CN213624362U - Efficient sputtering jig of sheet type vacuum coating machine - Google Patents

Abstract

The utility model relates to a piece formula vacuum coating machine's high-efficient sputtering tool, including last fixture, last terminal, main part, lower terminal, fixture, substrate fixed pressing strip and backplate of tool. The upper fixture and the lower fixture are respectively fixed on the upper large disc and the lower large disc of the sputtering cavity through screws; the upper terminal and the lower terminal are provided with a clamping groove and a through hole, the clamping groove is connected with the main body, the screw is fixed through the through hole, and the terminals are matched with the clamping apparatus to realize the installation and the disassembly of the sputtering jig; the main part is equipped with four mounting positions, and the mounting position is equipped with the step all around and is used for the substrate location, and the main part still is equipped with five pairs of screw holes and is used for the fixed of layering and two pairs of screw holes are used for the fixed of backplate. The utility model discloses a positive and negative fretwork design, when openly sputtering, the reverse side covers with the backplate, openly has spattered and to have covered the backplate and openly carry out the back sputtering. The utility model discloses anchor clamps simple structure, convenient assembling can effectively prevent to sputter, has improved reliability and work efficiency.

Description

Efficient sputtering jig of sheet type vacuum coating machine

Technical Field

The utility model belongs to the technical field of vacuum coating, in particular to piece formula vacuum coating machine's high-efficient sputtering tool.

Background

Vacuum-plating (magnetronic-sputtering) is a "high-speed low-temperature sputtering technique" that developed rapidly in the 70 s. Vacuum coating is the formation of an orthogonal electromagnetic field over the surface of a cathode target. When the secondary electrons generated by sputtering are accelerated to high-energy electrons in the cathode fall region, the high-energy electrons do not fly to the anode directly, but do reciprocating oscillation motion similar to cycloid under the action of orthogonal electromagnetic field. The energetic electrons continuously collide with gas molecules and transfer energy to the latter, ionizing them to become low-energy electrons themselves. The low-energy electrons finally drift to the auxiliary anode near the cathode along magnetic lines to be absorbed, so that the strong bombardment of high-energy electrons to the polar plate is avoided, the root cause of damage caused by bombardment heating and electron irradiation of the polar plate in the two-pole sputtering is eliminated, and the characteristic of low temperature of the polar plate in the vacuum coating is reflected. Due to the existence of an external magnetic field, the complex movement of electrons increases the ionization rate and realizes high-speed sputtering. The vacuum coating is technically characterized in that a magnetic field vertical to the direction of an electric field is generated near a cathode target surface and is generally realized by adopting a permanent magnet.

The traditional sheet type vacuum coating machine adopts a single-side sputtering process with a relatively fixed jig, so that a substrate on each sputtering side needs to be clamped by screwing a screw, the substrate can be damaged, and the substrate has cracks and hidden crack risks. After the sputtering process of the first surface of the substrate is finished, the sputtering cavity needs to be cooled, the cavity door needs to be opened, all the fixtures are taken down, the substrate needs to be turned over manually, and then the fixtures are reloaded to perform the sputtering process of the reverse surface. When the traditional jig is used for carrying out similar processes, on one hand, the process time is greatly prolonged, and unnecessary labor force is increased; on the other hand, the risk of the substrate in the sputtering process is increased, the substrate can be damaged in the process of turning the substrate, more importantly, pollutants can be brought in, and even very tiny air floating objects can affect the quality of the sputtering finished product.

SUMMERY OF THE UTILITY MODEL

In order to solve the problems of low efficiency, complex operation and certain risk of the traditional sputtering jig, the utility model aims to provide a high-efficiency sputtering jig of a sheet type vacuum coating machine with high efficiency, convenient operation and good reliability.

In order to achieve the above object, the present invention is achieved by the following technical solutions: a high-efficiency sputtering jig of a chip type vacuum coating machine comprises an upper fixture, an upper terminal, a main body, a lower terminal, a lower fixture, a substrate fixing pressing strip and a back plate of the jig. The upper fixture and the lower fixture are respectively fixed on the upper large disc and the lower large disc of the sputtering cavity through screws; the upper terminal and the lower terminal are provided with a clamping groove and a through hole, the clamping groove is connected with the main body, the screw is fixed through the through hole, and the terminals are matched with the clamping apparatus to realize the installation and the disassembly of the sputtering jig; the main part adopts the fretwork design, is equipped with four mounting positions, and the mounting position is equipped with the step all around and is used for the substrate location, and the main part still is equipped with five pairs of screw holes and is used for the fixed of layering, and two pairs of screw holes are used for the fixed of backplate in addition.

Further, last fixture and lower fixture all be equipped with the cross draw-in groove for the location of tool, go up fixture and install on sputtering the cavity and go up the big dish, can reciprocate and rotate to leave the space and carry out the installation and the dismantlement of tool, lower fixture is fixed on big dish down with the screw, the central counter bore and the cross draw-in groove of fixture all carry out 45 chamfers and handle, are favorable to smoothly loading and unloading the tool.

Furthermore, the end heads of the upper terminal and the lower terminal are subjected to 45-degree chamfering treatment, so that the jig can be smoothly assembled and disassembled.

