CN215896351U - Silicon wafer basket entering mechanism - Google Patents
Silicon wafer basket entering mechanism Download PDFInfo
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- CN215896351U CN215896351U CN202122283595.4U CN202122283595U CN215896351U CN 215896351 U CN215896351 U CN 215896351U CN 202122283595 U CN202122283595 U CN 202122283595U CN 215896351 U CN215896351 U CN 215896351U
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- basket
- silicon wafer
- support plate
- inserted sheet
- sliding
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Abstract
The utility model discloses a silicon wafer basket entering mechanism and relates to the field of silicon wafer production. This basket mechanism is gone into to silicon chip, including totally closed module and slip support plate, the top fixed mounting of totally closed module has servo motor, and the surface of totally closed module is equipped with inserted sheet basket of flowers, and the top both sides of slip support plate all are equipped with the location slide rail, and the surface sliding connection of location slide rail has the material pin that pushes away, and the bottom fixed mounting of slip support plate has basket of flowers microscope carrier, and one side of basket of flowers microscope carrier is equipped with down to pressing from both sides, is equipped with between two sets of location slide rails to pressing from both sides. This basket mechanism is gone into to silicon chip carries out accurate location through last butt clamp and lower butt clamp to inserted sheet basket of flowers when using, avoids appearing the condition emergence that the deviation leads to the inserted sheet to fail when the inserted sheet.
Description
Technical Field
The utility model relates to the technical field of silicon wafer production, in particular to a silicon wafer basket entering mechanism.
Background
In the process of silicon wafer production, silicon wafers must be strictly cleaned in order to remove surface contamination impurities, and some impurities exist on the surfaces of the silicon wafers in an atomic state or an ionic state, and some impurities exist on the surfaces of the silicon wafers in a film form or a particle form, so that various defects can be caused, and the silicon wafers are inserted into a silicon wafer basket through a wafer inserting machine after the cleaning is finished.
And present silicon chip is when the inserted sheet goes into the basket, need with the accurate basket of inserting into of silicon chip, then the basket of flowers that will load the silicon chip takes off and changes new basket of flowers and continue to carry out the inserted sheet from the insert machine, but in the actual operation in-process, need guarantee that the basket of flowers is in the accurate location on the insert machine, the in-process of basket of flowers rebound must keep at the uniform velocity and move the interval invariable simultaneously in the insert machine, otherwise appear the deviation easily when the inserted sheet and lead to the inserted sheet failure, produce the condition of card, provide a silicon chip and go into basket mechanism in order to solve above-mentioned problem very much.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
Aiming at the defects of the prior art, the utility model discloses a silicon wafer basket entering mechanism, which aims to solve the problems in the background technology.
(II) technical scheme
In order to achieve the purpose, the utility model is realized by the following technical scheme: silicon chip goes into basket mechanism includes:
the top of the totally-enclosed module is fixedly provided with a servo motor, and the outer surface of the totally-enclosed module is provided with an insert flower basket;
the flower basket support comprises a sliding support plate, wherein positioning slide rails are arranged on two sides of the top end of the sliding support plate, a pushing stop lever is connected to the outer surface of each positioning slide rail in a sliding mode, a flower basket carrying platform is fixedly mounted at the bottom end of the sliding support plate, a lower butt clamp is arranged on one side of the flower basket carrying platform, and an upper butt clamp is arranged between the two positioning slide rails.
Preferably, the outer surface of the totally-enclosed module is connected with a sliding connection seat in a sliding manner, the servo motor is in transmission connection with the sliding connection seat, and the sliding support plate is fixedly installed on the outer surface of the sliding connection seat.
Preferably, the inserted sheet basket of flowers includes bottom plate, roof, stand and inserted sheet locating rack, roof and bottom plate fixed connection are at the upper and lower both ends of stand respectively, inserted sheet locating rack fixed connection is in the inboard of stand.
Preferably, the bottom plate is in contact with the upper surface of the basket carrying platform, and the lower surfaces of the two sides of the top plate are in contact with the upper surfaces of the positioning slide rails respectively.
