CN214898377U

CN214898377U - Bernoulli sucker device

Info

Publication number: CN214898377U
Application number: CN202121490414.9U
Authority: CN
Inventors: 续振林; 李山水; 李毅峰; 朱石宝; 陈妙芳
Original assignee: Xiamen Jude Electronic Technology Co ltd; Xiamen Flexible Electronics Research Institute Co ltd
Current assignee: Xiamen Jude Electronic Technology Co ltd; Xiamen Flexible Electronics Research Institute Co ltd
Priority date: 2021-07-01
Filing date: 2021-07-01
Publication date: 2021-11-26
Anticipated expiration: 2031-07-01

Abstract

The utility model discloses a Bernoulli sucker device, which comprises a bottom plate, an air bag, a Bernoulli sucker body, a Bernoulli sucker, a spring connecting piece and a gas pipe joint; the Bernoulli sucker body is pressed on the bottom plate through the air bag, and the Bernoulli sucker is arranged on the Bernoulli sucker body and connected with the air pipe joint; the Bernoulli chuck is provided with a plurality of vent holes; the number of the spring connecting pieces is multiple, the spring connecting pieces are distributed on the lower surface of the Bernoulli chuck, and the bottom ends of the spring connecting pieces are connected to the bottom plate; the Bernoulli sucker body and the Bernoulli sucker are jacked away from the bottom plate for certain displacement when the air bag is inflated, and reset through the rebound action of the spring connecting piece after the air bag stops inflating. The utility model discloses can realize the automatic unloading operation of going up of product, equipment operation and control are more nimble, efficient.

Description

Bernoulli sucker device

Technical Field

The utility model relates to a semiconductor industry automation equipment technical field, more specifically relates to a bernoulli suction cup device.

Background

Aiming at some workpiece materials which are thin in thickness, extremely precise and fragile, such as wafers in the semiconductor industry, battery plates in the photovoltaic industry and the like, the workpiece materials are not suitable for manual operation, the efficiency is low, and the processing quality of products is influenced, so that the material loading and unloading operation of the materials is realized by matching a sucker device with a material moving mechanism such as a mechanical arm.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to overcome prior art's is not enough, provides a bernoulli's sucking disc device, can also realize the unloading of the material on the silo with material jack-up to the silo when the material.

In order to achieve the above purpose, the solution of the present invention is:

a Bernoulli chuck device comprises a bottom plate, an air bag, a Bernoulli chuck body, a Bernoulli chuck, a spring connecting piece and an air pipe joint; the Bernoulli sucker body is pressed on the bottom plate through the air bag, and the Bernoulli sucker is arranged on the Bernoulli sucker body and connected with the air pipe joint; the Bernoulli chuck is provided with a plurality of vent holes; the number of the spring connecting pieces is multiple, the spring connecting pieces are distributed on the lower surface of the Bernoulli chuck, and the bottom ends of the spring connecting pieces are connected to the bottom plate; the Bernoulli sucker body and the Bernoulli sucker are jacked away from the bottom plate for certain displacement when the air bag is inflated, and reset through the rebound action of the spring connecting piece after the air bag stops inflating.

Further, the bernoulli chuck is divided into a jig chuck and a material chuck, the material chuck is located on the inner ring of the jig chuck, and the jig chuck and the material chuck are all provided with a plurality of vent holes.

Further, the utility model discloses still include the material tool, the material tool includes tool body, padlock and material vacancy groove, the tool body be loop configuration and with the tool sucking disc is corresponding, the material vacancy groove is located the inner circle of tool body is corresponding with the material sucking disc, the padlock distributes on the tool body to can be attached with the cooperation lock of the padlock draw-in groove on the material hanger when rotatory certain angle.

Furthermore, a plurality of air vents on the jig sucker are distributed in a circular ring shape.

Furthermore, the utility model also comprises a rotary lock-attaching driving component; the center of the bottom plate is also provided with a rotary shaft sleeve; the rotary locking driving assembly comprises a W rotating shaft, a pushing support rod, a pushing bearing, a bearing pressing plate, a rotary bearing, a linear motor and a pushing block; the bottom plate is sleeved on the W rotating shaft through the rotating shaft sleeve, the W rotating shaft is connected to the bearing pressing plate through the rotating bearing, the upper end of the pushing support rod is connected with the edge of the Bernoulli sucker, and the lower end of the pushing support rod is connected with the pushing bearing; the linear motor is arranged on the bearing pressing plate and connected with the pushing block; the pushing block is provided with a bearing pushing hole; the pushing shaft is inserted in the bearing pushing hole. The rotary lock attachment driving assembly can also be a rotary motor module, and the bottom plate is connected to the rotary motor module and can rotate under the driving of the rotary motor module.

After the technical scheme is adopted, the utility model discloses Bernoulli's sucking disc device has following beneficial effect:

the Bernoulli chuck in the Bernoulli chuck device of the utility model is arranged on the Bernoulli chuck body and connected with the air pipe joint; the Bernoulli sucker body is pressed on the bottom plate through the air bag, a plurality of spring connecting pieces are distributed on the lower surface of the Bernoulli sucker, and the bottom end of the Bernoulli sucker is connected to the bottom plate; the Bernoulli sucker body and the Bernoulli sucker are jacked away from the bottom plate for certain displacement when the air bag is inflated, and reset through the resilience effect of the spring connecting piece after the air bag stops inflating, so that material displacement on the Bernoulli sucker body is realized, automatic feeding and discharging are realized in an auxiliary mode, and the equipment is more flexible to operate and control and high in efficiency.

