CN114571376A - Shielding jig for non-sandblasting area of target and using method thereof - Google Patents

Shielding jig for non-sandblasting area of target and using method thereof Download PDF

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Publication number
CN114571376A
CN114571376A CN202210285480.5A CN202210285480A CN114571376A CN 114571376 A CN114571376 A CN 114571376A CN 202210285480 A CN202210285480 A CN 202210285480A CN 114571376 A CN114571376 A CN 114571376A
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China
Prior art keywords
shielding
target
sandblasting
area
plate
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CN202210285480.5A
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Chinese (zh)
Inventor
姚力军
潘杰
王学泽
李闯
范文新
周伟君
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Wuhan Jiangfeng Electronic Materials Co ltd
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Wuhan Jiangfeng Electronic Materials Co ltd
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Priority to CN202210285480.5A priority Critical patent/CN114571376A/en
Publication of CN114571376A publication Critical patent/CN114571376A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C9/00Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/10Nuclear fusion reactors

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Abstract

The invention provides a shielding jig for a target non-sandblasting area and a using method thereof, wherein the shielding jig comprises a shielding assembly and a pressing plate, the shielding assembly is arranged on the surface of the target non-sandblasting area and used for shielding the non-sandblasting area, and the shielding assembly is formed by splicing a plurality of polygonal shielding plates; the pressing plate is arranged on the surface of the shielding component and used for fixing the shielding component. The invention provides a shielding jig for a non-sandblasting area of a target, which is used for shielding and protecting the non-sandblasting area of the target, the shielding jig is placed on the surface of the non-sandblasting area to effectively shield and protect the non-sandblasting part, so that the target after sandblasting reaches the use standard, the quality and yield of products are effectively improved, the large-scale production is facilitated, and the industrial application prospect is good.

