CN216274350U - Lifting type substrate table for film plating machine - Google Patents

Abstract

The utility model discloses a lifting substrate table for a film plating machine, which belongs to the technical field of vacuum film plating machines and comprises a hollow table body with an opening at the top, wherein a substrate placing frame which is controlled to lift through a lifting cylinder is arranged in the table body, cover plates are hinged to the left and right of the opening at the top of the table body, and the cover plates are connected with the substrate placing frame through connecting rod structures, so that the connecting rod structures push the cover plates to open the openings when the substrate placing frame is lifted, and the connecting rod structures pull the cover plates to close the openings when the substrate placing frame is lowered. The substrate to be coated is fixed through the substrate placing frame, the substrate placing frame can stretch out of the table body, coating of the substrate is facilitated, the substrate placing frame can be taken back to the inside of the table body again after coating is finished, the cover plate of the table body is linked with the substrate placing frame, the cover plate is opened when the substrate placing frame stretches out, the cover plate is closed when the substrate placing frame is taken back, and therefore the coated substrate can be protected from being coated with coating materials for a second time.

Description

Lifting type substrate table for film plating machine

Technical Field

The utility model relates to the technical field of vacuum coating machines, in particular to a lifting type substrate table for a coating machine.

Background

The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The main idea is to divide into evaporation and sputtering. The material to be coated is referred to as a substrate and the material to be coated is referred to as a target. The substrate and the target material are in the vacuum cavity. The evaporation coating is generally to heat a target material to evaporate surface components in the form of atomic groups or ions, and deposit the surface components on a substrate to form a thin film through a film forming process (scattering-island structure-labyrinth structure-layer growth). In the sputtering type coating, it can be simply understood that electrons or high-energy laser is utilized to bombard a target material, and surface components are sputtered out in the form of atomic groups or ions and finally deposited on the surface of a substrate, and subjected to a film forming process to finally form a thin film.

The substrate table is used for placing a substrate in a vacuum coating machine, and because the coating of the substrate is a continuous process, the coating thickness on the surface of the substrate is thicker along with the longer coating time, the traditional substrate table cannot protect the substrate, so that the coating thickness on the surface of the substrate can be increased, and the exposed substrate which does not need to be coated with the material is easily polluted when different materials are coated, so that the product quality is influenced, the actual production requirement cannot be met, and certain defects exist during use.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the problem that the substrate table of the vacuum coating machine cannot effectively protect the substrate, and provides the lifting substrate table for the coating machine, which has the advantages that the substrate can be prevented from being polluted by other coating materials, the quality of a coated product is improved, the coating efficiency is high, and the loading and unloading are convenient.

The utility model realizes the aim through the following technical scheme, and the lifting type substrate table for the film plating machine comprises a table body which is hollow inside and is provided with an opening at the top, wherein a substrate placing frame which is controlled to lift through a lifting cylinder is arranged inside the table body, cover plates are hinged to the left and the right of the opening at the top of the table body, and the cover plates are connected with the substrate placing frame through connecting rod structures, so that the connecting rod structures push the cover plates to open the openings when the substrate placing frame is lifted, and the connecting rod structures pull the cover plates to close the openings when the substrate placing frame is lowered.

Preferably, the bottom of the substrate placing frame is provided with a lifting seat, the bottom of the lifting seat is connected with a push rod, and the push rod is connected with the output end of a lifting cylinder.

Preferably, the connecting rod structure comprises a connecting rod connected to the lifting seat, the connecting rod is rotatably connected to the end of the swing rod through a first rotating shaft, and the other end of the swing rod is rotatably connected to the cover plate through a second rotating shaft.

Preferably, the substrate placing frame comprises a fixing frame arranged at the top of the supporting frame, and a substrate clamping plate used for clamping the substrate to be coated is arranged on the fixing frame.

Preferably, the guide rods are vertically arranged on two sides of the fixing frame, the substrate clamping plates slide along the guide rods, and the substrate clamping plates are magnetically connected with two sides of the fixing frame through the magnet pieces.

