CN212713833U

CN212713833U - Automatically controlled integrative portable single crystal growing furnace lower furnace chamber

Info

Publication number: CN212713833U
Application number: CN202021359619.9U
Authority: CN
Inventors: 倪建刚
Original assignee: Zhejiang Haoxiang Precision Machinery Manufacturing Co ltd
Current assignee: Zhejiang Haoxiang Precision Machinery Manufacturing Co ltd
Priority date: 2020-07-13
Filing date: 2020-07-13
Publication date: 2021-03-16
Anticipated expiration: 2030-07-13

Abstract

The utility model discloses a stove room under automatically controlled integrative portable single crystal growing furnace, including the base, the lower fixed surface of base installs the gyro wheel, and the vertical welding of the upper surface of base has the limiting plate, and fixed mounting has single crystal growing furnace body in the limiting plate, and single crystal growing furnace body includes bell and stove room down, and the surface of going up the bell has admission line and feed inlet fixed mounting in proper order, and the position that stove external surface is close to the bell down is provided with the siren, and the downside dispersion of siren is provided with control panel and observation window of fixed mounting on stove external surface down. The utility model has the advantages that: the single crystal furnace has the advantages that the movement of the single crystal furnace body is facilitated, the labor force is saved, the time is saved, the feeding amount can be effectively controlled through the telescopic rod by arranging the guide plate and the hydraulic cylinder, the material waste is reduced, the use cost is saved, and the work efficiency is greatly improved.

Description

Automatically controlled integrative portable single crystal growing furnace lower furnace chamber

Technical Field

The utility model relates to a lower furnace chamber, in particular to an electrically controlled integrated movable single crystal furnace lower furnace chamber, belonging to the technical field of monocrystalline silicon production and manufacturing.

Background

The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas environment and growing dislocation-free single crystals by using a Czochralski method. The production process flow of the single crystal furnace is generally as follows: firstly, a certain amount of polycrystalline silicon raw material is put into a crucible and heated to be molten, seed crystals are clamped at the lower end of a pull rod and immersed into the molten crystal raw material, the pull rod is slowly pulled upwards and simultaneously slowly rotated, and finally, the cylindrical monocrystalline silicon rod is grown.

The existing lower furnace chamber of the single crystal furnace has various problems, one of the problems is that the existing lower furnace chamber of the single crystal furnace is inconvenient to move, when the existing lower furnace chamber of the single crystal furnace is needed to be used, a plurality of persons are often needed to move, a large amount of manpower is wasted, the feeding quantity and the feeding speed cannot be controlled by the existing lower furnace chamber of the single crystal furnace, the existing lower furnace chamber of the single crystal furnace is often needed to be controlled by the persons, the single crystal furnace is inconvenient to use, and the electric control integration cannot be realized by the existing lower furnace chamber of the single crystal furnace.

Disclosure of Invention

The utility model aims to solve the problems of inconvenient movement and troublesome use and provides an electrically-controlled integrated movable single crystal furnace lower furnace chamber.

The utility model discloses a following technical scheme realizes above-mentioned purpose: the utility model provides an automatically controlled integrative portable single crystal growing furnace lower furnace chamber, includes the base, the lower fixed surface of base installs the gyro wheel, and the vertical welding of upper surface of base has the limiting plate, fixed mounting has single crystal growing furnace body in the limiting plate, single crystal growing furnace body includes bell and lower furnace chamber, the surface of going up the bell fixed mounting in proper order has admission line and feed inlet, the position that the outer surface of lower furnace chamber is close to last bell is provided with the siren, the downside dispersion of siren is provided with control panel and observation window of fixed mounting on the outer surface of lower furnace chamber.

As a further aspect of the present invention: the observation window is made of high-temperature-resistant transparent glass material.

As a further aspect of the present invention: the inner surface of the limiting plate is arc-shaped and is matched with the surface radian of the single crystal furnace body.

As a further aspect of the present invention: the lower furnace chamber comprises a shell, wherein first fixed blocks are symmetrically arranged on two sides of the inner wall of the shell, a guide plate is hinged to the other ends of the first fixed blocks, hydraulic cylinders fixed on the shell are arranged on the lower sides of the first fixed blocks, one ends of the hydraulic cylinders are hinged to the guide plate, a quartz crucible is arranged inside the shell, a graphite crucible is arranged on the lower side of the quartz crucible and used for supporting the quartz crucible, a crucible tray is connected to the lower side of the quartz crucible, a crucible shaft is connected to the lower end of the crucible tray, and a supporting rod sheath is sleeved on the outer side of the crucible shaft.

