CN214992007U - Crystal pulling speed control system for high-frequency induction single crystal furnace - Google Patents
Crystal pulling speed control system for high-frequency induction single crystal furnace Download PDFInfo
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- CN214992007U CN214992007U CN202121345474.1U CN202121345474U CN214992007U CN 214992007 U CN214992007 U CN 214992007U CN 202121345474 U CN202121345474 U CN 202121345474U CN 214992007 U CN214992007 U CN 214992007U
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- single crystal
- control system
- frequency induction
- threaded rod
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Abstract
The utility model discloses a crystal pulling speed control system for a high-frequency induction single crystal furnace, which belongs to the technical field of single crystal furnace matching and comprises a mounting frame and a fixing frame, wherein lifting plates are fixedly arranged on both sides of the mounting frame, the lifting plates are clamped inside the fixing frame, a driving motor is fixedly arranged at the bottom of the fixing frame, a threaded pipe is fixedly arranged at the output end of the driving motor, the inner thread of the threaded pipe is connected with a threaded rod, the lifting plates are rotatably arranged on the threaded rod, a threaded sleeve is fixedly arranged at the middle position of the upper end of the fixing frame, the upper end of the threaded rod is in threaded connection with the inner part of the threaded sleeve, through installing a speed inductor and a pressure inductor, when in use, the speed inductor senses the moving speed of the lifting plates, the pressure inductor senses the moving distance, the control is convenient, and through finely adjusting the motor and the driving motor, the accurate control of the moving effect of a pull rod is convenient, the operation is convenient.
Description
Technical Field
The utility model relates to a crystal pulling control device, in particular to a crystal pulling speed control system for a high-frequency induction single crystal furnace, belonging to the technical field of single crystal furnace matching.
Background
The monocrystalline silicon has the physical properties of metalloid, has weaker conductivity, the conductivity of the monocrystalline silicon increases along with the rise of the temperature, and has remarkable semiconductivity, the monocrystalline furnace is equipment for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas environment and growing dislocation-free monocrystalline by using a Czochralski method, when the equipment is used, crystal pulling is needed, the speed of the crystal pulling is one of important factors influencing the crystal pulling effect, most of modern crystal pulling modes adopt a walking motor to drive a pull rod to move so as to complete crystal pulling operation, but when the equipment is used, the regulation is inconvenient according to the speed of the crystal pulling, the use is inconvenient, and the speed and the distance of the crystal pulling are inconvenient to control.
SUMMERY OF THE UTILITY MODEL
An object of the present invention is to provide a crystal pulling rate control system for a high frequency induction single crystal furnace, which can facilitate control of the pulling rate of a pulling rod and detection of the distance between pulling and pulling.
The utility model discloses a following technical scheme realizes above-mentioned purpose, a crystal pulling speed control system for high frequency induction single crystal growing furnace, including mounting bracket and mount, the equal fixed mounting in both sides of mounting bracket has the lifter plate, the lifter plate is in the inside of mount, the bottom fixed mounting of mount has driving motor, just driving motor's output fixed mounting has the screwed pipe, the inside threaded connection of screwed pipe has the threaded rod, just the lifter plate rotates to be installed on the threaded rod, the upper end intermediate position fixed mounting of mount has the thread bush, the upper end threaded connection of threaded rod is in the inside of thread bush.
Preferably, for the convenience of finely tuning, the both sides slip joint of mount has the crane, just the crane is U type structure, the inside upper end fixed mounting of crane has the fine setting motor, the output of fine setting motor with the upper end looks fixed mounting of threaded rod, the upper end thread density of threaded rod is greater than the thread density of threaded rod lower extreme.
Preferably, in order to facilitate the lifting frame to lift and slide, sliding grooves are formed in two sides of the outer surface of the fixing frame, and the lifting frame is connected to the fixing frame in a sliding and clamping mode through the sliding grooves.
Preferably, in order to sense the moving speed of the lifting plate, a speed sensor is rotatably installed at one side of the lifting plate, and one side of the speed sensor is in contact with one side of the inner wall of the fixing frame.
Preferably, in order to improve the guidance of the lifting plate during lifting, a guide rod is inserted into one side of the lifting plate, and the upper end of the guide rod is fixedly mounted on one side of the upper end of the fixing frame.
