CN215628263U - PVD tray structure - Google Patents

Abstract

The utility model relates to the technical field of tray water vapor treatment, in particular to a PVD tray structure. The PVD tray structure comprises a tray and a cover plate assembly, wherein a containing groove for containing a piece to be coated is formed in one surface of the tray; the cover plate component is detachably connected with the tray and can cover the surface of the tray with the accommodating groove; the cover plate assembly is provided with a through material passing groove, and when the cover plate assembly covers the tray, the material passing groove and the accommodating groove are arranged correspondingly. The utility model has the advantages that: the cover plate assembly can effectively protect other areas on the tray except for the to-be-coated film, so that the TCO film cannot be coated on the tray, the TCO film on the tray is prevented from absorbing moisture in air, the tray is not required to be heated by the preheating cavity or cleaned, the cost is greatly reduced, and the time is saved; and, convenient operation, simple swift, high-usage, can not cause the influence to structure, roughness and the equipment precision of tray self yet.

Description

PVD tray structure

Technical Field

The utility model relates to the technical field of tray water vapor treatment, in particular to a PVD tray structure.

Background

In the production of heterojunction cells, the TCO coating process is one of the most important processes at present, and when TCO coating is carried out, a metal frame such as aluminum or stainless steel is generally adopted as a support of a silicon wafer and is generally called as a PVD tray; in the TCO coating process, firstly, a silicon wafer is placed in a designed PVD tray, the PVD tray is conveyed into vacuum coating equipment through a conveying system, and a TCO film layer is sputtered on the surface of the silicon wafer in the vacuum coating equipment through a physical vapor deposition method to form a TCO film with a certain thickness; after deposition is finished, the PVD tray with the silicon wafer is conveyed out of the vacuum chamber through a transmission system, and the silicon wafer coated with the TCO film is taken out of the PVD tray.

However, in the process of coating the TCO film, the surface of the PVD tray is inevitably coated with the TCO film, the TCO film absorbs moisture in the air, and when the PVD tray enters the vacuum chamber again, the TCO film on the surface of the PVD tray generates moisture overflow due to the high temperature in the process chamber, thereby affecting the quality of the TCO film.

The existing method for removing water vapor on the PVD tray comprises the steps that firstly, water is heated in a preheating cavity through heating of the preheating cavity, the water is adsorbed to a condensation pipe through a condensation pump, defrosting operation is carried out on the condensation pipe regularly, and the water on the condensation pipe is pumped away through a vacuum pump; and the TCO film on the surface of the PVD tray is removed by a physical or chemical method, but the cost for removing water vapor by adopting the method is too high, the process is complicated, and the productivity is influenced.

SUMMERY OF THE UTILITY MODEL

In view of the above, there is a need for a PVD tray structure with simple structure, easy operation, low cost and high utilization rate.

In order to solve the technical problem, the application provides the following technical scheme:

a PVD tray structure comprises a tray and a cover plate assembly, wherein a containing groove for containing a piece to be coated is formed in one surface of the tray; the cover plate assembly is detachably connected with the tray and can cover the surface of the tray, which is provided with the accommodating groove;

the cover plate assembly is provided with a through material passing groove, and when the cover plate assembly covers the tray, the material passing groove and the accommodating groove are arranged correspondingly.

In the application, the cover plate assembly is arranged on the tray, the to-be-coated piece is placed in the containing groove, and when the cover plate assembly covers the tray, the material passing groove can correspond to the containing groove, so that the to-be-coated piece is completely exposed; the cover plate assembly can effectively protect other areas on the tray except for the piece to be coated, so that the TCO film cannot be coated on the tray, the TCO film on the tray is prevented from absorbing moisture in the air, and the moisture on the surface of the tray can be released when the tray subsequently enters a process cavity with higher temperature, so that the piece to be coated is influenced; after the cover plate assembly is arranged, the TCO film is arranged on the cover plate assembly in the film coating process, and when the TCO film on the cover plate assembly is deposited to a certain thickness, the cover plate assembly is disassembled and replaced, so that the influence of water absorption of the tray on a film layer on a film to be coated is reduced; meanwhile, the preheating cavity is not required to be heated or the tray is not required to be cleaned, so that the cost is greatly reduced, and the time is saved; and, convenient operation, simple swift, high-usage, can not cause the influence to structure, roughness and the equipment precision of tray self yet.

In one embodiment, the tray comprises an effective coating area, and the accommodating groove is arranged in the effective coating area; the cover plate assembly comprises a slotted area, and the material passing groove is arranged in the slotted area; when the cover plate component covers the tray, the slotted area and the effective film coating area are arranged correspondingly.

