CN112430844B - Piezoelectric crystal weighing and crystal growing device and working method - Google Patents
Piezoelectric crystal weighing and crystal growing device and working method Download PDFInfo
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- CN112430844B CN112430844B CN202110114721.5A CN202110114721A CN112430844B CN 112430844 B CN112430844 B CN 112430844B CN 202110114721 A CN202110114721 A CN 202110114721A CN 112430844 B CN112430844 B CN 112430844B
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- 239000013078 crystal Substances 0.000 title claims abstract description 225
- 238000005303 weighing Methods 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 39
- 230000008569 process Effects 0.000 claims description 24
- 230000008859 change Effects 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 6
- 238000010899 nucleation Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000012544 monitoring process Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 description 6
- 239000010980 sapphire Substances 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000008054 signal transmission Effects 0.000 description 4
- 238000002109 crystal growth method Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
- C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods
Abstract
The invention relates to the technical field of crystal growth, in particular to a piezoelectric crystal weighing and crystal growing device and a working method thereof, wherein the device comprises a balance lever (3) arranged on a crystal growing furnace, and the lower part of the balance lever (3) is provided with a fulcrum (12); a rotating motor (2) is arranged below the balance lever (3) on the left side of the fulcrum (12), the lower part of the rotating motor (2) is connected with a seed crystal rod (13), and the lower end of the seed crystal rod (13) is provided with a seed crystal (14); a linear guide rail (11) is arranged above the balance lever (3) on the right side of the fulcrum (12), a sliding block (10) is arranged on the linear guide rail (11), and a balancing weight (9) can be placed on the sliding block (10); a motor (5) positioned on the left side of the linear guide rail (11) is further mounted above the balance lever (3) on the right side of the fulcrum (12), the motor (5) is connected with a screw rod (7) through a coupler (6), and the screw rod (7) is connected through a screw rod nut (8) and fixed with a sliding block (10).
Description
Technical Field
The invention relates to the technical field of piezoelectric crystals, in particular to a piezoelectric crystal weighing and crystal growing device and a working method.
Background
In the field of piezoelectric crystal growth technology, particularly in a piezoelectric crystal growth method, a pulling and weighing method is generally used for controlling crystal growth. During the whole crystal growth process, the whole crystal growth process is controlled mainly by measuring the weight of the crystal.
At present, the conventional crystal growth method is: the high-precision sensor is utilized to measure the weight of the crystal, and the seed crystal is hung on the weighing sensor, so that the weight signal of the crystal is continuously read in the growth process, and the growth appearance of the crystal is controlled. The disadvantages of the weighing crystal growth technology are: the weighing sensor has poor precision, small measuring range, high price, high cost and poor reliability. In addition, the weighing sensor is directly connected with the crystal and is arranged in the furnace environment, so that the weighing sensor is frequently damaged mechanically, and the problems of easy damage and short service life exist.
In view of the above problems, patent document No. CN105177704B discloses a crystal weighing device for a crystal growth furnace with high stability, comprising: the weighing vacuum airtight box is arranged above the crystal growth furnace shell, a corrugated pipe is arranged between the weighing vacuum airtight box and the crystal growth furnace shell for sealing connection, a stepping motor is arranged in the weighing vacuum airtight box, an output end of the stepping motor is connected with a seed rod penetrating through the corrugated pipe and extending into the crystal growth furnace shell, crystals connected with the seed rod are arranged in the crystal growth furnace shell, and a plurality of air pressure supporting rods are arranged in the corrugated pipe.
In order to solve the above problems, patent document No. CN102392295B discloses a weighing device for a sapphire single crystal furnace, comprising: the weighing sensor is arranged in a lower shell through a sensor bracket, and a signal transmission device for transmitting a weighing signal of the weighing sensor is arranged in the lower shell; the weighing sensor and the signal transmission device are hermetically arranged in the lower shell. The weighing sensor and the signal transmission device are hermetically arranged in the lower shell, the upper shell is positioned above the lower shell, and the lower shell is separated from the upper shell; the lower shell can rotate along with the rotating mechanism when the sapphire crystal grows, so that the signal transmission in the rotating process is met, and meanwhile, the sealing condition required by the sapphire single crystal furnace is met; the sapphire growth measuring device has the advantages of simple and compact structure, convenience in installation and use, improvement of measuring precision, good adaptability and improvement of stability and reliability of sapphire growth.
