CN213532226U - Sand blasting protection tool for target material assembly - Google Patents
Sand blasting protection tool for target material assembly Download PDFInfo
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- CN213532226U CN213532226U CN202022009024.7U CN202022009024U CN213532226U CN 213532226 U CN213532226 U CN 213532226U CN 202022009024 U CN202022009024 U CN 202022009024U CN 213532226 U CN213532226 U CN 213532226U
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Abstract
The utility model provides a target component sand blasting protection tool, which comprises a protective layer, a buffer layer, a shaping layer and a basal layer which are sequentially stacked; the base layer is in contact with a non-sandblasted region of the backing plate; the protective layer, the buffer layer, the shaping layer and the basal layer are respectively and independently provided with at least two threaded holes for fixing bolts to penetrate through; and the positions of all layers of threaded holes in the target material assembly sand blasting protection tool correspond to one another. The sand blasting protection tool for the target material assembly is suitable for protection when the rectangular target material assembly is subjected to sand blasting, is simple in structure and convenient to install, can be repeatedly used, and avoids the resource waste defect that a shielding tool in the prior art is complex to install and cannot be repeatedly used.
Description
Technical Field
The utility model belongs to the technical field of the semiconductor is made, a manufacturing tool of target is related to, especially, relate to a target subassembly sandblast protection instrument.
Background
Magnetron sputtering is one of the common processes in the field of semiconductor manufacturing, and the sputtering quality of magnetron sputtering directly influences the quality of sputtering film formation.
In the field of sputtering target manufacturing, a target assembly is composed of a target blank meeting sputtering performance and a back plate combined with the target blank through welding. In the sputtering process, one side of a back plate of the target material assembly is subjected to strong cooling through cooling water with certain pressure, and one side of a target blank is in a high-temperature vacuum environment, so that huge pressure difference is formed between the two opposite sides of the target material assembly; one side of the target blank is bombarded by various particles in a high-voltage electric field and a strong magnetic field to generate a large amount of heat. In a severe magnetron sputtering environment, in order to ensure the stability of the quality of a film and the quality of a target assembly, the requirements on the quality of a target blank and a back plate and the welding bonding rate are higher and higher; and the sand blasting treatment is carried out on the back plate and the non-sand blasting area of the target, which is beneficial to improving the quality of the target assembly.
The sand blasting is to form high-speed spraying beam to spray the material to the surface of the workpiece to be treated with compressed air as power, so that the surface of the workpiece has certain cleanliness and different roughness, the mechanical property of the surface of the workpiece is improved, and the fatigue resistance of the workpiece is improved. However, the sand blasting treatment of the workpiece is easy to generate organic residue, and the range of sand blasting is difficult to control accurately, thereby increasing the difficulty of subsequent production. In order to avoid the influence of organic residues caused by sand blasting on the surface properties of the non-sand-blasting surface, the non-sand-blasting area needs to be properly shielded in actual production.
Before the target assembly is subjected to sand blasting treatment, the non-sand blasting surface of the target assembly needs to be treated by using an adhesive tape so as to shield the non-sand blasting surface. Or the non-sand-blasting surface of the target material component is shielded by placing a cloth material or an organic cover plate material and fixing the cloth material or the organic cover plate material through an adhesive tape. However, the above method is time-consuming, and the kit cannot be reused, which is not favorable for saving resources.
CN 111378936a discloses a method for manufacturing a target assembly, which comprises a target and a back plate, wherein the target is connected with the back plate; and placing the target material into a sleeve tool, and then carrying out sand blasting treatment on the back plate. The surface of the target material is wrapped in the sleeve, and sand grains incident on the surface of the target material are completely blocked outside the surface of the target material by the sleeve in the sand blasting process; the magic tape is arranged at the joint of the target and the back plate, and the sand grains are further separated by the attachment of the magic tape, so that the sand grains do not enter the joint of the target and the back plate; and the magic tape is convenient to be attached and detached, and is convenient to be attached between the set and the target. Then, the process of arranging the magic tape inevitably affects the mechanical properties of the back plate and the target, and the manufacturing method is difficult to be effectively implemented in the actual production process.
