CN215148218U

CN215148218U - Target shielding jig

Info

Publication number: CN215148218U
Application number: CN202120724686.4U
Authority: CN
Inventors: 姚力军; 窦兴贤; 王学泽; 王青松; 朱雪明
Original assignee: Hefei Jiangfeng Electronic Material Co ltd
Current assignee: Hefei Jiangfeng Electronic Material Co ltd
Priority date: 2021-04-09
Filing date: 2021-04-09
Publication date: 2021-12-14
Anticipated expiration: 2031-04-09

Abstract

The utility model provides a target shielding jig, which comprises a first shielding cover, a second shielding cover, a third shielding cover, a fourth shielding cover and handles respectively arranged on the shielding covers; the first shielding cover, the second shielding cover, the third shielding cover and the fourth shielding cover independently comprise side walls and a top plate, and are matched and buckled on the non-sand blasting surface of the target material through a stepped structure. The utility model discloses a design of shielding the tool structure has realized reuse nature when having guaranteed to shield the effect, has improved production efficiency, has reduced the abnormal rate of product, is favorable to the industrialization to be used.

Description

Target shielding jig

Technical Field

The utility model belongs to the technical field of the target preparation, concretely relates to target shields tool.

Background

The target sputtering is to apply an orthogonal magnetic field and an electric field between a target (cathode) and an anode to be sputtered, fill the required inert gas (usually Ar gas) into the high vacuum chamber, form a magnetic field of 250-350 Gauss on the surface of the target material by the permanent magnet, and form an orthogonal electromagnetic field with the high voltage electric field. Under the action of electric field, Ar gas is ionized into positive ions and electrons, a certain negative high voltage is added on the target, the electrons emitted from the target electrode are subjected to the action of a magnetic field and the ionization probability of working gas is increased, high-density plasma is formed near the cathode, Ar ions accelerate to fly to the target surface under the action of Lorentz force, and bombard the target surface at a high speed, so that atoms sputtered from the target are separated from the target surface by high kinetic energy to fly to a substrate to deposit and form a film according to the momentum conversion principle.

In the current target preparation, before sputtering the target, sand blasting is needed to make the target obtain better mechanical properties. The sand blasting process is to form high-speed spray beam with compressed air as power to spray the material to the surface of the workpiece to be treated at high speed to change the surface or shape of the workpiece. Due to the impact and cutting action of the abrasive on the surface of the workpiece, the surface of the workpiece obtains certain cleanliness and different roughness, and the mechanical property of the surface of the workpiece is improved, so that the fatigue resistance of the workpiece is improved, the adhesive force between the surface of the workpiece and a coating is increased, the durability of a coating is prolonged, and the leveling and decoration of the coating are facilitated.

At present, organic matter residue is easily generated on the surface of a workpiece by sand blasting or fusion jetting of the workpiece, so that the organic matter residue cannot be removed in subsequent procedures such as ultrasonic cleaning, and the ranges of sand blasting and fusion jetting are difficult to accurately control, thereby increasing the difficulty of production. In order to avoid the influence of organic residues caused by sand blasting and meltallizing on the surface properties of a non-working surface, proper shielding of a non-sand blasting area is generally required in actual production.

The existing LCD split type target material needs to be manually shielded and protected on a non-sandblasted surface during sandblasting, and the method comprises the following steps: 1) sticking a blue film (220mm) on the non-sandblasting surface, and then cutting off the redundant blue film by using an art designer; 2) fixing the blue film and the non-sandblasted film together by using an electric adhesive tape; 3) sticking 1 circle of the cloth with 19mm heat-resistant adhesive tape, and then spreading 4 layers of 20mm 3404mm purified cloth on the blue film; 4) spreading the resin curtain on the purifying cloth; 5) fixing the resin curtain and the non-sand-blasting surface by using an electric adhesive tape, and then sticking 2 layers by using a 45mm wide yellow adhesive tape; 6) 2 layers were attached with electrical tape along the non-sandblasted face side. This flow needs personnel to operate 45 minutes, great reduction the flow efficiency of product, and used sticky tape uses once and just scraps, can not used repeatedly. Therefore, the target non-sandblasting surface shielding jig which is simple in structure and can be recycled has important significance.