In order to solve the above problems, patent document No. CN105821477B discloses "a high-precision full-scale weighing system for sapphire crystal growth equipment by kyropoulos method", which includes: the device comprises a containing cavity and a top cover, wherein a circular opening is arranged at the bottom of the containing cavity and connected with a seed crystal rod sleeve, a supporting round platform is arranged on the seed crystal rod sleeve, a crystal lifting platform is arranged in the containing cavity, a high-precision weighing sensor, an attraction device and a seed crystal rod support are arranged in the containing cavity, the top surface of the attraction device is connected with the top cover through a long-neck bolt and can move up and down, the bottom surface of the attraction device is fixedly connected with the high-precision weighing sensor, the bottom surface of the high-precision weighing sensor is fixedly connected with the seed crystal rod support, at least two low-precision wide-range weighing sensors are arranged on the crystal lifting platform, a circular through hole is formed in the crystal lifting platform, the wide-range weighing sensors are symmetrically arranged around the circular through hole of the crystal lifting platform, a seed crystal centering sleeve passes through the circular through hole of the crystal lifting, the high-precision weighing sensor is connected with the wide-range weighing sensor.
The invention monitors the weight of the crystal through the weighing sensor arranged in the crystal growing device and controls the crystal growing process. The principle is still to use a weighing sensor to measure the weight of the crystal in the growth process to realize the growth of the crystal. The invention only uses a specific mechanical structure to match with the weighing sensor, and optimizes the structure of the equipment. The sensor is still used for detecting weighing per se, and no major breakthrough or innovation is made on the technical key point of weighing. Because the weighing sensor is arranged in the furnace body and is in long-term contact with crystal volatile matters, high temperature and the like, the sensor is in a severe environment, and the service life is short. Meanwhile, the sensor is directly connected with the crystal, various phenomena of crystal adhesion, excessive lifting and the like often occur in the crystal growing process, and the sensor is easily damaged by mechanical impact and the like. It can be seen that the invention is optimized on the basis of the traditional weighing crystal growth structure mode without significant technical breakthrough.
With regard to the weighing sensor, currently, the international highest precision level is one ten thousandth, namely, 100 kg of crystal is grown, the detection precision is 10g, and jump is carried out by taking 10g as a unit. This type of sensor belongs to a step precision detection, the detected value is jump rather than continuous. Taking this as an example, in the initial stage of crystal growth, since the crystal weight is small, the amount of crystal growth within 10g will not be detected by the sensor, and will become a detection blind zone and also a control blind zone. By analogy, weight measurements between 10 and 20 grams are also control blind spots. According to the actual production data, the failure rate of the sensor is over 2% by using the weighing sensor due to the conditions of crystal bottom contact, pulling range overrun, misoperation and the like in the crystal growth process. Meanwhile, the price of the high-precision weighing sensor is high, according to the current market price, one measuring range is 50 kilograms, the price of the weighing sensor with one-ten-thousandth precision is more than 5 ten thousand yuan, and the manufacturing cost is very high.
Disclosure of Invention
The invention aims to provide a piezoelectric crystal weighing and crystal growing device and a working method.
According to the piezoelectric crystal weighing and crystal growing device, a weighing sensor in the traditional crystal growing technology is abandoned, and the weights at two ends of a lever are synchronously increased through the lever balance principle, so that high-precision weight detection is always kept at the initial stage and the later stage of crystal growth. In other words, as long as a weight deviation occurs at both ends of the lever, the lever is displaced accordingly. Therefore, the device can realize stepless precision detection.
In order to achieve the purpose, the invention provides the following technical scheme:
a piezoelectric crystal weighing crystal growth device comprises a balance lever arranged at the top of the outer side of a furnace shell of a crystal growth furnace, wherein a fulcrum is arranged at the lower part of the balance lever;
a rotary motor is arranged below the balance lever on the left side of the fulcrum, the lower part of the rotary motor is connected with a seed crystal rod, and the lower end of the seed crystal rod is provided with a seed crystal;
a linear guide rail is arranged above the balance lever on the right side of the fulcrum, a sliding block is arranged on the linear guide rail, and a balancing weight can be placed on the sliding block;
the motor is arranged on the left side of the linear guide rail and is connected with the lead screw through the coupler, and the lead screw is connected and fixed with the sliding block after being connected with the lead screw nut.
And a horizontal angle sensor is arranged at the position of the upper part of the balance lever opposite to the fulcrum.
Wherein, a crystal is arranged below the seed crystal.
Wherein the length of the balancing lever is 0.5-2 m.