Description

Shielding jig for target non-sandblasting area and use method thereof
Technical Field
The invention belongs to the technical field of target processing, and relates to a shielding jig for a non-sandblasting area of a target and a using method thereof.
Background
The target material, which is a target material for high-speed energetic particle bombardment, usually needs a sputtering source for performing magnetron sputtering, multi-arc ion plating or other types of coating systems to sputter various functional films on a substrate under appropriate process conditions. The material can be divided into metal target, ceramic target, alloy target and the like. Various types of sputtered thin film materials are widely used in the fields of semiconductor integrated circuits (VLSI), optical disks, flat panel displays, and surface coatings for workpieces. Since the 90 s of the 20 th century, the synchronous development of sputtering targets and sputtering technology greatly meets the development requirements of various novel electronic components. For example, in the manufacturing process of a semiconductor integrated circuit, an aluminum film wiring is replaced with a copper conductor film having a lower resistivity: in the flat panel display industry, the synchronous development of various display technologies (such as LCD, PDP, OLED, and FED, etc.) has been used in the manufacture of computer and computer displays; in the information storage industry, the storage capacity of magnetic memories is increasing, new magneto-optical recording materials are being developed, which place ever-increasing demands on the quality of the sputtering target required, and the number of demands is increasing year by year.
The sputtering of the target material is that an orthogonal magnetic field and an electric field are added between a target pole (cathode) and an anode to be sputtered, required inert gas (usually Ar gas) is filled in a high-vacuum chamber, a permanent magnet forms a 250-350 gauss magnetic field on the surface of the target material, and the orthogonal electromagnetic field is formed by the permanent magnet and the high-voltage electric field. Under the action of electric field, Ar gas is ionized into positive ions and electrons, a certain negative high voltage is added on the target, the electrons emitted from the target electrode are subjected to the action of a magnetic field and the ionization probability of working gas is increased, high-density plasma is formed near the cathode, Ar ions accelerate to fly to the target surface under the action of Lorentz force, and bombard the target surface at a high speed, so that atoms sputtered from the target are separated from the target surface by high kinetic energy to fly to a substrate to deposit and form a film according to the momentum conversion principle. Magnetron sputtering is generally divided into two categories: direct current sputtering and radio frequency sputtering, wherein the direct current sputtering device has simple principle, and the speed is fast when metal is sputtered. The application range of the radio frequency sputtering is wider, and the radio frequency sputtering can be used for sputtering conductive materials, non-conductive materials and preparing compound materials such as oxides, nitrides, carbides and the like by reactive sputtering. If the frequency of the radio frequency is increased, microwave plasma sputtering is performed, and electron cyclotron resonance (E microwave plasma sputtering) is commonly used today.
In the current target preparation, before sputtering the target, sand blasting is needed to make the target obtain better mechanical properties. Sandblasting is a process of cleaning and roughening the surface of a substrate by the impact action of a high-velocity stream of sand. Compressed air is used as power to form a high-speed spray beam to spray materials (copper ore sand, quartz sand, carborundum, iron sand and Hainan sand) to the surface of a workpiece to be treated at a high speed, so that the appearance or the shape of the outer surface of the workpiece is changed, and the surface of the workpiece obtains certain cleanliness and different roughness due to the impact and cutting action of an abrasive on the surface of the workpiece, so that the mechanical property of the surface of the workpiece is improved, the fatigue resistance of the workpiece is improved, the adhesive force between the workpiece and a coating is increased, the durability of a coating film is prolonged, and the leveling and decoration of a coating are facilitated. Sandblasting is currently mainly applied in the following areas:
(1) the workpiece is coated and the workpiece is bonded and pretreated, sand blasting can remove all dirt such as rusts and the like on the surface of the workpiece, an important basic pattern (generally called a rough surface) is established on the surface of the workpiece, and the roughness of different degrees can be achieved by exchanging abrasive materials with different granularities, such as the abrasive material of a flying abrasive grinding tool, so that the binding force of the workpiece with paint and plating materials is greatly improved. Or the bonding piece is bonded more firmly and has better quality.
(2) The rough surface of the casting part and the workpiece after heat treatment can be cleaned by polishing and sand blasting, all dirt (such as oxide skin, oil stain and other residues) on the surfaces of the casting part and the workpiece after heat treatment can be cleaned, the surface of the workpiece is polished to improve the smoothness of the workpiece, the workpiece can be exposed to uniform and consistent metal true color, and the appearance of the workpiece is more attractive and beautiful.
(3) The burr cleaning and surface beautifying sand blasting of the machined part can clean the tiny burrs on the surface of the workpiece, make the surface of the workpiece smoother, eliminate the harm of the burrs and improve the grade of the workpiece. And the sand blasting can form a very small round angle at the junction of the surfaces of the workpieces, so that the workpieces are more attractive and precise.
(4) The mechanical performance of the part is improved, and after sand blasting, the mechanical part can generate uniform and fine concave-convex surfaces on the surface of the part, so that lubricating oil is stored, the lubricating condition is improved, noise is reduced, and the service life of the machine is prolonged.
(5) Polishing for some special purpose workpieces, the sand blasting can realize different reflection or matte at will. Such as polishing of stainless steel workpieces and plastics, polishing of jade articles, surface matting of wooden furniture, pattern on the surface of frosted glass, and roughening of the surface of cloth.