CN 104369113a discloses a target material sandblasting clamp and a target material sandblasting method, wherein the target material sandblasting clamp includes a target material chuck, the target material chuck is provided with a first groove, and the first groove is used for accommodating a target material; the cover plate is positioned on the sputtering area of the target and used for protecting the sputtering area; the number of the connecting pieces is larger than or equal to two, each connecting piece comprises a first end and a second end, the first ends can be fixed on the target chuck outside the first groove, and the second ends can be fixed on the cover plate. The target material sand blasting clamp protects the sputtering area of the target material, realizes accurate sand blasting on the target material sand blasting area, and ensures that the size and the precision of the sand blasting area meet requirements. However, the target material sand blasting clamp can only process target material components with fixed shapes and sizes, and the structure of the target material sand blasting clamp is easy to change after long-term use, which is not beneficial to long-term use.
Therefore, a target material sandblasting protection tool which has a simple structure and can effectively shield the non-sandblasting area of the target material assembly is needed, so that the waste of shielding materials can be reduced, the shielding efficiency is improved, and the processing efficiency of the target material assembly is improved.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects in the prior art, the utility model aims to provide a target material component sand blasting protection tool, in particular to a target material sand blasting protection tool suitable for a rectangular target material component; the target material sand blasting protection tool is simple in structure and convenient to install, can be used for multiple times during sand blasting treatment, and avoids the resource waste defect caused by complex installation and incapability of recycling of a shielding tool in the prior art.
To achieve the purpose, the utility model adopts the following technical proposal:
the utility model provides a target component sand blasting protection tool, which comprises a protective layer, a buffer layer, a shaping layer and a basal layer which are sequentially stacked; the base layer is in contact with a non-sandblasted region of the backing plate.
The protective layer, the buffer layer, the shaping layer and the basal layer are respectively and independently provided with at least two threaded holes for fixing bolts to penetrate through; and the positions of all layers of threaded holes in the target material assembly sand blasting protection tool correspond to one another.
The utility model can lead the sand blasting protection tool of the target component to be closely connected with the non-sand blasting area of the backboard through the arrangement of the basal layer, thereby avoiding the particles entering the non-sand blasting area during sand blasting and generating adverse effect on the sputtering performance of the non-sand blasting area; the utility model provides a certain length for the sand blasting protection tool of the target component through the setting of the setting layer, thereby avoiding the problem of difficult positioning caused by higher flexibility; the buffer layer can play a role in buffering during sand blasting, so that the deformation problem caused by collision during sand blasting is avoided; the arrangement of the protective layer avoids the pollution of sand grains to the buffer layer during sand blasting treatment.
Use the utility model provides a during target subassembly sandblast protection instrument, can set up the screw hole at the backplate in advance, through making this application the screw hole of target subassembly sandblast protection instrument corresponds with the backplate screw hole, fixes the non-sandblast region of target subassembly sandblast protection instrument and backplate.
The position one-to-one of each layer screw hole among the target subassembly sandblast protection instrument means that the quantity of the screw hole that sets up in inoxidizing coating, buffer layer, design layer and the stratum basale is the same among the target subassembly sandblast protection instrument, and corresponds the central axis coincidence of screw hole.
Preferably, the target assembly sand blasting protection tool is a cuboid target assembly sand blasting protection tool.
Preferably, the length of the target assembly sand blasting protection tool is 280-320mm, such as 280mm, 290mm, 300mm, 310mm or 320mm, but not limited to the values listed, and other values not listed in the range of values are also applicable; a width of 240-260mm, such as 240mm, 245mm, 250mm, 255mm or 260mm, but not limited to the values recited, and other values not recited in the range of values are equally applicable; the thickness is 24-28mm, and may be, for example, 24mm, 24.5mm, 25mm, 25.5mm, 26mm, 26.5mm, 27mm, 27.5mm or 28mm, but is not limited to the values recited, and other values not recited within the range of values are equally applicable.
The utility model discloses make target subassembly sandblast protection instrument's length be 280 and increase 320mm, wide for 240 and increase 260mm, make target subassembly sandblast protection instrument can be applicable to the sandblast treatment protection of the conventional rectangle target subassembly in this field.