Preferably, the two ends of the fixing frame are respectively connected with the supporting frame in a rotating mode, the clamped substrate can be overturned up and down, a driven gear is installed at one end of the fixing frame, and the driven gear is meshed with a driving gear driven by an overturning motor.

Compared with the prior art, the utility model has the beneficial effects that:

1. the substrate to be coated is fixed through the substrate placing frame, the substrate placing frame can stretch out of the table body, coating of the substrate is facilitated, the substrate placing frame can be taken back to the inside of the table body again after coating is finished, the cover plate of the table body is linked with the substrate placing frame, the cover plate is opened when the substrate placing frame stretches out, the cover plate is closed when the substrate placing frame is taken back, and therefore the coated substrate can be protected from being coated with coating materials for a second time.

2. The front and back of the substrate can be changed by arranging the fixing frame which can be overturned from top to bottom, the front and back of the substrate are quickly coated, the coating efficiency is improved, and the substrate clamping plate for fixing the substrate is clamped in a magnetic attraction mode and is convenient to operate.

Drawings

Fig. 1 is a schematic view showing a state in which a substrate placing frame of the present invention is lifted in a stage body.

Fig. 2 is a schematic view of the connecting rod structure of the present invention.

FIG. 3 is a schematic view of a substrate holder according to the present invention.

Fig. 4 is a schematic view of a substrate clamp mounting arrangement of the present invention.

In the figure: 1. the device comprises a table body, 2, a cover plate, 3, a connecting rod structure, 4, a lifting seat, 5, a push rod, 6, a lifting cylinder, 7, a substrate placing frame, 8, a connecting rod, 9, a first rotating shaft, 10, a swinging rod, 11, a second rotating shaft, 12, a supporting frame, 13, a fixing frame, 14, a substrate clamping plate, 15, a driven gear, 16, a driving gear, 17, a magnet piece, 18 and a guide rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1, a lifting substrate table for a film plating machine comprises a hollow table body 1 with an open top, a substrate placing frame 7 controlled to lift by a lifting cylinder 6 is installed inside the table body 1, cover plates 2 are hinged to the left and right of the open top of the table body 1, the cover plates 2 are connected with the substrate placing frame 7 by connecting rod structures 3, so that the connecting rod structures 3 push the cover plates 2 to open the open when the substrate placing frame 7 is lifted, the connecting rod structures 3 pull the cover plates 2 to close the open when the substrate placing frame 7 is lowered, the cover plates 2 are hinged on the table body 1 to open and close the space inside the table body 1, the substrate placing frame 7 can be lifted due to linkage between the cover plates 2 and the substrate placing frame 7 by the connecting rod structures 3, when the substrate placing frame is lifted, the connecting rod structures 3 push the cover plates 2 to open, the substrate can be plated, after the film plating is finished, the substrate placing frame 7 is taken back inside the table body 1, the cover plate 2 is closed along with the pulling of the link mechanism 3, the substrate is locked inside the platform body 1, the coating material in the coating chamber can not continuously contact the surface of the substrate at the moment, the influence of continuous coating on the surface of the substrate can be avoided, the coating film of the substrate exceeds the actual standard, the lifting seat 4 is installed at the bottom of the substrate placing frame 7, the bottom of the lifting seat 4 is connected with the push rod 5, the push rod 5 is connected with the output end of the lifting cylinder 6, the substrate placing frame 7 is driven by the lifting cylinder 6, when the coating starts, the lifting cylinder 6 jacks up the substrate placing frame 7 through the push rod 5, and after the coating is completed, the lifting cylinder 6 pulls back the substrate placing frame 7 through the push rod 5.