The pretreatment is required before the sandblasting, and the sandblasting pretreatment is a treatment to be performed on the surface of the workpiece before the workpiece is sprayed and the protective layer is sprayed. The pretreatment quality of the sand blasting process affects the adhesion and appearance of the coating, and the moisture resistance and corrosion resistance of the coating. The pretreatment work is not good, and the rust still continues to spread under the coating, so that the coating is flaked and falls off. The surface after carefully cleaning and the workpiece after generally simple cleaning are coated by a insolation method, and the service life of the workpiece can be different by 4-5 times. Surface cleaning methods are numerous, but the most commonly accepted methods are: solvent cleaning, acid cleaning, hand tools, power tools.
At present, due to the special properties of part of the target material, when sand blasting is carried out, only the part of the sputtering surface needs to be subjected to sand blasting, and one part of the sputtering surface does not need to be subjected to sand blasting, namely the part needs to be protected to be prevented from being influenced by sand blasting, so that the target material cannot be scrapped in the sand blasting process. In the prior art, the protection measures adopted for the non-sandblasting surface are realized by sticking an adhesive tape, but the adhesive tape adopted in the existing shielding process is damaged in the sandblasting process due to the limitation of the strength of the adhesive tape, so that the sputtering surface which does not need sandblasting is damaged, and the target material cannot be protected by the shielding measures; further, during the shielding operation, the width of the tape is small, so that the region to be shielded cannot be completely shielded during the shielding operation, and finally, the target material subjected to sand blasting cannot reach the standard and cannot be used.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a shielding jig for a non-sand blasting area of a target material and a using method thereof, which are used for shielding and protecting the non-sand blasting area of the target material, the shielding jig is placed on the surface of the non-sand blasting area to effectively shield and protect the non-sand blasting part, so that the target material subjected to sand blasting reaches the use standard, the quality and yield of products are effectively improved, the large-scale production is facilitated, and the shielding jig has a good industrial application prospect.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the invention provides a shielding jig for a non-sandblasting area of a target, which comprises a shielding assembly and a pressing plate, wherein the shielding assembly is arranged on the surface of the non-sandblasting area of the target and used for shielding the non-sandblasting area, and the shielding assembly is formed by splicing a plurality of polygonal shielding plates; the pressing plate is arranged on the surface of the shielding component and used for fixing the shielding component.
The invention provides a shielding jig for a non-sandblasting area of a target, which is used for shielding and protecting the non-sandblasting area of the target, the shielding jig is placed on the surface of the non-sandblasting area to effectively shield and protect the non-sandblasting part, so that the target after sandblasting reaches the use standard, the quality and yield of products are effectively improved, the large-scale production is facilitated, and the industrial application prospect is good. In addition, the shielding assembly is formed by splicing a plurality of polygonal shielding plates, is used after being installed, and is convenient to store after being detached.
As a preferable technical scheme of the invention, at least one splicing piece is arranged at the edge or the vertex of the shielding plate, the splicing pieces of different shielding plates are of complementary structures, and the shielding plates are fixed in the horizontal direction by mutual embedding of the connecting pieces.
In the invention, the shielding component is of a powder structure and is formed by splicing a plurality of shielding plates, so that the shielding component is convenient to disassemble, take and store. In order to further improve the shielding effect, the gap between the shielding plates needs to be reduced, and the shielding plates are prevented from shifting in the horizontal direction due to vibration in the sand blasting process, so that the splicing pieces are arranged at the edges or the vertexes of the shielding plates, are part of the shielding plates and are of an integral structure, and the connecting pieces are better connected and fixed through the splicing pieces.
It should be noted that the structure of the connecting member is not specifically required or limited, but preferably adopts a male-female complementary structure, and the shielding plates are embedded or inserted into each other in a mortise-tenon insertion or jigsaw splicing manner, so that the shielding plates form a relatively stable whole. The advantage of adopting above structure lies in: on one hand, the gap between the shielding plates is reduced; on the other hand, the horizontal displacement of the shielding plate in the sand blasting process is effectively inhibited, and the vertical displacement is limited by the pressing plate; the movement of the shielding assembly is limited from the horizontal direction and the vertical direction through the connecting piece and the pressing plate, and the shielding protection effect is improved.
As a preferable technical solution of the present invention, the shielding member has a rectangular structure.
Preferably, a protective layer is disposed between the masking element and the non-abrasive blast zone surface.
Preferably, the size of the shielding component is larger than that of the non-sandblasting area of the target.
The protective layer is arranged between the shielding assembly and the surface of the non-sand blasting area and is mainly used for preventing the shielding assembly from crushing or scratching the surface of the target material.
As a preferred technical scheme of the present invention, four corners of the bottom surface of the pressing plate are respectively provided with a supporting rod, two ends of the supporting rod are respectively butted with the bottom surface of the pressing plate and the surface of the target material, and the shielding assembly is clamped between the pressing plate and the target material.
As a preferred technical scheme of the present invention, a fixing member is disposed at one end of the supporting rod close to the surface of the target material, and the pressing plate is fixed by the fixing member.