Preferably, the protective layer is a stainless steel protective layer or an aluminum protective layer.
The protective layer has a thickness of 1 to 2mm, and may be, for example, 1mm, 1.2mm, 1.4mm, 1.5mm, 1.6mm, 1.8mm or 2mm, but is not limited to the values recited, and other values not recited within the range of values are equally applicable.
Preferably, the buffer layer is a rubber buffer layer with the thickness of 10-12 mm; the thickness of the rubber cushion layer is 10-12mm, for example 10mm, 10.5mm, 11mm, 11.5mm or 12mm, but is not limited to the values listed, and other values not listed in the numerical range are also applicable.
Preferably, the shaping layer is a stainless steel shaping layer or an aluminum shaping layer.
The thickness of the shaping layer is 1 to 2mm, and may be, for example, 1mm, 1.2mm, 1.4mm, 1.5mm, 1.6mm, 1.8mm or 2mm, but is not limited to the values listed, and other values not listed in the numerical range are also applicable.
Preferably, the substrate layer is a rubber substrate layer with the thickness of 10-12 mm; the thickness of the rubber substrate layer is 10-12mm, for example 10mm, 10.5mm, 11mm, 11.5mm or 12mm, but is not limited to the values listed, and other values not listed in the numerical range are equally applicable.
Preferably, the substrate layer is provided with a through groove matched with the rectangular back plate; the depth of the through grooves is 4-6mm, for example 4mm, 4.5mm, 5mm, 5.5mm or 6mm, but is not limited to the values listed, and other values not listed in the range of values are equally applicable.
As the utility model discloses preferred technical scheme, the utility model discloses a bottom at the stratum basale sets up logical groove, makes to lead to groove and rectangular backplate supporting, has improved the convenience of target subassembly sandblast protection instrument installation location to and the stability in the use.
Preferably, the periphery of the protective layer is connected with a protective plate; the protection plate is made of stainless steel or aluminum.
The connection mode of the protection plate and the protection layer comprises but is not limited to hinging.
The thickness of the protective plate is 1-2mm, and can be 1mm, 1.2mm, 1.4mm, 1.5mm, 1.6mm, 1.8mm or 2mm, but is not limited to the values listed, and other values not listed in the range of values are also applicable; the height of the protective plate is 14-16mm, for example 14mm, 14.5mm, 15mm, 15.5mm or 16mm, but is not limited to the values listed, and other values not listed in the numerical range are also applicable.
The utility model discloses a connect the guard plate around the inoxidizing coating, played the effect of protecting to the lateral wall on inoxidizing coating, buffer layer and design layer.
Preferably, the shaping layer is connected with a handle; the protective layer and the buffer layer are provided with through holes for the handle to pass through.
The utility model not only improves the moving convenience of the sand blasting protection tool of the target material component through the arrangement of the handle and the through hole which is passed through by the handle; the connection stability of the protective layer, the buffer layer, the shaping layer and the basal layer can also be improved.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) the utility model provides a target subassembly sandblast protection instrument is suitable for the protection when sandblasting to the rectangle target subassembly, and simple structure, and simple to operate can used repeatedly, has avoided shielding the instrument among the prior art and has installed loaded down with trivial details and can't reuse the wasting of resources defect that leads to;
(2) the utility model improves the convenience of the installation and the positioning of the sand blasting protection tool of the target material component and the stability in the use process by arranging the through groove at the bottom of the basal layer and matching the through groove with the rectangular back plate;
(3) the utility model has the advantages that the protection plate is connected around the protection layer, so that the protection effect on the side walls of the protection layer, the buffer layer and the shaping layer is achieved;
(4) the utility model not only improves the moving convenience of the sand blasting protection tool of the target material component through the arrangement of the handle and the through hole which is passed through by the handle; the connection stability of the protective layer, the buffer layer, the shaping layer and the basal layer can also be improved.
