CN214923578U - Sand blasting equipment with movable structure for producing polycrystalline silicon wafers - Google Patents
Sand blasting equipment with movable structure for producing polycrystalline silicon wafers Download PDFInfo
- Publication number
- CN214923578U CN214923578U CN202121401789.3U CN202121401789U CN214923578U CN 214923578 U CN214923578 U CN 214923578U CN 202121401789 U CN202121401789 U CN 202121401789U CN 214923578 U CN214923578 U CN 214923578U
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- CN
- China
- Prior art keywords
- face
- sand blasting
- polycrystalline silicon
- blasting equipment
- shell
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000005488 sandblasting Methods 0.000 title claims abstract description 21
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 15
- 235000012431 wafers Nutrition 0.000 title claims description 7
- 238000004519 manufacturing process Methods 0.000 claims abstract description 10
- 239000007921 spray Substances 0.000 claims description 6
- 210000003437 trachea Anatomy 0.000 abstract description 5
- 238000012369 In process control Methods 0.000 abstract description 4
- 238000010965 in-process control Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 8
- 238000001179 sorption measurement Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000004576 sand Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a polycrystalline silicon chip production is with sand blasting equipment that has a movable structure belongs to the sand blasting equipment field, which comprises a housin, the spout has been seted up at the inside up end middle part of casing, the inside both ends of spout all have the screw thread axle through bearing fixed mounting, the one end of screw thread axle is located the inside of the inside cavity of seting up of casing, the side fixed mounting of cavity has the motor, the axle head fixed mounting of motor has the tip in the screw thread axle, the side screw thread of screw thread axle has cup jointed the connecting block, the lower terminal surface fixed mounting of connecting block has the sucking disc, the up end fixed mounting of casing has the vacuum pump, the side fixed mounting of vacuum pump has the trachea, tracheal side sliding connection is in the inside of the through-hole that the casing up end was seted up. This polycrystalline silicon piece production is with sand blasting equipment that has extending structure can drive the screw spindle through the motor and rotate to can drive the sucking disc and remove, can be at the removal of sandblast in-process control work piece, the sandblast is comparatively abundant, improves the result of use.
Description
Technical Field
The utility model relates to a sand blasting equipment field, more specifically say, relate to a polycrystalline silicon chip production is with sand blasting equipment that has a beta structure.
Background
The silicon chip is an important material for manufacturing an integrated circuit, various semiconductor devices can be manufactured by means of photoetching, ion implantation and the like, and the silicon chip needs sand blasting processing through sand blasting equipment in the production process.
Traditional polycrystalline silicon piece production is with sand blasting equipment that has a movable structure in the use, and the work piece is rigid usually, leads to the sandblast abundant inadequately, and the result of use is relatively poor, and traditional polycrystalline silicon piece production is fixed with sand blasting equipment that has a movable structure when to the work piece, carries out the centre gripping through anchor clamps and fixes, damages the work piece easily in fixed process, and fixed effect is relatively poor.
SUMMERY OF THE UTILITY MODEL
To the problem that exists among the prior art, the utility model aims to provide a polycrystalline silicon piece production is with sand blasting equipment that has active structure can drive the screw spindle through the motor and rotate to can drive the sucking disc and remove, can be at the removal of sandblast in-process control work piece, the sandblast is comparatively abundant, improves the result of use, can make the sucking disc produce the adsorption affinity through the vacuum pump, thereby can adsorb the work piece and fix, avoids the work piece to damage in fixed process, improves fixed effect.
In order to solve the above problems, the utility model adopts the following technical proposal.
A sand blasting device with a movable structure for producing polycrystalline silicon wafers comprises a shell, wherein a sliding groove is formed in the middle of the upper end face in the shell, threaded shafts are fixedly mounted at two ends in the sliding groove through bearings, one end of each threaded shaft is located in a cavity formed in the shell, a motor is fixedly mounted on the side face of the cavity, the shaft end of the motor is fixedly mounted at the end part of each threaded shaft, a connecting block is sleeved on the side face of each threaded shaft in a threaded manner, a sucking disc is fixedly mounted on the lower end face of the connecting block, a vacuum pump is fixedly mounted on the upper end face of the shell, an air pipe is fixedly mounted on the side face of the vacuum pump, the side face of the air pipe is slidably connected in a through hole formed in the upper end face of the shell, one end of the air pipe is fixedly mounted on the upper end face of the sucking disc, a spray head is uniformly mounted on the lower end face in the shell, and the threaded shafts can be driven to rotate through the motor, thereby can drive the sucking disc and remove, can be at the removal of sandblast in-process control work piece, the sandblast is comparatively abundant, improves the result of use, can make the sucking disc produce the adsorption affinity through the vacuum pump to can fix the work piece absorption, avoid the work piece to damage at fixed in-process, improve fixed effect.
