CN214894824U

CN214894824U - Glass substrate inspection machine

Info

Publication number: CN214894824U
Application number: CN202121440009.6U
Authority: CN
Inventors: 徐锋利; 延太钦
Original assignee: LG Display Optoelectronics Technology China Co Ltd
Current assignee: LG Display Optoelectronics Technology China Co Ltd
Priority date: 2021-06-25
Filing date: 2021-06-25
Publication date: 2021-11-26
Anticipated expiration: 2031-06-25

Abstract

The utility model discloses a glass substrate inspection machine, including cavity and the transport platform, inspection mechanism, air knife and the workstation of setting inside the cavity, carry the platform to be used for carrying glass substrate, inspection mechanism and workstation setting are carrying bench side, and the air knife setting is on the workstation, and the platform is carried to the opening orientation of air knife. The utility model discloses glass substrate inspection machine is provided with the air knife on the workstation of carrying the bench side, after the foreign matter that inspection mechanism produced falls on the glass substrate, the air current that the air knife produced will sweep the glass substrate in the motion, blow away the foreign matter on glass substrate surface, make the foreign matter on glass substrate surface clear away in glass substrate inspection machine promptly, reduce because of the foreign matter leads to the probability that quality problems took place in follow-up processing, because of need not to shift the glass substrate to carry out the work of cleaing away of foreign matter in other equipment, display panel's production efficiency has been improved, and the production cost is reduced.

Description

Glass substrate inspection machine

Technical Field

The utility model relates to a display panel makes technical field, especially relates to a glass substrate inspection machine.

Background

In the manufacturing process of the display panel, a plurality of processing procedures are required to be carried out on the glass substrate, and in order to find defective products in time and avoid the defective products from entering the subsequent processing procedures, the glass substrate needs to be checked for a plurality of times in the manufacturing process of the display panel so as to judge whether the processing quality meets the requirements. The existing glass substrate inspection machine is provided with an inspection mechanism above a conveying table of a glass substrate, wherein the inspection mechanism comprises a camera, and the camera is used for scanning the glass substrate to determine whether the processing of the glass substrate is qualified. The camera reciprocates during operation, and wear and aging of parts due to long-term motion may generate foreign substances, which fall on the glass substrate to adversely affect subsequent processing.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a glass substrate inspection machine can effectively clear away the foreign matter on the glass substrate, makes the foreign matter on glass substrate surface clear away promptly in glass substrate inspection machine, improves display panel's production efficiency.

To achieve the purpose, the utility model adopts the following technical proposal:

the glass substrate inspection machine comprises a cavity, a conveying table, an inspection mechanism, an air knife and a workbench, wherein the conveying table, the inspection mechanism, the air knife and the workbench are arranged in the cavity, the conveying table is used for conveying glass substrates, the inspection mechanism and the workbench are arranged above the conveying table, the air knife is arranged on the workbench, and an opening of the air knife faces the conveying table.

As a preferred scheme of the utility model, inspection mechanism includes first camera subassembly and second camera subassembly, first camera subassembly with second camera subassembly is followed glass substrate's direction of delivery interval sets up, first camera subassembly is used for right glass substrate makes a video recording, second camera subassembly is used for right glass substrate takes a picture.

As a preferred embodiment of the present invention, the number of the air knives is two, the air knives are strip-shaped air knives, two the air knives are respectively disposed on two sides of the working table, and two the air knives are disposed between the first camera component and the second camera component.

As a preferred embodiment of the present invention, the air knife is parallel to the surface of the conveying table, the opening direction of the air knife is perpendicular to the surface of the conveying table, and the distance between the air knife and the conveying table is equal.

As an optimized scheme of the utility model, glass substrate inspection machine still includes a plurality of fans, the fan sets up just be located in the cavity the top of cavity, the air outlet orientation of fan carry the platform.

As an optimized scheme of the utility model, a plurality of ventilation holes have been seted up to the bottom of cavity.

As an optimized proposal of the utility model, a one-way exhaust valve is arranged in the ventilation hole.

As an optimized scheme of the utility model, the fan is EFU fan filter unit.