Drawings
Fig. 1 is a side view of a blast protection tool of a target assembly provided in example 1;
fig. 2 is a schematic structural view of a blast protection tool of the target assembly provided in embodiment 1;
fig. 3 is a side view of the blast protection tool of the target assembly provided in example 6;
fig. 4 is a schematic structural view of a blast protection tool of the target assembly provided in embodiment 6;
fig. 5 is a side view of the blast protection tool of the target assembly provided in example 9;
fig. 6 is a schematic structural view of a blast protection tool of the target assembly provided in embodiment 9;
fig. 7 is a side view of the blast protection tool of the target assembly provided in example 12;
fig. 8 is a schematic structural view of a handle provided in a sand blast protection tool for a target assembly according to embodiment 12.
Wherein: 1, a protective layer; 11, a protection plate; 12, a through hole; 2, a buffer layer; 3, shaping layer; 4, a base layer; 41, a through groove; 5, a threaded hole; and 6, a handle.
Detailed Description
It is to be understood that in the description of the present invention, the terms "central," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for the purpose of convenience and simplicity of description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the present invention.
It should be noted that, unless explicitly stated or limited otherwise, the terms "disposed," "connected" and "connected" in the description of the present invention are to be construed broadly, and may for example be fixedly connected, detachably connected or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.
Example 1
The embodiment provides a sandblasting protection tool for a target assembly, wherein a side view of the sandblasting protection tool for the target assembly is shown in fig. 1, and a schematic structural diagram is shown in fig. 2, and the sandblasting protection tool for the target assembly comprises a protection layer 1, a buffer layer 2, a shaping layer 3 and a substrate layer 4 which are sequentially stacked; the base layer 4 is in contact with the non-sandblasted areas of the back-plate.
The protective layer 1, the buffer layer 2, the shaping layer 3 and the substrate layer 4 are respectively and independently provided with 4 threaded holes 5 for fixing bolts to pass through; and the positions of the threaded holes 5 of all layers in the target material assembly sand blasting protection tool correspond to one another.
The target component sand blasting protection tool is a cuboid target component sand blasting protection tool, the length of the tool is 300mm, the width of the tool is 250mm, and the thickness of the tool is 26 mm.
The protective layer 1 is a stainless steel protective layer with the thickness of 1 mm.
The buffer layer 2 is a rubber buffer layer with the thickness of 12 mm.
The shaping layer 3 is a stainless steel shaping layer with the thickness of 1 mm.
The base layer 4 is a rubber base layer with the thickness of 12 mm.
Example 2
The embodiment provides a sand blasting protection tool for a target assembly, which comprises a protective layer 1, a buffer layer 2, a shaping layer 3 and a substrate layer 4 which are sequentially stacked; the base layer 4 is in contact with the non-sandblasted areas of the back-plate.
The protective layer 1, the buffer layer 2, the shaping layer 3 and the substrate layer 4 are respectively and independently provided with 4 threaded holes 5 for fixing bolts to pass through; and the positions of the threaded holes 5 of all layers in the target material assembly sand blasting protection tool correspond to one another.
The target component sand blasting protection tool is a cuboid target component sand blasting protection tool, the length of the tool is 310mm, the width of the tool is 255mm, and the thickness of the tool is 27 mm.
The protective layer 1 is an aluminum protective layer and is 1.5mm thick.
The buffer layer 2 is a rubber buffer layer with the thickness of 12 mm.
The shaping layer 3 is an aluminum shaping layer with the thickness of 1.5 mm.
The base layer 4 is a rubber base layer with the thickness of 12 mm.
Example 3
The embodiment provides a sand blasting protection tool for a target assembly, which comprises a protective layer 1, a buffer layer 2, a shaping layer 3 and a substrate layer 4 which are sequentially stacked; the base layer 4 is in contact with the non-sandblasted areas of the back-plate.
The protective layer 1, the buffer layer 2, the shaping layer 3 and the substrate layer 4 are respectively and independently provided with 4 threaded holes 5 for fixing bolts to pass through; and the positions of the threaded holes 5 of all layers in the target material assembly sand blasting protection tool correspond to one another.
The target material component sand blasting protection tool is a cuboid target material component sand blasting protection tool, the length of the tool is 290mm, the width of the tool is 245mm, and the thickness of the tool is 25 mm.
The protective layer 1 is an aluminum protective layer and is 1.5mm thick.
The buffer layer 2 is a rubber buffer layer with the thickness of 11 mm.
