CN114150370B - Crystal bar growth control device based on moment balance - Google Patents
Crystal bar growth control device based on moment balance Download PDFInfo
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- CN114150370B CN114150370B CN202111278208.6A CN202111278208A CN114150370B CN 114150370 B CN114150370 B CN 114150370B CN 202111278208 A CN202111278208 A CN 202111278208A CN 114150370 B CN114150370 B CN 114150370B
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- lever
- sliding block
- workbench
- crystal bar
- counterweight sliding
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
Abstract
A crystal bar growth control device based on moment balance comprises a crucible and a lever system, wherein the lever system comprises a workbench and a support fixed on the workbench, a lever is pivoted on the support, a seed rod is fixed at one cantilever end of the lever and is suspended above the crucible, a sliding chute is arranged on the other cantilever, and a counterweight sliding block is arranged on the sliding chute; the temperature of feed liquid maintains the constant value in the crucible, the displacement time curve of counter weight slider, workstation sets up according to the shape of the crystal bar that waits to generate, and the displacement of counter weight slider, workstation is by predetermined program control. The invention changes the control mode of the prior art, replaces a precious automatic diameter control system by a software program, and realizes the equal diameter or variable diameter control of the crystal bar based on the moment balance control of the lever; meanwhile, a control circuit is additionally arranged to prevent growth lines caused by turbid feed liquid from being generated when the crystal bar grows to be close to the tail sound, and the growth reliability is guaranteed.
Description
Technical Field
The invention relates to the field of crystal bar preparation, in particular to a crystal bar growth control device based on moment balance.
Background
The Czochralski method is a mainstream preparation method for the growth of the single crystal ingot at present, and is prepared by sequentially carrying out the process steps of seeding, necking, shoulder expanding, shoulder closing, constant diameter, ending, separating and the like, is a main production mode of the current crystal, has higher requirements on the quality of the single crystal when the current crystal is developed towards the direction of large size and high quality, and has the defects that the inside of the single crystal ingot has stress and is easy to crack and scrap due to the existence of growth grains if the inside of the single crystal is not provided with the growth grains.
In the preparation process of the Czochralski method, the crystal growth is finished under the regulation and control action of an automatic diameter control system (ADC), based on the requirements of cost and efficiency, single crystals prepared by the prior art exceed 20Kg, a single crystal bar is suspended on the automatic diameter control system, the automatic diameter control system measures the weight of the crystal bar through an electronic circuit, the suspension system pulls the automatic diameter control system and the crystal bar to move upwards, the single crystal grows step by step, the increment of the single crystal growth is reacted in real time through the automatic diameter control system, the automatic diameter control system compares the obtained weight, and the growth is corrected by controlling the temperature of feed liquid in a crucible.
The current automatic diameter control system usually comprises an electronic scale, a temperature controller, a microprocessor, a phase advancer, a pulling and rotating unit and the like, and all prepared single crystals exceed 20Kg, so a large-range weighing sensor is needed, but the actual growth condition of the single crystal is dynamic and slow, the control requirement on the growth of the single crystal is high in precision, the double requirements of large range and high precision are difficult to meet in practice, the system is not available domestically, if the internationally known maximum weighing sensor 6.2Kg and the precision of 10mg are adopted, the cost is high, the economic value of practical application is not high, and the signal-to-noise ratio of a weight signal is low at low pulling speed, and the high-precision control requirement on the whole growth process is difficult to achieve.
Disclosure of Invention
In view of the problems of the background art, the present invention provides a control device for crystal bar growth based on moment balance, which uses a lever to replace the existing automatic diameter control system, controls the growth of the crystal bar by controlling the movement of the slide block and the rising of the lever through programs, and is further described below.
A crystal bar growth control device based on moment balance comprises a crucible and a lever system, wherein the lever system comprises a workbench and a support fixed on the workbench, a lever is pivoted on the support, a seed rod is fixed at one cantilever end of the lever and is suspended above the crucible, a sliding chute is arranged on the other cantilever, and a counterweight sliding block is arranged on the sliding chute; the temperature of the feed liquid in the crucible is maintained at a constant value, the displacement time curves of the counterweight sliding block and the workbench are arranged according to the shape of the crystal bar to be generated, and the displacements of the counterweight sliding block and the workbench are controlled by a preset program.
Preferably, when the ascending speed of the workbench changes, the sliding grooves are arranged on two sides of the lever, and the matching of the counterweight sliding block and the sliding grooves has a limited contact surface in the vertical direction; the interaction prevents dislocation of the counterweight slide block.