As an optimized proposal of the utility model, the conveying platform is an air floatation platform.

As an optimal scheme of the utility model, carry the platform including a plurality of intervals and parallel arrangement's delivery board, a plurality of gas holes have been seted up on the delivery board.

The utility model has the advantages that:

the utility model discloses glass substrate inspection machine is provided with the air knife on the workstation of carrying the bench side, after the foreign matter that inspection mechanism produced falls on the glass substrate, the air current that the air knife produced will sweep the glass substrate in the motion, blow away the foreign matter on glass substrate surface, make the foreign matter on glass substrate surface clear away in glass substrate inspection machine promptly, reduce because of the foreign matter leads to the probability that quality problems took place in follow-up processing, because of need not to shift the glass substrate to carry out the work of cleaing away of foreign matter in other equipment, display panel's production efficiency has been improved, and the production cost is reduced.

Drawings

Fig. 1 is a schematic structural view of a glass substrate inspection machine according to an embodiment of the present invention;

fig. 2 is a schematic top view of a glass substrate inspection machine according to an embodiment of the present invention;

fig. 3 is a schematic top view of a conveying table according to an embodiment of the present invention.

In the figure:

1. a cavity; 2. a conveying table; 21. a conveying plate; 211. a gas blowing hole; 3. an inspection mechanism; 31. a first camera assembly; 32. a second camera assembly; 4. an air knife; 5. a work table; 6. a fan; 7. a vent hole; 8. a one-way exhaust valve; 100. a glass substrate.

Detailed Description

The advantages and features of the present invention and the methods of accomplishing the same will become apparent with reference to the following detailed description of the embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and the embodiments are provided only to accomplish the disclosure of the present invention and to enable those skilled in the art to sufficiently understand the scope of the present invention, and the present invention is limited only by the scope of the claims. Like reference numerals denote like constituent elements throughout the specification.

Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

As shown in fig. 1, the glass substrate inspection machine of an embodiment includes a chamber 1, and a conveying table 2, an inspection mechanism 3, an air knife 4, and a table 5 disposed inside the chamber 1, the conveying table 2 being used to convey a glass substrate 100, the inspection mechanism 3 and the table 5 being disposed above the conveying table 2, the air knife 4 being disposed on the table 5, and an opening of the air knife 4 facing the conveying table 2.

In order to facilitate the working personnel to enter the cavity 1 for maintenance, the workbench 5 is arranged in the cavity 1, the working personnel can walk on the workbench 5, and the conveying platform 2 for conveying the glass substrate 100 is prevented from being trampled. In fig. 1, three tables 5 are shown, without limiting the number of tables 5, the number of tables 5 being related to the size of the chamber 1, and for a chamber 1 with a longer length, a greater number of tables 5 are required. As shown in fig. 2, the table 5 is flat, and the longitudinal direction of the table 5 is perpendicular to the conveyance direction of the glass substrate 100, so that the table 5 does not block the inspection mechanism 3.

The glass substrate inspection machine of the embodiment is provided with the air knife 4 on the workbench 5 above the conveying table 2, when foreign matters generated by the inspection mechanism 3 fall onto the glass substrate 100, the air flow generated by the air knife 4 blows the moving glass substrate 100 to blow away the foreign matters on the surface of the glass substrate 100, so that the foreign matters on the surface of the glass substrate 100 are removed in the glass substrate inspection machine, the probability of quality problems in subsequent processing caused by the foreign matters is reduced, the glass substrate 100 does not need to be transferred to other equipment for removing the foreign matters, the production efficiency of the display panel is improved, and the production cost is reduced.