Preferably, the side fixedly connected with locating piece of sliding connection seat, the side fixed mounting of totally closed module has the location strip, locating piece sliding connection is at the surface of location strip.
Preferably, the outer fixed surface of the sliding support plate is connected with an electric hydraulic rod, the outer fixed surface of the pushing stop lever is connected with a pushing vertical rod, the output end of the electric hydraulic rod is fixedly arranged on the outer surface of the pushing vertical rod, and the other side of the pushing vertical rod is abutted to the stand column.
Preferably, a positioning barrier strip is fixedly mounted on one side of the upper surface of the basket carrying platform, the positioning barrier strip abuts against one side of the bottom plate, and the other side of the bottom plate abuts against the lower butt clamp.
The utility model discloses a silicon wafer basket entering mechanism, which has the following beneficial effects:
1. this basket mechanism is gone into to silicon chip through setting up butt clamp and lower butt clamp, starts three electric telescopic handle of group when using for the electric telescopic handle of bottom drives the location baffle and moves to being close to location blend stop one side, and two sets of electric telescopic handle at top drive two sets of location slide rails 5 and carry out the small-amplitude removal to the middle part simultaneously, and the top of inserted sheet basket of flowers is held by two sets of location slide rails this moment, and the bottom of inserted sheet basket of flowers is held and is accomplished the installation location by location blend stop and location blend stop.
2. This basket mechanism is gone into to silicon chip, after the silicon chip inserted sheet was accomplished, will push away the material pole setting and outwards promote through electronic hydraulic stem for push away the material pin and outwards remove along the location slide rail, finally outwards ejecting with the inserted sheet basket of flowers, the convenient basket of flowers that will load the silicon chip of taking away.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is an exploded view of the overall structure of the present invention;
FIG. 3 is a schematic view of the structure of the insert flower basket of the present invention;
FIG. 4 is a schematic view of the outer surface structure of the sliding carrier according to the present invention;
FIG. 5 is a schematic view of a backside structure of the sliding carrier of the present invention;
FIG. 6 is a schematic view of the outer surface structure of the totally enclosed module of the present invention.
In the figure: 1. a totally-enclosed module; 2. inserting the flower basket; 201. a base plate; 202. a top plate; 203. a column; 204. an inserting sheet positioning frame; 3. sliding the carrier plate; 4. a basket of flowers carrying platform; 5. positioning the slide rail; 6. a material pushing stop lever; 7. pushing a material to erect the rod; 8. an electro-hydraulic lever; 9. positioning the barrier strip; 10. a lower clamp; 11. upward clamping; 12. a servo motor; 13. a sliding connection seat; 14. a positioning bar; 15. and (5) positioning the blocks.
Detailed Description
The embodiment of the utility model discloses a silicon wafer basket entering mechanism, which comprises a totally-closed module 1, wherein a servo motor 12 is fixedly installed at the top of the totally-closed module 1, and an insert flower basket 2 is arranged on the outer surface of the totally-closed module 1;
meanwhile, the device further comprises a sliding support plate 3, positioning slide rails 5 are arranged on two sides of the top end of the sliding support plate 3, a pushing stop lever 6 is connected to the outer surface of each positioning slide rail 5 in a sliding mode, a flower basket carrying platform 4 is fixedly mounted at the bottom end of the sliding support plate 3, a lower butt clamp 10 is arranged on one side of each flower basket carrying platform 4, and an upper butt clamp 11 is arranged between the two groups of positioning slide rails 5.
Referring to fig. 1, 4 and 6, the outer surface of the totally enclosed module 1 is slidably connected with a sliding connection seat 13, a servo motor 12 is in transmission connection with the sliding connection seat 13, and a sliding support plate 3 is fixedly installed on the outer surface of the sliding connection seat 13.
Referring to fig. 3, the insert flower basket 2 includes a bottom plate 201, a top plate 202, a vertical column 203 and an insert positioning frame 204, wherein the top plate 202 and the bottom plate 201 are respectively and fixedly connected to the upper and lower ends of the vertical column 203, and the insert positioning frame 204 is fixedly connected to the inner side of the vertical column 203.