As shown in fig. 2, the connecting rod structure 3 includes a connecting rod 8 connected to the lifting seat 4, the connecting rod 8 is rotatably connected to the end of a swing rod 10 through a first rotating shaft 9, the other end of the swing rod 10 is rotatably connected to the cover plate 2 through a second rotating shaft 11, the connecting rod 8 can move up and down along with the lifting seat 4, when moving up, the swing rod 10 is pushed to move up, otherwise, the swing rod 10 is pulled to move down, and since the cover plate 2 is hinged to the opening at the top of the table body 1, the connecting rod 8 and the swing rod 10 can rotate, and the swing rod 10 and the cover plate 2 can rotate to open and close the cover plate 2.

As shown in fig. 3, the substrate placing frame 7 includes a fixing frame 13 installed on the top of a supporting frame 12, a substrate clamping plate 14 for clamping a substrate to be coated is installed on the fixing frame 13, the substrate clamping plate 14 is attached to two sides of the fixing frame 13 to clamp and fix the edge of the substrate, two ends of the fixing frame 13 are respectively connected with the supporting frame 12 in a rotating manner, so that the clamped substrate can be turned over up and down, a driven gear 15 is installed at one end of the fixing frame 13, the driven gear 15 is engaged with a driving gear 16 driven by a turning motor, the fixing frame 13 is turned over up and down through the gear drive of the turning motor, so as to turn over the substrate, after the coating of the front surface of the substrate is completed, the coating of the back surface of the substrate is performed, so that the coating efficiency is greatly improved, as shown in fig. 4, guide rods 18 are vertically installed on two sides of the fixing frame 13, and the substrate clamping plate 14 slides along the guide rods 18, and the substrate clamping plates 14 are magnetically connected with the two sides of the fixing frame 13 through the magnet sheets 17, the substrate clamping plates 14 are attached to the two sides of the fixing frame 13 in a magnetic attraction mode, and the guide rods 18 are used for limiting the substrate clamping plates 14 not to sideslip with the fixing frame 13, so that the magnetic attraction clamping mode is more convenient to operate and is convenient for taking and placing the substrate.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (6)

1. The utility model provides a lifting type substrate platform for coating machine, its characterized in that, including inside cavity and open-top's stage body (1), the internally mounted of stage body (1) has substrate rack (7) through lift cylinder (6) control lift, articulated about the open-top of stage body (1) have apron (2), apron (2) through link structure (3) with substrate rack (7) are connected, make substrate rack (7) when rising link structure (3) promote apron (2) open the opening, substrate rack (7) are when descending link structure (3) pulling apron (2) close the opening.

2. The lifting substrate table for coating machine according to claim 1, wherein the bottom of the substrate placing frame (7) is provided with a lifting seat (4), the bottom of the lifting seat (4) is connected with a push rod (5), and the push rod (5) is connected with the output end of the lifting cylinder (6).

3. The lifting substrate table for coating machine according to claim 2, characterized in that the connecting rod structure (3) comprises a connecting rod (8) connected to the lifting base (4), the connecting rod (8) is rotatably connected to the end of a swing rod (10) through a first rotating shaft (9), and the other end of the swing rod (10) is rotatably connected to the cover plate (2) through a second rotating shaft (11).

4. The lifting substrate table for coating machine according to claim 1, wherein the substrate placing frame (7) comprises a fixing frame (13) installed on the top of the supporting frame (12), and a substrate clamping plate (14) for clamping the substrate to be coated is arranged on the fixing frame (13).

5. The elevating substrate table according to claim 4, wherein the two sides of the fixing frame (13) are vertically provided with guide rods (18), the substrate clamping plates (14) slide along the guide rods (18), and the substrate clamping plates (14) are magnetically connected with the two sides of the fixing frame (13) through magnet pieces (17).

6. The lifting substrate table for coating machine according to claim 4, wherein two ends of the fixing frame (13) are respectively connected with the supporting frame (12) in a rotating manner, so that the clamped substrate can be turned upside down, one end of the fixing frame (13) is provided with a driven gear (15), and the driven gear (15) is engaged with a driving gear (16) driven by a turning motor.

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