The weight block can move left and right along with the sliding block, and the weight of the weight block is 0.1kg-10 kg.
The horizontal angle sensor is used for detecting the inclination angle data of the balance lever deviating from the horizontal and monitoring the balance state of the whole crystal growth system.
The motor is a servo motor, a direct current motor or an alternating current motor.
The invention relates to a working method of a piezoelectric crystal weighing and crystal growing device, which comprises the following steps: in the crystal growth process, the position of the balancing weight from the fulcrum is continuously adjusted by a motor to change the reference weight; and controlling the growth process of the crystal to enable the crystal to grow synchronously according to the change of the reference weight, and finally obtaining the crystal with the required shape.
Specifically, the method comprises the following steps:
determining corresponding parameters including growth rate, crystal shape, total crystal amount and moving speed of a balancing weight before crystal growth according to a crystal growth production process;
when the crystal powder in the crucible reaches a melting point, installing seed crystals on a seed crystal rod to perform seeding operation in a full-melting state; the lead screw is rotated to drive the balancing weight to move left and right by controlling the rotation of the motor;
if the seed crystal rod is installed on one side of the seed crystal rod in a heavy state, the balancing lever inclines leftwards, the balancing weight is adjusted to move rightwards until the balancing lever basically reaches a horizontal state; if one side of the seed crystal rod is slightly light and the balance lever inclines rightwards, the balancing weight is adjusted to move towards the left side until the balance lever basically reaches a horizontal state;
when the balance lever reaches a basic horizontal state, the display numerical value of the horizontal angle sensor is not zero, and the display and output of the horizontal angle sensor can be zero through zero clearing operation; so far, the primary horizontal reference of the whole balance system is verified;
the piezoelectric crystal weighing and crystal growing device is wholly descended through the long crystal control switch, so that seed crystals slowly contact the full molten liquid level to complete seeding operation; at the moment, carrying out zero clearing operation through the horizontal angle sensor, carrying out zero clearing again, and switching to an automatic crystal growth program; after the automatic crystal growth process is started, the piezoelectric crystal weighing and crystal growth device is synchronously lifted upwards, and crystal growth is slowly carried out;
in the whole crystal growth process, the numerical value of the lever deflection angle is detected to feed back the change of the crystal appearance diameter; and the growth speed of the crystal is controlled by controlling the heating temperature, thereby meeting the crystal growth requirement.
A piezoelectric crystal weighing crystal growth device can replace a horizontal angle sensor in the device with a resistance strain sensor or a force sensor or other sensors with similar monitoring functions. For example, the position of the load cell is monitored by the relative motion relationship between the load cell and the balance bar, that is, the load cell is fixed on the furnace body and connected with the balance lever, when the balance lever is angularly offset, the position deviation is formed between the load cell of the load cell and the balance lever, because the load cell is fixed, the load cell will be subjected to a certain pulling force or pushing force, and the magnitude of the force is determined by the offset angle of the balance lever. The force transducer can feed back the force direction and the force magnitude to the control system for heating adjustment, thereby realizing the crystal growth control process.
The working principle of the piezoelectric crystal weighing and crystal growing device provided by the invention is as follows:
the lever principle is utilized in the crystal growth control process, a rotating motor, a seed crystal rod and the like of a crystal growth part are arranged at one end of a balance lever, and a balancing weight for adjusting the force arm by the motor and a screw rod is arranged at the other side of the balance lever. The balance lever can reach a horizontal state only under the condition that the gravity on the two sides of the balance lever is multiplied by the force arm to have the same value.
In the initial stage of crystal growth, the position of the balancing weight on the balancing lever is adjusted first, and the balancing lever is in a balanced state. After the growth begins, as the weight of the crystal grows larger gradually, the balance of the lever changes, and the balance state of the lever is synchronously stabilized by synchronously adjusting the position of the balancing weight at a preset speed. Meanwhile, in the whole crystal growth process, the numerical value of the lever offset angle is detected to feed back the change of the crystal appearance diameter. And the growth speed of the crystal is controlled by controlling the heating adjusting part, so that the crystal growth requirement of equal-diameter growth is met.
As shown in fig. 1, the power F1, the resistance F2, the power arm length L1, and the resistance arm length L2 are set as follows: f1 × L1= F2 × L2.
