CN214898376U - Sucking disc turning device of loading and unloading equipment - Google Patents
Sucking disc turning device of loading and unloading equipment Download PDFInfo
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- CN214898376U CN214898376U CN202121488232.8U CN202121488232U CN214898376U CN 214898376 U CN214898376 U CN 214898376U CN 202121488232 U CN202121488232 U CN 202121488232U CN 214898376 U CN214898376 U CN 214898376U
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- 238000007599 discharging Methods 0.000 claims abstract description 51
- 239000000463 material Substances 0.000 claims description 43
- 238000003825 pressing Methods 0.000 claims description 11
- 230000007306 turnover Effects 0.000 abstract description 11
- 238000009713 electroplating Methods 0.000 description 31
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000009471 action Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
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Abstract
The utility model discloses a sucker turnover device of feeding and discharging equipment, which comprises a P-axis turnover driving component, a turnover supporting component and a feeding and discharging sucker component; the P-axis overturning driving component is provided with a P-axis overturning shaft, and the overturning supporting component is pivoted on the P-axis overturning shaft; the overturning support assembly is provided with a W rotating shaft; the feeding and discharging sucker assembly is connected to the W rotating shaft; the feeding and discharging sucker assembly can be driven to be in a horizontal or vertical state by the P-axis overturning driving assembly when the overturning supporting assembly is driven by the P-axis overturning driving assembly to overturn along the P axis, and the overturning supporting assembly drives the feeding and discharging sucker assembly to rotate at a small angle, so that the feeding or discharging of a product can be completed on a vertical target trough; wherein, the P-direction overturning shaft is vertical to the W rotating shaft. The utility model discloses can realize the automatic unloading operation of going up of wafer class product, equipment operation and control are more nimble, efficient.
Description
Technical Field
The utility model relates to a semiconductor industry automation equipment technical field, more specifically relates to a go up sucking disc turning device of unloading equipment.
Background
The wafer is a silicon wafer manufactured by a silicon semiconductor integrated circuit, and is called a wafer because the shape of the wafer is circular, a layer of conductive metal is plated on the wafer, and the conductive metal layer is processed to manufacture a conductive circuit. In semiconductor industry automation processes, it is often desirable to flip the wafer up and down about its center. During the turning process, the requirement of high concentricity between the wafer center and the rotating shaft center is required, and the accuracy of the turning angle in place is also required. For example, an electroplating process is one of the key processes for manufacturing these metal layers, and the wafer electroplating loading and unloading operation of the conventional wafer electroplating apparatus, especially the vertical wafer electroplating apparatus, usually adopts manual operation, which results in low wafer loading and unloading efficiency, and meanwhile, the manual operation also affects the wafer electroplating quality.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the not enough of prior art, provide a go up sucking disc turning device of unloading equipment, can realize going on unloading to vertical target silo automatically.
In order to achieve the above purpose, the solution of the present invention is:
a sucker overturning device of feeding and discharging equipment comprises a P-axis overturning driving assembly, an overturning supporting assembly and a feeding and discharging sucker assembly;
the P-axis overturning driving component is provided with a P-axis overturning shaft, and the overturning supporting component is pivoted on the P-axis overturning shaft; the overturning support assembly is provided with a W rotating shaft; the feeding and discharging sucker assembly is connected to the W rotating shaft; the feeding and discharging sucker assembly can be driven to be in a horizontal or vertical state by the P-axis overturning driving assembly when the overturning supporting assembly is driven by the P-axis overturning driving assembly to overturn along the P axis, and the overturning supporting assembly drives the feeding and discharging sucker assembly to rotate at a small angle, so that the feeding or discharging of a product can be completed on a vertical target trough; wherein, the P-direction overturning shaft is vertical to the W rotating shaft.
Furthermore, the P-axis overturning driving assembly further comprises a fixed frame, a motor fixing plate, a screw rod motor, a floating plate and a guide pillar; the P-direction overturning shaft is arranged at the top of the fixing frame; the motor fixing plate is fixedly connected to the fixing frame, the lead screw motor is arranged on the bottom surface of the motor fixing plate from bottom to top, and the floating plate is provided with a lead screw matching hole, a guide pillar hole and a connecting rod pivot and is connected with a lead screw of the lead screw motor in a matching mode through the lead screw matching hole.