Drawings

Fig. 1 is an overall perspective view of the bernoulli chuck apparatus of the present invention.

Fig. 2 is a partial perspective view of the bernoulli chuck apparatus of the present invention.

Fig. 3 is a partially exploded view of the bernoulli chuck apparatus of the present invention.

Fig. 4 is a perspective view of the rotary lock driving assembly of the present invention.

Fig. 5 is a side view of the bernoulli chuck apparatus flipped to a vertical position.

Fig. 6 is a perspective view of the material jig of the present invention.

Fig. 7 is a perspective view of the electroplating hanger of the present invention.

Detailed Description

In order to further explain the technical solution of the present invention, the present invention is explained in detail by the following embodiments.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "X", "Y", "Z", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "secured" are to be construed broadly and can, for example, be connected or detachably connected or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above should not be understood to necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.

As shown in fig. 1 to 6, the bernoulli chuck apparatus 100 of the present embodiment comprises a base plate 1, an air bag 2, a bernoulli chuck body 3, a bernoulli chuck 4, a spring connector 5 and an air pipe connector 6; the Bernoulli sucker 3 is pressed on the bottom plate 1 through the air bag 2, and the Bernoulli sucker 4 is arranged on the Bernoulli sucker 3 and connected with the air pipe joint 6; the Bernoulli chuck 4 is provided with a plurality of vent holes 43; the number of the spring connecting pieces 5 is multiple, the spring connecting pieces are distributed on the lower surface of the Bernoulli chuck 4, and the bottom ends of the spring connecting pieces are connected to the bottom plate 1; the Bernoulli chuck body 3 and the Bernoulli chuck 4 are jacked away from the bottom plate 1 for certain displacement when the air bag 2 is inflated, and reset through the rebound action of the spring connecting piece 5 after the air bag 2 stops inflating. Therefore, the material on the Bernoulli chuck 4 can be captured by the next station to realize displacement.

According to the bernoulli principle, when the air pipe joint 6 of the bernoulli chuck device 100 of the present embodiment is connected with compressed air, the air vents of the bernoulli chuck 4 generate uniform and thin strong air flow on the working surface, at this time, the air flow rate between the material placed on the bernoulli chuck 4 and the chuck is greater than the air flow rate on the upper part of the material, and by utilizing the principle that the faster the bernoulli fluid speed is, the smaller the pressure is, the pressure difference is generated on the upper and lower sides of the workpiece, so that the workpiece is adsorbed on the top of the bernoulli chuck 4.

The Bernoulli chuck 4 is divided into a jig chuck 41 and a material chuck 42, the material chuck 42 is positioned at the inner ring of the jig chuck 41, and a plurality of vent holes 43 are respectively arranged on the jig chuck 41 and the material chuck 42; the air holes 43 on the jig suction disc 41 are distributed in a circular ring shape. The jig suction cup 41 is used for adsorbing a material jig, and the material suction cup 42 is used for adsorbing a material.

As shown in fig. 6, the utility model discloses still can include material tool 7, material tool 7 includes tool body 71, fastening lock 72 and material vacancy groove 73, tool body 71 be the loop configuration and with tool sucking disc 41 is corresponding, material vacancy groove 73 is located tool body 71's inner circle is corresponding with material sucking disc 42, fastening lock 73 distributes on tool body 71 to can cooperate the lock with fastening lock draw-in groove 201 on the next station when rotatory certain angle and attach, if can with fastening lock draw-in groove 201 cooperation lock on the material hanger 200 of fig. 7.

As shown in fig. 3 and 4, in order to lock the material fixture 7 to the next station, the present invention further includes a rotary locking driving assembly 8; and the center of the bottom plate 1 is also provided with a rotating shaft sleeve 12; the rotary locking driving assembly 8 comprises a W rotating shaft 81, a pushing support rod 82, a pushing bearing 83, a bearing pressing plate 84, a rotating bearing 85, a linear motor 86 and a pushing block 87; the bottom plate 1 is sleeved on the W rotating shaft 81 through the rotating shaft sleeve 12, the W rotating shaft 81 is connected to the bearing pressing plate 84 through the rotating bearing 85, the upper end of the pushing support rod 82 is connected with the edge of the Bernoulli sucker 3, and the lower end of the pushing support rod is connected with the pushing bearing 85; the linear motor 86 is arranged on the bearing pressing plate 84 and connected with the pushing block 87; the pushing block 87 is provided with a bearing pushing hole 872; the push bearing 83 is inserted into the bearing push hole 872. The rotary lock attachment driving assembly can also be a rotary motor module, and the bottom plate is connected to the rotary motor module and can rotate under the driving of the rotary motor module.