Preferably, the traction system comprises inelastic traction wires tied to two sides of the counterweight sliding block, and a first fixed pulley, a second fixed pulley, a pay-off wheel and a take-up wheel which are fixed on the workbench; one side of the counterweight sliding block is connected with a pay-off wheel by a traction wire around a first fixed pulley, the other side of the counterweight sliding block is connected with a take-up wheel by a second fixed pulley, and the pay-off wheel and the take-up wheel synchronously rotate; the two sides of the counterweight sliding block are under the traction action of the traction wire, so that the inertia influence of the counterweight sliding block in motion is overcome, and the speed of the counterweight sliding block is accurately controlled.
Preferably, a tensioning wheel is arranged on the workbench, and the tensioning degree of the wire drawing can be adjusted by the tensioning wheel; further ensuring immediate and immediate control of speed changes.
Preferably, the first fixed pulley and the second fixed pulley guide a wire acting on the counterweight sliding block to be parallel to the lever; the lever balance is maintained.
Preferably, one end parts of the pay-off wheel and the take-up wheel are connected through a chain, the pay-off wheel or the take-up wheel is connected to the driving motor, and the traction system can be controlled to pull the counterweight sliding block to slide according to a preset program through the single driving motor.
Preferably, a clamping seat is fixed on the workbench, the end part of one side of the lever, which is provided with the sliding chute, is positioned in the clamping seat, and the height of the inner space of the clamping seat is higher than that of the lever; the moment balance of a lever system is not influenced in the crystal growth process, and the limit protection effect on the lever is only realized under the extreme condition.
Preferably, the workbench is arranged on the turntable base; after the crystal bar grows, the turntable base rotates to drive the lever system and the traction system to integrally rotate, and the crystal bar is transferred to an area to be discharged.
Preferably, after the displacement of the counterweight sliding block according to the preset degree is finished, the program traction system controls the counterweight sliding block.
Preferably, the control circuit is further arranged and configured to output a control signal after the turbidity of the feed liquid reaches a certain degree, the driving device is triggered to lift the workbench, so that the bottom of the crystal bar is separated from the feed liquid, the crystal bar is blocked from continuing to grow, and meanwhile, the traction system is triggered to pull the counterweight sliding block to move to the outermost end of the lever. The control circuit comprises a light source, the light source emits light beams which shoot to the feed liquid, the light beams irradiate on a photoresistor R1 after penetrating through the feed liquid, the photoresistor R1 and a resistor R2 are connected between a constant voltage source and a ground wire in series, a node between the photoresistor R1 and the resistor R2 is connected with a base electrode of a triode P, a collector electrode of the triode P is connected with the constant voltage source through a resistor R3, an emitter electrode of the triode P is grounded through a resistor R4, and the collector electrode and the ground electrode are used as output.
Has the advantages that: compared with the prior art, the control mode of the prior art is changed, a valuable automatic diameter control system is replaced by a software program, the temperature of the crucible is set to be constant, the actions of the lever system and the balance weight sliding block are preset according to the shape of a target crystal bar, and the equal-diameter or variable-diameter control of the crystal bar is realized based on the moment balance control of the lever; meanwhile, a control circuit is additionally arranged, the condition that growth grains are generated due to feed liquid turbidity when the crystal bar grows to be close to the tail sound is avoided, and the growth reliability is guaranteed.
Drawings
FIG. 1: the invention has a structure schematic diagram;
FIG. 2 is a schematic diagram: the matching section view of the counterweight sliding block and the lever;
FIG. 3: a control circuit diagram;
in the figure: the device comprises a crucible 1, a feed liquid 2, a workbench 3, a support 4, a lever 5, a chute 51, a seed rod 6, a counterweight sliding block 7, a drawing wire 8, a first fixed pulley 9, a second fixed pulley 10, a take-up pulley 11, a pay-off pulley 12, a tension pulley 13, a clamping seat 14, a light source 15 and a control circuit 16.
Detailed Description
A specific embodiment of the present invention will be described in detail with reference to fig. 1-3.
Referring to the attached drawing 1, a crystal bar growth control device based on moment balance comprises a crucible 1 used for loading feed liquid 2 and a lever system, wherein the lever system comprises a workbench 3 and a support 4 fixed on the workbench, a lever 5 is pivoted on the support 4 and has a rotational degree of freedom relative to the support, a seed rod 6 is fixed at one cantilever end of the lever 5 and is suspended above the crucible, a chute 51 is arranged on the other cantilever, a counterweight sliding block 7 is arranged on the chute, and the counterweight sliding block 7 slides on the chute under the pulling of a traction system so as to match the lever moment change in the crystal bar growth process; the height of the workbench 3 is changed by lifting under the action of the lifting system.