The shaping layer 3 is an aluminum shaping layer with the thickness of 1.5 mm.
The base layer 4 is a rubber base layer with the thickness of 11 mm.
Example 4
The embodiment provides a sand blasting protection tool for a target assembly, which comprises a protective layer 1, a buffer layer 2, a shaping layer 3 and a substrate layer 4 which are sequentially stacked; the base layer 4 is in contact with the non-sandblasted areas of the back-plate.
The protective layer 1, the buffer layer 2, the shaping layer 3 and the substrate layer 4 are respectively and independently provided with 4 threaded holes 5 for fixing bolts to pass through; and the positions of the threaded holes 5 of all layers in the target material assembly sand blasting protection tool correspond to one another.
The target component sand blasting protection tool is a cuboid target component sand blasting protection tool, the length of the tool is 280mm, the width of the tool is 240mm, and the thickness of the tool is 24 mm.
The protective layer 1 is an aluminum protective layer with the thickness of 2 mm.
The buffer layer 2 is a rubber buffer layer with the thickness of 10 mm.
The shaping layer 3 is an aluminum shaping layer and is 2mm thick.
The base layer 4 is a rubber base layer with the thickness of 10 mm.
Example 5
The embodiment provides a sand blasting protection tool for a target assembly, which comprises a protective layer 1, a buffer layer 2, a shaping layer 3 and a substrate layer 4 which are sequentially stacked; the base layer 4 is in contact with the non-sandblasted areas of the back-plate.
The protective layer 1, the buffer layer 2, the shaping layer 3 and the substrate layer 4 are respectively and independently provided with 4 threaded holes 5 for fixing bolts to pass through; and the positions of the threaded holes 5 of all layers in the target material assembly sand blasting protection tool correspond to one another.
The target component sand blasting protection tool is a cuboid target component sand blasting protection tool, the length of the tool is 320mm, the width of the tool is 260mm, and the thickness of the tool is 28 mm.
The protective layer 1 is an aluminum protective layer with the thickness of 2 mm.
The buffer layer 2 is a rubber buffer layer with the thickness of 12 mm.
The shaping layer 3 is an aluminum shaping layer and is 2mm thick.
The base layer 4 is a rubber base layer with the thickness of 12 mm.
In embodiments 1 to 5 of the present invention, the base layer 4 is disposed, so that the sandblasting protection tool of the target assembly can be tightly connected to the non-sandblasting area of the backing plate, thereby preventing particles from entering the non-sandblasting area during sandblasting and adversely affecting the sputtering performance of the non-sandblasting area; the utility model provides a certain length for the sand blasting protection tool of the target component through the setting of the setting layer 3, thereby avoiding the problem of difficult positioning caused by higher flexibility; the buffer layer 2 can play a role in buffering during sand blasting, so that the deformation problem caused by collision during sand blasting is avoided; the arrangement of the protective layer 1 avoids the pollution of sand grains to the buffer layer 2 during sand blasting treatment.
Therefore, the sandblasting protection tool for the target assembly provided in embodiments 1 to 5 is suitable for protection when sandblasting is performed on the rectangular target assembly, has a simple structure, is convenient to install, can be reused, and avoids the resource waste defect caused by complicated installation and incapability of recycling of the shielding tool in the prior art.
Example 6
The embodiment provides a sandblasting protection tool for a target assembly, wherein a side view of the sandblasting protection tool for the target assembly is shown in fig. 3, and a schematic structural diagram is shown in fig. 4, and the sandblasting protection tool for the target assembly comprises a protection layer 1, a buffer layer 2, a shaping layer 3 and a substrate layer 4 which are sequentially stacked; the base layer 4 is in contact with the non-sandblasted areas of the back-plate.
Compared with the embodiment 1, in the embodiment, the bottom of the substrate layer 4 is provided with the through groove 41 matched with the rectangular back plate, and the depth of the through groove 41 is 5 mm; the rest is the same as in example 1.
Example 7
The embodiment provides a sand blasting protection tool for a target assembly, which comprises a protective layer 1, a buffer layer 2, a shaping layer 3 and a substrate layer 4 which are sequentially stacked; the base layer 4 is in contact with the non-sandblasted areas of the back-plate.