As a further aspect of the present invention: the utility model discloses a crucible electrode, including casing, crucible shaft, electrode column, heater, electrode bolt and electrode column rigid coupling, casing bottom inboard is equipped with graphite carbon felt, and graphite carbon felt middle part runs through the crucible axle, and the both sides of crucible shaft are provided with the venthole, and the back of the body one side of carrying on the back of every venthole all is provided with the electrode column, and the electrode column outside is connected with the electrode sheath, and the upper end of electrode column is connected with the heater.

As a further aspect of the present invention: the pneumatic cylinder includes the telescopic link, the one end of telescopic link articulates on the pneumatic cylinder surface, and other end fixedly connected with slider, the inside spout of offering with slider assorted of guide plate.

As a further aspect of the present invention: the air inlet pipeline comprises a pipe body, an air inlet is formed in the upper end of the pipe body, an aspirator is arranged inside the pipe body and fixedly connected with a second fixed block fixed on the inner wall of the pipe body, a filter chamber is fixedly connected with the output end of the aspirator, and an air outlet is fixedly connected with the lower end of the filter chamber.

As a further aspect of the present invention: an air pressure sensor is arranged in the lower furnace chamber, the output end of the air pressure sensor is connected with the input end of a control panel, and the output end of the control panel is respectively connected with the input ends of an alarm and an air aspirator.

As a further aspect of the present invention: and the output end of the heater is connected with the input end of the control panel.

The utility model has the advantages that: the lower furnace chamber of the electric control integrated movable single crystal furnace is reasonable in design: by arranging the rollers, the movement of the single crystal furnace body is facilitated, the labor force is saved, and the time is saved; by arranging the guide plate and the hydraulic cylinder, the feeding quantity can be effectively controlled under the action of the telescopic rod, the waste of materials is reduced, and the use cost is saved; through setting up control panel, baroceptor, siren and aspirator, can carry out real time monitoring to the inside gas of single crystal growing furnace body, when gas concentration is not enough, the siren takes place the alarm, and control bread control aspirator work has improved work efficiency greatly.

Drawings

Fig. 1 is a schematic view of the structure of the present invention.

Fig. 2 is a schematic view of the cross-sectional structure of the present invention.

Fig. 3 is a schematic view of the connection structure of the telescopic rod and the guide plate of the present invention.

Fig. 4 is the schematic diagram of the internal structure of the air inlet pipe of the present invention.

In the figure: 1. the single crystal furnace comprises a base, 2, rollers, 3, a limiting plate, 4, an alarm, 5, an upper furnace cover, 6, an air inlet pipeline, 61, an air inlet, 62, a pipe body, 63, an aspirator, 64, a filter chamber, 65, an air outlet, 7, a feed inlet, 8, a lower furnace chamber, 81, a shell, 82, a first fixing block, 83, a guide plate, 84, a hydraulic cylinder, 841, an expansion rod, 842, a sliding chute, 843, a sliding block, 85, a heater, 86, a graphite crucible, 87, a quartz crucible, 88, an air pressure sensor, 89, a supporting rod sheath, 810, a crucible shaft, 811, an air outlet hole, 812, an electrode sheath, 813, a graphite carbon felt, 814, an electrode column, 815, an electrode bolt, 816, a crucible tray, 9, a control panel, 10, an observation window, 11 and a single crystal furnace body.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Please refer to fig. 1-4, an automatically controlled integrative portable single crystal growing furnace lower furnace chamber, includes base 1, the lower fixed surface of base 1 installs gyro wheel 2, and the vertical welding of the upper surface of base 1 has limiting plate 3, fixed mounting has single crystal growing furnace body 11 in the limiting plate 3, single crystal growing furnace body 11 includes bell 5 and lower furnace chamber 8, the surface of going up bell 5 is fixed mounting in proper order has admission line 6 and feed inlet 7, the position that lower furnace chamber 8 surface is close to last bell 5 is provided with siren 4, the downside dispersion of siren 4 is provided with control panel 9 and observation window 10 of fixed mounting on lower furnace chamber 8 surface.

Further, in the embodiment of the present invention, the observation window 10 is made of a high temperature resistant transparent glass material, so as to facilitate observation of the reaction inside the single crystal furnace.