So set up, the fluting district corresponds the setting with effective coating film district, can make in the coating film process, guarantees that some TCO membrane can be plated on waiting to coat the membrane piece through the fluting district accurately, and the position outside the silo is crossed to another part deposit on the fluting district.

In one embodiment, the open-trough area has an open-trough cover plate, the through-trough is open on the open-trough cover plate, the open-trough cover plate can cover the open trough, and when the open-trough cover plate covers the open trough, the through-trough is arranged corresponding to the open trough.

So set up, treat that the coating film piece places in the storage tank, the storage tank apron can cover on the storage tank, and when the storage tank apron covers in the storage tank, can make silo and storage tank correspond the setting, thereby make TCO membrane deposit on the storage tank apron at the coating film in-process, avoid the storage tank to coat TCO membrane all around, when TCO membrane deposit to certain thickness on the storage tank apron, dismantle the storage tank apron and get off the renewal, thereby reduce and treat the influence of coating film piece upper film layer because of the tray absorbs water.

In one embodiment, the number of the accommodating grooves is multiple, the accommodating grooves are distributed in the effective coating area at intervals, the number of the accommodating groove cover plates corresponds to the number of the accommodating grooves, and the accommodating groove cover plates can be covered on the accommodating grooves in a one-to-one correspondence manner.

So set up, simple structure, convenient operation and simple swift reduce because of the tray absorbs water treats the influence of coating film spare upper film layer.

In one embodiment, the tray further comprises an invalid coating area, the cover plate assembly further comprises a blank area, and when the cover plate assembly covers the tray, the blank area and the invalid coating area are arranged correspondingly.

So set up, when the apron subassembly covers on the tray, the blank area of apron subassembly can set up with the invalid coating area of tray is corresponding, at the coating film in-process, TCO membrane can deposit in the blank area of apron subassembly, avoids the deposit at invalid coating area, when the TCO membrane deposit of blank area to certain thickness, dismantle the blank area and get off more renewedly to reduce the tray and absorb water and treat the influence of coating film piece on the rete, and convenient operation is simple and fast and with low costs.

In one embodiment, the ineffective coating area includes a first area and a second area, the blank area includes a first cover unit and a second cover unit, the first cover unit can cover the first area, and the second cover unit can cover the second area.

So set up, every apron unit on the apron subassembly can come unified processing according to the size of a dimension, the shape in different regions on the tray, and processing is convenient and with low costs.

In one embodiment, the first cover plate unit comprises a plurality of first cover plates, the second cover plate unit comprises a plurality of second cover plates, and the first cover plates are sequentially covered on the first area; the second cover plates are sequentially covered on the second area.

So set up, first apron unit, second apron unit are provided with a plurality of first apron, a plurality of second apron respectively to in cover first region and second area respectively.

In one embodiment, the cover plate assembly is connected with the tray through any one of clamping, screwing and bonding.

So set up, be convenient for apron subassembly's installation.

In one embodiment, the side of the cover plate assembly remote from the tray is treated by sandblasting.

So set up, make apron subassembly surface coarse, in the coating film process, deposit TCO membrane better.

In one embodiment, the thickness of the cover plate assembly is no greater than 5 mm.

So set up, be convenient for apron subassembly's processing and installation.

Compared with the prior art, according to the PVD tray structure, the cover plate assembly is arranged on the tray, the to-be-coated piece is placed in the containing groove, and when the cover plate assembly covers the tray, the material passing groove can correspond to the containing groove, so that the to-be-coated piece is completely exposed; the cover plate assembly can effectively protect other areas on the tray except for the piece to be coated, so that the TCO film cannot be coated on the tray, the TCO film on the tray is prevented from absorbing moisture in the air, and the moisture on the surface of the tray can be released when the tray subsequently enters a process cavity with higher temperature, so that the piece to be coated is influenced; after the cover plate assembly is arranged, the TCO film is arranged on the cover plate assembly in the film coating process, and when the TCO film on the cover plate assembly is deposited to a certain thickness, the cover plate assembly is disassembled and replaced, so that the influence of water absorption of the tray on a film layer on a film to be coated is reduced; meanwhile, the preheating cavity is not required to be heated or the tray is not required to be cleaned, so that the cost is greatly reduced, and the time is saved; and, convenient operation, simple swift, high-usage, can not cause the influence to structure, roughness and the equipment precision of tray self yet.