CN104817878A discloses an ultraviolet curable sandblasting resistant masking protective ink, which comprises the following components in percentage by weight based on the total weight of the ink composition: 50-70% of oligomer, 0.5-15% of active monomer, 3-8% of initiator and 15-30% of filler; wherein the oligomer is one or more of aliphatic urethane acrylate and anhydride modified epoxy acrylate. The shielding ink provided by the patent application has the high performance of easy demoulding, no residue after film stripping and no corrosion to a base material, can be used for shielding a non-working area of a target, but even if the shielding ink is used, the shielding ink still needs to be coated manually, and additionally the processes of curing and demoulding are added, so that the cost is higher.

CN211361908U discloses a sand blasting shielding jig for a target, which comprises a target, a shielding plate, a positioning block and a pressing block; the shielding plate is arranged on the non-sandblasting surface of the target material; the positioning block is used for positioning the shielding plate; the pressing block is arranged on the shielding plate. The shielding jig needs to be additionally fixed by a positioning block and a pressing block, cannot shield and protect the side edge of the target material, and has limited shielding effect.

In summary, how to provide a shielding jig which has a simple structure, can be reused, and can shield and protect the non-sandblasted surface of the target in all directions is a problem to be solved.

SUMMERY OF THE UTILITY MODEL

Problem to prior art exists, the utility model aims to provide a target shields tool, shield the tool and pass through the design of structure, realized but reuse nature when having guaranteed to shield the effect, improved production efficiency, reduced the abnormal rate of product, be favorable to the industrialization to be used.

To achieve the purpose, the utility model adopts the following technical proposal:

the utility model provides a target shielding jig, which comprises a first shielding cover, a second shielding cover, a third shielding cover, a fourth shielding cover and handles respectively arranged on the shielding covers;

the first shielding cover, the second shielding cover, the third shielding cover and the fourth shielding cover independently comprise side walls and a top plate, and are matched and buckled on the non-sand blasting surface of the target material through a stepped structure.

In the utility model, the target shielding jig is formed by combining 4 shielding covers, the split structure is convenient to disassemble and take, and the 4 shielding covers can realize dislocation shielding on the surface and the side surface of the target through the design of the stepped structure without leaving gaps, thereby avoiding the sand blasting material from entering the gaps and influencing the surface property of the non-sand blasting surface; the combined shielding jig is buckled on a product, so that the plane and the side edge of a target material non-sand blasting area can be protected, the use method is simple, the combined shielding jig can be repeatedly utilized, the turnover rate of the product is greatly reduced, the production efficiency and the product quality are improved, the industrial waste output is reduced, and the combined shielding jig has a good industrial application prospect.

Following conduct the utility model discloses preferred technical scheme, nevertheless do not conduct the utility model provides a technical scheme's restriction, through following technical scheme, can reach and realize better the utility model discloses a technical purpose and beneficial effect.

As the preferred technical scheme of the utility model, first cover, second shield lid, third shield lid and fourth shield the lid and shield the lid for stainless steel shields the lid, carbon steel shields the lid, iron shields the lid, the aluminum alloy shields the lid, the aluminium shields the lid or polyurethane shields any one in the lid.

The utility model discloses in, the selection of shielding tool material is crucial. The utility model discloses the cover material that shields who chooses for use all has wear-resisting, resistant spouting, the light advantage of quality, and operating personnel is single can operate, the cost of using manpower sparingly.

In a preferred embodiment of the present invention, the top plate includes a main body portion and a stepped portion, and a thickness of the stepped portion is smaller than a thickness of the main body portion.