Compared with the prior art, the invention has the beneficial effects that:
(1) the piezoelectric crystal weighing crystal growth device and the working method have the advantages that the weighing precision is high, and the weighing range is large; the structure is reliable, and the cost is low;
(2) the device can realize the growth of various special-shaped crystals by using a balancing weight adjusting mode;
(3) the device uses the digital horizontal angle sensor, so that the balance condition of a crystal growth system can be visually and accurately observed, and the device can be observed in real time and is visual and clear;
(4) the piezoelectric crystal weighing and crystal growing device and the working method can be applied to various crystal growing technologies and have good popularization prospects.
Drawings
FIG. 1 is a schematic diagram of the apparatus of the present invention;
FIG. 2 is a schematic view of the structure of the apparatus of the present invention.
The device comprises a crystal 1, a rotating motor 2, a balance lever 3, a horizontal angle sensor 4, a motor 5, a coupler 6, a screw 7, a screw nut 8, a balancing weight 9, a sliding block 10, a linear guide rail 11, a fulcrum 12, a seed crystal rod 13 and a seed crystal 14.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 2, the present invention provides a technical solution:
a piezoelectric crystal weighing crystal growth device and a working method thereof comprise a balance lever 3 arranged at the top of the outer side of a furnace shell of a crystal growth furnace, wherein the lower part of the balance lever 3 is provided with a fulcrum 12;
a rotary motor 2 is arranged below a balance lever 3 on the left side of a fulcrum 12, the lower part of the rotary motor 2 is connected with a seed rod 13, and the lower end of the seed rod 13 is provided with a seed crystal 14;
a linear guide rail 11 is arranged above the balance lever 3 on the right side of the fulcrum 12, a sliding block 10 is arranged on the linear guide rail 11, and a balancing weight 9 can be placed on the sliding block 10;
the motor 5 positioned on the left side of the linear guide rail 11 is further mounted above the balance lever 3 on the right side of the fulcrum 12, the motor 5 is connected with the lead screw 7 through the coupler 6, and the lead screw 7 is connected with the sliding block 10 through the lead screw nut 8.
A horizontal angle sensor 4 is arranged at the position of the upper part of the balance lever 3 opposite to the fulcrum 12. The horizontal angle sensor 4 is used for detecting the inclination angle data of the balance lever 3 deviating from the horizontal and monitoring the balance state of the whole crystal growth system.
The motor 5 is a servo motor, a direct current motor or an alternating current motor. The length of the balance lever 3 is 0.5-2 meters. The balancing weight 9 can move left and right along with the sliding block 10, and the weight of the balancing weight 9 is 0.1kg-10 kg. Below the seed crystal 14 is the crystal 1.
Example 1
The working method of the piezoelectric crystal weighing and crystal growing device comprises the following specific steps:
according to the crystal growth production process, determining corresponding parameters before crystal growth, including growth rate, crystal shape, total crystal amount and counterweight block moving speed;
when the crystal powder in the crucible reaches a melting point, installing seed crystals on a seed crystal rod to perform seeding operation in a full-melting state; the lead screw is rotated to drive the balancing weight to move left and right by controlling the rotation of the motor;
if the seed crystal rod is installed on one side of the seed crystal rod in a heavy state, the balancing lever inclines leftwards, the balancing weight is adjusted to move rightwards until the balancing lever basically reaches a horizontal state; if one side of the seed crystal rod is slightly light and the balance lever inclines rightwards, the balancing weight is adjusted to move towards the left side until the balance lever basically reaches a horizontal state;
when the balance lever reaches a basic horizontal state, the display numerical value of the horizontal angle sensor is not zero, and the display and output of the horizontal angle sensor can be zero through zero clearing operation; so far, the primary horizontal reference of the whole balance system is verified;
the piezoelectric crystal weighing and crystal growing device is wholly descended through the long crystal control switch, so that seed crystals slowly contact the full molten liquid level to complete seeding operation; at the moment, carrying out zero clearing operation through the horizontal angle sensor, carrying out zero clearing again, and switching to an automatic crystal growth program; after the automatic crystal growth process is started, the piezoelectric crystal weighing and crystal growth device is synchronously lifted upwards, and crystal growth is slowly carried out;
in the whole crystal growth process, the numerical value of the lever deflection angle is detected to feed back the change of the crystal appearance diameter; and the growth speed of the crystal is controlled by controlling the heating temperature, thereby meeting the crystal growth requirement.
Examples are as follows:
it is assumed that the crystal growth pulling rate is 5mm/h, i.e., 5mm of crystal growth per hour. The increase in crystal weight per hour can be calculated by the density formula.