Furthermore, the P-axis overturning driving assembly further comprises an X-direction sliding table which is connected to the bottom of the fixing frame and can not slide in the X direction, so that the P-axis overturning driving assembly is close to or far away from the vertical target trough.
Furthermore, the overturning support assembly further comprises a support frame, an overturning driving connecting rod, a bearing pressing plate, a P-axis connecting piece, a rotating bearing, a linear motor and a pushing block; the supporting frame is used for supporting the bearing pressing plate; the bearing pressing plate is further connected to the P-direction overturning shaft through the P-axis connecting piece, and two ends of the overturning driving connecting rod are respectively connected with the connecting rod pivot and the supporting frame; the W rotating shaft is connected to the bearing pressing plate through the rotating bearing and is used for connecting the feeding and discharging sucker assembly; the linear motor is arranged on the bearing pressing plate and connected with the pushing block; and the pushing block is provided with a bearing pushing hole.
Further, the feeding and discharging sucker assembly further comprises a rotating plate, an air bag, a Bernoulli sucker body, a jig sucker, a material sucker, a spring connecting piece, an air pipe joint, a rotating support rod and a bearing; the rotary plate is sleeved on the W rotary shaft, the Bernoulli sucker body is pressed on the rotary plate through the air bag, the jig sucker and the material sucker are arranged on the Bernoulli sucker body, and the material sucker is positioned at the inner ring of the jig sucker and connected with the air pipe connector; a plurality of vent holes are distributed on the jig sucker in a circular shape, and a plurality of vent holes are distributed on the material sucker; the number of the spring connecting pieces is multiple, the spring connecting pieces are distributed on the lower surface of the material sucker, and the bottom ends of the spring connecting pieces are connected to the rotating plate; the upper end of the rotary supporting rod is connected with the edge of the Bernoulli sucker, the lower end of the rotary supporting rod is connected with the bearing, and the bearing is inserted into the bearing push hole. The feeding and discharging sucker assembly sucks the wafer jig and the wafer materials by adopting the Bernoulli principle, the wafer jig and the wafer materials are separated from the wafer jig to the electroplating hanger or separated from the electroplating hanger under the action of the air bag, the overturning supporting assembly drives the Bernoulli sucker assembly to rotate around the W rotating shaft by a certain small angle, the wafer jig, the wafer materials and the electroplating hanger are installed and disassembled, and the complex operation of manual feeding and discharging of the original electroplating hanger is replaced.
After the scheme is adopted, the utility model discloses unloading equipment has following beneficial effect in the automation:
the utility model discloses a sucking disc turning device, when arranging vertical target silo mesh side in, can realize going on unloading to vertical target silo automatically, go up unloading sucking disc subassembly and connect on P axle upset drive assembly through the upset supporting component, make P axle upset drive assembly drive upset supporting component when overturning along P axle, can drive and go up unloading sucking disc subassembly and switch in horizontality and vertical state, the upset supporting component then can realize fixed angle to the rotation of last unloading sucking disc subassembly, thereby can will go up the wafer tool and the wafer material loading on the unloading sucking disc subassembly and lock and attach to vertical target silo, perhaps follow the wafer tool that the lock attached on vertical target silo and wafer material and carry out the unblock unloading, thereby realize the automation mechanized operation, equipment operation and control are more nimble, high efficiency.
Drawings
Fig. 1 is a perspective view of the automatic feeding and discharging device for turning.
Fig. 2 is a side view of fig. 1.
Fig. 3 is a schematic diagram of the P-axis flip drive assembly in fig. 2 in a flipped state.
Fig. 4 is a perspective view of the P-axis turnover driving assembly of the present invention.
Fig. 5 is a perspective view of the turning support assembly of the present invention.
Fig. 6 is a perspective view of the feeding and discharging suction cup assembly of the present invention.
Fig. 7 is an exploded view of the feeding and discharging chuck assembly of the present invention.
Fig. 8 is a perspective view of the wafer jig of the present invention.
Fig. 9 is a use state diagram of the automatic feeding and discharging mechanism of the present invention.
Detailed Description
In order to further explain the technical solution of the present invention, the present invention is explained in detail by the following embodiments.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "X", "Y", "Z", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "secured" are to be construed broadly and can, for example, be connected or detachably connected or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above should not be understood to necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.