Drawings

FIG. 1 is a front view of a PVD tray structure provided by the utility model.

Fig. 2 is a front view of the tray provided by the present invention.

In the figure, 100, a PVD tray structure; 10. a tray; 11. an effective coating area; 111. a containing groove; 12. an ineffective coating area; 121. a first region; 122. a second region; 20. a cover plate assembly; 21. a grooving area; 211. a cover plate of the containing groove; 2111. a material passing groove; 22. a blank area; 221. a first cover plate unit; 2211. a first cover plate; 222. a second cover plate unit; 2221. a second cover plate; 223. and a third cover plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.

It will be understood that when an element is referred to as being "mounted on" another element, it can be directly mounted on the other element or intervening elements may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. When an element is referred to as being "secured to" another element, it can be directly secured to the other element or intervening elements may also be present.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used herein, the term "or/and" includes any and all combinations of one or more of the associated listed items.

As shown in fig. 1, the present application provides a PVD tray structure 100, which is used for preventing TCO film from being plated on a tray 10 in a plating process, and preventing the TCO film on the tray 10 from generating water vapor due to high temperature evaporation, which affects a film layer of a member to be plated. In the prior TCO coating process, a TCO film is inevitably coated on the surface of a tray, the TCO film can absorb moisture in the air, and when the tray enters a process cavity again, the TCO film on the surface of the tray generates the condition of water vapor overflow due to higher temperature in the process cavity, so that the quality of the TCO film is influenced.

The PVD tray refers to a metal frame for supporting a piece to be coated during TCO coating; the PVD tray structure 100 that this application provided carries out partial improvement to the PVD tray, reduces and treats the coating film spare because of the tray absorbs water and goes up the rete and produce the influence.

However, in the existing method for removing water vapor from the tray, firstly, the water is heated in the preheating cavity by the preheating cavity, and is adsorbed on the condensing tube by the condensing pump, and the defrosting operation is performed on the condensing tube periodically, so that the water on the condensing tube is pumped away by the vacuum pump, but the treatment in the preheating cavity is poor in treatment capacity under a vacuum environment, and meanwhile, the equipment cost is high, and the length of the preheating cavity is increased in order to improve the treatment effect, so that the equipment cost and the electricity charge are high; meanwhile, water molecules overflowing from the preheating cavity need to be adsorbed by a condensation pump, the adsorption capacity of the condensation pump is reduced along with the increase of the water molecules, defrosting is usually required for about one week, production is stopped and target burning treatment is required in the process, and the capacity is greatly influenced and target materials are wasted; and secondly, the TCO film layer on the surface of the PVD tray is removed by a physical or chemical method, in the process, the tray needs to be disassembled, cleaned, dried and assembled for the second time, the process is high in cost, and due to the fact that the assembly precision is different every time, automatic debugging is needed, and the production line capacity is wasted.

The PVD tray structure 100 provided by the application comprises a tray 10 and a cover plate component 20, wherein a containing groove 111 for containing a piece to be coated is formed in one surface of the tray 10; the cover plate assembly 20 is detachably connected with the tray 10 and can be covered on the surface of the tray 10 with the containing groove 111; the cover plate assembly 20 is provided with a through material passing groove 2111, and when the cover plate assembly 20 covers the tray 10, the material passing groove 2111 is arranged corresponding to the accommodating groove 111; the cover plate assembly 20 can effectively protect other areas of the tray 10 except the to-be-coated member, so that the TCO film cannot be coated on the tray 10, and the TCO film on the tray 10 is prevented from absorbing moisture in the air and subsequently affecting the to-be-coated member; after the cover plate assembly 20 is arranged, a TCO film is deposited on the cover plate assembly 20 in a film coating process, and when the TCO film on the cover plate assembly 20 is deposited to a certain thickness, the cover plate assembly 20 is detached and replaced, so that the influence of water absorption of the tray 10 on a film layer on a to-be-coated part is reduced; meanwhile, the tray 10 does not need to be heated by a preheating cavity or cleaned, so that the cost is greatly reduced, and the time is saved; moreover, the operation is convenient, simple and rapid, the utilization rate is high, and the structure, the flatness and the assembly precision of the tray 10 can not be influenced.

The application provides a material of apron subassembly 20 is good and high temperature resistant material of stability such as aluminium, stainless steel or titanium.