Preferably, in order to facilitate sensing of the lifting distance of the lifting plate, a pressure sensor is fixedly mounted on the upper surface of the lifting plate, a spring is sleeved on the guide rod, the lower end of the spring is fixedly connected with the pressure sensor, and the upper end of the spring is fixedly connected with the upper end of the fixing frame.
Preferably, in order to facilitate the electric control of the utility model, a controller is fixedly arranged on one side of the fixing frame.
The utility model has the advantages that: the utility model discloses an install speed inductor and pressure sensors, when using, speed inductor senses the speed that the lifter plate removed, and the distance that pressure sensors response removed is convenient for control, and through trimmer motors and driving motor, is convenient for carry out accurate control to the removal effect of drawing the stick, is convenient for operate.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic view of the overall structure of the present invention.
Fig. 3 is a schematic view of the structure of the middle part of the present invention.
Fig. 4 is a schematic structural view of the middle lifting plate of the present invention.
Fig. 5 is a diagram of the electrical connection relationship of the present invention.
In the figure: 1. mounting bracket, 2, mount, 3, lifter plate, 4, driving motor, 5, screwed pipe, 6, threaded rod, 7, thread bush, 8, crane, 9, fine setting motor, 10, spout, 11, speed inductor, 12, guide bar, 13, pressure sensor, 14, spring, 15, controller.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Please refer to fig. 1-5, a crystal pulling speed control system for a high-frequency induction single crystal furnace comprises an installation frame 1 and a fixed frame 2, wherein lifting plates 3 are fixedly installed on two sides of the installation frame 1, the lifting plates 3 are clamped inside the fixed frame 2, a driving motor 4 is fixedly installed at the bottom of the fixed frame 2, a threaded pipe 5 is fixedly installed at the output end of the driving motor 4, the internal thread of the threaded pipe 5 is connected with a threaded rod 6, the lifting plates 3 are rotatably installed on the threaded rod 6, a threaded sleeve 7 is fixedly installed at the middle position of the upper end of the fixed frame 2, the upper end of the threaded rod 6 is in the threaded sleeve 7 in a threaded manner, the driving motor 4 drives the threaded sleeve 7 to rotate, the threaded rod 6 can conveniently move inside the threaded sleeve 7, the lifting plates 3 can be conveniently lifted and moved, and crystal pulling is convenient.
As a technical optimization scheme, as shown in fig. 2, mount 2's both sides slip joint has crane 8, and crane 8 is U type structure, crane 8's inside upper end fixed mounting has fine setting motor 9, fine setting motor 9's the output and the upper end looks fixed mounting of threaded rod 6, the upper end screw thread density of threaded rod 6 is greater than the screw thread density of threaded rod 6 lower extreme, spout 10 has all been seted up to mount 2's surface both sides, and crane 8 passes through spout 10 slip joint on mount 2, through fine setting motor 9, be convenient for highly finely tune lifter plate 3, conveniently adjust, be convenient for control.
As a technical optimization scheme of the utility model, as shown in fig. 4, one side of lifter plate 3 is rotated and is installed speed inductor 11, and one side of speed inductor 11 contacts with inner wall one side of mount 2, when lifter plate 3 goes up and down, speed inductor 11 rolls along the inner wall of mount 2, is convenient for detect the speed that lifter plate 3 removed.
As a technical optimization scheme of the utility model, as shown in fig. 3, one side of lifter plate 3 is pegged graft and is had guide bar 12, and the upper end fixed mounting of guide bar 12 is in upper end one side of mount 2, the last fixed surface of lifter plate 3 installs pressure sensors 13, and spring 14 has been cup jointed on the guide bar 12, the lower extreme and the pressure sensors 13 looks fixed connection of spring 14, the upper end of spring 14 and the upper end looks fixed connection of mount 2, one side fixed mounting of mount 2 has controller 15, when using, respond to the position of lifter plate 3 and the speed when removing through speed sensors 11 and pressure sensors 13, and transmit sensing signal to controller 15, be convenient for controller 15 adjusts driving motor 4 and trimmer motor 9 in real time, be convenient for use, conveniently control.