Compared with the embodiment 1, in the embodiment, the bottom of the substrate layer 4 is provided with the through groove 41 matched with the rectangular back plate, and the depth of the through groove 41 is 4 mm; the rest is the same as in example 1.
Example 8
The embodiment provides a sand blasting protection tool for a target assembly, which comprises a protective layer 1, a buffer layer 2, a shaping layer 3 and a substrate layer 4 which are sequentially stacked; the base layer 4 is in contact with the non-sandblasted areas of the back-plate.
Compared with the embodiment 1, in the embodiment, the bottom of the substrate layer 4 is provided with the through groove 41 matched with the rectangular back plate, and the depth of the through groove 41 is 6 mm; the rest is the same as in example 1.
Examples 6-8 in comparison to example 1, a target assembly blast protection tool was provided with through slots 41. Through the arrangement of the through grooves 41, the through grooves 41 are matched with the rectangular back plate, so that the mounting and positioning convenience of the sand blasting protection tool for the target material assembly and the stability in the use process are improved.
Example 9
The embodiment provides a sandblasting protection tool for a target assembly, wherein a side view of the sandblasting protection tool for the target assembly is shown in fig. 5, and a schematic structural diagram is shown in fig. 6, and the sandblasting protection tool for the target assembly comprises a protection layer 1, a buffer layer 2, a shaping layer 3 and a substrate layer 4 which are sequentially stacked; the base layer 4 is in contact with the non-sandblasted areas of the back-plate.
Compared with the embodiment 1, the protection layer 1 is the same as the embodiment 1 except that the protection plate 11 is hinged around the protection layer 1; the protection plate 11 is an aluminum protection plate with the thickness of 1.5mm, and the height of the protection plate is 14 mm.
This embodiment is through connecting guard plate 11 around at inoxidizing coating 1, has played the effect of protecting to inoxidizing coating 1, buffer layer 2 and the lateral wall of stereotyping layer 3.
Example 10
The embodiment provides a sand blasting protection tool for a target assembly, which comprises a protective layer 1, a buffer layer 2, a shaping layer 3 and a substrate layer 4 which are sequentially stacked; the base layer 4 is in contact with the non-sandblasted areas of the back-plate.
Compared with the embodiment 2, the protection layer 1 of the embodiment is hinged with the protection plate 11 at the periphery, and the rest is the same as the embodiment 2; the protection plate 11 is an aluminum protection plate with the thickness of 2mm and the height of 15 mm.
This embodiment is through connecting guard plate 11 around at inoxidizing coating 1, has played the effect of protecting to inoxidizing coating 1, buffer layer 2 and the lateral wall of stereotyping layer 3.
Example 11
The embodiment provides a sand blasting protection tool for a target assembly, which comprises a protective layer 1, a buffer layer 2, a shaping layer 3 and a substrate layer 4 which are sequentially stacked; the base layer 4 is in contact with the non-sandblasted areas of the back-plate.
Compared with the embodiment 5, the protection layer 1 of the embodiment is hinged with the protection plate 11 at the periphery, and the rest is the same as the embodiment 5; the protection plate 11 is a stainless steel protection plate with the thickness of 1mm, and the height of the protection plate is 16 mm.
This embodiment is through connecting guard plate 11 around at inoxidizing coating 1, has played the effect of protecting to inoxidizing coating 1, buffer layer 2 and the lateral wall of stereotyping layer 3.
In examples 9 to 11, the protective plate 11 was attached around the protective layer 1, thereby protecting the side walls of the protective layer 1, the cushioning layer 2, and the setting layer 3.
Example 12
The embodiment provides a sandblasting protection tool for a target assembly, wherein a side view of the sandblasting protection tool for the target assembly is shown in fig. 7, and a schematic structural diagram of a handle 6 is shown in fig. 8, and the sandblasting protection tool for the target assembly comprises a protective layer 1, a buffer layer 2, a shaping layer 3 and a substrate layer 4 which are sequentially stacked; the base layer 4 is in contact with the non-sandblasted areas of the back-plate.
Compared with embodiment 1, this embodiment is the same as embodiment 1 except that the shaping layer 3 is connected with the handle 6, and the protective layer 1 and the cushioning layer 2 are provided with the through holes 12 for the handle 6 to pass through.