Referring to fig. 2-4, the bottom plate 201 contacts with the upper surface of the basket carrying table 4, and the lower surfaces of the two sides of the top plate 202 contact with the upper surfaces of the positioning slide rails 5 respectively.
Referring to fig. 6, the side surface of the sliding connection seat 13 is fixedly connected with a positioning block 15, the side surface of the totally-enclosed module 1 is fixedly provided with a positioning strip 14, and the positioning block 15 is slidably connected to the outer surface of the positioning strip 14, so that the insert flower basket 2 is ensured not to incline when moving up and down.
Referring to the attached drawing 4, an electric hydraulic rod 8 is fixedly connected to the outer surface of the sliding support plate 3, a material pushing vertical rod 7 is fixedly connected to the outer surface of the material pushing stop rod 6, the output end of the electric hydraulic rod 8 is fixedly installed on the outer surface of the material pushing vertical rod 7, the other side of the material pushing vertical rod 7 abuts against the upright column 203, the material pushing vertical rod 7 is pushed outwards through the electric hydraulic rod 8, the material pushing stop rod 6 moves outwards along the positioning slide rail 5, the insertion piece basket 2 is finally ejected outwards, and a buffering adhesive tape is arranged on the outer surface of the material pushing vertical rod 7 and used for buffering a silicon wafer when the silicon wafer enters the insertion piece basket 2, so that the silicon wafer is prevented from colliding with the bottom rod of the basket and extending and retracting through the connection of the electric hydraulic rod.
Referring to the attached drawing 2, 4 and 5, upper surface one side fixed mounting of basket of flowers microscope carrier 4 has location blend stop 9, location blend stop 9 offsets with one side of bottom plate 201, the opposite side of bottom plate 201 offsets with lower butt clamp 10, 11 go up to pressing from both sides including two sets of electric telescopic handle, through installing electric telescopic handle at the surface of sliding support plate 3, then install two sets of location slide rails 5 and electric telescopic handle's output, two sets of electric telescopic handle drive two sets of location slide rails 5 and carry out small amplitude movement to middle part or both sides when using, including a set of electric telescopic handle and a set of locating baffle to pressing from both sides 10 down simultaneously, electric telescopic handle installs the inside at basket of flowers microscope carrier 4, locating baffle sets up the side at basket of flowers microscope carrier 4, electric telescopic handle drives locating baffle and moves to being close to location blend stop 9 one side when using.
The working principle is as follows: when the device is used, the inserting piece flower basket 2 is placed on the upper surface of a flower basket carrying platform 4 through the mechanical arm, then the three groups of electric telescopic rods are started, so that the electric telescopic rods at the bottom drive the positioning baffle plate to move towards one side close to the positioning barrier strips 9, meanwhile, the two groups of electric telescopic rods at the top drive the two groups of positioning slide rails 5 to move towards the middle part in a small range, at the moment, the top end of the inserting piece flower basket 2 is clamped by the two groups of positioning slide rails 5, and meanwhile, the bottom end of the inserting piece flower basket 2 is clamped by the positioning barrier strips 9 and the positioning barrier strips to complete installation and positioning;
when the silicon chip inserting device is used, the silicon chip is sequentially inserted into the inserting piece positioning frame 204, in the process, the servo motor 12 drives the sliding connection seat 13 to slowly and stably move upwards, meanwhile, the sliding support plate 3 drives the inserting piece flower basket 2 to move upwards through the flower basket carrying platform 4, finally, the silicon chip can be orderly inserted into the inserting piece, the upper butt clamp 11 and the lower butt clamp 10 are controlled to move away from the inserting piece flower basket 2, the clamping and positioning of the inserting piece flower basket 2 are released, then the pushing upright rod 7 is pushed outwards through the electric hydraulic rod 8, the pushing stop rod 6 is made to move outwards along the positioning slide rail 5, finally, the inserting piece flower basket 2 is ejected outwards, the inserting piece flower basket 2 is grabbed and moved away by the cooperation of the mechanical arm in the process, and then the next group of inserting piece flower basket 2 is installed.
