CN216444570U

CN216444570U - Continuous feed mechanism of cleaning machine

Info

Publication number: CN216444570U
Application number: CN202122919292.7U
Authority: CN
Inventors: 卞梁; 杨昱
Original assignee: Jinzhou Thinkon Semiconductor Co ltd
Current assignee: Jinzhou Thinkon Semiconductor Co ltd
Priority date: 2021-11-25
Filing date: 2021-11-25
Publication date: 2022-05-06
Anticipated expiration: 2031-11-25

Abstract

The utility model discloses a continuous feeding mechanism of a cleaning machine, which relates to the technical field of silicon wafer processing and comprises a slide rail, the upper end of the sliding rail is connected with three supporting plates in a sliding way, the upper ends of the three supporting plates are sequentially provided with a first tool, a second tool and a third tool, limiting columns are respectively arranged between the lower ends of the first tool, the second tool and the third tool and the three supporting plates, after the material is discharged, a person does not need to wait for the silicon wafer to be conveyed from the initial station to the final station any more, and through the arrangement of the first tool, the second tool and the third tool, the silicon wafer can be conveyed to the next station more smoothly, the waiting time is shortened, the production time of a cleaning machine is reduced, the yield of the silicon wafer is improved, the feeding mechanism is divided into three tools, when one of the tools is damaged, the silicon wafers can still be conveyed, so that the total production is ensured.

Description

Continuous feed mechanism of cleaning machine

Technical Field

The utility model relates to the technical field of silicon wafer processing, in particular to a continuous feeding mechanism of a cleaning machine.

Background

In the field of silicon wafer manufacturing, silicon wafer cleaning is an important link, after a feeding table of a cleaning machine discharges materials, a moving tool is needed to convey the silicon wafer from an initial station to a final station, and then a mechanical arm grabs the materials to clean the silicon wafer. At present, the cleaning machine cannot continuously feed materials in a feeding operation mode, after the materials are discharged, a person needs to wait for the silicon wafer to be conveyed from an initial station to a final station, the waiting time is too long, the production time of the cleaning machine is prolonged, and therefore the yield of the silicon wafer is reduced.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a continuous feeding mechanism of a cleaning machine, which aims to solve the problems that the feeding operation mode of the prior cleaning machine provided by the background art cannot continuously feed materials, when a person needs to wait for a silicon wafer to be conveyed from an initial station to a final station after discharging, the production time of the cleaning machine is increased due to overlong waiting time, so that the yield of the silicon wafer is reduced, and on the other hand, the moving tool without continuous feeding of the cleaning machine is an integral tool, so that the product cannot be produced if the moving tool is damaged, and the total yield is influenced.

In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a continuous feed mechanism of cleaning machine, includes the slide rail, the upper end sliding connection of slide rail has three backup pad, and is three the upper end of backup pad sets gradually a frock, No. two frocks and No. three frocks, a frock No. two frocks reach the lower extreme and the three of No. three frocks are equipped with spacing post between the backup pad respectively.

Preferably, the first tool, the second tool and the third tool all comprise bottom plates, side plates are arranged at the upper ends of the bottom plates, material feeding plates are connected between the side plates through bolts, and material feeding seats are arranged at the upper ends of the material feeding plates.

Preferably, the upper surface of the supporting plate is provided with the lower ends of the lifting cylinders at the two limited ends, and the upper ends of the lifting cylinders are connected with the lower ends of the first tool, the second tool and the third tool.

Preferably, the inside of slide rail is equipped with a cylinder, No. two cylinders and No. three cylinders respectively, the expansion end of a cylinder, No. two cylinders and No. three cylinder respectively with three the lower extreme of backup pad is connected.

Preferably, the first tool, the second tool and the third tool are connected with the supporting plate in a sliding mode through the limiting columns.

Compared with the prior art, the utility model has the beneficial effects that: through slide rail sliding connection backup pad, and set up a frock in the backup pad, No. two frocks and No. three frocks, transport the work piece, replace the cleaning machine material loading operation mode of unable continuous material loading at present, no longer need wait for the silicon chip to convey the final station from initial station after personnel's blowing, through a frock, the setting of No. two frocks and No. three frocks, can be the more smooth next station conveying of silicon chip, shorten latency, the time of cleaning machine production has been reduced, thereby promote silicon chip output, decompose into three frock with feed mechanism, when one of them frock damages, still can guarantee transporting of silicon chip, thereby guarantee total output.

Drawings

FIG. 1 is an isometric view of a body structure of the present invention;

FIG. 2 is a schematic front view of the main structure of the present invention;

FIG. 3 is a right side view of the main structure of the present invention;

FIG. 4 is a schematic top view of the main structure of the present invention;

fig. 5 is a top sectional view of the main structure of the present invention.

In the figure: the device comprises a slide rail 1, a support plate 2, a tool 3, a tool 301, a bottom plate 302, a side plate 303, a feeding plate 304, a feeding seat 4, a tool II, a tool III, a limiting column 6, a lifting cylinder 7, a cylinder 8, a cylinder 9, a cylinder III, a cylinder 11, a station I, a station 12, a station II, a station 13, a station III, a station 14, a station IV and a station 15, wherein the slide rail is arranged on the bottom plate, the side plate is arranged on the bottom plate, the lifting cylinder 7 is arranged on the bottom plate, the cylinder 8, the cylinder II, the cylinder 10, the station I, the station II, the station 13, the station III, the station IV and the station V station 15.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-5, the utility model provides a continuous feeding mechanism of a cleaning machine, which comprises a slide rail 1, wherein the upper end of the slide rail 1 is slidably connected with three support plates 2, the upper ends of the three support plates 2 are sequentially provided with a first tool 3, a second tool 4 and a third tool 5, and limit posts 6 are respectively arranged between the lower ends of the first tool 3, the second tool 4 and the third tool 5 and the three support plates 2.