Preferably, the fixing member is a suction cup.
In order to better fix the shielding assembly, the pressing plate is arranged on the shielding assembly, the shielding assembly is pressed and fixed through weight, in addition, the sucking disc is arranged at one end of the supporting rod and is adsorbed on the surface of the target through the sucking disc, and the pressing force of the pressing plate is further improved, so that the shielding assembly is more stably fixed in a non-sand blasting area of the target.
As a preferred technical scheme of the invention, the supporting rod is of an axially-through hollow structure, one end of a cavity of the supporting rod is communicated with the fixing piece, the other end of the cavity of the supporting rod is connected with an air extraction device, and the air extraction device is used for extracting air in the fixing piece and pressing the pressing plate under the action of air pressure.
According to the invention, the air exhaust device is additionally arranged on the basis of the sucker, and the suction force of the sucker is combined with the air exhaust of the air exhaust device, so that the pressure in the sucker is further reduced, the sucker is tightly adsorbed on the surface of the target material, the device cannot fall off in the sand blasting process, and the sand blasting quality of the target material is further ensured. The invention is not particularly limited and is not limited to the type or configuration of the suction device as defined, but the suction device used may be a syringe or similar piston-type suction device due to the small internal volume of the suction cup.
As a preferable technical solution of the present invention, the shielding assembly is formed by splicing a first shielding plate and a second shielding plate, the first shielding plate and the second shielding plate are rectangles with the same size, and the shielding assembly with a rectangular structure is formed after splicing.
A notch is formed in one side edge of the first shielding plate, a planar protrusion is formed by extending one side edge of the second shielding plate, and the protrusion of the second shielding plate is embedded into the notch of the first shielding plate.
Preferably, the convex shape is the same as the notch shape, and all are major arcs.
As a preferable technical scheme of the invention, the shielding assembly is formed by splicing four shielding plates, and one vertex of the four shielding plates is intersected with a central point.
The edges of two sides of the central point of the four shielding plates are respectively provided with a notch and a bulge, wherein the bulge of one shielding plate is embedded into the notch of the other adjacent shielding plate, and the shielding components with rectangular structures are sequentially spliced around the central point in the clockwise or anticlockwise direction.
As a preferable aspect of the present invention, the shape of the shielding plate is rectangular or triangular.
In the present invention, due to the existence of the connecting member, the shielding plates cannot be spliced in the horizontal direction, but are spliced in the vertical direction.
In a second aspect, the present invention provides a method for using the shielding jig for the non-sandblasted region of the target according to the first aspect, wherein the method for using the shielding jig comprises:
and splicing a plurality of shielding plates to form a shielding assembly, covering the surface of the non-sand blasting area of the target material, shielding the non-sand blasting area, pressing a pressing plate on the shielding assembly, and performing sand blasting on the sand blasting area of the target material.
Compared with the prior art, the invention has the beneficial effects that:
the invention provides a shielding jig for a non-sandblasting area of a target, which is used for shielding and protecting the non-sandblasting area of the target, the shielding jig is placed on the surface of the non-sandblasting area to effectively shield and protect the non-sandblasting part, so that the target after sandblasting reaches the use standard, the quality and yield of products are effectively improved, the large-scale production is facilitated, and the industrial application prospect is good. In addition, the shielding assembly is formed by splicing a plurality of polygonal shielding plates, is used after being installed, and is convenient to store after being detached.
Drawings
Fig. 1 is a schematic structural diagram of a shielding jig according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of a masking assembly according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a masking assembly according to an embodiment of the present invention;
FIG. 4 is a schematic structural view of a shutter assembly according to an embodiment of the present invention;
wherein, 1-target material; 2-non-sandblasting area; 3-a shutter assembly; 4, pressing a plate; 5-a fixing piece; 6-an air extracting device; 7-a shielding plate; 8-splicing pieces; 9-a first shield plate; 10-second shield plate.
Detailed Description
It is to be understood that in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be taken as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
It should be noted that, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "disposed," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The technical solution of the present invention is further explained by the following embodiments.
In a specific embodiment, the present invention provides a shielding jig for a non-sandblasting area 2 of a target 1, as shown in fig. 1, the shielding jig includes a shielding component 3 and a pressing plate 4, the shielding component 3 is disposed on the surface of the non-sandblasting area 2 of the target 1 for shielding the non-sandblasting area 2, and the shielding component 3 is formed by splicing a plurality of polygonal shielding plates 7; the pressing plate 4 is arranged on the surface of the shielding component 3 and used for fixing the shielding component 3.
The invention provides a shielding jig for a non-sand blasting area 2 of a target 1, which is used for shielding and protecting the non-sand blasting area 2 of the target 1, placing the shielding jig on the surface of the non-sand blasting area 2 and effectively shielding and protecting the non-sand blasting part, so that the target 1 after sand blasting reaches the use standard, the quality and yield of products are effectively improved, the large-scale production is facilitated, and the industrial application prospect is good. In addition, the shielding component 3 is formed by splicing a plurality of polygonal shielding plates 7, and is used after being installed and is convenient to store after being detached.