Further, the inspection mechanism 3 includes a first camera module 31 and a second camera module 32, the first camera module 31 and the second camera module 32 are disposed at intervals along the conveying direction of the glass substrate 100, the first camera module 31 is used for shooting the glass substrate 100, and the second camera module 32 is used for shooting the glass substrate 100. The first camera module 31 and the second camera module 32 each include a camera (not shown) that can reciprocate in a direction perpendicular to the conveying direction of the glass substrate 100 to take an image of or photograph the glass substrate 100. Specifically, the camera in the first camera assembly 31 first captures an image of the glass substrate 100, the entire surface of the glass substrate 100 is inspected, when an abnormal region is found, the camera in the second camera assembly 32 moves in advance, when the abnormal region moves below the second camera assembly 32, the camera in the second camera assembly 32 captures an image of the abnormal region, and whether or not the abnormality exists and what kind of abnormality is determined. The division of the work by the first camera module 31 and the second camera module 32 enables the inspection mechanism 3 to inspect the moving glass substrate 100 with high accuracy, and the probability of occurrence of erroneous determination is low.

The number of the air knives 4 is at least one, and since the inspection mechanism 3 in this embodiment includes two portions of the first camera assembly 31 and the second camera assembly 32, the number of the air knives 4 is preferably two, the air knives 4 are strip-shaped air knives, and the two air knives 4 are respectively disposed at both sides of the work stage 5 between the first camera assembly 31 and the second camera assembly 32, so that one air knife 4 is disposed beside each of the first camera assembly 31 and the second camera assembly 32.

The opening direction of the gas knife 4 is preferably perpendicular to the surface of the conveying table 2, so that the gas flow blown by the gas knife 4 is perpendicular to the surface of the conveying table 2, and after the gas flow blown by the gas knife 4 contacts the glass substrate 100, the gas flow direction is perpendicular to the surface of the glass substrate 100, so that the moving speed of the glass substrate 100 is not changed obviously, the gas flow spreads along the surface of the glass substrate 100, and a continuous gas flow is formed on the surface of the glass substrate 100. Since the foreign substances are generated by the movement of the first and second camera assemblies 31 and 32, disposing the air knife 4 close to the first and

second camera assemblies

31 and 32 enables a portion of the foreign substances to be blown away before contacting the surface of the glass substrate 100. In order to enhance the removal capability of foreign substances, an additional air knife 4 may be provided on the work table 5 located downstream in the conveying direction of the glass substrate 100.

Further, the air knives 4 are parallel to the surface of the conveying table 2, and the distance between the two air knives 4 and the conveying table 2 is equal, so that the pressure of the air flow generated by the air knives 4 on the glass substrate 100 tends to be consistent, and the influence on the normal conveying of the glass substrate 100 is reduced.

As shown in fig. 1, the glass substrate inspection machine further includes a plurality of fans 6, the fans 6 are disposed in the cavity 1 and located at the top of the cavity 1, and an air outlet of each fan 6 faces the conveying table 2. The fan 6 can generate air flow inside the chamber 1, and the foreign matters blown up by the air knife 4 can be carried to the bottom of the chamber 1 by the air flow generated by the fan 6, thereby reducing the probability of the foreign matters settling on the surface of the glass substrate 100 or the conveying table 2. Because the fan 6 mainly plays a role in ventilation, the capacity of removing foreign matters on the surface of the glass substrate 100 by wind power is poor, and the capability of removing the foreign matters by the fan 6 is further limited due to the shielding of the inspection mechanism 3 and the workbench 5, the air knife 4 needs to be arranged on the workbench 5, and the foreign matters are prevented from staying on the glass substrate 100 by using larger air flow.

The fan 6 is preferably an EFU fan filter unit, which is a self-powered terminal air supply device with a filtering function. Fan 6 inhales the air and filters through HEPA from the top, evenly sends out clean air from the air outlet after filtering, for cavity 1 is inside to provide clean air and particle filtration control, but EFU fan filter unit moduleization connects the use, and the low power dissipation, small is convenient for install and maintain, therefore can reduce the contaminated probability of glass substrate 100. The modular connection can be used, so that the modular connection structure can adapt to various different installation environments.

Furthermore, a plurality of vent holes 7 are formed in the bottom of the cavity 1, gas in the cavity 1 can flow out through the vent holes 7, and airflow flowing from top to bottom is formed inside the cavity 1, so that foreign matters can be settled to the bottom of the cavity 1.