As shown in fig. 1 to 8, the suction cup turning device 100 of the loading and unloading apparatus of the present invention includes a P-axis turning driving assembly 4, a turning supporting assembly 5, and a loading and unloading suction cup assembly 6;
the P-axis overturning driving component 4 is provided with a P-axis overturning shaft 422, and the overturning supporting component 5 is pivoted on the P-axis overturning shaft 422; the turning support assembly 5 has a W rotation shaft 56; the feeding and discharging sucker assembly 6 is connected to the W rotating shaft 56; the P-axis overturning driving component 4 drives the overturning supporting component 5 to drive the feeding and discharging sucker component 6 to be in a horizontal or vertical state when overturning along the P axis, and the overturning supporting component 5 drives the feeding and discharging sucker component 6 to rotate at a small angle, so that the feeding or discharging of a product can be completed on the vertical target trough 200; the P-direction flip axis is perpendicular to the W-axis of rotation 56.
As a more preferred or more specific implementation of this embodiment:
as shown in fig. 4, the P-axis flipping driving assembly 4 further includes a fixing frame 42, a motor fixing plate 43, a lead screw motor 44, a floating plate 45 and a guide post 46; the P-direction turning shaft 422 is arranged at the top of the fixing frame 42; the motor fixing plate 43 is fixedly connected to the fixing frame 42, the lead screw motor 44 is arranged on the bottom surface of the motor fixing plate 43 from bottom to top, and the floating plate 45 is provided with a lead screw matching hole 451, a guide post hole 452 and a connecting rod pivot 453, and is matched and connected with a lead screw 441 of the lead screw motor 44 through the lead screw matching hole 451. When the screw motor 44 drives the screw 441 to rotate forward or backward, the floating plate 45 is driven to ascend or descend along the guide post 46, so as to jack up one side of the turnover support assembly 5 to turn over for handling a vertical state, or to apply a pulling force to one side of the turnover support assembly 5 to return to a horizontal state.
The P-axis turnover driving assembly further includes an X-direction sliding table 41, and the X-direction sliding table 41 is connected to the bottom of the fixed frame 42 and can slide in the X direction so as to be close to or far from the vertical target trough 201. During assembly, the X-direction sliding table 41 can be erected on the X-direction linear slide rail 31, and driven by the X-direction lead screw motor 32 to slide along the X-direction linear slide rail 31, so as to be close to or far away from the vertical target trough 201.
As shown in fig. 5, the turning support assembly 5 further includes a support frame 51, a turning driving link 52, a bearing press plate 53, a P-axis connector 54, a rotary bearing 55, a linear motor 57 and a pushing block 58; the supporting frame 51 is used for supporting the bearing pressing plate 53; the bearing pressure plate 53 is further connected to the P-direction turning shaft 422 through the P-axis connecting member 54, and both ends of the turning driving link 52 are respectively connected to the link pivot 453 and the support frame 51; the W rotating shaft 56 is connected to the bearing pressure plate 53 through the rotating bearing 55 and is used for connecting the feeding and discharging sucker assembly 6; the linear motor 57 is arranged on the bearing pressure plate 53 and connected with the pushing block 58; the pushing block 58 is provided with a bearing pushing hole 582.