The density formula is: ρ = m/V; and (5) carrying out high-speed harvest on the lithium niobate crystal with the density of 4.3 g/cm.
Assuming that 4 inches of crystals are grown, a crystal volume per millimeter of V = pi r h =7.85 cm rectification, a crystal mass per millimeter: m = ρ × V =33.755 g.
Therefore, the hourly moving distance of the balancing weight can be calculated.
Assuming a weight mass of 1000g, the weight is preset to move 6.751mm per hour.
In this pulling growth process, the balance lever is tilted left and right, assuming that the crystal is grown too fast for some reason. If the crystal grows too fast, the balance lever inclines leftwards, the horizontal angle sensor monitors the horizontal deviation angle of the balance lever, the angle sensor transmits the generated angle deviation value to the control system for calculation, and the control system adjusts the heating power of the thermal field according to the set proportion.
According to the crystal growth principle, when the crystal grows too fast, the heating power of the thermal field needs to be increased. Thus, the crystal was finally grown at 33.755 g/hr, and a cylindrical crystal was finally grown.
When the length of the grown crystal reaches the required length, the automatic control is released, and the grown crystal is pulled out from the crystal melt to finish crystal growth.
In the growth process, because the removal of balancing weight is that the continuity goes on, the regulation of balancing weight variation is also continuous, and the continuity is fine in the whole growth process, and the crystal appearance that grows out is smooth, and the cylindricity is high, and the crystal quality is good.
Example 2
A piezoelectric crystal weighing and crystal growing device replaces a horizontal angle sensor in embodiment 1 with a resistance strain sensor or a force sensor, and the rest parts are unchanged.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a piezoelectric crystal long brilliant device of weighing which characterized in that: the device comprises a balance lever (3) arranged at the top of the outer side of a furnace shell of the crystal growth furnace, wherein a fulcrum (12) is arranged at the lower part of the balance lever (3);
a rotating motor (2) is arranged below a balance lever (3) on the left side of a fulcrum (12), the lower part of the rotating motor (2) is connected with a seed crystal rod (13), and the lower end of the seed crystal rod (13) is provided with a seed crystal (14);
a linear guide rail (11) is arranged above the balance lever (3) on the right side of the fulcrum (12), a sliding block (10) is arranged on the linear guide rail (11), and a balancing weight (9) can be placed on the sliding block (10);
a horizontal angle sensor (4) is arranged at the position of the upper part of the balance lever (3) opposite to the fulcrum (12);
the motor (5) positioned on the left side of the linear guide rail (11) is further mounted above the balance lever (3) on the right side of the fulcrum (12), the motor (5) is connected with the lead screw (7) through the coupler (6), and the lead screw (7) is connected with the sliding block (10) through the lead screw nut (8).
2. The piezoelectric crystal weighing and crystal growing device of claim 1, wherein: the length of the balance lever (3) is 0.5-2 m.
3. The piezoelectric crystal weighing and crystal growing device of claim 1, wherein: the balancing weight (9) can move left and right along with the sliding block (10), and the weight of the balancing weight (9) is 0.1kg-10 kg.
4. The piezoelectric crystal weighing and crystal growing device of claim 1, wherein: the horizontal angle sensor (4) is used for detecting the inclination angle data of the balance lever (3) deviating from the horizontal and monitoring the balance state of the whole crystal growing system.
5. The working method of the piezoelectric crystal weighing and crystal growth device of any one of claims 1 to 4, wherein: in the crystal growth process, the position of the balancing weight from the fulcrum is continuously adjusted by a motor to change the reference weight; and controlling the growth process of the crystal to enable the crystal to grow synchronously according to the change of the reference weight, and finally obtaining the crystal with the required shape.