Before growth, the lower end part of the seed rod 6 is contacted with the liquid level of the feed liquid in the crucible, the seed rod provides the growth direction and the adsorption point of the single crystal, and the single crystal is gradually precipitated on the seed rod. The working table is gradually lifted under the traction of the lifting system, the seed crystal rod is moved upwards, the bottom of the seed crystal rod is always contacted with the liquid level of the feed liquid, the seed crystal rod and the feed liquid have molecular attraction without buoyancy influence, the moment balance of two sides of the lever system is not influenced by the feed liquid, and the length of the crystal rod is gradually increased along with the gradual lifting of the working table; when the workbench gradually rises and the length of the crystal bar gradually increases, the counterweight sliding block 7 on the lever 5 gradually moves outwards under the traction of the traction system, so that the moment balance of the lever system is maintained.
In the invention, the temperature of the feed liquid in the crucible is maintained at a constant value, and the crystal precipitation rate is nearly constant when the temperature is stable and constant, so that the method abandons the arrangement of a complex feedback control system compared with the prior art that the heating system is regulated by feedback to control the precipitation temperature; meanwhile, based on the constant crystal precipitation rate, the weight of the crystal rod precipitated in a set time is constant, the displacement of the corresponding counterweight sliding block 7 is unique, the ascending speed of the workbench 3 corresponds to the length of the crystal, and the diameter change of the crystal rod can be controlled by controlling the displacement time curves of the counterweight sliding block 7 and the workbench 3, namely, the crystal rods with different shapes can be generated.
The displacement time curves of the counterweight sliding block 7 and the workbench 3 are set according to the shape of the crystal bar to be generated, the displacement of the counterweight sliding block 7 and the workbench 3 is controlled by a preset program, compared with the control of an automatic diameter control system consisting of a large amount of hardware in the prior art, the cost is greatly reduced, and the crystal bar growth control of different shapes can be realized by changing a program equation. The invention does not perform dynamic control any more in the crystallization process, but makes the crystal growth speed constant through the temperature control, and then achieves the purpose through the displacement control of the counterweight sliding block 7 and the workbench 3.
Referring to fig. 2, in the present embodiment, the growth of the ingots with different shapes requires a variable speed change of the ascending speed of the worktable 3, that is, a change of the acceleration, in order to limit the weight slider 7 in the sliding slot, the sliding slots 51 are arranged at both sides of the lever 5, and the contact surface of the weight slider 7 and the sliding slot 51 in the vertical direction prevents the dislocation of the weight slider 7.
The counterweight sliding block 7 slides on the sliding chute according to a preset displacement curve under the pulling of a traction system, speed change may exist according to the shape of a crystal bar in the sliding process of the counterweight sliding block 7, the counterweight sliding block 7 in motion has physical inertia, and in order to realize accurate control of the speed of the counterweight sliding block, the traction system comprises inelastic drawing wires 8 tied on two sides of the counterweight sliding block 7, and a first fixed pulley 9, a second fixed pulley 10, an unwinding wheel 12 and a winding wheel 11 which are fixed on a workbench, one side of the counterweight sliding block 7 bypasses the first fixed pulley 9 through the drawing wires 8 to be connected with the unwinding wheel 12, and the other side of the counterweight sliding block is connected to the winding wheel 11 through the second fixed pulley 10, the unwinding wheel 12 and the winding wheel 11 rotate synchronously, and in the synchronous rotating process of the unwinding wheel 12 and the winding wheel 11, two sides of the counterweight sliding block 7 are under the traction action of the drawing wires, and the control requirement of instant change on the speed change is met.
In the embodiment, in order to further control the wire drawing to control the counterweight sliding block 7, a tensioning wheel 13 fixed on the workbench is further arranged, and the tensioning wheel 13 can adjust the tensioning degree of the wire drawing, so that the instant immediate control requirement of speed change is further ensured.
When the traction system is pulled, the traction force of the traction system on the counterweight sliding block is parallel to the lever to maintain the lever balance, and the first fixed pulley 9 and the second fixed pulley 10 guide the traction wire acting on the counterweight sliding block to be parallel to the lever.