Furthermore, the main part adopt the fretwork design, have 4 vertical arrangement's dress piece positions, the dress piece position positive and negative carries out 45 chamfers around and handles, reduces the influence of tool itself to sputtering substrate edge membrane layer thickness.

Furthermore, steps of 0.3mm are arranged around the main body chip mounting position, so that the substrate is conveniently positioned.

Furthermore, the main body assembling position is provided with five pairs of threaded holes for fixing the pressing strip.

Furthermore, four corners of the upper end and the lower end of the main body are provided with two pairs of screw holes for fixing the back plate.

Furthermore, the periphery of the front surface of the substrate fixing pressing strip is subjected to 45-degree chamfering treatment, so that the influence on the thickness of the film layer at the edge of the sputtering substrate is reduced.

Furthermore, all the parts need to be subjected to emery sand blasting treatment of No. 90, and all the parts are made of temperature-resistant, acid-base-resistant and antioxidant materials such as 304 stainless steel, but are not limited to the materials, so that the acid treatment and maintenance of the jig in the later period are facilitated.

The utility model has the advantages that: the utility model discloses a positive and negative fretwork design, when openly sputtering, the reverse side covers with the backplate, openly has spattered and to have covered the backplate and openly carry out the back sputtering. The traditional sputtering jig is easily polluted by a copper clamp, a vacuum cavity can be formed in a vacuum environment, and the substrate has hidden cracking risk. Compared with the prior art, the utility model discloses anchor clamps simple structure, convenient assembling can effectively prevent to sputter, has improved reliability and work efficiency.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a front outline view of the utility model after assembly.

Fig. 3 is a back outline of the utility model after assembly.

Wherein: 1-upper fixture, 2-upper terminal, 3-main body, 4-lower terminal, 5-lower fixture, 6-substrate fixing batten and 7-back plate.

Detailed Description

The disclosure of this patent may be further understood in conjunction with the following examples of the invention. The utility model relates to a piece formula vacuum coating machine's high-efficient sputtering tool, including last fixture, last terminal, main part, lower terminal, fixture, substrate fixed pressing strip and backplate down. The utility model discloses a positive and negative fretwork design, when openly sputtering, the reverse side covers with the backplate, openly has spattered and to have covered the backplate and openly carry out the back sputtering. The utility model discloses anchor clamps simple structure, convenient assembling can effectively prevent to sputter, has improved reliability and work efficiency.

The utility model discloses a realize through following technical scheme: a high-efficiency sputtering jig of a chip type vacuum coating machine comprises an upper fixture, an upper terminal, a main body, a lower terminal, a lower fixture, a substrate fixing pressing strip and a back plate of the jig. The upper fixture and the lower fixture are respectively fixed on the upper large disc and the lower large disc of the sputtering cavity through screws; the upper terminal and the lower terminal are provided with a clamping groove and a through hole, the clamping groove is connected with the main body, the screw is fixed through the through hole, and the terminals are matched with the clamping apparatus to realize the installation and the disassembly of the sputtering jig; the main part adopts the fretwork design, is equipped with four mounting positions, and the mounting position is equipped with the step all around and is used for the substrate location, and the main part still is equipped with five pairs of screw holes and is used for the fixed of layering, and two pairs of screw holes are used for the fixed of backplate in addition.

Go up fixture and lower fixture and all be equipped with the cross draw-in groove for the location of tool, go up fixture and install on sputtering the cavity and go up the big dish, can reciprocate and rotate to leave the space and carry out the installation and the dismantlement of tool, lower fixture is fixed under on the big dish with the screw, and the central counter bore and the cross draw-in groove of fixture all carry out 45 chamfers and handle, are favorable to smoothly loading and unloading the tool. The end heads of the upper terminal and the lower terminal are subjected to 45-degree chamfering treatment, so that the jig is favorably and smoothly assembled and disassembled. The main part adopts the fretwork design, has 4 vertical dress piece positions of arranging, and the dress piece position positive and negative carries out 45 chamfers all around and handles, reduces the influence of tool itself to sputtering substrate edge coating thickness. The periphery of the main body chip mounting position is provided with 0.3mm steps, so that the substrate is conveniently positioned. Five pairs of threaded holes are formed in the main body assembling position for fixing the pressing strips. Two pairs of screw holes are arranged at four corners of the upper end and the lower end of the main body and used for fixing the back plate. The periphery of the front surface of the substrate fixing depression bar is chamfered by 45 degrees, so that the influence on the thickness of the film layer at the edge of the sputtering substrate is reduced. All parts need to be subjected to No. 90 carborundum sand blasting treatment, and all parts are made of temperature-resistant, acid-base-resistant and antioxidant materials such as 304 stainless steel, but are not limited to the materials, so that the acid treatment and the maintenance of the jig in the later period are facilitated. The utility model discloses a positive and negative fretwork design, when openly sputtering, the reverse side covers with the backplate, openly has spattered and to have covered the backplate and openly carry out the back sputtering.

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. In addition, recitation of embodiments does not imply that other embodiments are not useful, nor is it intended to exclude other embodiments from the scope of the invention.