Furthermore, at least one splicing piece 8 is arranged at the edge or the vertex of the shielding plate 7, the splicing pieces 8 of different shielding plates 7 are of complementary structures, and the shielding plates 7 are fixed in the horizontal direction through mutual embedding of the connecting pieces.
In the invention, the shielding component 3 is of a powder structure and is formed by splicing a plurality of shielding plates 7, so that the shielding component is convenient to disassemble, take and store. In order to further improve the shielding effect, the gap between the shielding plates 7 needs to be reduced, and the shielding plates 7 are prevented from horizontally displacing due to vibration in the sand blasting process, so that the splicing pieces 8 are arranged at the edges or the vertexes of the shielding plates 7, the splicing pieces 8 are part of the shielding plates 7 and are of an integral structure, and all connecting pieces are better connected and fixed through the splicing pieces 8.
It should be noted that, the structure of the connecting member is not particularly limited, but preferably, the connecting member adopts a male-female complementary structure, and the connecting members are embedded or inserted into each other in a mortise-tenon joint or a jigsaw puzzle joint manner (as shown in fig. 2, 3 and 4), so that each shielding plate 7 forms a relatively stable whole. The advantage of adopting above structure lies in: on the one hand, the gap between the shielding plates 7 is reduced; on the other hand, the horizontal displacement of the shielding plate 7 in the sand blasting process is effectively inhibited, and the vertical displacement is limited by the pressing plate 4; the movement of the shielding component 3 is limited from the horizontal direction and the vertical direction through the connecting piece and the pressing plate 4, so that the shielding protection effect is improved.
Further, the shielding component 3 has a rectangular structure.
Further, a protective layer is arranged between the shielding component 3 and the surface of the non-sandblasting area 2.
Further, the size of the shielding component 3 is larger than the size of the non-sandblasting area 2 of the target 1.
The protective layer is arranged between the shielding component 3 and the surface of the non-sand blasting area 2, and is mainly used for preventing the shielding component 3 from generating pressure injury or scratch on the surface of the target 1.
Furthermore, four corners of the bottom surface of the pressing plate 4 are respectively provided with a supporting rod, two ends of each supporting rod are respectively butted with the bottom surface of the pressing plate 4 and the surface of the target 1, and the shielding assembly 3 is clamped between the pressing plate 4 and the target 1.
Furthermore, a fixing part 5 is arranged at one end of the support rod close to the surface of the target 1, and the pressing plate 4 is fixed through the fixing part 5.
Further, the fixing member 5 is a suction cup.
In order to better fix the shielding component 3, the pressing plate 4 is arranged on the shielding component 3, the shielding component 3 is pressed and fixed through weight, in addition, the sucking disc is arranged at one end of the supporting rod and is adsorbed on the surface of the target material 1 through the sucking disc, the pressing force of the pressing plate 4 is further improved, and the shielding component 3 is more stably fixed on the non-sand blasting area 2 of the target material 1.
Furthermore, the supporting rod is of a hollow structure which is axially communicated, one end of the supporting rod cavity is communicated with the fixing piece 5, the other end of the supporting rod cavity is connected into the air extracting device 6, and the air extracting device 6 is used for extracting air in the fixing piece 5 and pressing the pressing plate 4 tightly under the action of air pressure.
According to the invention, the air exhaust device 6 is additionally arranged on the basis of the sucker, and the suction force of the sucker is combined with the air exhaust of the air exhaust device 6, so that the pressure in the sucker is further reduced, the sucker is tightly adsorbed on the surface of the target material 1, the device cannot fall off in the sand blasting process, and the sand blasting quality of the target material 1 is further ensured. The invention is not particularly required and limited with respect to the type and construction of the suction device 6 defined, but the suction device 6 used may be a syringe or similar piston-type suction device, since the suction cup has a small internal space.
Further, as shown in fig. 2, the shielding assembly 3 is formed by splicing a first shielding plate 9 and a second shielding plate 10, wherein the first shielding plate 9 and the second shielding plate 10 are rectangles with the same size, and the shielding assembly 3 with a rectangular structure is formed after splicing.
A notch is arranged at one side edge of the first shielding plate 9, a planar protrusion is formed by extending the edge of one side of the second shielding plate 10, and the protrusion of the second shielding plate 10 is embedded into the notch of the first shielding plate 9.
Further, the shape of the bulge is the same as that of the notch, and the bulge and the notch are both major arcs.
Further, the shielding assembly 3 is formed by splicing four shielding plates 7, and one vertex of each of the four shielding plates 7 is intersected at a central point.
The edges of two sides of the central point of the four shielding plates 7 are respectively provided with a notch and a bulge, wherein the bulge of one shielding plate 7 is embedded into the notch of the other adjacent shielding plate 7, and the shielding components 3 with rectangular structures are sequentially spliced around the central point according to the clockwise or anticlockwise direction.
Further, the shape of the shielding plate 7 is rectangular (as shown in fig. 4) or triangular (as shown in fig. 3).
It should be noted that, in the present invention, due to the existence of the connecting member, the shielding plates 7 cannot be spliced in the horizontal direction, but are spliced in the vertical direction.
In another embodiment, the present invention provides a method for using the shielding jig for the non-sandblasting area 2 of the target 1, wherein the method comprises:
a plurality of shielding plates 7 are spliced to form a shielding assembly 3, the shielding assembly is covered on the surface of the non-sand blasting area 2 of the target material 1 to shield the non-sand blasting area 2, a pressing plate 4 is pressed on the shielding assembly 3, and sand blasting is carried out on the sand blasting area of the target material 1.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.