In the present invention, the total thickness between the two mutually contacting and fitting step portions is equal to the thickness of the main body portion.

In a preferred embodiment of the present invention, the thickness of the main body of the top plate is 4 to 6mm, for example, 4mm, 4.5mm, 5mm, 5.5mm, or 6mm, but the present invention is not limited to the above-mentioned values, and other values not shown in the above-mentioned range of values are also applicable.

As an optimal technical solution of the utility model, the step set up in two adjacent right angle avris of roof.

The step has a width of 6 to 8mm, for example, 6mm, 6.5mm, 7mm, 7.5mm, or 8mm, but the step is not limited to the above-mentioned values, and other values not shown in the above-mentioned value range are also applicable.

In the utility model, the adjacent two right-angle side edges are provided with the step parts, therefore, each shielding cover comprises two step parts, and each step part can be contacted and matched with the step parts on other shielding covers in the combination process; since each step and the main body form an L-shaped cross section, the steps can be matched with each other through the L-shaped symmetrical about the origin, so that 4 shielding covers are tightly closed, and the effect of shielding and protecting the non-sandblasting surface is achieved.

The utility model discloses in, the structure of step includes multiple design, can make 4 shield the lid closely cooperate can.

As a preferred embodiment of the present invention, the side of the top plate where the step portion is not provided is connected to a side wall.

The utility model discloses in, except setting up two adjacent right-angle sides of step portion, the quantity and the shape on other limits of roof do not make the regulation, and 4 shield the lid cooperation and close the cross sectional shape after detaining and can decide according to the concrete shape of target, and its length and width size is decided according to the size of target equally. Similarly, the width of the step portion can be adaptively adjusted according to the size of the entire shield cover.

In a preferred embodiment of the present invention, the thickness of the sidewall is 6 to 8mm, for example, 6mm, 6.5mm, 7mm, 7.5mm, or 8mm, but the thickness is not limited to the above-mentioned values, and other values not shown in the above-mentioned range of values are also applicable.

In the utility model, the part of the side wall which is matched with other shielding covers is also provided with a step part, therefore, the thickness of the side wall in the utility model refers to the thickness of the main body part of the side wall; with reference to the structure of the top plate, the total thickness between two mutually contacting and matching step parts on the side wall is also equal to the thickness of the side wall main body part; similarly, the structure of the step part of the sidewall includes various design ways, so that 4 shielding covers can be tightly matched.

As the preferred technical scheme of the utility model, the first lid, the second of shielding, the third shields the lid and the fourth shields the inboard surface of lid and pastes and has the adhesive tape.

The utility model discloses in, the whole inboard surface that shields the tool pastes the adhesive tape and can prevent the tool and bump the product surface, reduces the production of defective products.

As a preferred technical solution of the present invention, the target material includes an LCD target material.

The LCD target comprises a G10.5 or G11 series target.

Compared with the prior art, the utility model discloses following beneficial effect has:

target shields tool passes through the design and the combination of structure, can shield the non-sand blasting face region of protection target comprehensively, can realize the reuse nature of shielding the tool simultaneously, very big improvement production efficiency, the completion shields operating procedure only needs 2min, has reduced the turnover rate of product, has reduced the output of industrial waste simultaneously, practices thrift the cost, has effectively improved the quality of product, reduces the product abnormal rate, is favorable to scale production, has good industrialization application prospect.

Drawings

Fig. 1 is a schematic structural view of a target shielding jig provided in embodiment 1 of the present invention;

fig. 2 is a schematic top view of a first shield cover and a handle thereof according to embodiment 1 of the present invention;

fig. 3 is a schematic front view of the first shielding cover and its handle according to embodiment 1 of the present invention;

fig. 4 is a schematic top view of a second shield cover and its handle according to embodiment 1 of the present invention;

fig. 5 is a schematic top view of a third shield cover and a handle thereof according to embodiment 1 of the present invention;

fig. 6 is a schematic top view of a fourth shield cover and a handle thereof according to embodiment 1 of the present invention;

wherein, 1-the first shielding cover, 2-the second shielding cover, 3-the third shielding cover, 4-the fourth shielding cover, 5-the handle, 6-the main body, 7-the step part, 8-the side wall.

