CN215866360U - 一种晶圆蓝膜框架旋转定位装置 - Google Patents
一种晶圆蓝膜框架旋转定位装置 Download PDFInfo
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- CN215866360U CN215866360U CN202122153585.9U CN202122153585U CN215866360U CN 215866360 U CN215866360 U CN 215866360U CN 202122153585 U CN202122153585 U CN 202122153585U CN 215866360 U CN215866360 U CN 215866360U
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CN202122153585.9U CN215866360U (zh) | 2021-09-03 | 2021-09-03 | 一种晶圆蓝膜框架旋转定位装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114649255A (zh) * | 2022-03-14 | 2022-06-21 | 马丁科瑞半导体技术(南京)有限公司 | 一种晶圆台蓝膜张紧方法及调整机构 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114649255A (zh) * | 2022-03-14 | 2022-06-21 | 马丁科瑞半导体技术(南京)有限公司 | 一种晶圆台蓝膜张紧方法及调整机构 |
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Legal Events
Date | Code | Title | Description |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: Unit 1, 1st Floor, No. 670 Hong'an Road, Xiang'an Industrial Zone, Torch High tech Zone, Xiamen City, Fujian Province, 361003 Patentee after: Koer Microelectronics Equipment (Xiamen) Co.,Ltd. Address before: 361103 unit 1, floor 1, No. 670, Honglong Road, torch high tech Zone (Xiang'an) Industrial Zone, Xiamen, Fujian Patentee before: COER AUTOMATION EQUIPMENT CO.,LTD. |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A wafer blue film frame rotation positioning device Effective date of registration: 20230829 Granted publication date: 20220218 Pledgee: Bank of China Limited Xiamen Kaiyuan sub branch Pledgor: Koer Microelectronics Equipment (Xiamen) Co.,Ltd. Registration number: Y2023110000363 |