CN215556984U - 板式自动上下料装置 - Google Patents
板式自动上下料装置 Download PDFInfo
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- CN215556984U CN215556984U CN202122095334.XU CN202122095334U CN215556984U CN 215556984 U CN215556984 U CN 215556984U CN 202122095334 U CN202122095334 U CN 202122095334U CN 215556984 U CN215556984 U CN 215556984U
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- unloading device
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CN202122095334.XU CN215556984U (zh) | 2021-09-01 | 2021-09-01 | 板式自动上下料装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114939539A (zh) * | 2022-05-30 | 2022-08-26 | 厦门福信光电集成有限公司 | 一种晶圆表面缺陷智能检测设备 |
CN114985288A (zh) * | 2022-05-30 | 2022-09-02 | 厦门福信光电集成有限公司 | 一种晶圆表面缺陷检测的智能出料设备 |
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2021
- 2021-09-01 CN CN202122095334.XU patent/CN215556984U/zh active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114939539A (zh) * | 2022-05-30 | 2022-08-26 | 厦门福信光电集成有限公司 | 一种晶圆表面缺陷智能检测设备 |
CN114985288A (zh) * | 2022-05-30 | 2022-09-02 | 厦门福信光电集成有限公司 | 一种晶圆表面缺陷检测的智能出料设备 |
CN114939539B (zh) * | 2022-05-30 | 2024-03-05 | 厦门福信光电集成有限公司 | 一种晶圆表面缺陷智能检测设备 |
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Legal Events
Date | Code | Title | Description |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Plate type automatic loading and unloading device Effective date of registration: 20220628 Granted publication date: 20220118 Pledgee: Bank of Communications Co.,Ltd. Hunan Branch Pledgor: Hunan Dongchuang Intelligent Equipment Co.,Ltd. Registration number: Y2022980009311 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20231218 Granted publication date: 20220118 Pledgee: Bank of Communications Co.,Ltd. Hunan Branch Pledgor: Hunan Dongchuang Intelligent Equipment Co.,Ltd. Registration number: Y2022980009311 |