Further, in the embodiment of the utility model, the 3 internal surfaces of limiting plate are the arc form, and agree with mutually with 11 surperficial radians of single crystal growing furnace body, are convenient for carry on spacing fixedly to single crystal growing furnace body 11, prevent to take place to empty the phenomenon in the course of the work.

Further, in the embodiment of the utility model, lower furnace chamber 8 includes casing 81, the inner wall bilateral symmetry of casing 81 is provided with first fixed block 82, and the other end of two first fixed blocks 82 all articulates there is guide plate 83, the downside of two first fixed blocks 82 all is provided with fixes pneumatic cylinder 84 on casing 81, and pneumatic cylinder 84's one end is articulated with guide plate 83, casing 81 is inside to be equipped with quartz crucible 87, and quartz crucible 87 downside is equipped with graphite crucible 86 for supporting quartz crucible 87, quartz crucible 87's downside is connected with crucible tray 816, and crucible tray 816 lower extreme is connected with crucible axle 810, and crucible axle 810 outside cover has die-pin sheath 89, has improved the stability of crucible, guarantees going on smoothly of heating process.

Further, in the embodiment of the utility model, casing 81 bottom inboard is equipped with graphite carbon felt 813, and crucible axle 810 is run through at graphite carbon felt 813 middle part, and the both sides of crucible axle 810 are provided with venthole 811, and the back of the body one side of every venthole 811 all is provided with electrode column 814, and the electrode column 814 outside is connected with electrode sheath 812, and electrode column 814's upper end is connected with heater 85, and electrode bolt 815 and electrode column 814 rigid coupling are passed through to heater 85's bottom, are convenient for carry out heat treatment to crystalline silicon.

Further, in the embodiment of the utility model, pneumatic cylinder 84 includes telescopic link 841, the one end of telescopic link 841 articulates on pneumatic cylinder 84 surface, and other end fixedly connected with slider 843, guide plate 83 is inside seted up with slider 843 assorted spout 842, is convenient for control feeding volume and feed rate, and when the feeding volume is big, guide plate 83 atress moves down, and then drives telescopic link 841 compression to make the opening grow between two guide plates, when the feeding volume is little, the opening diminishes, thereby controls its feeding volume.

Further, in the embodiment of the utility model provides an in, admission line 6 includes body 62, body 62 upper end is provided with air inlet 61, and the inside aspirator 63 that is provided with of body 62, aspirator 63 is through fixing the second fixed block 67 rigid coupling on the body 62 inner wall, the output fixedly connected with filter chamber 64 of aspirator 63, and the lower extreme fixedly connected with gas outlet 65 of filter chamber 64, be convenient for remove dust the drying to the gas of introducing, prevent that impurity from entering into furnace body inside.

Further, in the embodiment of the utility model provides an in, the inside of lower furnace chamber 8 is provided with baroceptor 88, and baroceptor 88's output links to each other with control panel 9's input, control panel 9's output links to each other with siren 4 and aspirator 63's input respectively, when baroceptor 88 detects the inside gas of furnace body not enough, give control panel 9 with signal transmission, control panel 9 controls siren 4 and sends out the police dispatch newspaper, control panel 9 controls aspirator 63 and begins to work simultaneously, automatically controlled integration has been realized, the cost of labor has been practiced thrift, and the work efficiency is improved.

Further, in the embodiment of the utility model provides an in, the output of heater 85 links to each other with control panel 9's input, and when needs heated, control panel 9 control heater 85 heated the crucible, has realized automatically controlled integration.