Detailed Description

To better explain the technical solution of the present invention, it is convenient to understand the technical solution of the present invention, and the following is further detailed description of the present invention, but the following embodiments are only simple examples of the present invention, and do not represent or limit the protection scope of the present invention, and the protection scope of the present invention is subject to the claims.

The utility model provides a target shielding jig, which comprises a first shielding cover 1, a second shielding cover 2, a third shielding cover 3, a fourth shielding cover 4 and handles 5 respectively arranged on the shielding covers;

the first shielding cover 1, the second shielding cover 2, the third shielding cover 3 and the fourth shielding cover 4 independently comprise a side wall 8 and a top plate, and are matched and buckled on the non-sandblasting surface of the target material through a stepped structure.

The following are typical but non-limiting examples of the present invention:

example 1:

the embodiment provides a target shielding jig, a schematic plan view structure of which is shown in fig. 1, wherein a target suitable for the shielding jig is a G10.5 LCD target.

The target shielding jig comprises a first shielding cover 1, a second shielding cover 2, a third shielding cover 3, a fourth shielding cover 4 and handles 5 respectively arranged on the shielding covers; the first shielding cover 1 and the handle 5 thereof are shown in fig. 2 in a top view structure and fig. 3 in a front view structure; the second shielding cover 2 and the handle 5 thereof are shown in fig. 4 in a top view; the top view structure of the third shield cover 3 and the handle 5 thereof is shown in fig. 5; fig. 6 is a plan view showing the fourth shield cover 4 and the handle 5.

The first shielding cover 1, the second shielding cover 2, the third shielding cover 3 and the fourth shielding cover 4 are all stainless steel shielding covers.

The top plate includes a body portion 6 and a step portion 7, and the thickness of the body portion 6 of the top plate is 5 mm.

Step portion 7 set up in two adjacent right angle avris of roof, step portion 7's width is 6 mm.

The side of the top plate, which is not provided with the step portion 7, is connected with a side wall 8, and the thickness of the side wall 8 is 7.5 mm.

Adhesive tapes are adhered to the inner side surfaces of the first shielding cover 1, the second shielding cover 2, the third shielding cover 3 and the fourth shielding cover 4.

Example 2:

the embodiment provides a target shielding jig, a schematic diagram of which is shown in fig. 1, wherein a target suitable for the shielding jig is a G11 LCD target.

The target shielding jig comprises a first shielding cover 1, a second shielding cover 2, a third shielding cover 3, a fourth shielding cover 4 and handles 5 respectively arranged on the shielding covers;

The first shielding cover 1, the second shielding cover 2, the third shielding cover 3 and the fourth shielding cover 4 are all aluminum alloy shielding covers.

The top plate includes a body portion 6 and a step portion 7, and the thickness of the body portion 6 of the top plate is 4 mm.

Step portion 7 set up in two adjacent right angle avris of roof, step portion 7's width is 8 mm.

The side of the top plate, which is not provided with the step portion 7, is connected with a side wall 8, and the thickness of the side wall 8 is 6 mm.

Example 3:

the embodiment provides a target shielding jig, a schematic diagram of the target shielding jig is shown in fig. 1, and a target suitable for the shielding jig is a G10.5 LCD target.

The target shielding jig comprises a first shielding cover 1, a second shielding cover 2, a third shielding cover 3, a fourth shielding cover 4 and handles 5 respectively arranged on the shielding covers; the first shielding cover 1, the second shielding cover 2, the third shielding cover 3 and the fourth shielding cover 4 independently comprise a side wall 8 and a top plate, and are matched and buckled on the non-sandblasting surface of the target material through a stepped structure.