As shown in fig. 6 to 7, the feeding and discharging chuck assembly 6 further includes a rotating plate 61, an air bag 62, a bernoulli chuck body 63, a jig chuck 64, a material chuck 65, a spring connector 66, an air pipe joint 67, a rotating rod 68 and a bearing 69; the rotating plate 61 is sleeved on the W rotating shaft 56, the Bernoulli chuck body 63 is pressed on the rotating plate 61 through the air bag 62, the jig chuck 64 and the material chuck 65 are arranged on the Bernoulli chuck body 63, and the material chuck 65 is positioned at the inner ring of the jig chuck 64 and connected with the air pipe joint 67; a plurality of vent holes are distributed on the jig sucker 64 in a circular shape, and a plurality of vent holes are distributed on the material sucker 65; the number of the spring connecting pieces 66 is multiple, the spring connecting pieces are distributed on the lower surface of the material sucking disc 65, and the bottom ends of the spring connecting pieces are connected to the rotating plate 61; the upper end of the rotating support rod 68 is connected with the edge of the bernoulli chuck body 63, the lower end of the rotating support rod is connected with the bearing 69, and the bearing 69 is inserted into the bearing pushing hole 582. According to the Bernoulli principle, when the feeding and discharging sucker assembly 6 is connected with compressed air through the air pipe joint 67, the air holes of the sucker (comprising the jig sucker 64 and the material sucker 65) can generate uniform and thin strong air flow on the working surface, at the moment, the air flow rate between the workpiece (comprising a wafer jig and wafer materials) placed on the sucker and the sucker is greater than the air flow rate on the upper part of the workpiece, and the pressure difference can be generated on the upper side and the lower side of the workpiece by utilizing the principle that the faster the Bernoulli fluid speed is, the smaller the pressure is, so that the workpiece is adsorbed on the top of the sucker. The feeding and discharging sucker assembly 6 sucks the wafer jig 7 and the wafer materials by adopting the Bernoulli principle, the wafer jig and the wafer materials are separated from the wafer jig to the electroplating hanger 200 or from the electroplating hanger 200 under the action of the air bag 62, the overturning supporting assembly 5 drives the feeding and discharging sucker assembly 6 to rotate around the W rotating shaft 56 by a certain small angle, the wafer jig 7, the wafer materials and the electroplating hanger 200 are mounted and dismounted, and the complex operation of manual feeding and discharging is replaced.
As shown in fig. 8, in order to successfully complete the turnover transfer of the wafer material, the wafer tool 7 is required to be used for bearing the wafer material during the turnover transfer, the wafer tool 7 is used for bearing the wafer material, and includes a tool body 71, a fastening lock 72 and a wafer empty slot 73, the tool body 71 is of an annular structure, the wafer empty slot 73 is formed by an inner ring, the fastening lock 72 is distributed on the tool body 71 and can be matched and locked with the fastening lock slot 203 on the electroplating hanger 200 when rotating a certain angle, so that the wafer material is ensured not to fall off after being loaded, and then is separated from the fastening lock slot 203 on the electroplating hanger 200 when rotating a certain angle, so that the wafer material can be smoothly unloaded.
Combine fig. 9 to show to target silo 201 establishes at electroplating hanger 200 as an example, the utility model discloses a sucking disc turning device 100 need go on unloading wafer tool and wafer material to electroplating hanger 200's vertical target silo 201, then the utility model discloses a theory of operation and process:
1. when the wafer is placed on the material sucking disc 65 of the feeding and discharging sucking disc assembly 6, the outer ring of the wafer 200 is sleeved on the upper wafer jig 7;
2. the tool sucker 64 of the loading and unloading sucker assembly 6 sucks the wafer tool 7, and the material sucker 65 sucks the wafer material 200;
3. a screw motor 44 of the P-axis overturning driving assembly 4 drives a floating plate 45 to ascend to drive an overturning driving connecting rod 52 to push upwards so that the overturning supporting assembly 5 and the feeding and discharging sucker assemblies 6 thereon overturn for 90 degrees around the P-direction overturning shaft 422 towards the electroplating hanger 200, as shown in fig. 3, at this time, the feeding and discharging sucker assemblies 6 are also in a vertical state, so as to face a vertical target trough;
4. at this time, the P-axis turnover driving assembly 4 can be driven by the X-direction lead screw motor 32 to move to a preset position along the X-direction linear slide rail 31 and lean against the vertical target trough 201 of the electroplating hanger 200;
5. the air bags 62 of the feeding and discharging sucker assembly 6 are inflated to push the wafer jig 7 against the electroplating hanger 200, and the fastening locks 72 of the wafer jig 7 are sleeved into the fastening lock slots 203 of the corresponding electroplating hanger 200 one by one;