In the embodiment, the handle 6 and the through hole 12 through which the common handle 6 passes are arranged, so that the moving convenience of the target material assembly sand blasting protection tool is improved; the connection stability of the protective layer 1, the buffer layer 2, the shaping layer 3 and the basal layer 4 can be improved.
To sum up, the utility model provides a target subassembly sandblast protection instrument is suitable for the protection when sandblasting to the rectangle target subassembly, and simple structure, and convenient to install, can used repeatedly, has avoided covering the instrument among the prior art to install loaded down with trivial details and can't reuse the resource waste defect that leads to; the utility model improves the convenience of the installation and the positioning of the sand blasting protection tool of the target material component and the stability in the use process by arranging the through groove at the bottom of the basal layer and matching the through groove with the rectangular back plate; the utility model has the advantages that the protection plate is connected around the protection layer, so that the protection effect on the side walls of the protection layer, the buffer layer and the shaping layer is achieved; the utility model not only improves the moving convenience of the sand blasting protection tool of the target material component through the arrangement of the handle and the through hole which is passed through by the handle; the connection stability of the protective layer, the buffer layer, the shaping layer and the basal layer can also be improved.
The applicant states that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and those skilled in the art should understand that any changes or substitutions easily conceivable by those skilled in the art within the technical scope of the present invention are within the protection scope and the disclosure scope of the present invention.
Claims (10)
1. A sand blasting protection tool for a target assembly is characterized by comprising a protection layer, a buffer layer, a shaping layer and a basal layer which are sequentially stacked; the base layer is in contact with a non-sandblasted region of the backing plate;
the protective layer, the buffer layer, the shaping layer and the basal layer are respectively and independently provided with at least two threaded holes for fixing bolts to penetrate through; and the positions of all layers of threaded holes in the target material assembly sand blasting protection tool correspond to one another.
2. The target assembly blast protection tool of claim 1, wherein the target assembly blast protection tool is a cuboid target assembly blast protection tool.
3. The tool of claim 2, wherein the tool has a length of 280-320mm, a width of 240-260mm and a thickness of 24-28 mm.
4. The tool of claim 3, wherein the protective layer is a stainless steel protective layer or an aluminum protective layer;
the thickness of the protective layer is 1-2 mm.
5. The tool of claim 3 or 4, wherein the cushion layer is a rubber cushion layer with a thickness of 10-12 mm.
6. The tool of claim 5, wherein the sizing layer is a stainless steel sizing layer or an aluminum sizing layer;
the thickness of the shaping layer is 1-2 mm.
7. The tool of claim 6, wherein the substrate layer is a rubber substrate layer having a thickness of 10-12 mm.
8. The tool of claim 1 or 7, wherein the substrate layer is provided with a through slot matching with the rectangular back plate;
the depth of the through groove is 4-6 mm.
9. The tool of claim 1, wherein a protective plate is attached around the protective layer;
the thickness of the protective plate is 1-2mm, and the height of the protective plate is 14-16 mm.
10. The target assembly blast protection tool of claim 1, wherein the shaping layer is connected with a handle; the protective layer and the buffer layer are provided with through holes for the handle to pass through.
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| CN202022009024.7U CN213532226U (en) | 2020-09-11 | 2020-09-11 | Sand blasting protection tool for target material assembly |
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| CN202022009024.7U CN213532226U (en) | 2020-09-11 | 2020-09-11 | Sand blasting protection tool for target material assembly |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114714262A (en) * | 2022-04-06 | 2022-07-08 | 广东江丰电子材料有限公司 | Two-end sand blasting protection jig for LCD target |
| CN114750079A (en) * | 2022-04-24 | 2022-07-15 | 广东江丰电子材料有限公司 | Preparation method of target material assembly |
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2020
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114714262A (en) * | 2022-04-06 | 2022-07-08 | 广东江丰电子材料有限公司 | Two-end sand blasting protection jig for LCD target |
| CN114750079A (en) * | 2022-04-24 | 2022-07-15 | 广东江丰电子材料有限公司 | Preparation method of target material assembly |
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