioning bracket device 220 further includes a damping buffer 226, and the damping buffer 226 is disposed on a side surface of the main plate 221C facing the feeding trolley 230. The damping bumper 226 is used to prevent a large impact from being generated on the positioning frame assembly 220 when the feeding trolley 230 is in place.

The control display device 600 is used for operating the equipment, displaying the current state of the equipment and alarming; the graphite disc positioning and identifying device is used for regulating the graphite laminated sheet 300, so that a clamping mechanism can conveniently grab and identify the graphite disc codes; the empty graphite plates 500 are stacked and cached in the empty graphite plate 500 placing area, and when the graphite lamination 300 products in the feeding trolley 230 are completely taken and a new batch of products are not delivered, the empty graphite plates are used for the robot to operate; the isolating bars are used for identifying sintering batches, and the isolating bar pushing device 240 is used for pushing the isolating bars to a specified position to be grabbed by the six-axis robot 210; the outer shield 400 is used to isolate equipment from pedestrians, protecting personnel safety.

The whole process of the automatic feeding device of the sintering furnace comprises the following steps:

(1) transporting two feeding trolleys 230 filled with graphite composite sheets 300 to the positions of the positioning bracket devices;

(2) the six-axis robot 210 drives the clamping mechanism to extend out of the material taking platform 110 to take out the graphite lamination 300 from the flat end of the feeding trolley 230, and the graphite lamination 300 is placed on the transfer rack 200 and is identified and positioned by a graphite disc positioning identification device;

(3) meanwhile, the six-axis robot 210 drives the clamping mechanism to convert the grabbing position, withdraws the material taking platform 110, clamps the side edge of the graphite sheet 300 by using the clamping jaw assembly 120, clamps the graphite sheet 300 at the specified position after the identification and positioning are completed, and waits for the sintering process. So as to complete the loading of all the graphite composite sheets 300 on the feeding trolley 230.

After the batch of one feeding trolley 230 is taken out, the six-axis robot 210 automatically drives the clamping mechanism to move to the position of the parting strip pushing device 240, and the parting strips are clamped by the clamping jaw assembly 120 and placed at the specified position for batch isolation; after the spacers are placed, the device continues to automatically grab the graphite plates on the other batch number feeding trolley 230.

When all the graphite lamination 300 on all the feeding trolleys 230 are placed, the six-axis robot 210 drives the clamping mechanism to move to the placing area of the empty graphite plate 500 to grab the empty graphite plate 500 to replace the loaded graphite lamination for feeding, so that the temperature in the sintering furnace is kept constant as much as possible; waiting for a new batch of feed carts 230 to feed.

The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims (10)

1. A clamping mechanism, comprising a main body platform (100), wherein the main body platform (100) is used for being fixed at the execution end of a robot;

a material taking platform (110) is arranged on the main body platform (100), and the material taking platform (110) can extend into the space between two adjacent graphite laminating sheets (300) in the feeding trolley (230);

still be equipped with clamping jaw assembly (120) on main part platform (100), clamping jaw assembly (120) include two clamping jaw heads (121), two the equal vertical setting of clamping face of clamping jaw head (121), two clamping jaw head (121) can be used for the centre gripping respectively the graphite closes the both sides limit of piece (300).

2. The clamping mechanism of claim 1, wherein the take out platform (110) is slidably connected to the body platform (100).

3. The gripper mechanism of claim 1, wherein the gripping direction of the two gripper heads (121) is perpendicular to the sliding direction of the reclaiming platform (110).

4. The clamping mechanism of claim 1, wherein the jaw assembly and the take-out platform (110) are located on opposite sides of the body platform (100).

5. The clamping mechanism of claim 1, further comprising an extension damper (170), said extension damper (170) being disposed at a free end of said body platform (100).

6. Gripper mechanism according to one of the claims 1 to 5, characterized in that it further comprises a first detection sensor (150), a second detection sensor (160) and an extension sensor (180),

the first detection sensor (150) is arranged at the upper part of the main body platform (100);

the second detection sensor (160) is arranged at the lower part of the main body platform (100);

the extension sensor (180) is used for detecting whether the extension position of the material taking platform (110) reaches a specified position.

7. An automatic loading device of a sintering furnace is characterized by comprising a transfer frame (200) and a six-axis robot (210), wherein an end effector of the six-axis robot (210) is a clamping mechanism according to any one of claims 1 to 6, the transfer frame (200) comprises two oppositely arranged supports, the height positions of the two supports are consistent, and the distance between the two supports is smaller than the length/width of the graphite sheet (300) and larger than the width of the material taking platform (110).

8. The sintering furnace automatic feeding device according to the claim 7, characterized by further comprising a positioning bracket device (220), wherein the positioning bracket device (220) is used for positioning the feeding trolley (230).

9. The automatic loading device of the sintering furnace according to the claim 8, characterized in that the feeding trolley (230) is provided with two oppositely arranged positioning blocks (231);

the positioning support device (220) comprises a support main body, the support main body comprises a top plate (221A), two side plates (221B) and a main plate (221C), and the distance between the two side plates (221B) is larger than or equal to the width of the feeding trolley (230); a row of guide wheels (224) are arranged on each of two sides of the top plate (221A), and the distance between the outer edges of the guide wheels (224) on the two sides is matched with the gap between the two positioning blocks (231);

a distance measuring sensor (223) is arranged on the top plate (221A), and the distance measuring sensor (223) is used for detecting the position of the graphite laminating sheet (300) in the feeding trolley (230); the main board (221C) is provided with a proximity sensor (225) and an electromagnet (222), the proximity sensor (225) is used for detecting the in-place condition of the feeding trolley (230), and the electromagnet (222) is used for attracting the feeding trolley (230).

10. Sintering furnace automatic feeding device according to claim 9, characterized in that a damping buffer (226) is further provided on the main plate (221C), said damping buffer (226) being used to contact the feeding trolley (230).

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