The paying-off wheel 12 and the take-up pulley 11 synchronously rotate, the counterweight sliding block 7 is dragged to slide by a traction wire, the requirement on the rotation synchronism of the paying-off wheel 12 and the take-up pulley 11 is strict, in the embodiment, one end parts of the paying-off wheel 12 and the take-up pulley 11 are connected through a chain, the paying-off wheel 12 or the take-up pulley 11 is connected onto a driving motor, and the traction system can be controlled to drag the counterweight sliding block 7 to slide according to a preset program through the independent driving motor.
In the process of growing the single crystal, the invention only depends on the displacement of the lever system and the counterweight sliding block controlled by the preset program, the dynamic control is lacked in the growing process, the accidental factors with low probability exist in the actual growing process of the single crystal, so that the lever system loses balance, the embodiment adds the protection measures, the clamping seat 14 is fixed on the workbench, the end part of one side of the lever 5, which is provided with the sliding groove, is positioned in the clamping seat 14, the height of the internal space of the clamping seat 14 is higher than that of the lever, the moment balance of the lever system is not influenced in the process of growing the crystal, and the limit protection effect of the clamping seat on the lever can be caused only under extreme conditions, such as the crack caused by the internal stress of the crystal bar.
The workbench 3 is arranged on the turntable base, and after the crystal bar grows, the turntable base rotates to drive the lever system and the traction system to integrally rotate, so that the crystal bar is transferred to an area to be discharged. In the rotation process of the turntable base, the crystal bar swings, and the lever system loses balance under the action of centrifugal force, in the embodiment, the limiting effect of the lever 5 can be protected through the clamping seat 14, or preferably, after the crystal bar growth is finished, for example, after the displacement of the counterweight sliding block 7 according to the preset degree is finished, the program traction system controls the counterweight sliding block 7
In practice, when the growth of the crystal bar is close to the end sound and the balance weight sliding block is not displaced to the position corresponding to the end of program execution, the transparency of precipitated crystals is gradually reduced due to the fact that the feed liquid is gradually turbid, the probability of growing grains is greatly increased, and production efficiency is improved in order to avoid crystal bar cracking.
Referring to fig. 3, the circuit diagram of the control circuit 16 according to this embodiment includes a light source 15, the light source 15 emits a light beam toward the material liquid, the light beam irradiates on a photo resistor R1 after passing through the material liquid, the photo resistor R1 and a resistor R2 are connected in series between a constant voltage source and a ground line, a node between the photo resistor R1 and the resistor R2 is connected to a base of a triode P, a collector of the triode P is connected to the constant voltage source through a resistor R3, an emitter of the triode P is grounded through a resistor R4, and the collector and the ground are used as an output.
In the early stage of crystal bar growth, the feed liquid is transparent, the light beam irradiates on the photoresistor R1, the resistance on the photoresistor R1 is far smaller than the resistance R2, so that the voltage between the base electrode and the emitting electrode of the triode P is smaller than cut-off voltage, the triode is in a cut-off state, and the output end has no output; when the material liquid is turbid during growth and tail sound entering, the material liquid weakens the light beam, the intensity of the light beam irradiating on the photoresistor R1 is reduced, the resistance value of the photoresistor R1 is increased, the voltage between the base electrode and the emitting electrode of the triode P reaches and exceeds the cut-off voltage, the triode is in a conducting state, the output end outputs a voltage signal outwards, the work table 3 is triggered to be lifted, and the counterweight sliding block 7 is pulled by the traction system to move to the outermost end of the lever.
The resistor R2 of the control circuit is a rheostat, resistance value adjustment can be carried out, and the control circuit can be conveniently calibrated and adjusted.
In this embodiment, the signal for triggering the traction system to pull the counterweight sliding block 7 to move to the outermost end of the lever has two signals, which are the output signal of the control circuit and the output signal of the counterweight sliding block after displacement is terminated according to a preset program, and the logic of the two signals for controlling the traction system is "or". When traction system pulling counter weight slider 7 moved to the outermost end of lever, the cassette still had limiting displacement to counter weight slider, also promptly the cassette has the dual limiting displacement to lever and counter weight slider.