Examples

As shown in fig. 1, the high-efficiency sputtering jig of the chip-type vacuum coating machine comprises an upper fixture 1, an upper terminal 2, a main body 3, a lower terminal 4, a lower fixture 5, a substrate fixing bead 6 and a back plate 7; the upper fixture 1 and the lower fixture 5 are respectively fixed on an upper large disc and a lower large disc of the sputtering cavity through screws; the upper terminal 2 and the lower terminal 4 are both provided with a clamping groove and a through hole, the clamping groove is connected with the main body 3, a screw is fixed through the through hole, and the terminals are matched with the clamping apparatus to realize the installation and the disassembly of the sputtering jig; the main part 3 adopts the fretwork design, is equipped with four mounting positions, and the mounting position is equipped with the step all around and is used for the substrate location, main part 3 still is equipped with five pairs of screw holes and is used for the fixed of layering, and two pairs of screw holes are used for the fixed of backplate 7 in addition.

The upper fixture 1 and the lower fixture 5 are both provided with cross clamping grooves for positioning the fixture, the upper fixture 1 is arranged on an upper large disc in a sputtering cavity and can move up and down and rotate so as to leave a space for mounting and dismounting the fixture, the lower fixture 5 is fixed on a lower large disc by screws, and a central counter bore and the cross clamping grooves of the fixtures are both subjected to 45-degree chamfering treatment, so that the fixture can be smoothly mounted and dismounted; the end heads of the upper terminal 2 and the lower terminal 4 are chamfered at 45 degrees, so that the fixture can be assembled and disassembled smoothly; the main body 3 adopts a hollow design and is provided with 4 chip mounting positions which are vertically arranged, and the peripheries of the front and back surfaces of the chip mounting positions are chamfered by 45 degrees, so that the influence of the jig on the thickness of the edge film layer of the sputtering substrate is reduced; steps of 0.3mm are arranged around the chip mounting position of the main body 3, so that the positioning of the substrate is facilitated; five pairs of threaded holes are formed in the sheet loading position of the main body 3 for fixing the pressing strip; four corners of the upper end and the lower end of the main body 3 are provided with two pairs of screw holes for fixing the back plate 7. The periphery of the front surface of the substrate fixing pressing strip 6 is chamfered by 45 degrees, so that the influence on the thickness of the edge film layer of the sputtering substrate is reduced. All parts need to be subjected to No. 90 carborundum sand blasting treatment, and all parts are made of temperature-resistant, acid-base-resistant and antioxidant materials such as 304 stainless steel, but are not limited to the materials, so that the acid treatment and maintenance of the jig in the later period are facilitated.

The number of the loading positions of the main body 3 is 4 in the embodiment, but can be modified according to actual requirements. Finally, it should be understood that the above description is only exemplary of the present invention and is not intended to limit the present invention, and that any modifications, equivalents, improvements, etc. made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims (9)

1. The utility model provides a piece formula vacuum coating machine's high-efficient sputtering tool which characterized in that: the device comprises an upper clamp (1), an upper terminal (2), a main body (3), a lower terminal (4), a lower clamp (5), a substrate fixing pressing strip (6) and a back plate (7); the upper fixture (1) is connected with an upper terminal (2); the lower fixture (5) is connected with the lower terminal (4); the upper terminal (2) and the lower terminal (4) are both provided with a clamping groove and a through hole, and the clamping grooves are connected with the main body (3); the main body (3) is provided with a chip mounting position, and steps are arranged around the chip mounting position; a hole is arranged on the chip mounting position of the main body (3) and is connected with a substrate fixing pressing strip (6); holes are formed in the upper end and the lower end of the main body (3) and are connected with a back plate (7) for fixing.

2. The efficient sputtering jig of the chip vacuum coater according to claim 1, wherein the upper fixture (1) and the lower fixture (5) are provided with cross slots, and the central counter bore and the cross slots of the fixtures are chamfered at 45 degrees.

3. The efficient sputtering jig of the chip vacuum coater according to claim 1, wherein the ends of the upper terminal (2) and the lower terminal (4) are chamfered at an angle of 45 °.

4. The efficient sputtering jig of the chip vacuum coater according to claim 1, wherein the main body (3) has 4 chip loading positions arranged vertically, and the peripheries of the front and back surfaces of the chip loading positions are chamfered by 45 degrees.

5. The efficient sputtering jig of the sheet type vacuum coating machine according to claim 1, characterized in that steps of 0.3mm are further arranged around the sheet loading position of the main body (3).

6. The efficient sputtering jig of the chip vacuum coater according to claim 1, wherein the holes on the chip loading position of the main body (3) are threaded holes.

7. The efficient sputtering jig of the chip vacuum coater according to claim 1, wherein the holes at the upper end and the lower end of the main body (3) are screw holes.

8. The efficient sputtering jig of the chip vacuum coater according to claim 1, wherein the periphery of the front surface of the substrate fixing bead (6) is chamfered by 45 degrees.

9. The efficient sputtering jig of the sheet type vacuum coating machine according to claim 1, wherein all of the jigs are subjected to emery blasting treatment of 90 degrees.

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