Furthermore, a one-way exhaust valve 8 is arranged in the vent hole 7. When a certain pressure is reached in the cavity 1, the gas can push away a valve plate (not shown in the figure) of the one-way exhaust valve 8 from inside to outside, and redundant gas is discharged outwards, when the cavity 1 is communicated with the outside, the one-way exhaust valve 8 can help to form positive pressure in the cavity 1, when the glass substrate 100 is input from the outside or output from the cavity 1, the outside air cannot invade into the cavity 1, and the inside of the cavity 1 can maintain a clean environment.

The transfer table 2 is preferably an air floating table, the transfer table 2 and the glass substrate 100 can be prevented from directly contacting with each other, and abrasion of the glass substrate 100 can be minimized, and the transfer table 2 generates an air flow directed obliquely upward, so that a force applied to the glass substrate 100 by the air flow can be decomposed into two components, namely, a vertical component and a horizontal component, the vertical component lifts the glass substrate 100 to keep the glass substrate 100 at a distance from the transfer table 2, and the horizontal component moves the glass substrate 100 in a predetermined direction.

Since the air flow ejected from the air knife 4 generates a vertically downward pressure on the glass substrate 100, the air pressure of the air knife 4 should be limited to avoid contact between the glass substrate 100 and the surface of the conveying table 2, and the pressure generated by the air flow of the air knife 4 on the glass substrate 100 should be smaller than the vertical component force generated by the air flow generated by the conveying table 2 on the glass substrate 100, so as to avoid friction between the glass substrate 100 and the conveying table 2 while ensuring effective removal of foreign matters.

As shown in fig. 3, the conveying table 2 further includes a plurality of conveying plates 21 arranged in parallel at intervals, and a plurality of air blowing holes 211 are formed in the conveying plates 21. A gap exists between two adjacent conveying plates 21, a channel is provided for the settlement of foreign matters, and the probability of the foreign matters settling on the surface of the conveying platform 2 is reduced.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but may be manufactured in various forms, and those skilled in the art will understand that the present invention may be embodied in other specific forms without changing the technical spirit or essential features of the invention. It is therefore to be understood that the above described embodiments are illustrative and not restrictive in all respects.

Claims

1. The glass substrate inspection machine is characterized by comprising a cavity, a conveying platform, an inspection mechanism, an air knife and a workbench, wherein the conveying platform, the inspection mechanism, the air knife and the workbench are arranged in the cavity, the conveying platform is used for conveying glass substrates, the inspection mechanism and the workbench are arranged above the conveying platform, the air knife is arranged on the workbench, and an opening of the air knife faces the conveying platform.

2. The glass substrate inspection machine of claim 1, wherein the inspection mechanism includes a first camera assembly and a second camera assembly, the first camera assembly and the second camera assembly being spaced apart along a conveyance direction of the glass substrate, the first camera assembly being configured to take a picture of the glass substrate, the second camera assembly being configured to take a picture of the glass substrate.

3. The glass substrate inspection machine of claim 2, wherein the number of the air knives is two, the air knives are strip-shaped air knives disposed on both sides of one of the work tables, and the two air knives are located between the first camera assembly and the second camera assembly.

4. The glass substrate inspection machine of claim 3, wherein the gas knife is parallel to a surface of the conveying table, an opening direction of the gas knife is perpendicular to the surface of the conveying table, and the two gas knives are equidistant from the conveying table.

5. The glass substrate inspection machine of claim 1, further comprising a plurality of fans disposed within the cavity at a top of the cavity, an air outlet of the fans facing the delivery table.

6. The glass substrate inspection machine of claim 5, wherein the bottom of the cavity is vented.

7. The glass substrate inspection machine of claim 6, wherein a one-way vent valve is disposed within the vent hole.

8. The glass substrate inspection machine of claim 5, wherein the fan is an EFU fan filter unit.

9. The glass substrate inspection machine of claim 1, wherein the conveyance stage is an air bearing stage.

10. The glass substrate inspection machine of claim 9, wherein the conveyor table includes a plurality of spaced and parallel conveyor plates, the conveyor plates having a plurality of gas blowing holes formed therein.