6. the linear motor 57 of the overturning support assembly 5 drives the pushing block 58 to drive the bearing 69 and the rotating support rod 68 of the feeding and discharging sucker assembly 6 to move, so that the feeding and discharging sucker assembly 6 rotates around the W rotating shaft 56 for a certain small angle, the fastening lock 72 of the wafer jig 7 is locked and attached to the fastening lock slot 203 of the electroplating hanger 200, and a wafer is loaded on the vertical target trough 201 of the electroplating hanger 200;
7. the feeding and discharging sucker assembly 6 stops working, the air bag 62 stops air inlet, the jig sucker 64 is separated from the wafer jig 7 under the rebound action of the spring connecting piece 66, the material sucker 65 is separated from the wafer, and the overturning supporting assembly 5 drives the feeding and discharging sucker assembly 6 to rotate and reset around the W rotating shaft 56 to complete feeding;
after the vertical target material groove 201 of the electroplating hanger 200 is filled with the materials, the overhead traveling crane of the electroplating equipment clamps the electroplating hanger 200 away for subsequent electroplating operation; the blanking process is explained as follows:
1. the overhead traveling crane of the electroplating equipment inserts the electroplating hanger 200 of the electroplated wafer into the Y-direction hanger socket 204;
2. the loading and unloading sucker assembly 6 is started, the air bag 62 is inflated, the jig sucker 64 and the material sucker 65 act simultaneously, the wafer jig 7 is sucked by the jig sucker 64, and the wafer is sucked by the material sucker 65;
3. the linear motor 57 of the overturning support assembly 5 drives the pushing block 58 to drive the bearing 69 and the rotating support rod 68 of the feeding and discharging sucker assembly 6 to move, so that the feeding and discharging sucker assembly 6 rotates around the W rotating shaft 56 for a certain small angle, and the wafer jig 7 is separated from the electroplating hanger 200;
4. the air bag 62 of the feeding and discharging sucker assembly 6 stops air intake, under the resilience action of the spring connecting piece 66, the wafer jig 7 is sucked by the jig sucker 64, the wafer is sucked by the material sucker 65 and separated from the electroplating hanger 200, and the feeding and discharging sucker assembly 6 is driven by the overturning supporting assembly 5 to rotate around the W rotating shaft to reset;
5. the X-direction screw rod motor 32 drives the P-axis overturning driving assembly 4 to return to the initial position along the X-direction linear slide rail 31;
6. the screw motor 44 of the P-axis overturning driving assembly 4 drives the floating plate 45 to descend and drives the overturning driving connecting rod 52 to pull back, so that the feeding and discharging sucker assembly 6 overturns for 90 degrees around the P direction to the overturning shaft 422 and returns to the state shown in fig. 2, and the discharging of the vertical target trough 201 of the electroplating hanger 200 is completed.
After the scheme is adopted, the utility model discloses unloading equipment has following beneficial effect in the automation:
the utility model discloses a sucking disc turning device, when arranging vertical target silo mesh side in, can realize going on unloading to vertical target silo automatically, go up unloading sucking disc subassembly and connect on P axle upset drive assembly through the upset supporting component, make P axle upset drive assembly drive upset supporting component when overturning along P axle, can drive and go up unloading sucking disc subassembly and switch in horizontality and vertical state, the upset supporting component then can realize fixed angle to the rotatory one of unloading sucking disc subassembly of going up, thereby can will go up the wafer tool and the wafer material loading on the unloading sucking disc subassembly and lock and attach to vertical target silo, perhaps wafer tool and the wafer material that lock attached from vertical target silo unblock unloading, thereby realize the automation mechanized operation, equipment operation and control are more nimble, high efficiency. The above embodiments and drawings are not intended to limit the form and style of the present invention, and any suitable changes or modifications made by those skilled in the art should not be construed as departing from the scope of the present invention.
Claims (5)
1. The utility model provides a go up sucking disc turning device of unloading equipment which characterized in that: the device comprises a P-axis overturning driving component, an overturning supporting component and a feeding and discharging sucker component;
the P-axis overturning driving component is provided with a P-axis overturning shaft, and the overturning supporting component is pivoted on the P-axis overturning shaft; the overturning support assembly is provided with a W rotating shaft; the feeding and discharging sucker assembly is connected to the W rotating shaft; the feeding and discharging sucker assembly can be driven to be in a horizontal or vertical state by the P-axis overturning driving assembly when the overturning supporting assembly is driven by the P-axis overturning driving assembly to overturn along the P axis, and the overturning supporting assembly drives the feeding and discharging sucker assembly to rotate at a small angle, so that the feeding or discharging of a product can be completed on a vertical target trough; wherein, the P-direction overturning shaft is vertical to the W rotating shaft.