During the use, support 2 of upper end through slide rail 1, and guarantee that backup pad 2 can smoothly slide on slide rail 1, set gradually a frock 3 through three backup pad 2, No. two frock 4 and No. three frock 5, make a frock 3, No. two frock 4 and No. three frock 5 can relatively independent motion, and guarantee a frock 3, No. two there is not the collision between frock 4 and No. three frock 5, carry on spacingly through spacing post 6 to the motion of a frock 3, No. two frock 4 and No. three frock 5 upper and lower direction in backup pad 2.

Tool 3, No. two tools 4 and No. three tools 5 all include bottom plate 301, the upper end of bottom plate 301 is equipped with curb plate 302, there is flitch 303 through bolted connection between the curb plate 302, the upper end of going up flitch 303 is equipped with material loading seat 304, support the upper end structure through bottom plate 301, it makes to set up curb plate 302 on bottom plate 301, tool 3, the height that needs when highly accords with the silicon chip transportation of No. two tools 4 and No. three tools 5, and set up material loading plate 303 between curb plate 302, material loading plate 303 horizontal and bottom plate 301 between leave the space, make the tolerance of transportation silicon chip in-process dissolve through the deformation of curb plate 302 and material loading plate 303, set up material loading seat 304 on material loading plate 303, hold the dress to the silicon chip through material loading seat 304.

The upper surface of backup pad 2 and all be equipped with the lower extreme of lift cylinder 7 at spacing both ends of living 6, the upper end of lift cylinder 7 is connected with the lower extreme of a frock 3, No. two frock 4 and No. three frock 5, controls the motion of the upper and lower direction of a frock 3, No. two frock 4 and No. three frock 5 through lift cylinder 7.

The inside of slide rail 1 is equipped with cylinder 8, No. two cylinders 9 and No. three cylinder 10 respectively, and the expansion end of cylinder 8, No. two cylinders 9 and No. three cylinder 10 is connected with the lower extreme of three backup pad 2 respectively, drives three backup pad 2 through cylinder 8, No. two cylinders 9 and No. three cylinder 10 and moves on slide rail 1 respectively for a frock 3, No. two frock 4 and No. three frock 5 move respectively.

No. 3, No. 4 and No. 5 frocks of frock pass through spacing post 6 and backup pad 2 sliding connection, restrict the motion of No. 3, No. 4 and No. 5 frocks of frock in the vertical direction in backup pad 2.

The first air cylinder 8 controls the first tool 3 to move between the first station 11 and the second station 12, the second air cylinder 9 controls the second tool 4 to move between the second station 12, the third station 13 and the fourth station 14, the third air cylinder 10 controls the third tool 10 to move between the fourth station 14 and the fifth station 15, when the first tool 3, the second tool 4 and the third tool 5 are in a silicon wafer loading state, the lifting air cylinder 7 lifts the first tool 3, the second tool 4 and the third tool 5 with a silicon wafer, the silicon wafer is higher than the stations at the moment, the silicon wafer can be smoothly transported, when the first tool 3, the second tool 4 and the third tool 5 are not in a silicon wafer loading state, the lifting air cylinder 7 lowers the first tool 3, the second tool 4 and the third tool 5 to the lowest position, the heights of the first tool 3, the second tool 4 and the third tool 5 are lower than the heights of the tools placed on the silicon wafer stations, a tool 3, a tool 4 and a tool 5 can smoothly move among stations.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a continuous feed mechanism of cleaning machine which characterized in that: including slide rail (1), the upper end sliding connection of slide rail (1) has three backup pad (2), and is three the upper end of backup pad (2) sets gradually frock (3), No. two frock (4) and No. three frock (5), frock (3), No. two frock (4) reach the lower extreme and the three of No. three frock (5) are equipped with spacing post (6) between backup pad (2) respectively.

2. The continuous feeding mechanism of the cleaning machine as claimed in claim 1, characterized in that: the tool (3), the tool (4) and the tool (5) all comprise bottom plates (301), side plates (302) are arranged at the upper ends of the bottom plates (301), material feeding plates (303) are connected between the side plates (302) through bolts, and material feeding seats (304) are arranged at the upper ends of the material feeding plates (303).

3. The continuous feeding mechanism of the cleaning machine as claimed in claim 1, characterized in that: the upper surface of backup pad (2) just the both ends of spacing post (6) all are equipped with the lower extreme of lift cylinder (7), the upper end of lift cylinder (7) with frock (3), No. two frock (4) reach the lower extreme of No. three frock (5) is connected.

4. The continuous feeding mechanism of the cleaning machine as claimed in claim 1, characterized in that: the inside of slide rail (1) is equipped with cylinder (8), No. two cylinder (9) and No. three cylinder (10) respectively, cylinder (8), No. two cylinder (9) and the expansion end of No. three cylinder (10) is respectively with three the lower extreme of backup pad (2) is connected.

5. The continuous feeding mechanism of the cleaning machine as claimed in claim 1, characterized in that: the first tool (3), the second tool (4) and the third tool (5) are connected with the support plate (2) in a sliding mode through the limiting columns (6).