The first shielding cover 1, the second shielding cover 2, the third shielding cover 3 and the fourth shielding cover 4 are all polyurethane shielding covers.

The top plate includes a body portion 6 and a step portion 7, and the thickness of the body portion 6 of the top plate is 6 mm.

Step portion 7 set up in two adjacent right angle avris of roof, step portion 7's width is 7 mm.

The side of the top plate, which is not provided with the step portion 7, is connected with a side wall 8, and the thickness of the side wall 8 is 8 mm.

Comparative example 1:

the comparative example provides a target shielding jig, and the target suitable for the target shielding jig is the target in the reference example 1.

The shielding jig is different from the target shielding jig in embodiment 1 only in that: step parts 7 are not arranged on top plates and side walls 8 of the first shielding cover 1, the second shielding cover 2, the third shielding cover 3 and the fourth shielding cover 4, and only 4 shielding covers are aligned and buckled on the target material.

The target shielding jigs in example 1 and comparative example 1 were used to perform sand blasting on G10.5 LCD targets, and the effect of the target shielding jigs was verified.

The target material using the masking jig of example 1 was fully protected from the non-sandblasted surface, and no organic matter remained on the non-sandblasted surface.

The target material using the masking jig of comparative example 1 showed traces of the residue of the organic material on the plane and side of the non-sandblasted area. The reason is that the 4 shielding covers are aligned and matched with the gaps, and no dislocation shielding effect is formed, so that organic matters enter from the gaps in the sand blasting process and remain on the non-sand blasting surface of the target material.

Synthesize above-mentioned embodiment and comparative example and can see out, the utility model discloses a design and the combination of cascaded structure can shield the non-sand blasting face region of protection target comprehensively, can realize the reuse nature of shielding the tool simultaneously, very big improvement production efficiency, the completion shields the operating procedure and only needs 2min, the turnover rate of product has been reduced, the output of industrial waste has been reduced simultaneously, the cost is saved, the quality of product has effectively been improved, reduce the product abnormal rate, be favorable to the scale production, good industrialization application prospect has.

The applicant states that the present invention is described in detail by the above embodiments, but the present invention is not limited to the above detailed structure, i.e. the present invention can be implemented only by relying on the above detailed structure. It should be clear to those skilled in the art that any improvement of the present invention, to the addition of the equivalent replacement of the structure and the auxiliary structure, the selection of the specific mode, etc., all fall within the protection scope and disclosure scope of the present invention.

Claims

1. A target shielding jig is characterized by comprising a first shielding cover, a second shielding cover, a third shielding cover, a fourth shielding cover and handles respectively arranged on the shielding covers;

2. The target shielding jig of claim 1, wherein the first shielding cover, the second shielding cover, the third shielding cover and the fourth shielding cover are any one of a stainless steel shielding cover, a carbon steel shielding cover, an iron shielding cover, an aluminum alloy shielding cover, an aluminum shielding cover or a polyurethane shielding cover.

3. The target shielding jig of claim 1, wherein the top plate comprises a main body portion and a step portion, and a thickness of the step portion is smaller than a thickness of the main body portion.

4. The target shielding jig of claim 3, wherein the thickness of the main body portion of the top plate is 4 to 6 mm.

5. The target shielding jig according to claim 3, wherein the step portions are disposed on two adjacent right-angle edges of the top plate;

the width of the step part is 6-8 mm.

6. The target shielding jig of claim 5, wherein a side wall is connected to an edge of the top plate where the step portion is not provided.

7. The target shielding jig of claim 1, wherein the thickness of the sidewall is 6 to 8 mm.

8. The target shielding jig of claim 1, wherein adhesive tapes are adhered to inner side surfaces of the first shielding cover, the second shielding cover, the third shielding cover and the fourth shielding cover.

9. The target shielding jig of claim 1, wherein the target comprises an LCD target;

the LCD target comprises a G105 or G11 series target.