Referring to fig. 1 to 7, a vertical trough 202 on a wafer plating rack 200 is illustrated as an example in the following working position, to illustrate the process of feeding and discharging material from the vertical trough 202 by the bernoulli chuck device, so as to illustrate the working principle of the bernoulli chuck device of the present invention:

the feeding process comprises the following steps:

1. when the tool sucker 41 sucks the material tool 7, the material sucker 43 sucks the wafer material;

2. the bernoulli chuck apparatus is turned over by 90 degrees, as shown in fig. 5 in the vertical direction, by the associated driving mechanism so as to be opposite to the vertical trough 202 on the wafer plating rack 200;

3. the bernoulli chuck apparatus is leaned against the vertical trough 202 on the wafer plating rack 200 by a relevant driving mechanism;

4. the air bag 2 is inflated to push the material jig 7 against the wafer electroplating hanger 200, and the fastening locks 72 of the material jig 7 are sleeved into the fastening lock slots 201 of the corresponding wafer electroplating hanger 200 one by one;

6. the linear motor 86 drives the pushing block 87 to drive the pushing bearing 83 and the pushing support rod 82 to move forward, so that the jig sucker 41 rotates forward around the W rotating shaft 81 by a fixed small angle, the material jig 7 is locked on the electroplating hanger 200, and meanwhile, the wafer material is embedded into the vertical trough 202 to complete feeding;

the blanking process comprises the following steps:

1. the air bag 2 is inflated, the tool sucker 41 and the material sucker 42 act simultaneously, the tool sucker 41 sucks the material tool 7 on the wafer electroplating hanger 200, and the material sucker 42 sucks the wafer material on the wafer electroplating hanger 200;

2. the linear motor 86 drives the pushing block 87 to drive the pushing bearing 83 and the pushing support rod 82 to move reversely, so that the jig suction disc 41 rotates reversely around the W rotating shaft 81 for a fixed small angle, and the material jig 7 is separated from the electroplating hanger 200;

3. the air bag 2 stops air intake, under the resilience action of the spring connecting piece 5, the jig sucker 41 sucks the material jig 7, the material sucker 42 sucks the wafer material and separates the wafer material from the wafer electroplating hanger 200, and discharging is completed.

The above embodiments and drawings are not intended to limit the form and style of the present invention, and any suitable changes or modifications made by those skilled in the art should not be construed as departing from the scope of the present invention.

Claims

1. A bernoulli chuck apparatus, comprising: comprises a bottom plate, an air bag, a Bernoulli sucker body, a Bernoulli sucker, a spring connecting piece and an air pipe joint; the Bernoulli sucker body is pressed on the bottom plate through the air bag, and the Bernoulli sucker is arranged on the Bernoulli sucker body and connected with the air pipe joint; the Bernoulli chuck is provided with a plurality of vent holes; the number of the spring connecting pieces is multiple, the spring connecting pieces are distributed on the lower surface of the Bernoulli chuck, and the bottom ends of the spring connecting pieces are connected to the bottom plate; the Bernoulli sucker body and the Bernoulli sucker are jacked away from the bottom plate for certain displacement when the air bag is inflated, and reset through the rebound action of the spring connecting piece after the air bag stops inflating.

2. A bernoulli chuck apparatus according to claim 1, wherein: the Bernoulli sucker comprises a jig sucker and a material sucker, wherein the material sucker is located on the inner ring of the jig sucker, and a plurality of air holes are formed in the jig sucker and the material sucker.

3. A bernoulli chuck apparatus according to claim 2, wherein: the material hanging tool is characterized by further comprising a material jig, wherein the material jig comprises a jig body, a buckling lock and a material empty groove, the jig body is of an annular structure and corresponds to the jig sucker, the material empty groove is located in the inner ring of the jig body and corresponds to the material sucker, and the buckling lock is distributed on the jig body and can be matched with the buckling lock clamping groove on the material hanging tool to lock when the material hanging tool rotates for a certain angle.

4. A bernoulli chuck apparatus according to claim 2, wherein: a plurality of air vents on the jig sucker are distributed in a circular ring shape.

5. A Bernoulli chuck assembly according to any one of claims 1 to 4, wherein: the rotary lock is attached with a driving component; the center of the bottom plate is also provided with a rotary shaft sleeve;

the rotary locking driving assembly comprises a W rotating shaft, a pushing support rod, a pushing bearing, a bearing pressing plate, a rotary bearing, a linear motor and a pushing block; the bottom plate is sleeved on the W rotating shaft through the rotating shaft sleeve, the W rotating shaft is connected to the bearing pressing plate through the rotating bearing, the upper end of the pushing support rod is connected with the edge of the Bernoulli sucker, and the lower end of the pushing support rod is connected with the pushing bearing; the linear motor is arranged on the bearing pressing plate and connected with the pushing block; the pushing block is provided with a bearing pushing hole; the pushing shaft is inserted in the bearing pushing hole.

6. A Bernoulli chuck assembly according to any one of claims 1 to 4, wherein: still attach drive assembly including rotatory lock, rotatory lock attaches drive assembly and is the rotating electrical machines module, the bottom plate is connected on the rotating electrical machines module, can the rotating electrical machines module drive is rotatory down.