The invention changes the control mode of the prior art, replaces a precious automatic diameter control system by a software program, sets the temperature of the crucible to be constant, further presets the actions of a lever system and a counterweight sliding block according to the shape of a target crystal bar by a program, and realizes the equal diameter or variable diameter control of the crystal bar based on the moment balance control of a lever; meanwhile, a control circuit is additionally arranged, the condition that growth grains are generated due to feed liquid turbidity when the crystal bar grows to be close to the tail sound is avoided, and the growth reliability is guaranteed.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (3)
1. The utility model provides a crystal bar growth controlling means based on moment balance, includes crucible (1) and lever system, its characterized in that:
the lever system comprises a workbench (3) and a support (4) fixed on the workbench, a lever (5) is pivoted on the support (4), a seed rod (6) is fixed at one cantilever end of the lever (5), the seed rod is suspended above the crucible, a chute (51) is arranged on the other cantilever, and a counterweight sliding block (7) is arranged on the chute;
the temperature of the feed liquid in the crucible is maintained at a constant value, the displacement time curves of the counterweight sliding block (7) and the workbench (3) are set according to the shape of the crystal bar to be generated, and the displacements of the counterweight sliding block (7) and the workbench (3) are controlled by a preset program;
when the ascending speed of the workbench (3) has speed change, the sliding grooves (51) are arranged on two sides of the lever (5), and the matching of the counterweight sliding block (7) and the sliding grooves (51) has a limited contact surface in the vertical direction;
the counterweight sliding block (7) slides under the traction of the traction system; the traction system comprises inelastic traction wires (8) tied at two sides of the counterweight sliding block (7), and a first fixed pulley (9), a second fixed pulley (10), a paying-off wheel (12) and a take-up pulley (11) which are fixed on the workbench; one side of the counterweight sliding block (7) bypasses a first fixed pulley (9) through a wire drawing (8) and is connected with a wire releasing wheel (12), the other side of the counterweight sliding block is connected to a wire winding wheel (11) through a second fixed pulley (10), the wire releasing wheel (12) and the wire winding wheel (11) synchronously rotate, one end parts of the wire releasing wheel (12) and the wire winding wheel (11) are connected through a chain, and the wire releasing wheel (12) or the wire winding wheel (11) is connected to a driving motor;
a clamping seat (14) is fixed on the workbench, the end part of one side of the lever (5) provided with the sliding chute is positioned in the clamping seat (14), and the height of the inner space of the clamping seat (14) is higher than that of the lever; the workbench (3) is arranged on the turntable base, and after the crystal bar grows, the turntable base rotates to drive the lever system and the traction system to integrally rotate, so that the crystal bar is transferred to an area to be discharged;
the control circuit is also arranged and comprises a light source (15), the light source (15) emits light beams which shoot to the feed liquid, the light beams penetrate through the feed liquid and then irradiate on a photoresistor R1, the photoresistor R1 and a resistor R2 are connected between a constant voltage source and a grounding wire in series, a node between the photoresistor R1 and the resistor R2 is connected with a base electrode of a triode P, a collector electrode of the triode P is connected with the constant voltage source through a resistor R3, an emitter electrode of the triode P is grounded through a resistor R4, and the collector electrode and the ground are used as output;
after the displacement of the counterweight sliding block (7) according to the preset degree is finished, the traction system controls the counterweight sliding block (7) to move outwards to the outermost end of the lever; the control circuit outputs to trigger the workbench (3) to be lifted so that the bottom of the crystal bar is separated from contact with the feed liquid, the crystal bar is blocked from continuing to grow, and meanwhile, the traction system is triggered to pull the counterweight sliding block (7) to move to the outermost end of the lever.
2. The apparatus of claim 1, wherein:
the workbench is provided with a tensioning wheel (13), and the tensioning degree of the wire pulling can be adjusted by the tensioning wheel (13).
3. The apparatus of claim 1, wherein:
the first fixed pulley (9) and the second fixed pulley (10) guide the wire pulling acting on the counterweight sliding block to be parallel to the lever.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111278208.6A CN114150370B (en) | 2021-10-30 | 2021-10-30 | Crystal bar growth control device based on moment balance |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111278208.6A CN114150370B (en) | 2021-10-30 | 2021-10-30 | Crystal bar growth control device based on moment balance |
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| CN114150370A CN114150370A (en) | 2022-03-08 |
| CN114150370B true CN114150370B (en) | 2022-10-11 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1115429C (en) * | 1999-10-20 | 2003-07-23 | 中国科学院物理研究所 | Technology for growth of crystal |
| CN201886280U (en) * | 2010-12-03 | 2011-06-29 | 京东方科技集团股份有限公司 | Protector |
| CN203411656U (en) * | 2013-07-30 | 2014-01-29 | 元亮科技有限公司 | Lower weighing device for crystal oven |
| CN112430844B (en) * | 2021-01-28 | 2021-04-30 | 天通控股股份有限公司 | Piezoelectric crystal weighing and crystal growing device and working method |
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