Claims (10)

1. A shielding jig for a non-sand blasting area of a target is characterized by comprising a shielding assembly and a pressing plate, wherein the shielding assembly is arranged on the surface of the non-sand blasting area of the target and used for shielding the non-sand blasting area, and the shielding assembly is formed by splicing a plurality of polygonal shielding plates; the pressing plate is arranged on the surface of the shielding component and used for fixing the shielding component.
2. The shielding jig for the non-sandblasting area of the target material as claimed in claim 1, wherein at least one splicing piece is disposed at the edge or the vertex of the shielding plate, the splicing pieces of different shielding plates are of complementary structures, and the horizontal fixation between the shielding plates is realized by mutual embedding of the connecting pieces.
3. The shielding jig for the non-sandblasting region of a target according to claim 1 or 2, wherein the shielding member has a rectangular structure;
preferably, a protective layer is arranged between the shielding component and the surface of the non-sand blasting area;
preferably, the size of the shielding component is larger than that of the non-sandblasting area of the target.
4. The shielding jig for the non-sandblasted region of the target according to any one of claims 1 to 3, wherein a support rod is disposed at each of four corners of the bottom surface of the pressing plate, two ends of the support rod are respectively abutted to the bottom surface of the pressing plate and the surface of the target, and the shielding assembly is sandwiched between the pressing plate and the target.
5. The shielding jig for the non-sandblasting area of the target according to any one of claims 1 to 4, wherein a fixing member is disposed at one end of the supporting rod close to the surface of the target, and the pressing plate is fixed by the fixing member;
preferably, the fixing member is a suction cup.
6. The shielding jig for the non-sandblasting area of the target according to any one of claims 1 to 5, wherein the supporting rod is a hollow structure with an axial through, one end of the supporting rod cavity is communicated with the fixing member, and the other end of the supporting rod cavity is connected to an air extractor, and the air extractor is used for sucking air in the fixing member and pressing the pressing plate under the action of air pressure.
7. The shielding jig for the non-sandblasting area of a target material as claimed in claim 2, wherein the shielding assembly is formed by splicing a first shielding plate and a second shielding plate, the first shielding plate and the second shielding plate are rectangles with the same size, and the shielding assembly is formed into a rectangular structure after splicing;
a notch is arranged at one side edge of the first shielding plate, a planar bulge is formed by extending one side edge of the second shielding plate, and the bulge of the second shielding plate is embedded into the notch of the first shielding plate;
preferably, the convex shape is the same as the notch shape, and all are major arcs.
8. The shielding jig for the target non-sandblasting region according to claim 2, wherein the shielding assembly is formed by splicing four shielding plates, wherein one of the vertexes of the four shielding plates is intersected with a central point;
the edges of two sides of the central point of the four shielding plates are respectively provided with a notch and a bulge, wherein the bulge of one shielding plate is embedded into the notch of the other adjacent shielding plate, and the shielding components with rectangular structures are sequentially spliced around the central point in the clockwise or anticlockwise direction.
9. The shielding jig for the non-sandblasting region of a target according to claim 8, wherein the shape of the shielding plate is rectangular or triangular.
10. The use method of the shielding jig for the target non-sandblasting area according to any one of claims 1 to 9, characterized in that the use method comprises:
and splicing a plurality of shielding plates to form a shielding assembly, covering the surface of the non-sand blasting area of the target material, shielding the non-sand blasting area, pressing a pressing plate on the shielding assembly, and performing sand blasting on the sand blasting area of the target material.
CN202210285480.5A 2022-03-21 2022-03-21 Shielding jig for non-sandblasting area of target and using method thereof Pending CN114571376A (en)