Furthermore, the diameter of the sucking disc is not larger than the width of the workpiece, so that the phenomenon that the workpiece is too small in size and cannot be adsorbed by the sucking disc is avoided, and fixation is not influenced.
Further, the distance between the upper end face of the spray head and the lower end face of the suction disc is not smaller than the thickness of the workpiece, so that the workpiece is prevented from being placed in an interference mode.
Furthermore, the trachea is made for the elastic hose, and the trachea can follow the sucking disc and remove to avoid influencing the adsorption affinity of sucking disc.
Furthermore, a baffle is fixedly mounted on one side of the lower end face in the shell, the lower end of the opening of the shell can be shielded through the baffle, sand in the sand blasting process is prevented from flowing out of the shell, and the using effect is improved.
Compared with the prior art, the utility model has the advantages of:
(1) this scheme can drive the threaded spindle through the motor and rotate to can drive the sucking disc and remove, can be at the removal of sandblast in-process control work piece, the sandblast is comparatively abundant, improves the result of use, can make the sucking disc produce the adsorption affinity through the vacuum pump, thereby can adsorb the work piece and fix, avoids the work piece to damage at fixed in-process, improves fixed effect.
(2) The diameter of sucking disc is not more than the width of work piece, avoids work piece undersize and can not be adsorbed by the sucking disc to it is fixed to avoid influencing.
(3) The distance between the upper end surface of the spray head and the lower end surface of the suction disc is not less than the thickness of the workpiece, so that the workpiece is prevented from being placed in a hindrance mode.
(4) The trachea is made for the elastic hose, and the trachea can follow the sucking disc and remove to avoid influencing the adsorption affinity of sucking disc.
(5) The baffle is fixedly mounted on one side of the lower end face in the shell, the lower end of the opening of the shell can be shielded through the baffle, sand in the sand blasting process is prevented from flowing out of the shell, and the using effect is improved.
Drawings
Fig. 1 is a front sectional view of the present invention;
fig. 2 is a side sectional view of the present invention;
fig. 3 is a top view of the present invention.
The middle part of the figure illustrates:
the device comprises a shell 1, a sliding groove 2, a threaded shaft 3, a cavity 4, a motor 5, a connecting block 6, a sucking disc 7, a vacuum pump 8, an air pipe 9, a through hole 10, a spray head 11 and a baffle 12.
Detailed Description
The technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiment of the present invention; obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by those skilled in the art without any inventive work are within the scope of the present invention based on the embodiments of the present invention.
Referring to fig. 1-3, a sand blasting apparatus with a movable structure for producing a polysilicon chip comprises a housing 1, referring to fig. 1, 2 and 3, a chute 2 is formed in the middle of the upper end face of the interior of the housing 1, a threaded shaft 3 is fixedly mounted at both ends of the interior of the chute 2 through bearings, one end of the threaded shaft 3 is located inside a cavity 4 formed in the interior of the housing 1, a motor 5 is fixedly mounted on the side face of the cavity 4, the model is Y80M1-2, the motor 5 is connected with a switch and an external power supply in series through a wire, the shaft end of the motor 5 is fixedly mounted at the end of the threaded shaft 3, the threaded shaft 3 can be driven to rotate under the action of the motor 5, so as to drive a sucker 7 to move horizontally, the side face of the threaded shaft 3 is sleeved with a connecting block 6, a sucker 7 is fixedly mounted at the lower end face of the connecting block 6, and the workpiece can be sucked through the sucker 7, so that the fixing is convenient, the diameter of the sucking disc 7 is not larger than the width of a workpiece, the phenomenon that the workpiece is too small to be adsorbed by the sucking disc 7 and not to be influenced and fixed is avoided, the vacuum pump 8 is fixedly arranged on the upper end face of the shell 1 and has the model of LC-XD-020, the vacuum pump 8 is connected with a switch and an external power supply in series through a lead, the air pipe 9 is fixedly arranged on the side face of the vacuum pump 8, the side face of the air pipe 9 is connected with the inside of a through hole 10 formed in the upper end face of the shell 1 in a sliding manner, one end of the air pipe 9 is fixedly arranged on the upper end face of the sucking disc 7, the air pipe 9 and the air in the sucking disc 7 can be exhausted through the vacuum pump, so that the sucking disc 7 generates adsorption force, the workpiece can be adsorbed and fixed conveniently, the air pipe 9 is made of an elastic hose, the air pipe 9 can move along with the sucking disc 7 and not to be influenced, the adsorption force of the sucking disc 7 is avoided, the nozzles 11 are uniformly arranged on the lower end face in the shell 1, can spout sand grain to work piece lower extreme face through shower nozzle 11, carry out sandblast processing to the work piece, the distance between shower nozzle 11 up end and the sucking disc 7 lower extreme face is not less than the thickness of work piece to avoid hindering placing of work piece, the inside lower extreme face one side fixed mounting of casing 1 has baffle 12, can shelter from the opening part lower extreme of casing 1 through baffle 12, avoids the sand grain of sandblast in-process to flow out casing 1, improves the result of use.