In the present application, the cover plate assembly 20 and the tray 10 can be connected by any one of clamping, screwing and bonding, so as to facilitate the installation of the cover plate assembly 20. It should be noted that, in order to reduce the number of parts and facilitate assembly, a clamping manner may be adopted, for example, a groove is formed on the tray 10, a protrusion is formed on the cover plate assembly 20, and the protrusion is clamped into the groove to be detachably connected or other structures are arranged to realize clamping between the tray 10 and the cover plate assembly 20; bonding means bonding the tray 10 and the cover member 20 together by means of an adhesive to generate an adhesive force on the surface of the tray 10 or the surface of the cover member 20.

Further, the cover plate assembly 20 is sandblasted on the side away from the tray 10, so that the surface of the cover plate assembly 20 can be rough, and the TCO film can be better deposited during the coating process.

In the present application, the thickness of the cover plate assembly 20 is not greater than 5mm, which facilitates the processing and installation of the cover plate assembly 20; preferably, the cover plate assembly 20 is 1mm thick; of course, in other embodiments, the cover plate assembly 20 may have other thicknesses, such as 2mm, 3mm, or 4 mm.

As shown in fig. 1 and fig. 2, the tray 10 includes an effective coating area 11, and the accommodating groove 111 is opened in the effective coating area 11; the cover plate assembly 20 comprises a slotted area 21, and the material passing groove 2111 is arranged in the slotted area 21; when the cover plate assembly 20 is covered on the tray 10, the grooving area 21 is arranged corresponding to the effective coating area 11, so that in the coating process, it can be ensured that a part of TCO film can be accurately coated on the member to be coated through the grooving area 21, and the other part of TCO film is deposited on the grooving area 21 except for the material passing groove 2111.

Further, the slotted zone 21 has a receiving slot cover 211, the material passing slot 2111 is arranged on the receiving slot cover 211, the receiving slot cover 211 can cover the receiving slot 111, and when the receiving slot cover 211 covers the receiving slot 111, the material passing slot 2111 is arranged corresponding to the receiving slot 111; the film-coated member is placed in the containing groove 111, the containing groove cover plate 211 can cover the containing groove 111, when the containing groove cover plate 211 covers the containing groove 111, the material passing groove 2111 and the containing groove 111 can be arranged correspondingly, so that a TCO film is deposited on the containing groove cover plate 211 in a film coating process, the TCO film is prevented from being coated on the periphery of the containing groove 111, when the TCO film on the containing groove cover plate 211 is deposited to a certain thickness, the containing groove cover plate 211 is detached and replaced, and the influence of water absorption of the tray 10 on the film-coated member is reduced.

Specifically, the number of the accommodating grooves 111 is plural, the accommodating grooves 111 are distributed in the effective coating region 11 at intervals, the number of the accommodating groove cover plates 211 corresponds to the number of the accommodating grooves 111, and the accommodating groove cover plates 211 can be covered on the accommodating grooves 111 in a one-to-one correspondence manner; simple structure, convenient operation and simple swift reduce because of tray 10 absorbs water treats the influence of coating film spare upper film layer.

As shown in fig. 1 and 2, the tray 10 further includes an ineffective plating region 12, the cover plate assembly 20 further includes a blank region 22, and when the cover plate assembly 20 covers the tray 10, the blank region 22 is disposed corresponding to the ineffective plating region 12; when apron subassembly 20 covers on tray 10, the blank area 22 of apron subassembly 20 can set up with the ineffective coating area 12 of tray 10 is corresponding, at the coating film in-process, the TCO film can deposit in the blank area 22 of apron subassembly 20, avoid depositing in ineffective coating area 12, when the TCO film deposit of blank area 22 to certain thickness, dismantle blank area 22 and change the renewal, thereby reduce the influence that the coating film was gone up to the piece of treating that absorbs water of tray 10, and convenient operation, simple and fast and with low costs.

Further, the ineffective coating region 12 includes a first region 121 and a second region 122, the blank region 22 includes a first cover unit 221 and a second cover unit 222, the first cover unit 221 can cover the first region 121, the second cover unit 222 can cover the second region 122, each cover unit on the cover assembly 20 can be processed uniformly according to the size and shape of different regions on the tray 10, and the processing is convenient and low in cost.

Specifically, the first cover plate unit 221 includes a plurality of first cover plates 2211, the second cover plate unit 222 includes a plurality of second cover plates 2221, and the plurality of first cover plates 2211 sequentially cover the first area 121; the second cover plates 2221 are sequentially covered on the second area 122.