2. The suction cup turning device of the loading and unloading apparatus as claimed in claim 1, wherein: the P-axis overturning driving assembly further comprises a fixed frame, a motor fixing plate, a screw rod motor, a floating plate and a guide pillar; the P-direction overturning shaft is arranged at the top of the fixing frame; the motor fixing plate is fixedly connected to the fixing frame, the lead screw motor is arranged on the bottom surface of the motor fixing plate from bottom to top, and the floating plate is provided with a lead screw matching hole, a guide pillar hole and a connecting rod pivot and is connected with a lead screw of the lead screw motor in a matching mode through the lead screw matching hole.
3. The suction cup turning device of the loading and unloading apparatus as claimed in claim 2, wherein: the P-axis overturning driving assembly further comprises an X-direction sliding table which is connected to the bottom of the fixing frame and can not slide in the X direction, so that the P-axis overturning driving assembly is close to or far away from the vertical target trough.
4. The suction cup turning device of the loading and unloading apparatus as claimed in claim 2, wherein: the overturning support assembly further comprises a support frame, an overturning driving connecting rod, a bearing pressing plate, a P-axis connecting piece, a rotary bearing, a linear motor and a pushing block; the supporting frame is used for supporting the bearing pressing plate; the bearing pressing plate is further connected to the P-direction overturning shaft through the P-axis connecting piece, and two ends of the overturning driving connecting rod are respectively connected with the connecting rod pivot and the supporting frame; the W rotating shaft is connected to the bearing pressing plate through the rotating bearing and is used for connecting the feeding and discharging sucker assembly; the linear motor is arranged on the bearing pressing plate and connected with the pushing block; and the pushing block is provided with a bearing pushing hole.
5. The suction cup turning device of the loading and unloading apparatus as claimed in any one of claims 1 to 4, wherein: the feeding and discharging sucker assembly further comprises a rotating plate, an air bag, a Bernoulli sucker body, a jig sucker, a material sucker, a spring connecting piece, an air pipe joint, a rotating support rod and a bearing; the rotary plate is sleeved on the W rotary shaft, the Bernoulli sucker body is pressed on the rotary plate through the air bag, the jig sucker and the material sucker are arranged on the Bernoulli sucker body, and the material sucker is positioned at the inner ring of the jig sucker and connected with the air pipe connector; a plurality of vent holes are distributed on the jig sucker in a circular shape, and a plurality of vent holes are distributed on the material sucker; the number of the spring connecting pieces is multiple, the spring connecting pieces are distributed on the lower surface of the material sucker, and the bottom ends of the spring connecting pieces are connected to the rotating plate; the upper end of the rotary supporting rod is connected with the edge of the Bernoulli sucker, the lower end of the rotary supporting rod is connected with the bearing, and the bearing is inserted into the bearing push hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121488232.8U CN214898376U (en) | 2021-07-01 | 2021-07-01 | Sucking disc turning device of loading and unloading equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121488232.8U CN214898376U (en) | 2021-07-01 | 2021-07-01 | Sucking disc turning device of loading and unloading equipment |
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| Publication Number | Publication Date |
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| CN214898376U true CN214898376U (en) | 2021-11-26 |
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| CN202121488232.8U Active CN214898376U (en) | 2021-07-01 | 2021-07-01 | Sucking disc turning device of loading and unloading equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115241114A (en) * | 2022-08-17 | 2022-10-25 | 常熟市兆恒众力精密机械有限公司 | Crystal disc clamp |
| CN117604598A (en) * | 2024-01-23 | 2024-02-27 | 苏州智程半导体科技股份有限公司 | Wafer overturning mechanism and method for wafer electroplating machine |
-
2021
- 2021-07-01 CN CN202121488232.8U patent/CN214898376U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115241114A (en) * | 2022-08-17 | 2022-10-25 | 常熟市兆恒众力精密机械有限公司 | Crystal disc clamp |
| CN115241114B (en) * | 2022-08-17 | 2023-10-10 | 常熟市兆恒众力精密机械有限公司 | Crystal disc clamp |
| CN117604598A (en) * | 2024-01-23 | 2024-02-27 | 苏州智程半导体科技股份有限公司 | Wafer overturning mechanism and method for wafer electroplating machine |
| CN117604598B (en) * | 2024-01-23 | 2024-04-05 | 苏州智程半导体科技股份有限公司 | Wafer blanking mechanism of wafer electroplating machine |
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