The working principle is as follows: when the movable single crystal furnace lower chamber integrated with electric control is used, firstly, the single crystal furnace body 11 is moved to a required position through the sliding connection action of the idler wheel 2 and the ground, then the standard value of the air pressure sensor 85 is set, materials required to react are poured into the lower furnace chamber 8 through the feeding hole 7, the guide plate 83 can guide the falling materials to prevent the falling materials from splashing to the outer side of the crucible, meanwhile, the cooperation effect among the guide plate 83, the hydraulic cylinder 84 and the telescopic rod 841 can control the blanking amount and the blanking speed of the materials, after the materials are added, the control panel 9 controls the heater 85 to heat the crucible, the internal reaction can be monitored through the observation window 10 in the heating process, when the concentration of the internal gas is insufficient, the air pressure sensor 88 transmits signals to the control panel 9, and the control panel 9 controls the alarm 4 to give an alarm, meanwhile, the control panel 9 controls the air suction machine 63 to suck air, so that electric control integration is realized, labor cost is saved, and working efficiency is greatly improved.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides an automatically controlled integrative stove room under portable single crystal growing furnace, includes base (1), its characterized in that, the lower fixed surface of base (1) installs gyro wheel (2), and the vertical welding of the upper surface of base (1) has limiting plate (3), fixed mounting has single crystal growing furnace body (11) in limiting plate (3), single crystal growing furnace body (11) are including bell (5) and stove room (8) down, the surface of going up bell (5) fixed mounting in proper order has admission line (6) and feed inlet (7), the position that stove room (8) surface is close to last bell (5) down is provided with siren (4), the downside dispersion of siren (4) is provided with control panel (9) and observation window (10) of fixed mounting on stove room (8) surface down.

2. The electrically-controlled integrated movable lower furnace chamber of the single crystal furnace as claimed in claim 1, wherein the observation window (10) is made of high-temperature-resistant transparent glass material.

3. The electrically-controlled integrated movable lower furnace chamber of the single crystal furnace according to claim 1, wherein the inner surface of the limit plate (3) is arc-shaped and is matched with the surface radian of the single crystal furnace body (11).

4. The electrically controlled integrated movable single crystal furnace lower furnace chamber according to claim 1, the lower furnace chamber (8) comprises a shell (81), first fixed blocks (82) are symmetrically arranged on two sides of the inner wall of the shell (81), guide plates (83) are hinged to the other ends of the two first fixed blocks (82), the lower sides of the two first fixed blocks (82) are respectively provided with a hydraulic cylinder (84) fixed on the shell (81), one end of the hydraulic cylinder (84) is hinged with the guide plate (83), a quartz crucible (87) is arranged inside the shell (81), a graphite crucible (86) is arranged at the lower side of the quartz crucible (87), the crucible supporting device is used for supporting a quartz crucible (87), a crucible tray (816) is connected to the lower side of the quartz crucible (87), a crucible shaft (810) is connected to the lower end of the crucible tray (816), and a supporting rod sheath (89) is sleeved on the outer side of the crucible shaft (810).

5. The lower furnace chamber of the electric-control integrated movable single crystal furnace as claimed in claim 4, wherein a graphite carbon felt (813) is arranged on the inner side of the bottom end of the shell (81), the middle part of the graphite carbon felt (813) penetrates through the crucible shaft (810), air outlet holes (811) are formed in two sides of the crucible shaft (810), an electrode column (814) is arranged on one side of each air outlet hole (811) opposite to the other side of each air outlet hole, an electrode sheath (812) is connected to the outer side of the electrode column (814), a heater (85) is connected to the upper end of the electrode column (814), and the bottom end of the heater (85) is fixedly connected with the electrode column (814) through an electrode bolt.

6. The electrically-controlled integrated movable lower furnace chamber of the single crystal furnace as claimed in claim 4, wherein the hydraulic cylinder (84) comprises a telescopic rod (841), one end of the telescopic rod (841) is hinged on the surface of the hydraulic cylinder (84), the other end of the telescopic rod (841) is fixedly connected with a sliding block (843), and a sliding groove (842) matched with the sliding block (843) is formed in the guide plate (83).

7. The electrically-controlled integrated movable single crystal furnace lower furnace chamber according to claim 5, characterized in that the air inlet pipeline (6) comprises a pipe body (62), an air inlet (61) is arranged at the upper end of the pipe body (62), an air aspirator (63) is arranged inside the pipe body (62), the air aspirator (63) is fixedly connected through a second fixed block (67) fixed on the inner wall of the pipe body (62), the output end of the air aspirator (63) is fixedly connected with a filter chamber (64), and the lower end of the filter chamber (64) is fixedly connected with an air outlet (65).

8. The electrically-controlled integrated movable single crystal furnace lower furnace chamber according to claim 7, characterized in that an air pressure sensor (88) is arranged inside the lower furnace chamber (8), the output end of the air pressure sensor (88) is connected with the input end of a control panel (9), and the output end of the control panel (9) is respectively connected with the input ends of an alarm (4) and a getter (63).

9. The electrically controlled integrated movable single crystal furnace lower furnace chamber according to claim 5, characterized in that the output end of the heater (85) is connected with the input end of the control panel (9).