CN216030184U - Chip grinding supporting pad dresser - Google Patents
Chip grinding supporting pad dresser Download PDFInfo
- Publication number
- CN216030184U CN216030184U CN202120409595.1U CN202120409595U CN216030184U CN 216030184 U CN216030184 U CN 216030184U CN 202120409595 U CN202120409595 U CN 202120409595U CN 216030184 U CN216030184 U CN 216030184U
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- base body
- contracted
- electroplated layer
- dresser
- shaped structure
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Abstract
The utility model discloses a chip grinding support pad trimmer which comprises a base body, wherein brush teeth are arranged on the base body, the bottom of the base body is of a contracted table-shaped structure, and an electroplated layer is arranged outside the base body. The base body is provided with the contracted platform-shaped structure at the bottom, so that the electroplated layer is also in a contracted structure, when a part of the platform-shaped structure at the bottom of the base body is machined and cut, the contracted structure of the electroplated layer is still maintained, the electroplated layer with the contracted structure is tightly buckled on the platform-shaped structure at the bottom of the base body like a hat, and the trimmer cannot fall off or be damaged after being used for a long time.
Description
Technical Field
The utility model belongs to the technical field of semiconductor processing, and particularly relates to a chip grinding support pad trimmer used in chip mechanical polishing.
Background
The chip is polished to form a high quality planar surface. In the process of chip polishing, the chip grinding supporting pad is abraded, and the surface flatness of the chip polishing is further influenced. In order to guarantee the quality precision of chip polishing, need use the trimmer to comb the adjustment to the surface of supporting pad, current trimmer adopts the diamond dish structure, including the base member, is connected with the diamond on the base member and regards as the brush tooth, and the base member has plated the plating layer outward. Since the substrate is usually a columnar structure, the electroplated layer at the bottom is easy to be damaged and fall off. Affecting the use of the diamond disk.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a chip grinding support pad dresser, which is characterized in that a bottom structure of a substrate is improved, so that an electroplated layer at the bottom of the substrate forms a locking notch structure, the electroplated layer is not easy to fall off, and the chip grinding support pad dresser is durable in use.
The technical scheme of the utility model is as follows:
a trimmer for grinding and supporting chip pad is composed of base body with teeth, and features that the base body has a contracted bench structure and an electroplated layer.
The brush teeth are made of diamonds, and the base body and the diamonds are connected and fixed through an electroplated layer.
The substrate is made of stainless steel material and has a single-layer structure or a multi-layer structure.
The base body is columnar, and the bottom of the base body is in a shape of a contracted conical truncated cone.
The material of the brush teeth is tungsten steel, high carbon steel or diamond.
The base body is provided with the contracted platform-shaped structure at the bottom, so that the electroplated layer is also in a contracted structure, when a part of the platform-shaped structure at the bottom of the base body is machined and cut, the contracted structure of the electroplated layer is still maintained, the electroplated layer with the contracted structure is tightly buckled on the platform-shaped structure at the bottom of the base body like a hat, and the trimmer cannot fall off or be damaged after being used for a long time.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
Detailed Description
A chip grinding support pad dresser comprises a stainless steel columnar matrix 3, diamond brush teeth 1 are arranged on the matrix 3, a contracted platform-shaped structure 4 is arranged at the bottom of the stainless steel columnar matrix 3, and an electroplated layer 2 is arranged outside the matrix. The diamond brush teeth 1 and the basal body 3 are connected and fixed through the electroplated layer 2.
Claims (5)
1. A trimmer for grinding and supporting chip pad is composed of base body with teeth, and features that the base body has a contracted bench structure and an electroplated layer.
2. The dresser of claim 1, wherein the teeth are diamond coated and the substrate is secured to the diamond by an electroplated coating.
3. The dresser of claim 1, wherein the substrate is a stainless steel material and is one of a single layer and a multi-layer construction.
4. The dresser of claim 1, wherein the substrate is cylindrical and the base is tapered with a tapered truncated cone.
5. The dresser of claim 1, wherein the tooth material is tungsten steel, high carbon steel, or diamond.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120409595.1U CN216030184U (en) | 2021-02-24 | 2021-02-24 | Chip grinding supporting pad dresser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120409595.1U CN216030184U (en) | 2021-02-24 | 2021-02-24 | Chip grinding supporting pad dresser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216030184U true CN216030184U (en) | 2022-03-15 |
Family
ID=80596626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120409595.1U Active CN216030184U (en) | 2021-02-24 | 2021-02-24 | Chip grinding supporting pad dresser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216030184U (en) |
-
2021
- 2021-02-24 CN CN202120409595.1U patent/CN216030184U/en active Active
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| GR01 | Patent grant |