As shown in fig. 1, the cover plate assembly 20 further includes a third cover plate 223, the third cover plate 223 is located in the slot area 21 and covers the effective coating area 11 except for the slot 111; in the present application, the size, shape, number, etc. of the receiving groove cover 211, the first cover 2211, the second cover 2221, and the third cover 223 in the cover assembly 20 can be changed according to the structure of the tray 10, so as to adapt to the size, shape, etc. of the tray 10.

In the present application, the cover plate assembly 20 may be installed on any surface of the tray 10, or the cover plate assemblies 20 may be installed on both surfaces of the tray 10, so as to avoid the influence of the water absorption of the tray 10 on the film layer on the member to be coated. Meanwhile, the water vapor can be controlled by other modes, such as adhering an adhesive tape on the surface of the tray 10, coating the surface of the tray 10, and the like.

According to the coating device, the cover plate assembly 20 is arranged, so that a TCO film can be deposited on the cover plate assembly 20 in the coating process, the TCO film is prevented from being deposited on the tray 10, when the TCO film on the cover plate assembly 20 is deposited to a certain thickness, part or all of the cover plate assembly 20 is disassembled and replaced, and therefore the influence of water absorption of the tray 10 on a film layer on a to-be-coated member is reduced, the coating device is convenient to operate, simple, rapid and low in cost; the number of preheating cavities can be reduced, and the equipment cost and the occupied area are reduced; the waste of capacity and target materials in the defrosting process can be reduced; the cleaning frequency of the tray 10 is reduced, the steps of disassembling and assembling the tray 10 in the cleaning process are reduced, the cleaning cost is reduced, the structure of the tray 10 is prevented from being influenced in the cleaning process of the tray 10, and the service life of the tray 10 is prolonged; the machine adjusting time after 10 times of assembly of the tray is reduced, and the productivity of the equipment is improved.

It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.

The features of the above embodiments may be arbitrarily combined, and for the sake of brevity, all possible combinations of the features in the above embodiments are not described, but should be construed as being within the scope of the present specification as long as there is no contradiction between the combinations of the features.

It should be understood by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as a limitation of the present invention, and that suitable changes and modifications of the above embodiments are within the scope of the claimed invention as long as they are within the spirit and scope of the present invention.

Claims (10)

1. A PVD tray structure is characterized by comprising a tray and a cover plate assembly, wherein a containing groove for containing a piece to be coated is formed in one surface of the tray; the cover plate assembly is detachably connected with the tray and can cover the surface of the tray, which is provided with the accommodating groove;

the cover plate assembly is provided with a through material passing groove, and when the cover plate assembly covers the tray, the material passing groove and the accommodating groove are arranged correspondingly.

2. The PVD tray structure of claim 1, wherein the tray comprises an effective coating area, the accommodating groove is opened in the effective coating area; the cover plate assembly comprises a slotted area, and the material passing groove is arranged in the slotted area; when the cover plate component covers the tray, the slotted area and the effective film coating area are arranged correspondingly.

3. The PVD tray structure of claim 2, wherein the slotted region has a receiving slot cover plate, the through slot is arranged on the receiving slot cover plate, the receiving slot cover plate can cover the receiving slot, and when the receiving slot cover plate covers the receiving slot, the through slot is arranged corresponding to the receiving slot.

4. The PVD tray structure of claim 3, wherein the number of the receiving slots is plural, and the plurality of receiving slots are distributed in the effective coating area at intervals, the number of the receiving slot cover plates corresponds to the receiving slots, and the plurality of receiving slot cover plates can be covered on the receiving slots in a one-to-one correspondence.

5. The PVD tray structure of claim 2, wherein the tray further comprises an inactive plating area, and the cover plate assembly further comprises a blank area, wherein the blank area corresponds to the inactive plating area when the cover plate assembly is placed on the tray.

6. The PVD tray structure of claim 5, wherein the non-active coating region comprises a first region and a second region, the blank region comprises a first cover unit and a second cover unit, the first cover unit is capable of covering the first region, and the second cover unit is capable of covering the second region.

7. The PVD tray structure of claim 6, wherein the first cover plate unit comprises a plurality of first cover plates, the second cover plate unit comprises a plurality of second cover plates, and the plurality of first cover plates sequentially cover the first region; the second cover plates are sequentially covered on the second area.

8. The PVD tray structure of claim 1, wherein the cover plate assembly is connected to the tray by any one of clamping, screwing and bonding.

9. The PVD tray structure of claim 1, wherein the cover plate assembly is grit blasted on a side of the cover plate assembly remote from the tray.

10. The PVD tray structure of claim 1, wherein the thickness of the cover plate assembly is no greater than 5 mm.

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