When the utility model is used, the external pull rod is fixed on the mounting frame 1, the mounting frame 2 is fixedly connected with the external equipment, when the lifting is carried out, the threaded pipe 5 is driven to rotate by the driving motor 4, the threaded rod 6 is lifted in the threaded pipe 5, and the lifting plate 3 is lifted, and when the lifting plate 3 is moved, the speed sensor 11 at one side of the lifting plate 3 is rotated, so that the moving speed of the lifting plate 3 is convenient to monitor, and when the lifting plate 3 is moved, the lifting plate 3 presses the spring 14, so that the spring 14 is compressed, and the pressure sensor 13 is pressed, and the moving distance of the lifting plate 3 is convenient to calculate through the size of the pressed force, and the position of the lifting plate 3 and the speed during the moving are sensed by the speed sensor 11 and the pressure sensor 13, and sensing signals are transmitted to the controller 15, be convenient for controller 15 adjusts driving motor 4 and trimmer motor 9 in real time, be convenient for use, conveniently control, and when carrying out the fine setting, open trimmer motor 9, make trimmer motor 9 drive threaded rod 6 and rotate, make threaded rod 6 rotate at the inside of thread bush 7 and screwed pipe 5, and then make threaded rod 6 rise along thread bush 7, make crane 8 rise along spout 10, be convenient for finely tune for lifter plate 3, be convenient for control when pulling.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (7)
1. A crystal pulling speed control system for a high-frequency induction single crystal furnace comprises a mounting rack (1) and a fixing rack (2), and is characterized in that: the equal fixed mounting in both sides of mounting bracket (1) has lifter plate (3), lifter plate (3) joint is in the inside of mount (2), the bottom fixed mounting of mount (2) has driving motor (4), just the output fixed mounting of driving motor (4) has screwed pipe (5), the internal thread connection of screwed pipe (5) has threaded rod (6), just lifter plate (3) rotate to be installed on threaded rod (6), the upper end intermediate position fixed mounting of mount (2) has thread bush (7), the upper end threaded connection of threaded rod (6) is in the inside of thread bush (7).
2. A pull rate control system for a high frequency induction single crystal furnace as claimed in claim 1, wherein: the both sides sliding clamping of mount (2) has crane (8), just crane (8) are U type structure, the inside upper end fixed mounting of crane (8) has fine setting motor (9), the output of fine setting motor (9) with the upper end looks fixed mounting of threaded rod (6), the upper end thread density of threaded rod (6) is greater than the thread density of threaded rod (6) lower extreme.
3. A pull rate control system for a high frequency induction single crystal furnace as claimed in claim 2, wherein: the outer surface both sides of mount (2) have all been seted up spout (10), just crane (8) pass through spout (10) slip joint is in on mount (2).
4. A pull rate control system for a high frequency induction single crystal furnace as claimed in claim 1, wherein: one side of the lifting plate (3) is rotatably provided with a speed sensor (11), and one side of the speed sensor (11) is in contact with one side of the inner wall of the fixing frame (2).
5. A pull rate control system for a high frequency induction single crystal furnace as claimed in claim 1, wherein: one side of the lifting plate (3) is inserted with a guide rod (12), and the upper end of the guide rod (12) is fixedly arranged on one side of the upper end of the fixed frame (2).
6. A pull rate control system for a high frequency induction single crystal furnace as claimed in claim 5, wherein: the upper surface fixed mounting of lifter plate (3) has pressure sensors (13), just spring (14) have been cup jointed on guide bar (12), the lower extreme of spring (14) with pressure sensors (13) looks fixed connection, the upper end of spring (14) with the upper end looks fixed connection of mount (2).
7. A pull rate control system for a high frequency induction single crystal furnace as claimed in claim 1, wherein: and a controller (15) is fixedly arranged on one side of the fixed frame (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121345474.1U CN214992007U (en) | 2021-06-15 | 2021-06-15 | Crystal pulling speed control system for high-frequency induction single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121345474.1U CN214992007U (en) | 2021-06-15 | 2021-06-15 | Crystal pulling speed control system for high-frequency induction single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214992007U true CN214992007U (en) | 2021-12-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121345474.1U Active CN214992007U (en) | 2021-06-15 | 2021-06-15 | Crystal pulling speed control system for high-frequency induction single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214992007U (en) |
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2021
- 2021-06-15 CN CN202121345474.1U patent/CN214992007U/en active Active
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