The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (7)
1. Silicon chip goes into basket mechanism, its characterized in that includes:
the top of the fully-closed module (1) is fixedly provided with a servo motor (12), and the outer surface of the fully-closed module (1) is provided with an insert flower basket (2);
the flower basket comprises a sliding support plate (3), wherein positioning slide rails (5) are arranged on two sides of the top end of the sliding support plate (3), a pushing stop lever (6) is connected to the outer surface of each positioning slide rail (5) in a sliding mode, a flower basket carrying platform (4) is fixedly mounted at the bottom end of the sliding support plate (3), a lower butt clamp (10) is arranged on one side of each flower basket carrying platform (4), and an upper butt clamp (11) is arranged between every two corresponding positioning slide rails (5).
2. The silicon wafer basket entering mechanism according to claim 1, wherein: the outer surface sliding connection of totally closed module (1) has sliding connection seat (13), servo motor (12) is connected with sliding connection seat (13) transmission, sliding support plate (3) fixed mounting is at the surface of sliding connection seat (13).
3. The silicon wafer basket entering mechanism according to claim 1, wherein: inserted sheet basket of flowers (2) includes bottom plate (201), roof (202), stand (203) and inserted sheet locating rack (204), roof (202) and bottom plate (201) are fixed connection respectively at the upper and lower both ends of stand (203), inserted sheet locating rack (204) fixed connection is in the inboard of stand (203).
4. The silicon wafer basket entering mechanism according to claim 3, wherein: the bottom plate (201) is in contact with the upper surface of the basket carrying platform (4), and the lower surfaces of the two sides of the top plate (202) are in contact with the upper surfaces of the positioning sliding rails (5) respectively.
5. The silicon wafer basket entering mechanism according to claim 2, wherein: the side fixedly connected with locating piece (15) of sliding connection seat (13), the side fixed mounting of totally closed module (1) has location strip (14), locating piece (15) sliding connection is in the surface of location strip (14).
6. The silicon wafer basket entering mechanism according to claim 3, wherein: the outer fixed surface of slip support plate (3) is connected with electronic hydraulic stem (8), the outer fixed surface who pushes away material pin (6) is connected with and pushes away material pole setting (7), the output end fixed mounting of electronic hydraulic stem (8) pushes away the surface of material pole setting (7), the opposite side that pushes away material pole setting (7) offsets with stand (203).
7. The silicon wafer basket entering mechanism according to claim 3, wherein: a positioning barrier strip (9) is fixedly mounted on one side of the upper surface of the basket carrying platform (4), the positioning barrier strip (9) abuts against one side of the bottom plate (201), and the other side of the bottom plate (201) abuts against the lower butt clamp (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122283595.4U CN215896351U (en) | 2021-09-22 | 2021-09-22 | Silicon wafer basket entering mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122283595.4U CN215896351U (en) | 2021-09-22 | 2021-09-22 | Silicon wafer basket entering mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215896351U true CN215896351U (en) | 2022-02-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122283595.4U Active CN215896351U (en) | 2021-09-22 | 2021-09-22 | Silicon wafer basket entering mechanism |
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| CN (1) | CN215896351U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114873272A (en) * | 2022-05-09 | 2022-08-09 | 苏州天准科技股份有限公司 | Continuous overturning feeding device, feeding equipment and sorting system |
-
2021
- 2021-09-22 CN CN202122283595.4U patent/CN215896351U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114873272A (en) * | 2022-05-09 | 2022-08-09 | 苏州天准科技股份有限公司 | Continuous overturning feeding device, feeding equipment and sorting system |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: Area A, Floor 3, Building 3, No. 79, Wuxiang Road, Xuhang Town, Jiading District, Shanghai, 201800 Patentee after: Shanghai Youdian Green Energy Automation Co.,Ltd. Address before: No. 89, Wuxiang Road, Xuxing Town, Jiading District, Shanghai Patentee before: Shanghai Junzhu Precision Machinery Co.,Ltd. |
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| CP03 | Change of name, title or address |