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CN202210285480.5A CN114571376A (en) 2022-03-21 2022-03-21 Shielding jig for non-sandblasting area of target and using method thereof

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CN202210285480.5A CN114571376A (en) 2022-03-21 2022-03-21 Shielding jig for non-sandblasting area of target and using method thereof

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CN114571376A true CN114571376A (en) 2022-06-03

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CN106541338A (en) * 2015-09-22 2017-03-29 宁波江丰电子材料股份有限公司 A kind of masking methods of workpiece
US20180169834A1 (en) * 2016-12-19 2018-06-21 Shawcor Ltd. Internal weld blasting
CN108312077A (en) * 2018-04-13 2018-07-24 浙江海洋大学 Recovery device for sand blasting
CN208106084U (en) * 2018-04-19 2018-11-16 内蒙古寅岗建设集团有限公司 A kind of assembly concrete enclosure wall for construction site
CN209778982U (en) * 2018-12-18 2019-12-13 广东生波尔光电技术有限公司 Sputtering anode cover and sputtering device
CN211361908U (en) * 2019-12-04 2020-08-28 宁波江丰电子材料股份有限公司 Sand blasting shielding jig for target material
CN213731233U (en) * 2020-12-02 2021-07-20 河南东微电子材料有限公司 Sand blasting shielding jig for target material
CN215148218U (en) * 2021-04-09 2021-12-14 合肥江丰电子材料有限公司 Target shielding jig

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106541338A (en) * 2015-09-22 2017-03-29 宁波江丰电子材料股份有限公司 A kind of masking methods of workpiece
US20180169834A1 (en) * 2016-12-19 2018-06-21 Shawcor Ltd. Internal weld blasting
CN108312077A (en) * 2018-04-13 2018-07-24 浙江海洋大学 Recovery device for sand blasting
CN208106084U (en) * 2018-04-19 2018-11-16 内蒙古寅岗建设集团有限公司 A kind of assembly concrete enclosure wall for construction site
CN209778982U (en) * 2018-12-18 2019-12-13 广东生波尔光电技术有限公司 Sputtering anode cover and sputtering device
CN211361908U (en) * 2019-12-04 2020-08-28 宁波江丰电子材料股份有限公司 Sand blasting shielding jig for target material
CN213731233U (en) * 2020-12-02 2021-07-20 河南东微电子材料有限公司 Sand blasting shielding jig for target material
CN215148218U (en) * 2021-04-09 2021-12-14 合肥江丰电子材料有限公司 Target shielding jig

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