During the installation, align work piece and 7 lower extremes of sucking disc, then with the upper end of work piece and 7 lower terminal surface contacts of sucking disc, 8 work of control vacuum pump, make 7 production adsorption affinity of sucking disc can fix the instrument under vacuum pump 8's effect, it is comparatively simple to fix, add man-hour, 11 work of control shower nozzle, shower nozzle 11 spouts sand grain to terminal surface under the work piece, then 5 work of control motor, motor 5 drives threaded shaft 3 and rotates, threaded shaft 3 passes through connecting block 6 and drives 7 removals of sucking disc, can drive the work piece and remove, thereby make the sandblast abundant, and the use effect is improved.
The above description is only the preferred embodiment of the present invention; the scope of the present invention is not limited thereto. Any person skilled in the art should also be able to cover the technical scope of the present invention by replacing or changing the technical solution and the improvement concept of the present invention with equivalents and modifications within the technical scope of the present invention.
Claims (5)
1. The utility model provides a polycrystalline silicon piece production is with sand blasting equipment that has a movable structure, includes casing (1), its characterized in that: the vacuum pump is characterized in that a sliding groove (2) is formed in the middle of the upper end face of the interior of the shell (1), threaded shafts (3) are fixedly mounted at two ends of the interior of the sliding groove (2) through bearings, one end of each threaded shaft (3) is located inside a cavity (4) formed in the shell (1), a motor (5) is fixedly mounted on the side face of each cavity (4), the shaft ends of the motors (5) are fixedly mounted at the end portions of the threaded shafts (3), a connecting block (6) is sleeved on the side face of each threaded shaft (3) in a threaded manner, a sucking disc (7) is fixedly mounted on the lower end face of each connecting block (6), a vacuum pump (8) is fixedly mounted on the upper end face of the shell (1), an air pipe (9) is fixedly mounted on the side face of each vacuum pump (8), and the side face of each air pipe (9) is slidably connected inside a through hole (10) formed in the upper end face of the shell (1), one end of the air pipe (9) is fixedly arranged on the upper end face of the sucker (7), and the lower end face of the inside of the shell (1) is uniformly provided with the spray heads (11).
2. The sand blasting equipment with the movable structure for producing the polycrystalline silicon wafers as claimed in claim 1, wherein: the diameter of the sucker (7) is not larger than the width of the workpiece.
3. The sand blasting equipment with the movable structure for producing the polycrystalline silicon wafers as claimed in claim 1, wherein: the distance between the upper end face of the spray head (11) and the lower end face of the sucker (7) is not less than the thickness of a workpiece.
4. The sand blasting equipment with the movable structure for producing the polycrystalline silicon wafers as claimed in claim 1, wherein: the air pipe (9) is made of an elastic hose.
5. The sand blasting equipment with the movable structure for producing the polycrystalline silicon wafers as claimed in claim 1, wherein: a baffle (12) is fixedly arranged on one side of the lower end face in the shell (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121401789.3U CN214923578U (en) | 2021-06-23 | 2021-06-23 | Sand blasting equipment with movable structure for producing polycrystalline silicon wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121401789.3U CN214923578U (en) | 2021-06-23 | 2021-06-23 | Sand blasting equipment with movable structure for producing polycrystalline silicon wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214923578U true CN214923578U (en) | 2021-11-30 |
Family
ID=79049738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121401789.3U Expired - Fee Related CN214923578U (en) | 2021-06-23 | 2021-06-23 | Sand blasting equipment with movable structure for producing polycrystalline silicon wafers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214923578U (en) |
-
2021
- 2021-06-23 CN CN202121401789.3U patent/CN214923578U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20211130 |