6. The working method of the piezoelectric crystal weighing and crystal growing device according to claim 5, characterized in that: according to the crystal growth production process, determining corresponding parameters before crystal growth, including growth rate, crystal shape, total crystal amount and counterweight block moving speed; when the crystal powder in the crucible reaches a melting point, installing seed crystals on a seed crystal rod to perform seeding operation in a full-melting state; the lead screw is rotated to drive the balancing weight to move left and right by controlling the rotation of the motor; if one side of the seed crystal rod is arranged to be heavier, and the balance lever inclines leftwards, the balancing weight block is adjusted to move rightwards until the balance lever reaches a horizontal state; if one side of the seed crystal rod is slightly light and the balance lever inclines rightwards, the balancing weight is adjusted to move towards the left side until the balance lever reaches a horizontal state; when the balance lever reaches a horizontal state, the display numerical value of the horizontal angle sensor is not zero, and the display and output of the horizontal angle sensor can be zero through zero clearing operation; so far, the primary horizontal reference of the whole balance system is verified; the piezoelectric crystal weighing and crystal growing device is wholly descended through the long crystal control switch, so that seed crystals slowly contact the full molten liquid level to complete seeding operation; at the moment, carrying out zero clearing operation through the horizontal angle sensor, carrying out zero clearing again, and switching to an automatic crystal growth program; after the automatic crystal growth process is started, the piezoelectric crystal weighing and crystal growth device is synchronously lifted upwards, and crystal growth is slowly carried out; in the whole crystal growth process, the numerical value of the lever deflection angle is detected to feed back the change of the crystal appearance diameter; and the growth speed of the crystal is controlled by controlling the heating temperature, thereby meeting the crystal growth requirement.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110114721.5A CN112430844B (en) | 2021-01-28 | 2021-01-28 | Piezoelectric crystal weighing and crystal growing device and working method |
| JP2022539735A JP7416958B2 (en) | 2021-01-28 | 2021-02-02 | Piezoelectric crystal weighing crystal growth apparatus and operating method |
| PCT/CN2021/074827 WO2022160361A1 (en) | 2021-01-28 | 2021-02-02 | Weighing-based piezoelectric crystal growth device and working method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110114721.5A CN112430844B (en) | 2021-01-28 | 2021-01-28 | Piezoelectric crystal weighing and crystal growing device and working method |
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| CN112430844A CN112430844A (en) | 2021-03-02 |
| CN112430844B true CN112430844B (en) | 2021-04-30 |
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| JP (1) | JP7416958B2 (en) |
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| CN113897672A (en) * | 2021-10-12 | 2022-01-07 | 江西匀晶光电技术有限公司 | Single crystal growth diameter control device suitable for Czochralski method |
| CN114150373A (en) * | 2021-10-30 | 2022-03-08 | 江西师范大学 | Lithium niobate crystal bar quantitative growth control device based on moment balance |
| CN114150370B (en) * | 2021-10-30 | 2022-10-11 | 江西师范大学 | Crystal bar growth control device based on moment balance |
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| CN201506849U (en) * | 2009-04-15 | 2010-06-16 | 北京嘉东科技有限公司 | Lifting and growing device for self-weighing system |
| CN103454156B (en) * | 2012-05-28 | 2018-01-26 | 富泰华工业（深圳）有限公司 | Pulling capacity mechanism for testing and drawing force test method |
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| US9657407B2 (en) | 2013-10-29 | 2017-05-23 | Siemens Medical Solutions Usa, Inc. | Cantilever device for extending capacity of a scale used in a crystal growth apparatus |
| CN204385327U (en) * | 2015-01-03 | 2015-06-10 | 杭州晶一智能科技有限公司 | The accurate weighing system of brilliant equipment grown automatically by kyropoulos sapphire |
| CN105821477B (en) * | 2015-01-10 | 2017-12-08 | 杭州晶一智能科技有限公司 | The high-precision gamut weighing system of kyropoulos sapphire crystallization equipment |
| CN105239153B (en) * | 2015-09-10 | 2020-01-07 | 上海超硅半导体有限公司 | Single crystal furnace with auxiliary charging structure and application thereof |
| CN105177704B (en) * | 2015-10-23 | 2017-10-27 | 苏州晶特晶体科技有限公司 | A kind of stability high long crystal furnace crystals weighed device |
| CN205483242U (en) * | 2016-03-06 | 2016-08-17 | 辽宁旭亚衡器有限公司 | Electronic price computing scale's calibrating device |
| CN208818329U (en) * | 2018-10-07 | 2019-05-03 | 佛山市顺德区顺鹰衡器有限公司 | A kind of mechanical title with level(l)ing mechanism |
| CN109338468B (en) * | 2018-11-21 | 2021-04-06 | 南京晶升能源设备有限公司 | Crystal weighing device |
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2021
- 2021-01-28 CN CN202110114721.5A patent/CN112430844B/en active Active
- 2021-02-02 WO PCT/CN2021/074827 patent/WO2022160361A1/en active Application Filing
- 2021-02-02 JP JP2022539735A patent/JP7416958B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2023514801A (en) | 2023-04-11 |
| JP7416958B2 (en) | 2024-01-17 |
| CN112430844A (en) | 2021-03-02 |
| WO2022160361A1 (en) | 2022-08-04 |
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